公开(公告)号：US09329085B2

公开(公告)日：2016-05-03

申请号：US14296051

申请日：2014-06-04

Applicant: Block Engineering, LLC

Inventor： Petros Kotidis ,  Erik Deutsch ,  Ninghui Zhu ,  Dan Cavicchio

IPC: G01J4/00 ,  G01J3/433 ,  B82Y20/00 ,  G01N21/35 ,  H01S5/00 ,  H01S5/14 ,  H01S5/34 ,  G01J3/10 ,  G01J3/45 ,  G02B21/06 ,  G01N21/17 ,  H01S5/40 ,  G01N21/3504 ,  G01N21/3563 ,  G01N21/3577

CPC classification number: G01N21/39 ,  B82Y20/00 ,  G01J3/108 ,  G01J3/26 ,  G01J3/4338 ,  G01J3/45 ,  G01N21/272 ,  G01N21/35 ,  G01N21/3504 ,  G01N21/3563 ,  G01N21/3577 ,  G01N2021/1793 ,  G01N2021/399 ,  G01N2201/0221 ,  G01N2201/0612 ,  G01N2201/068 ,  G01N2201/08 ,  G02B21/0028 ,  G02B21/008 ,  G02B21/06 ,  H01S5/0071 ,  H01S5/141 ,  H01S5/3401 ,  H01S5/3402 ,  H01S5/4012 ,  H01S5/4031

Abstract: A spectroscopy system comprising at least two laser modules, each of the laser modules including a laser cavity, a quantum cascade gain chip for amplifying light within the laser cavity, and a tuning element for controlling a wavelength of light generated by the modules. Combining optics are used to combine the light generated by the at least two laser modules into a single beam and a sample detector detects the single beam returning from a sample.

Abstract translation: 一种包括至少两个激光模块的光谱系统，每个激光模块包括激光腔，用于放大激光腔内的光的量子级联增益芯片，以及用于控制由模块产生的光的波长的调谐元件。 组合光学器件用于将由至少两个激光模块产生的光组合成单个光束，并且样品检测器检测从样品返回的单个光束。

公开(公告)号：US20160116271A1

公开(公告)日：2016-04-28

申请号：US14521440

申请日：2014-10-22

Applicant: NATIONAL APPLIED RESEARCH LABORATORIES

Inventor： Ming-Hsing SHEN ,  Wei-Chung WANG ,  Chi-Hung HUANG ,  Jyh-Rou SZE ,  Chun-Li CHANG

IPC: G01B9/02 ,  G01J3/447 ,  G01J3/45

CPC classification number: G01B9/02042 ,  G01B9/02044 ,  G01B9/0209 ,  G01J3/447 ,  G01J3/45 ,  G02B21/0024

Abstract: The conventional white-light interferometer, confocal microscope, and ellipsometer are integrated as one device set in a functional sense, and the geometrical parameters conventionally measured may be deduced on the integrated device. Thus, the advantages and efficacies of equipment cost saving, on-line measuring, rapid monitoring, reduced manufacturing time, and reduced possibility of object damage during the manufacturing process may be secured, compared with the prior art.

Abstract translation: 传统的白光干涉仪，共聚焦显微镜和椭偏仪被集成为功能意义上的一个装置，并且可以在集成装置上推导传统测量的几何参数。 因此，与现有技术相比，可以确保设备成本节省，在线测量，快速监测，缩短制造时间以及减少制造过程中物体损坏可能性的优点和功效。

公开(公告)号：US20160109225A1

公开(公告)日：2016-04-21

申请号：US14935806

申请日：2015-11-09

Applicant: NOVA MEASURING INSTRUMENTS LTD.

