公开(公告)号：US20230173661A1

公开(公告)日：2023-06-08

申请号：US18100522

申请日：2023-01-23

Applicant: APPLIED MATERIALS, INC.

Inventor： Alexander Berger ,  Jeffrey C. Hudgens

IPC: B25J9/04 ,  B25J9/12 ,  B25J11/00 ,  B25J9/00 ,  B25J9/10

CPC classification number: B25J9/042 ,  B25J9/0009 ,  B25J9/104 ,  B25J9/123 ,  B25J11/0095

Abstract: The disclosure describes devices, systems and methods relating to a transfer chamber for an electronic device processing system. For example, a method includes causing a robot arm to pick up a substrate. The robot arm is caused to pick up the substrate by causing a first mover to rotate or to change a first distance to a second mover. Rotation of the first mover or the change in the first distance causes the first robot arm to rotate about a shoulder axis. The robot arm is further caused to pick up the substrate by causing one of a) a second mover to rotate or b) a third mover to change a second distance to the second mover. Rotation of the second mover or the change in the second distance causes the robot arm to raise or lower.

公开(公告)号：US11654578B2

公开(公告)日：2023-05-23

申请号：US17024543

申请日：2020-09-17

Applicant: KAWASAKI JUKOGYO KABUSHIKI KAISHA ,  Kawasaki Robotics (USA), INC.

Inventor： Masaya Yoshida ,  Hajime Nakahara ,  George Chin ,  Luc Nguyen

IPC: B25J15/00 ,  B25J11/00 ,  H01L21/687 ,  B25J9/16 ,  B25J13/08

CPC classification number: B25J15/0014 ,  B25J9/1664 ,  B25J11/0095 ,  B25J13/088 ,  H01L21/68707

Abstract: A robot system according to an embodiment may include a robot, a wafer jig that is held by the robot, a positioning base, a positional displacement detection device, a control part, and an offset acquisition part for acquiring an offset that occurs between a command position for the robot and an actual position. The positioning base includes contacting members. The wafer jig has a tapered surface. The tapered surface guides the wafer jig so that a center of the wafer jig approaches a predetermined position as a position where the taped surface contacts the contacting members is relatively higher. The robot places the wafer jig on the positioning base, then holds and conveys the wafer jig to the positional displacement detection device. The offset acquisition part acquires the offset based on a result in which the positional displacement detection device detects a positional displacement of the conveyed wafer jig.

公开(公告)号：US20190237351A1

公开(公告)日：2019-08-01

申请号：US16257595

申请日：2019-01-25

Applicant: Brooks Automation, Inc.

Inventor： Alexander KRUPYSHEV ,  Leigh F. SHARROCK

IPC: H01L21/68 ,  B25J9/16 ,  B25J11/00 ,  B65G47/90 ,  H01L21/67 ,  H01L21/677 ,  H01L21/687

CPC classification number: H01L21/681 ,  B25J9/1697 ,  B25J11/0095 ,  B65G47/905 ,  H01L21/67167 ,  H01L21/67196 ,  H01L21/67259 ,  H01L21/67742 ,  H01L21/67748 ,  H01L21/68707

Abstract: A substrate transport apparatus including a transport chamber, a drive section, a robot arm having an end effector at a distal end configured to support a substrate and being connected to the drive section generating at least arm motion in a radial direction extending and retracting the arm, an imaging system with a camera mounted in a predetermined location to image at least part of the robot arm, and a controller connected to the imaging system to image the arm moving to a predetermined repeatable position, the controller effecting capture of a first image of the robot arm proximate to the repeatable position decoupled from encoder data of the drive axis, wherein the controller calculates a positional variance of the robot arm from comparison of the first image with a calibration image, and from the positional variance determines a motion compensation factor changing the extended position of the robot arm.

公开(公告)号：US20180264654A1

公开(公告)日：2018-09-20

申请号：US15838082

申请日：2017-12-11

Applicant: Boe Technology Group Co., Ltd. ,  Hefei Xinsheng Optoelectronics Technology Co., Ltd.

