公开(公告)号：US09753082B2

公开(公告)日：2017-09-05

申请号：US15055200

申请日：2016-02-26

Applicant: Toyota Jidosha Kabushiki Kaisha

Inventor： Yohei Iwahashi ,  Hidemi Senda

IPC: G01R31/00 ,  G01R31/28 ,  H01L21/66 ,  G01R31/26 ,  H01L21/00

CPC classification number: G01R31/2875 ,  G01N2201/00 ,  G01R31/26 ,  H01L21/00 ,  H01L22/14 ,  H01L22/20 ,  H01L2221/00

Abstract: A manufacturing method of a semiconductor device is provided with an inspecting of a semiconductor substrate by an inspection method, the method including heating the semiconductor substrate, measuring first and second characteristics. The measuring of a first characteristic is performed by bringing a plurality of probes into contact with the heated semiconductor substrate and making a first electric current flow in the semiconductor substrate. The measuring of a second characteristic is performed, after the measuring of the first characteristic, by bringing a plurality of probes into contact with the heated semiconductor substrate and making a second electric current flow in the semiconductor substrate. A number of the plurality of probes used in the measuring of the second characteristic is larger than a number of the plurality of probes used in the measuring of the first characteristic. The second electric current is larger than the first electric current.

公开(公告)号：US09618573B2

公开(公告)日：2017-04-11

申请号：US14603251

申请日：2015-01-22

Applicant: Shing Kai Yip ,  Chi Wah Cheng

Inventor： Shing Kai Yip ,  Chi Wah Cheng

IPC: G01R31/01 ,  G01R31/28 ,  G01R1/067 ,  G01R31/26 ,  G01R1/00 ,  G01N1/00

CPC classification number: G01R31/2891 ,  G01N1/00 ,  G01N2201/00 ,  G01R1/00 ,  G01R1/06705 ,  G01R31/26 ,  G01R31/2893

Abstract: A test handler comprises an orientation changing device having a device holder for holding electronic devices, the device holder having a vertical rotary axis. A conveying device is operative to convey electronic devices to the device holder, and a rotary motor connected to the device holder is operative to rotate the device holder about the vertical rotary axis to change an orientation of the electronic device held on it. A rotary turret of the test handler has a plurality of pick heads arranged on the rotary turret, and each pick head is configured to pick up electronic devices from the device holder.

公开(公告)号：US20160306004A1

公开(公告)日：2016-10-20

申请号：US15195131

申请日：2016-06-28

Applicant: METRYX LIMITED

Inventor： Adrian KIERMASZ

IPC: G01R31/26 ,  G01N5/00

CPC classification number: G01R31/2601 ,  C30B1/00 ,  C30B7/00 ,  C30B23/00 ,  G01N1/00 ,  G01N5/00 ,  G01N5/02 ,  G01N15/0893 ,  G01N2201/00 ,  G01N2203/00 ,  H01J49/26 ,  H01L22/12

Abstract: A method and apparatus for extracting the contents of voids and/or pores present in a semiconductor device to obtain information indicative of the nature of the voids and/or pores, e.g. to assist with metrology measurements. The method includes heating the semiconductor wafer to expel the contents of the voids and/or pores, collecting the expelled material in a collector, and measuring a consequential change in mass of the semiconductor wafer and/or the collector, to extract information indicative of the nature of the voids. This information may include information relating to the distribution of the voids and/or pores, and/or the sizes of the voids and/or pores, and/or the chemical contents of the voids and/or pores. The collector may include a condenser having a temperature-controlled surface (e.g. in thermal communication with a refrigeration unit) for condensing the expelled material.

Abstract translation: 一种用于提取存在于半导体器件中的空隙和/或孔的内容物以获得指示空隙和/或孔的性质的信息的方法和装置，例如， 协助测量测量。 该方法包括加热半导体晶片以排出空隙和/或孔的内容物，将集流器中的排出的材料收集起来，并测量半导体晶片和/或集电器的相应的质量变化，以提取指示 空洞的性质。 该信息可以包括关于空隙和/或孔的分布，和/或空隙和/或孔的尺寸和/或空隙和/或孔的化学成分的信息。 收集器可以包括具有用于冷凝排出的材料的温度控制表面（例如与制冷单元热连通）的冷凝器。