Inventor： Moshe FINAROV ,  Boaz BRILL

IPC: G01B11/24

CPC classification number: G01B11/24 ,  G01B9/02087 ,  G01J3/45 ,  G01N21/21 ,  H01L22/12 ,  H01L22/20

Abstract: A method and system are presented for determining a line profile in a patterned structure, aimed at controlling a process of manufacture of the structure. The patterned structure comprises a plurality of different layers, the pattern in the structure being formed by patterned regions and un-patterned regions. At least first and second measurements are carried out, each utilizing illumination of the structure with a broad wavelengths band of incident light directed on the structure at a certain angle of incidence, detection of spectral characteristics of light returned from the structure, and generation of measured data representative thereof. The measured data obtained with the first measurement is analyzed, and at least one parameter of the structure is thereby determined. Then, this determined parameter is utilized, while analyzing the measured data obtained with the second measurements enabling the determination of the profile of the structure

公开(公告)号：US20160089019A1

公开(公告)日：2016-03-31

申请号：US14867897

申请日：2015-09-28

Applicant: IDx, LLC

Inventor： Michael D. Abramoff ,  Edward DeHoog

IPC: A61B3/10 ,  G01B9/02 ,  A61B3/14 ,  A61B3/00 ,  A61B3/12

CPC classification number: A61B3/102 ,  A61B3/0008 ,  A61B3/0025 ,  A61B3/1005 ,  A61B3/1225 ,  A61B3/14 ,  G01B9/02027 ,  G01B9/02028 ,  G01B9/02044 ,  G01B9/02091 ,  G01B2290/65 ,  G01J3/45

Abstract: Provided is a snapshot spectral domain optical coherence tomographer comprising a light source providing a plurality of beamlets; a beam splitter, splitting the plurality of beamlets into a reference arm and a sample arm; a first optical system that projects the sample arm onto multiple locations of a sample; a second optical system for collection of a plurality of reflected sample beamlets; a third optical system projecting the reference arm to a reflecting surface and receiving a plurality of reflected reference beamlets; a parallel interferometer that provides a plurality of interferograms from each of the plurality of sample beamlets with each of the plurality of reference beamlets; an optical image mapper configured to spatially separate the plurality of interferograms; a spectrometer configured to disperse each of the interferograms into its respective spectral components and project each interferogram in parallel; and a photodetector providing photon quantification.

Abstract translation: 提供了一种快照频域光学相干断层摄影机，其包括提供多个子束的光源; 分束器，将所述多个子束分成参考臂和样本臂; 将样品臂投影到样品的多个位置上的第一光学系统; 用于收集多个反射样品子束的第二光学系统; 第三光学系统将参考臂投影到反射表面并且接收多个反射的参考子束; 并行干涉仪，其从所述多个样本子束中的每一个与所述多个参考子束中的每一个提供多个干涉图; 配置为在空间上分离多个干涉图的光学图像映射器; 配置为将每个干涉图分散到其相应的光谱分量中并分别投影每个干涉图并分别布置的光谱仪; 以及提供光子量化的光电探测器。

公开(公告)号：US09279724B2

公开(公告)日：2016-03-08

申请号：US14312740

申请日：2014-06-24

Applicant: RAYTHEON COMPANY

Inventor： Ian S. Robinson ,  John D. Bloomer ,  Bradley Flanders

IPC: G01J3/45 ,  G01J3/453 ,  G01J3/02 ,  G01J3/06

CPC classification number: G01J3/4535 ,  G01J3/0202 ,  G01J3/06 ,  G01J3/45 ,  G01J2003/4538

Abstract: Interferometric transform spectrometer (ITS) systems and methods of operation thereof. In one example, an ITS system includes a Michelson interferometer that introduces a varying optical path length difference (OPD) between its two arms so as to produce an interferogram, a detector that receives and samples the interferogram, and a scan controller coupled to the detector and to Michelson interferometer. The scan controller controls the Michelson interferometer to vary the OPD in discrete steps such that the detector provides M samples of the interferogram for each of two scan segments. In the first scan segment, the M samples have a uniform or non-uniform sample spacing and the OPD has a first maximum value. In the second scan segment, the M samples have an incrementally increasing sample spacing and the OPD has a second maximum value that is at least twice the first maximum value.

