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    MEMS sensor including an over-travel stop and method of manufacture
    31.
    发明授权
    MEMS sensor including an over-travel stop and method of manufacture 有权
    MEMS传感器包括超行程挡块和制造方法

    公开(公告)号：US09593008B2

    公开(公告)日：2017-03-14

    申请号：US14501792

    申请日：2014-09-30

    申请人： InvenSense, Inc.

    发明人： Matthew Julian Thompson ,  Michael Dueweke ,  Ilya Gurin ,  Joseph Seeger

    IPC分类号： H02N1/04 ,  B81B3/00 ,  H02N11/00 ,  B81B7/02

    CPC分类号： B81B3/0051 ,  B81B7/02 ,  B81B2203/0118 ,  H02N11/002

    摘要： A MEMS sensor is disclosed. The MEMS sensor includes a MEMS structure and a substrate coupled to the MEMS structure. The substrate includes a layer of metal and a layer of dielectric material. The MEMS structure moves in response to an excitation. A first over-travel stop is formed on the substrate at a first distance from the MEMS structure. A second over-travel stop on the substrate at a second distance from the MEMS structure. At least one electrode on the substrate at a third distance from the MEMS structure. The first, second and third distances are all different.

    摘要翻译： 公开了一种MEMS传感器。 MEMS传感器包括耦合到MEMS结构的MEMS结构和衬底。 衬底包括金属层和电介质材料层。 MEMS结构响应于激发而移动。 在距离MEMS结构的第一距离处，在基板上形成第一超行程挡块。 在距离MEMS结构第二距离的基板上的第二超行程停止。 在距离MEMS结构三分之一距离的衬底上的至少一个电极。 第一，第二和第三距离都是不同的。

    IN-PLANE SENSING LORENTZ FORCE MAGNETOMETER
    32.
    发明申请
    IN-PLANE SENSING LORENTZ FORCE MAGNETOMETER 有权
    内平面感应LORENTZ力量磁力计

    公开(公告)号：US20140184213A1

    公开(公告)日：2014-07-03

    申请号：US13731301

    申请日：2012-12-31

    申请人： INVENSENSE, INC.

    发明人： Matthew Julian Thompson ,  Joseph Seeger

    IPC分类号： G01R33/028

    CPC分类号： G01R33/0286 ,  G03F1/00 ,  H01H1/00 ,  H02K1/00

    摘要： A magnetic field sensor includes a driving element through which an electric current circumnavigates the driving element. A Lorentz force acts on the driving element resulting in a torque about a first axis in response to a magnetic field along a second axis substantially parallel to a plane of a substrate. The driving element is coiled-shaped. A sensing element of the magnetic field sensor is configured to rotate about the first axis substantially parallel to the plane of the substrate in response to the magnetic field and a coupling element mechanically couples the driving element to the sensing element. The driving element, the sensing element, and the coupling element are disposed in the plane, substantially parallel to the substrate. At least two anchors are configured to connect the driving element, the sensing element, and the coupling element to the substrate.

    摘要翻译： 磁场传感器包括驱动元件，电流通过该驱动元件环绕驱动元件。 洛伦兹力作用在驱动元件上，导致响应于基本上平行于基底平面的第二轴的磁场而产生围绕第一轴线的转矩。 驱动元件是螺旋形的。 磁场传感器的感测元件被配置成响应于磁场围绕基板平行于基板的平面旋转，并且耦合元件将驱动元件机械耦合到感测元件。 驱动元件，感测元件和耦合元件设置在基本上平行于基板的平面内。 至少两个锚被构造成将驱动元件，感测元件和耦合元件连接到基板。

    Low stress overtravel stop
    34.
    发明授权
    Low stress overtravel stop 有权

    公开(公告)号：US11846648B2

    公开(公告)日：2023-12-19

    申请号：US17647376

    申请日：2022-01-07

    申请人： INVENSENSE, INC.

    发明人： Matthew Julian Thompson ,  Robert Walmsley

    IPC分类号： G01P15/08

    CPC分类号： G01P15/08 ,  G01P2015/0871

    摘要： A microelectromechanical system device is described. The microelectromechanical system device can comprise: a proof mass coupled to an anchor via a spring, wherein the proof mass moves in response to an imposition of an external load to the proof mass, and an overtravel stop comprising a first portion and a second portion.

    MEMS accelerometer with proof masses moving in an anti-phase direction
    39.
    发明授权
    MEMS accelerometer with proof masses moving in an anti-phase direction 有权

    公开(公告)号：US10371715B2

    公开(公告)日：2019-08-06

    申请号：US14642529

    申请日：2015-03-09

    申请人： InvenSense, Inc.

    发明人： Leonardo Baldasarre ,  Matthew Julian Thompson

    IPC分类号： G01P15/00 ,  G01P15/125 ,  G01P15/08

    摘要： A sensor is disclosed. The sensor includes a substrate and a mechanical structure. The mechanical structure includes at least two proof masses including a first proof mass and a second proof mass. The mechanical structure also includes a flexible coupling between the at least two proof masses and the substrate. The at least two proof masses move in an anti-phase direction normal to the plane of the substrate in response to acceleration of the sensor normal to the plane and move in anti-phase in a direction parallel to the plane of the substrate in response to an acceleration of the sensor parallel to the plane. The at least two proof masses move in a direction parallel to the plane of the substrate in response to an acceleration of the sensor parallel to the plane.

    SENSOR SELF-CALIBRATION
    40.
    发明申请
    SENSOR SELF-CALIBRATION 审中-公开

    公开(公告)号：US20190187172A1

    公开(公告)日：2019-06-20

    申请号：US16206882

    申请日：2018-11-30

    申请人： INVENSENSE, INC.

    发明人： Matthew Julian Thompson ,  David deKoninck ,  Sarah Nitzan ,  Houri Johari-Galle

    IPC分类号： G01P21/00 ,  G01P15/125

    CPC分类号： G01P21/00 ,  G01P15/125

    摘要： Facilitating self-calibration of a sensor device via modification of a sensitivity of the sensor device is presented herein. A sensor system can comprise a sensor component comprising a sensor that generates an output signal based on an external excitation of the sensor; a sensitivity modification component that modifies a sensitivity of the sensor by a defined amount; and a calibration component that measures a first output value of the output signal before a modification of the sensitivity by the defined amount, measures a second output value of the output signal after the modification of the sensitivity by the defined amount, and determines, based on a difference between the first output value and the second output value, an offset portion of the output signal. Further, the calibration component can modify, based on the offset portion, the output signal.