Inventor： Erfeng Shen ,  Jie Wang ,  Qingshuang Ren

IPC: B25J11/00 ,  B25J9/00 ,  H01L21/677

CPC classification number: B25J11/0095 ,  B25J9/0009 ,  B25J9/0087 ,  B25J9/042 ,  B25J13/088 ,  G05B2219/45031 ,  H01L21/67742 ,  H01L21/67766

Abstract: The present disclosure relates to a field of display technology, which provides a substrate transfer robot including: a base; a column provided on the base; a number of robotic arm groups protruding from the column in different directions, each of the number of robotic arm groups including at least one robotic arm; and elevating mechanisms corresponding to the robotic arm groups one by one and fixedly connected to the robotic arm groups; wherein the number of robotic arm groups can be driven by the respective elevating mechanisms, to move in a longitudinal direction of the column respectively. The substrate transfer robot of the present disclosure can improve the handling efficiency.

公开(公告)号：US20180233986A1

公开(公告)日：2018-08-16

申请号：US15952595

申请日：2018-04-13

Applicant: Brooks Automation, Inc.

Inventor： Jairo T. MOURA ,  Ulysses GILCHRIST ,  Robert T. CAVENEY

IPC: H02K5/128 ,  H02K1/14 ,  H02K11/21 ,  B25J11/00 ,  H02K19/10 ,  H02K1/24

CPC classification number: H02K5/128 ,  B25J11/0095 ,  H02K1/14 ,  H02K1/141 ,  H02K1/148 ,  H02K1/24 ,  H02K1/246 ,  H02K11/21 ,  H02K19/103

Abstract: A transport apparatus including a housing, a drive mounted to the housing, and at least one transport arm connected to the drive where the drive includes at least one rotor having at least one salient pole of magnetic permeable material and disposed in an isolated environment, at least one stator having at least one salient pole with corresponding coil units and disposed outside the isolated environment, where the at least one salient pole of the at least one stator and the at least one salient pole of the rotor form a closed magnetic flux circuit between the at least one rotor and the at least one stator, and at least one seal configured to isolate the isolated environment where the at least one seal is integral to the at least one stator.

公开(公告)号：US20180229361A1

公开(公告)日：2018-08-16

申请号：US15897525

申请日：2018-02-15

Applicant: Persimmon Technologies, Corp.

Inventor： Martin Hosek ,  Scott Wilkas ,  Jacob Lipcon

IPC: B25J9/04 ,  B25J9/16

CPC classification number: H01L21/68707 ,  B25J9/0021 ,  B25J9/0084 ,  B25J9/042 ,  B25J9/043 ,  B25J9/046 ,  B25J9/104 ,  B25J9/1664 ,  B25J11/0095 ,  B25J17/02 ,  H01L21/67742 ,  H01L21/67766 ,  Y10S901/02 ,  Y10S901/15 ,  Y10S901/16 ,  Y10S901/19 ,  Y10S901/29 ,  Y10S901/30

Abstract: A method including, based upon a desired path of a reference point from a start position to an end position, where the reference point is on an end effector on a robot arm, determine an included angle that corresponds to the start position and the end position, calculating a trajectory in radial coordinates of the reference point on the end effector at least partially based upon the included angles; calculating corresponding angular coordinates of the reference point on the end effector, based on the calculated radial coordinates, so that the reference point follows the desired path; using a modified formulation of inverse kinematics, converting the radial and angular coordinates supplemented with the included angles of the trajectory and corresponding angular velocity and acceleration of the end effector to form motion setpoints for the robot arm; and controlling the motors of the robot drive.

