Quartz glass having excellent resistance against plasma corrosion and method for producing the same
    33.
    发明授权
    Quartz glass having excellent resistance against plasma corrosion and method for producing the same 有权
    具有优异的等离子体腐蚀性的石英玻璃及其制造方法

    公开(公告)号:US07365037B2

    公开(公告)日:2008-04-29

    申请号:US11076944

    申请日:2005-03-11

    IPC分类号: C03C3/04 C03C3/095 C03B20/00

    摘要: As a jig material to use under plasma reaction for producing semiconductors the present invention provides a quartz glass having resistance against plasma corrosion, particularly corrosion resistance against fluorine-based plasma gases, and which is usable without causing anomalies to silicon wafers; the present invention furthermore provides a quartz glass jig, and a method for producing the same. A quartz glass containing 0.1 to 20 wt % in total of two or more types of metallic elements, said metallic elements comprising at least one type of metallic element selected from Group 3B of the periodic table as a first metallic element and at least one type of metallic element selected from the group consisting of Mg, Ca, Sr, Ba, Sc, Y, Ti, Zr, Hf, lanthanoids, and actinoids as a second metallic element, provided that the maximum concentration of each of the second metallic elements is 1.0 wt % or less.

    摘要翻译: 作为用于制造半导体的等离子体反应的夹具材料,本发明提供了具有耐等离子体腐蚀性,特别是耐氟基等离子体气体的耐腐蚀性的石英玻璃,其可以在不引起硅晶片异常的情况下使用; 本发明还提供一种石英玻璃夹具及其制造方法。 含有0.1〜20重量%的两种以上金属元素的石英玻璃,所述金属元素包含选自元素周期表第3B族的至少一种金属元素作为第一金属元素和至少一种 金属元素选自Mg,Ca,Sr,Ba,Sc,Y,Ti,Zr,Hf,镧系元素和锕系元素作为第二金属元素,条件是每个第二金属元素的最大浓度为1.0 wt%以下。

    METHOD OF MANUFACTURING STONE-LIKE ARTICLES
    34.
    发明申请
    METHOD OF MANUFACTURING STONE-LIKE ARTICLES 审中-公开
    制造石头样品的方法

    公开(公告)号:US20080076655A1

    公开(公告)日:2008-03-27

    申请号:US11859324

    申请日:2007-09-21

    IPC分类号: C03C1/02

    CPC分类号: C03C1/06 C03B19/06 C03C1/02

    摘要: A method of manufacturing an article includes granulating glass, clay, filler, and porosity reducing agent to form a mixture, adding binder to the mixture to form granular particles, forming the granular particles into a shaped article by dry pressing, drying the shaped article, and firing the shaped article in a kiln at a maximum temperature of between about 800° C. and about 1100° C. The glass, clay, filler, and porosity reducing agent are granulated in a fluidized bed granulator. Upon addition of the binder, granulated particles are formed having an average particle size of between about 0.08 millimeters and about 5 millimeters. The granular particles comprise between about 55% to about 99% glass by weight, up to about 40% clay by weight, up to about 30% filler by weight, between about 0.1% and about 5% porosity reducing agent by weight, and between about 0.2% and about 3% binder by weight.

    摘要翻译: 制造制品的方法包括将玻璃,粘土,填料和孔隙率降低剂造粒以形成混合物,向混合物中添加粘合剂以形成颗粒状颗粒,通过干压制成型成型制品,干燥成型制品, 并在约800℃至约1100℃的最高温度下在窑中焙烧成型制品。将玻璃,粘土,填料和孔隙率降低剂在流化床造粒机中造粒。 在添加粘合剂时,形成具有约0.08毫米至约5毫米的平均粒度的造粒颗粒。 颗粒颗粒包含按重量计约55%至约99%的玻璃,至多约40%的粘土,至多约30%的填料重量,约0.1%至约5%的孔隙率降低剂,以及在 约0.2%和约3%的粘合剂。

    Lithium ion conductive solid electrolyte and production process thereof
    36.
    发明申请
    Lithium ion conductive solid electrolyte and production process thereof 审中-公开
    锂离子导电固体电解质及其制备方法

    公开(公告)号:US20070231704A1

    公开(公告)日:2007-10-04

    申请号:US11727489

    申请日:2007-03-27

    申请人: Yasushi Inda

    发明人: Yasushi Inda

    IPC分类号: H01M10/36 C04B35/64

    摘要: A lithium ion conductive solid electrolyte formed by sintering a molding product containing an inorganic powder and having a porosity of 10 vol % or less, which is obtained by preparing a molding product comprising an inorganic powder as a main ingredient and sintering the molding product after pressing and/or sintering the same while pressing, the lithium ion conductive solid electrolyte providing a solid electrolyte having high battery capacity without using a liquid electrolyte, usable stably for a long time and simple and convenient in manufacture and handling also in industrial manufacture in the application use of secondary lithium ion battery or primary lithium battery, a solid electrolyte having good charge/discharge cyclic characteristic in the application use of the secondary lithium ion battery a solid electrolyte with less water permeation and being safe when used for lithium metal-air battery in the application use of primary lithium battery, a manufacturing method of the solid electrolyte, and a secondary lithium ion battery and a primary lithium battery using the solid electrolyte.

    摘要翻译: 1.一种锂离子传导性固体电解质,其是通过烧结含有无机粉末并且具有10体积%%以下的孔隙率的10体积%以下的成型体形成的,其是通过制备包含无机粉末作为主要成分并在压制后烧结成型产品的成型产物 和/或在压制时烧结,锂离子传导性固体电解质提供具有高电池容量的固体电解质,而不使用液体电解质,可长期稳定使用,并且在制造和处理中也在工业制造中应用 使用二次锂离子电池或一次锂电池,具有良好充电/放电循环特性的固体电解质在二次锂离子电池的应用中使用具有较少透水性的固体电解质,并且当用于锂金属空气电池时是安全的 一次锂电池的应用使用,一种制造方法 固体电解质,二次锂离子电池和使用该固体电解质的一次锂电池。