公开(公告)号：US20070169891A1

公开(公告)日：2007-07-26

申请号：US10933383

申请日：2004-09-03

申请人： Akira Koshiishi ,  Hideaki Tanaka ,  Nobuyuki Okayama ,  Masaaki Miyagawa ,  Shunsuke Mizukami ,  Wataru Shimizu ,  Jun Hirose ,  Toshikatsu Wakaki ,  Tomonori Miwa ,  Jun Ooyabu ,  Daisuke Hayashi

发明人： Akira Koshiishi ,  Hideaki Tanaka ,  Nobuyuki Okayama ,  Masaaki Miyagawa ,  Shunsuke Mizukami ,  Wataru Shimizu ,  Jun Hirose ,  Toshikatsu Wakaki ,  Tomonori Miwa ,  Jun Ooyabu ,  Daisuke Hayashi

IPC分类号： C23F1/00

CPC分类号： H01L21/68735 ,  H01J37/32642 ,  H01L21/68757

摘要： A focus ring and a plasma processing apparatus capable of improving an in-surface uniformity of a surface and reducing occurrences of deposition on a backside surface of a peripheral portion of a semiconductor wafer compared to a conventional case are provided. Installed in a vacuum chamber is a susceptor for mounting the semiconductor wafer thereon and a focus ring is installed to surround the semiconductor wafer mounted on the susceptor. The focus ring includes an annular lower member made of a dielectric, and an annular upper member made of a conductive material and mounted on the lower member. The upper member includes a flat portion which is an outer peripheral portion having a top surface positioned higher than a surface to be processed of the semiconductor wafer W, and an inclined portion which is an inner peripheral portion inclined inwardly.

摘要翻译： 提供了一种聚焦环和等离子体处理装置，其能够改善表面的表面均匀性并减少与常规情况相比在半导体晶片的周边部分的背面上沉积的情况。 安装在真空室中的是用于在其上安装半导体晶片的基座，并且安装聚焦环以围绕安装在基座上的半导体晶片。 聚焦环包括由电介质制成的环形下部构件和由导电材料制成并安装在下部构件上的环形上部构件。 上部构件包括平坦部，该平坦部是具有位于比半导体晶片W的待加工表面高的顶面的外周部，以及作为向内倾斜的内周部的倾斜部。

公开(公告)号：US20070047957A1

公开(公告)日：2007-03-01

申请号：US11502534

申请日：2006-08-11

申请人： Shinji Iio ,  Masayuki Suehiro ,  Katsuya Ikezawa ,  Akira Miura ,  Sadaharu Oka ,  Chie Sato ,  Mamoru Hihara ,  Tsuyoshi Yakihara ,  Shin-ichi Nakajima ,  Morio Wade ,  Daisuke Hayashi ,  Shinji Kobayashi ,  Yoshiyuki Asano

发明人： Shinji Iio ,  Masayuki Suehiro ,  Katsuya Ikezawa ,  Akira Miura ,  Sadaharu Oka ,  Chie Sato ,  Mamoru Hihara ,  Tsuyoshi Yakihara ,  Shin-ichi Nakajima ,  Morio Wade ,  Daisuke Hayashi ,  Shinji Kobayashi ,  Yoshiyuki Asano

IPC分类号： H04B10/20

CPC分类号： H04J14/0227 ,  H04J14/0201 ,  H04J14/0221 ,  H04J14/0241 ,  H04J14/0282 ,  H04J14/0283 ,  H04J14/0284 ,  H04Q11/0062 ,  H04Q11/0066 ,  H04Q2011/0049 ,  H04Q2011/0092

摘要： An optical packet network system of a ring type, capable of preventing degradation of an optical signal, can be implemented by providing a mechanism relatively simple in structure, capable of erasing light noise if the optical packet signal does not exists. In the optical packet network system made up by interconnecting respective nodes adjacent to each other, and connecting a sending source of an optical packet signal to a ring, a light noise removal function block is provided between the respective nodes adjacent to each other.

摘要翻译： 可以通过提供一种结构相对简单的机构来实现能够防止光信号劣化的环形光分组网络系统，如果光分组信号不存在则能够擦除光噪声。 在通过互相相邻的各个节点互连并将光分组信号的发送源连接到环的光分组网络系统中，在彼此相邻的相应节点之间提供光噪声去除功能块。

公开(公告)号：US20060180074A1

公开(公告)日：2006-08-17

申请号：US11354847

申请日：2006-02-16

申请人： Daisuke Hayashi

发明人： Daisuke Hayashi

IPC分类号： G01D21/00

CPC分类号： H01L21/67069 ,  H01J37/3482

摘要： In a plasma processing apparatus capable of generating a plasma in a processing chamber accommodating therein a substrate to plasma-process the substrate, a component disposed in the processing chamber includes an identification indicia formed with one or more symbols indicated by arranging a plurality of dotted recesses on a surface of the component. The dotted recesses are of a substantially circular shape in a plane view and a substantial U-shape in a sectional view. The life span of the component can be detected based on a status of the identification indicia.