公开(公告)号：US20180182658A1

公开(公告)日：2018-06-28

申请号：US15577137

申请日：2015-05-25

Applicant: KAWASAKI JUKOGYO KABUSHIKI KAISHA

Inventor： Hirohiko GOTO ,  Isao KATO ,  Masafumi KAMEDA

IPC: H01L21/687 ,  B25J9/04 ,  B25J9/16 ,  B25J15/00 ,  B25J11/00

CPC classification number: H01L21/68707 ,  B25J9/042 ,  B25J9/16 ,  B25J11/0095 ,  B25J15/0014 ,  B25J15/0028 ,  H01L21/677 ,  Y10S901/02 ,  Y10S901/17 ,  Y10S901/23 ,  Y10S901/32

Abstract: A horizontal articulated robot includes: a first link; a second link whose proximal end portion is coupled to one of an upper side and a lower side of a distal end portion of the first link; a third link whose proximal end portion is coupled to the other upper or lower side of a distal end portion of the second link; and a spacer disposed at a coupling position where the second link and one of the first link and the third link are coupled together, the spacer spacing the second link and the one link apart from each other in an up-down direction, such that a motion trajectory of the third link does not interfere with the first link.

公开(公告)号：US20180169854A1

公开(公告)日：2018-06-21

申请号：US15737372

申请日：2016-06-15

Applicant: MITSUBISHI ELECTRIC CORPORATION

Inventor： Koji SHIRATSUCHI

IPC: B25J9/10 ,  B25J9/04 ,  B25J18/04 ,  B25J11/00

CPC classification number: B25J9/10 ,  B25J9/042 ,  B25J9/1633 ,  B25J9/1638 ,  B25J9/1692 ,  B25J11/0095 ,  B25J13/085 ,  B25J18/04

Abstract: A calibration unit includes: an approximate curve generation unit configured to generate an approximate curve based on position information and force information obtained when a tool part is rotated in accordance with an attitude command value; a bias value estimation unit configured to estimate the bias value of the force information based on the approximate curve, the position information, and the force information; a mass/center-of-gravity position estimation unit configured to remove the bias value from the force information, and to calculate a mass and a center-of-gravity position vector of the hand tip load based on the obtained force information; and an external force component calculation unit configured to subtract the bias value and the gravity action component of the hand tip load from the force information based on the bias value, and the mass and the center-of-gravity position vector.

公开(公告)号：US09889567B2

公开(公告)日：2018-02-13

申请号：US14972366

申请日：2015-12-17

Applicant: Applied Materials, Inc.

Inventor： Dale R. Du Bois ,  Juan Carlos Rocha-Alvarez ,  Karthik Janakiraman ,  Hari K. Ponnekanti ,  Sanjeev Baluja ,  Prajeeth Wilton

IPC: H01L21/677 ,  B25J11/00 ,  H01L21/67

CPC classification number: B25J11/0095 ,  H01L21/67196 ,  H01L21/67742 ,  H01L21/67748

Abstract: The present disclosure generally relates to semiconductor process equipment used to transfer semiconductor substrates between process chambers. More specifically, embodiments described herein are related to systems and methods used to transfer, or swap, semiconductor substrates between process chambers using a transport device that employs at least two blades for the concurrent transfer of substrates between processing chambers.

公开(公告)号：US20180015614A1

公开(公告)日：2018-01-18

申请号：US15548953

申请日：2015-02-04

Applicant: KAWASAKI JUKOGYO KABUSHIKI KAISHA

Inventor： Kazuo FUJIMORI ,  Masaya YOSHIDA

IPC: B25J9/16 ,  B25J9/12 ,  G05B19/29 ,  H01L21/687 ,  B25J11/00

CPC classification number: B25J9/1641 ,  B25J9/12 ,  B25J11/0095 ,  G05B19/298 ,  G05B2219/34013 ,  G05B2219/45031 ,  H01L21/67259 ,  H01L21/68707 ,  Y10S901/02 ,  Y10S901/14 ,  Y10S901/23

Abstract: A robot shakes automatically adjusting device includes a parameter optimizing part configured to newly set any one of a plurality of control parameters to a control parameter setter when a shakes evaluation value is above a given threshold, and optimize a combination of the plurality of control parameters by causing the control parameter setter, a robot control part, a shakes acquiring part, and a determining part to repeat the new setting of the control parameters, a linear movement of an end effector, an acquisition of the shakes, and a determination, respectively, until the shakes evaluation value becomes below the given threshold.