公开(公告)号：US09395226B2

公开(公告)日：2016-07-19

申请号：US12448355

申请日：2007-11-30

Applicant: Armin Wernet ,  Roland Dieterle

Inventor： Armin Wernet ,  Roland Dieterle

IPC: G01R31/20 ,  G01F23/24 ,  G01F23/26 ,  C12Q1/00

CPC classification number: G01F23/24 ,  C12Q1/00 ,  C12Q2304/00 ,  G01F23/26 ,  G01N2201/00

Abstract: An apparatus for determining and/or monitoring at least one process variable of a medium. The apparatus includes at least one probe unit and at least one electronics unit, which supplies the probe unit with an electrical, exciter signal and which receives from the probe unit an electrical, measurement signal. The invention includes, that the probe unit has at least one inner electrode and at least one outer electrode surrounding the inner electrode.

Abstract translation: 一种用于确定和/或监视介质的至少一个过程变量的装置。 该装置包括至少一个探针单元和至少一个电子单元，其向探针单元提供电激励器信号，并从探针单元接收电测量信号。 本发明包括探针单元具有至少一个内电极和围绕内电极的至少一个外电极。

公开(公告)号：US09360518B2

公开(公告)日：2016-06-07

申请号：US14576642

申请日：2014-12-19

Applicant: Sunbeam Products, Inc.

Inventor： Gabriel Kohn ,  Leonard Horey ,  William G. McCoy ,  Lei Feng ,  Xiao Bao Yang ,  Fei Ma

IPC: G01R31/14 ,  G01R31/28 ,  H05B3/34 ,  H05B1/02 ,  G01K13/00 ,  G01R31/02 ,  G01N1/00

CPC classification number: G01R31/026 ,  G01K7/16 ,  G01K13/00 ,  G01K15/007 ,  G01N1/00 ,  G01N2201/00 ,  G01R31/021 ,  G01R31/2829 ,  H01L2221/00 ,  H05B1/0272 ,  H05B3/342 ,  H05B2203/019 ,  H05B2203/02

Abstract: A circuit integrity detection system for use in detecting the integrity of a sensing wire in a heating pad wherein the integrity of the sensing wire is checking the inputs from a first and second A/D converter connected to opposite ends of the sensing wire.

Abstract translation: 一种电路完整性检测系统，用于检测加热垫中的感测线的完整性，其中感测线的完整性检查来自连接到感测线的相对端的第一和第二A / D转换器的输入。

公开(公告)号：US09239308B2

公开(公告)日：2016-01-19

申请号：US13851795

申请日：2013-03-27

Applicant: ALPS ELECTRIC CO., LTD.

Inventor： Atsushi Tondokoro ,  Satoshi Waga ,  Takashi Sato ,  Shinya Yokoyama ,  Sumihito Morita

IPC: G01R27/26 ,  G01N27/22 ,  G01N1/00 ,  H01L21/00

CPC classification number: G01N27/223 ,  G01N1/00 ,  G01N2201/00 ,  H01L21/00 ,  Y10T29/49

Abstract: A humidity detection sensor includes a lower electrode provided on a board, an upper electrode provided so as to face the lower electrode, a humidity sensing film which is formed at least between the lower electrode and the upper electrode and whose dielectric constant changes in response to humidity, and a protective film provided so as to cover the upper electrode. Each of the upper electrode and the protective film has an opening through which the humidity sensing film is partially exposed to the outside. In the opening, the humidity sensing film is provided so as to reach at least a position higher than the position of the lower surface of the protective film.

Abstract translation: 湿度检测传感器包括设置在板上的下电极，设置成面向下电极的上电极，至少形成在下电极和上电极之间并且其介电常数响应于 湿度和设置成覆盖上电极的保护膜。 上部电极和保护膜中的每一个具有开口，湿度感测膜通过该开口部分地暴露于外部。 在开口中，湿度感测膜被设置成至少达到比保护膜的下表面的位置更高的位置。

公开(公告)号：US20150008934A1

公开(公告)日：2015-01-08

申请号：US14028689

申请日：2013-09-17

Applicant: Sunbeam Products, Inc.