公开(公告)号：US20060164563A1

公开(公告)日：2006-07-27

申请号：US10553738

申请日：2004-06-15

申请人： Kou Watanabe ,  Daisuke Hayashi ,  Hisaya Kato ,  Tetsuya Yagi

发明人： Kou Watanabe ,  Daisuke Hayashi ,  Hisaya Kato ,  Tetsuya Yagi

IPC分类号： H04N7/173 ,  H04N5/50 ,  H04N5/08 ,  H04N7/16

CPC分类号： H03G3/3068 ,  H03G3/3089 ,  H04N5/4401 ,  H04N5/52

摘要： A tuner has a dual AGC function, and frequency-converts an input signal into an IF signal. An orthogonal detector calculates a complex signal from the IF signal. A demodulator demodulates a digital signal from the complex signals. An error corrector corrects the error of the digital signal. A signal level detector calculates a level judgment signal from the IF signal. A demodulation level detector detects a signal level of a demodulation signal on a desired band from an output signal of the demodulator. When a demodulation level judgment unit generates a judgment signal representing an influence from interference waves in adjacent channel affecting on a signal on the desired band from the demodulation signal, a control signal generator feeds back a gain control signal to the tuner in accordance with the judgment signal.

摘要翻译： 调谐器具有双AGC功能，并将输入信号频率转换成IF信号。 正交检波器计算来自IF信号的复信号。 解调器解调来自复信号的数字信号。 误差校正器校正数字信号的误差。 信号电平检测器从IF信号计算电平判断信号。 解调电平检测器从解调器的输出信号检测期望频带上的解调信号的信号电平。 当解调电平判断单元从解调信号产生表示影响相邻信道中的信号的干扰波的影响的判断信号时，控制信号发生器根据判断反馈增益控制信号给调谐器 信号。

公开(公告)号：US20060146693A1

公开(公告)日：2006-07-06

申请号：US11302872

申请日：2005-12-14

申请人： Ryosuke Mori ,  Koji Setoh ,  Daisuke Hayashi ,  Tetsuya Yagi ,  Noritaka Iguchi ,  Akira Kisoda ,  Sadashi Kageyama

发明人： Ryosuke Mori ,  Koji Setoh ,  Daisuke Hayashi ,  Tetsuya Yagi ,  Noritaka Iguchi ,  Akira Kisoda ,  Sadashi Kageyama

IPC分类号： H04Q7/00 ,  H04Q7/24 ,  H04J11/00

CPC分类号： H04L27/265 ,  H04B7/0845 ,  H04L27/2633

摘要： Disclosed is an OFDM signal receiving apparatus for diversity reception, with a plurality of antennas, of an OFDM signal containing Y sub-carriers, where 2X−1 1. The OFDM signal receiving apparatus includes a plurality of receiving systems, and a diversity processing unit connected to the receiving systems and fed with sequences of data on sub-carriers demodulated by the respective receiving systems. At least one of the receiving systems includes an FFT circuit for Fast Fourier transforming, in parallel, only a sequence of data on 2Z sub-carriers contained in the OFDM signal received with a corresponding antenna, where X>Z. The diversity processing unit performs a diversity process on sequences of data on sub-carriers, out of all the Y sub-carries, redundantly demodulated.

摘要翻译： 公开了一种OFDM信号接收装置，用于分集接收包含Y个子载波的OFDM信号的多个天线，其中，2个X-1 和X> 1。 OFDM信号接收装置包括多个接收系统，以及连接到接收系统的分集处理单元，并且馈送有由各个接收系统解调的子载波上的数据序列。 至少一个接收系统包括用于快速傅里叶变换的FFT电路，其并行地仅包含在用相应的天线接收的OFDM信号中的2个子载波上的数据序列，其中X > Z。 在所有Y子载波中，分集处理单元对子载波上的数据序列执行分集处理，被冗余地解调。

公开(公告)号：US20050211384A1

公开(公告)日：2005-09-29

申请号：US11055058

申请日：2005-02-11

申请人： Daisuke Hayashi

发明人： Daisuke Hayashi

IPC分类号： H05H1/46 ,  B08B7/00 ,  B22D19/00 ,  C23C4/02 ,  C23C4/10 ,  C23C4/12 ,  C23C28/02 ,  C23C28/04 ,  C23F1/00 ,  H01J37/32 ,  H01L21/00 ,  H01L21/304 ,  H01L21/3065

CPC分类号： C23C4/12 ,  C23C28/321 ,  C23C28/3455 ,  H01J37/32009 ,  H01J37/32559 ,  H01L21/67069

摘要： A thermally sprayed member or an electrode includes a basic material, a thermally sprayed film formed on the surface of the basic material, the thermally sprayed film being made of an insulating ceramic and a metallic intermediate layer provided between the basic material and the thermally sprayed film for increasing a bonding force therebetween, wherein the thermally sprayed film side of the member is exposed to a high frequency plasma atmosphere and the electrode is intended to form a high frequency plasma on the side of the thermally sprayed film. The basic material includes a base portion made of a conductive material and a dielectric portion provided to include a part of a surface of the basic material. Further, the intermediate layer is comprised of a plurality of island-shaped parts isolated from each other.

摘要翻译： 热喷涂部件或电极包括碱性材料，形成在基材表面上的热喷涂膜，所述热喷涂膜由绝缘陶瓷和设置在所述基材和所述热喷涂膜之间的金属中间层 为了增加它们之间的结合力，其中该部件的热喷涂膜侧暴露于高频等离子体气氛中，该电极旨在在该热喷涂膜一侧上形成一高频等离子体。 基本材料包括由导电材料制成的基部和设置成包括基材的表面的一部分的电介质部分。 此外，中间层由彼此隔离的多个岛状部件组成。

公开(公告)号：US20050029369A1

公开(公告)日：2005-02-10

申请号：US10863205

申请日：2004-06-09

申请人： Hideki Nagaoka ,  Hiroshi Koizumi ,  Jun Ooyabu ,  Tsuyoshi Shimazu ,  Hiroki Endo ,  Keiki Ito ,  Daisuke Hayashi

发明人： Hideki Nagaoka ,  Hiroshi Koizumi ,  Jun Ooyabu ,  Tsuyoshi Shimazu ,  Hiroki Endo ,  Keiki Ito ,  Daisuke Hayashi

IPC分类号： B01J4/00 ,  H01L21/00 ,  B05B1/14

CPC分类号： H01L21/67253 ,  H01L21/67017 ,  Y10T137/2499 ,  Y10T137/7722 ,  Y10T137/7759 ,  Y10T137/7761 ,  Y10T137/8733

摘要： A partial pressure control system 45 includes two valves 2 which are branched from an operation gas supply pipe 44 and which variably control operation gas, pressure sensors 3 which are respectively connected to the each valves 2 in series and which detect pressure of the operation gas, and a controller 25 which proportionally controls the operation of the valves 2 based on detection result of the pressure sensors 3, thereby relatively controlling pressures P1 and P2 of the two valves. With this configuration, it is possible to reduce wastefull consumption of the operation gas, and to enhance the responsivity with respect to change of setting and the like.

摘要翻译： 分压控制系统45包括从操作气体供给管44分支并且可变地控制操作气体的压力传感器3和分别连接到每个阀2的压力传感器3并且检测操作气体的压力的两个阀2， 以及控制器25，其基于压力传感器3的检测结果按比例地控制阀2的操作，从而相对控制两个阀的压力P1和P2。 利用这种结构，可以减少操作气体的浪费，并且提高相对于设定变化等的响应性。

公开(公告)号：US20050000442A1

公开(公告)日：2005-01-06

申请号：US10844436

申请日：2004-05-13

申请人： Daisuke Hayashi ,  Toshifumi Ishida ,  Shigetoshi Kimura

发明人： Daisuke Hayashi ,  Toshifumi Ishida ,  Shigetoshi Kimura

IPC分类号： H05H1/46 ,  B01J3/00 ,  B01J19/08 ,  C23C16/44 ,  C23C16/455 ,  C23C16/509 ,  C23F4/00 ,  H01J37/32 ,  H01L21/02 ,  H01L21/3065 ,  C23C16/00

CPC分类号： C23C16/45565 ,  C23C16/5096 ,  H01J37/32009 ,  H01J37/3244 ,  H01J37/32724

摘要： An upper electrode for use in generating a plasma of a processing gas includes a cooling block having a coolant path for circulating a coolant therethrough and one or more through holes for passing the processing gas therethrough, an electrode plate having one or more injection openings for injecting the processing gas toward the substrate to be processed mounted on the mounting table, and an electrode frame installed at an upper portion of the cooling block and providing a processing gas diffusion gap for diffusing the processing gas between the cooling block and the electrode frame. The electrode plate is detachably fixed to a bottom surface of the cooling block via a thermally conductive member having flexibility.