Inventor： Gabriel Kohn

IPC: G01R31/02

CPC classification number: G01R31/026 ,  G01K7/16 ,  G01K13/00 ,  G01K15/007 ,  G01N1/00 ,  G01N2201/00 ,  G01R31/021 ,  G01R31/2829 ,  H01L2221/00 ,  H05B1/0272 ,  H05B3/342 ,  H05B2203/019 ,  H05B2203/02

Abstract: A circuit integrity detection system for use in detecting the integrity of sensing wire in a heating pad wherein the integrity of the sensing wire is checking the inputs from a first and second A/D converter connected to opposite ends of the sensing wire.

Abstract translation: 一种电路完整性检测系统，用于检测加热垫中的感测线的完整性，其中感测线的完整性检查来自连接到感测线的相对端的第一和第二A / D转换器的输入。

公开(公告)号：US09970960B2

公开(公告)日：2018-05-15

申请号：US15439967

申请日：2017-02-23

Applicant: CHUNGHWA PRECISION TEST TECH. CO., LTD.

Inventor： Chih-Peng Hsieh

IPC: G01R31/00 ,  G01R1/067 ,  G01R31/28 ,  G01N1/00

CPC classification number: G01R1/06794 ,  G01N1/00 ,  G01N2201/00 ,  G01R1/06722 ,  G01R1/44 ,  G01R31/2831 ,  H01L2221/00

Abstract: A probe having a sliding rail is provided and includes a probe head, a probe tail, an elastic element made of an elastic material and connected between the probe head and the probe tail, and a sliding rail assembly. The sliding rail assembly includes a slide rail and a position limit protrusion. The slide rail has a fixed end and a free end. The fixed end is fixedly connected to the probe tail, and the free end extends to the probe head. The position limit protrusion is fixedly connected to the probe head, and has a sliding slot formed thereon through which the slide rail can pass. The sliding rail assembly is made of a conductive material, and a cross-section area of the slide rail is greater than a cross-section area of the elastic material of the elastic element.

公开(公告)号：US20180031646A1

公开(公告)日：2018-02-01

申请号：US15620756

申请日：2017-06-12

Applicant: Radiation Monitoring Devices, Inc.

Inventor： Timothy C. Tiernan ,  Mark Steinback ,  Noa M. Rensing ,  Evan R. Weststrate

IPC: G01R33/09 ,  G01N27/90 ,  G01B1/00 ,  G01N1/00

CPC classification number: G01R33/09 ,  G01B1/00 ,  G01B2210/00 ,  G01N1/00 ,  G01N27/9033 ,  G01N2201/00 ,  G01R1/00 ,  G01R33/096

Abstract: Eddy current detection probes and related methods are disclosed. In some embodiments, the eddy current detection probes are hybrid probes, including a solid state sensor and a detection loop. In some embodiments, the eddy current detection probes include a drive coil and a detection loop, with the detection loop having a sensitive axis that is not parallel to principal axis of the drive coil. In some such embodiments, the sensitive axis of the detection loop is perpendicular to the principal axis of the drive coil.

公开(公告)号：US20170176512A1

公开(公告)日：2017-06-22

申请号：US15378922

申请日：2016-12-14

Applicant: MAGNETI MARELLI S.P.A.

Inventor： Danilo PRITELLI ,  Rosanna SUGLIA ,  Gianluca AURILIO ,  Alessandro CERUTTI ,  Franco CIAMPOLINI

IPC: G01R31/12 ,  G01R31/00 ,  G01R19/165

CPC classification number: G01R31/12 ,  G01N1/00 ,  G01N2201/00 ,  G01R19/16566 ,  G01R27/18 ,  G01R31/006 ,  G01R31/025 ,  G01R31/3606 ,  G07C5/0808 ,  H01G2/00

Abstract: A vehicle step apparatus including an extending and retracting device having a mounting bracket, a step bracket, and an arm assembly. A gear box has a cavity into which at least a portion of a motor shaft of a motor is inserted. A worm wheel is rotatably disposed in the cavity and has a worm wheel body meshing with the motor shaft. An output shaft is mounted to the worm wheel body. A sun gear is fitted over the output shaft. A planet carrier is rotatably disposed in the cavity and connected with the arm assembly. A planet gear is rotatably mounted to the planet carrier and meshes with the sun gear. An adjusting member is mounted in the gear box, and is movable in an axial direction of the motor shaft and abuts against a free end of the motor shaft.