摘要翻译： 用于产生处理气体的等离子体的上电极包括具有用于使冷却剂循环的冷却剂通道的冷却块和用于使处理气体通过的一个或多个通孔，具有一个或多个注射开口的电极板 处理气体朝着安装在安装台上的被处理基板，以及安装在冷却块的上部的电极框架，并且提供用于在冷却块和电极框架之间扩散处理气体的处理气体扩散间隙。 电极板通过具有柔性的导热构件可拆卸地固定在冷却块的底面上。

公开(公告)号：US5579097A

公开(公告)日：1996-11-26

申请号：US89377

申请日：1993-07-12

申请人： Tetsuro Tomoe ,  Hiroaki Tsuchiya ,  Daisuke Hayashi ,  Shinichi Tanaka

发明人： Tetsuro Tomoe ,  Hiroaki Tsuchiya ,  Daisuke Hayashi ,  Shinichi Tanaka

IPC分类号： B65H5/36 ,  G03G15/00 ,  G03G15/16 ,  G03G15/20 ,  G03G21/10

CPC分类号： G03G15/6552 ,  G03G15/2028 ,  G03G15/2039 ,  G03G15/2064 ,  G03G15/657 ,  G03G21/1685 ,  G03G2215/00413 ,  G03G2215/00421 ,  G03G2215/00649 ,  G03G2215/00679

摘要： A sheet processing apparatus operating in xerographic printing apparatus employs a single-component magnetic toner. The inventive features of the sheet processing apparatus are directed toward smooth transportation and discharge of printing sheets sent through the printing apparatus, across a sheet transport guide, and through an image fixing and sheet transporting unit which finally discharges the printing sheets. Conductivity of the transport guide is selected by the material of which it is made, specified herein to have superficial resistivity in the range of ten thousand to one hundred million megohms. Charge applied to a printing sheet to electrostatically attract the magnetic toner during the xerographic printing is thus drained by the transport guide gradually enough not to disturb the adhesion of the toner to the sheet, yet rapidly enough to prevent the sheet from being curled upward by electrostatic attraction toward a residual toner container just over the downstream end of the guide, in the optimally compacted arrangement of the various components of the sheet processing and xerographic printing apparatus into a facsimile machine or the like.

摘要翻译： 在静电印刷装置中操作的片材处理装置采用单组分磁性调色剂。 片材处理装置的发明特征是针对通过打印装置送出的打印纸，穿过纸张传送引导件以及通过最终排出打​​印纸的图像定影和纸张传送单元的平滑的输送和排出。 运输导轨的电导率由其制造的材料选择，这里规定具有在十万到十亿兆欧范围内的表面电阻率。 因此，在静电印刷过程中施加到印刷纸上以静电吸引磁性调色剂的电荷因此被输送引导件逐渐排出，足以不影响调色剂对片材的粘附，但足够快以防止片材被静电卷曲向上 在纸张处理和静电印刷装置的各种部件的最佳压实布置中，到导向装置的下游端上的残留调色剂容器的吸引力转移到传真机等中。

公开(公告)号：US5535220A

公开(公告)日：1996-07-09

申请号：US182830

申请日：1994-01-19

申请人： Ippei Kanno ,  Seiji Sakashita ,  Hiroaki Ozeki ,  Daisuke Hayashi ,  Todd S. Bowser

发明人： Ippei Kanno ,  Seiji Sakashita ,  Hiroaki Ozeki ,  Daisuke Hayashi ,  Todd S. Bowser

IPC分类号： H03M13/23 ,  H03M13/27 ,  H03M13/33 ,  H04L1/00 ,  H04L7/04 ,  H04L27/00 ,  H04L27/18 ,  G06F11/00

CPC分类号： H04L1/0071 ,  H03M13/271 ,  H03M13/276 ,  H03M13/33 ,  H04L1/0042 ,  H04L1/0054 ,  H04L7/048

摘要： A forward error correcting transmitter and receiver for preventing the erroneous detection of synchronization is provided in a system in which synchronization of an interleaver circuit and a deinterleaver circuit, to be inserted between a convolutional encoder and a Viterbi decoder, is obtained from a synchronization detecting circuit of the Viterbi decoder. A LFSR (Linear Feedback Shift Register) is used as a row-direction address counter during writing and an up/down counter is used as a column-direction address counter during reading, during the interleaver circuit. In the deinterleaver circuit, an up/down counter is used as the column-direction address counter during writing, and an LFSR is used as the row-direction address counter during reading.

摘要翻译： 在从同步检测电路获得插入卷积编码器和维特比译码器之间的交错器电路和去交织器电路的同步的系统中，提供了用于防止同步错误检测的前向纠错发送器和接收器 的维特比解码器。 在写入期间，LFSR（线性反馈移位寄存器）用作行方向地址计数器，并且在交织器电路期间，在读取期间将升/降计数器用作列方向地址计数器。 在去交错电路中，在写入期间使用升/减计数器作为列方向地址计数器，在读取期间使用LFSR作为行方向地址计数器。