Abstract translation: 干涉测量变换光谱仪（ITS）系统及其操作方法。 在一个示例中，ITS系统包括迈克尔逊干涉仪，其在其两个臂之间引入变化的光程长度差（OPD），以产生干涉图，接收和采样干涉图的检测器，以及耦合到检测器的扫描控制器 和迈克尔逊干涉仪。 扫描控制器控制迈克尔逊干涉仪以离散步骤改变OPD，使得检测器为两个扫描段中的每一个提供干涉图的M个采样。 在第一扫描段中，M个样本具有均匀或不均匀的采样间隔，并且OPD具有第一最大值。 在第二扫描段中，M个采样具有逐渐增加的采样间隔，并且OPD具有至少为第一最大值的两倍的第二最大值。

公开(公告)号：US20160041031A1

公开(公告)日：2016-02-11

申请号：US14823767

申请日：2015-08-11

Applicant: LI-COR, Inc.

Inventor： Serguei Koulikov

IPC: G01J3/02 ,  G01J3/42

CPC classification number: G01J3/027 ,  G01J3/42 ,  G01J3/45 ,  G01N21/41 ,  G01N2021/391 ,  G01N2021/399

Abstract: Systems and methods for controlling the optical path length between a feedback enabled laser and a cavity, and hence the optical feedback phase. A phasor element, positioned along an optical path between the laser and the cavity coupling mirror, includes a gas medium within a volume defined by the phasor element. The phasor element is configured to adjust or control an optical path length of the laser light between the laser and the cavity coupling mirror by adjusting or controlling a density of the gas medium within the phasor volume.

公开(公告)号：US09159138B2

公开(公告)日：2015-10-13

申请号：US14194377

申请日：2014-02-28

Applicant: THALES

Inventor： Jean-Michel Gaucel ,  Denis Simeoni ,  Sandrine Mathieu

IPC: G06T7/00 ,  G01J3/45

CPC classification number: G06T7/0081 ,  G01J3/45

Abstract: A device and method for dynamically adapting spatial resolution for imager Fourier transform spectrometers makes it possible to acquire data in interferogram mode and image mode on survey points for an observed scene, each survey point being associated a matrix of macro-pixels and defined by a plurality of zones. For each survey point, analysis of the content of each zone is carried out on the basis of data of the image mode. Classification into clear zone or non-clear zone is carried out as a function of proportion of cloud, and clear-pixel data are generated on the basis of the sum of the data of the macro-pixels of the clear zone class. Survey point data are generated on the basis of the sum of the data of all the macro-pixels of the matrix associated with the survey point. The survey point and clear pixel data streams are transmitted to the ground.

Abstract translation: 用于动态适应成像仪傅立叶变换光谱仪的空间分辨率的装置和方法使得可以在观测场景的测量点上采集干涉图模式和图像模式的数据，每个测量点与宏观像素的矩阵相关联并由多个 的区域。 对于每个测量点，根据图像模式的数据对每个区域的内容进行分析。 作为云的比例的函数进行到清晰区域或非清除区域的分类，并且基于清除区域类别的宏像素的数据的和来生成清除像素数据。 基于与测量点相关联的矩阵的所有宏观像素的数据之和生成测量点数据。 测量点和清晰像素数据流被传输到地面。

公开(公告)号：US20150253189A1

公开(公告)日：2015-09-10

申请号：US14282067

申请日：2014-05-20

Applicant: Michael K. Yetzbacher ,  Christopher W. Miller ,  Michael J. Deprenger ,  Andrew J. Boudreau

Inventor： Michael K. Yetzbacher ,  Christopher W. Miller ,  Michael J. Deprenger ,  Andrew J. Boudreau

IPC: G01J3/26 ,  G01N21/45

CPC classification number: G01J3/26 ,  G01J3/021 ,  G01J3/45 ,  G01N21/41 ,  G01N21/45

Abstract: A method of optical spectroscopy and a device for use in optical spectroscopy. The device includes a substrate, and a plurality of etalon cavities affixed to or coupled to the substrate. A signal is received from a Fabry-Perot interferometer. The signal is sampled using the device according to a generalized Nyquist-Shannon sampling criterion. The signal is sampled using the device according to a phase differential criterion for wave number resolution. An input spectrum for the signal is reconstructed based on the signal sampled according to the generalized Nyquist-Shannon sampling criterion and the signal sampled according to the phase differential criterion for wave number resolution.

Abstract translation: 光谱学方法和光谱学中使用的装置。 该器件包括衬底和固定到衬底或耦合到衬底的多个标准具腔。 从法布里 - 珀罗干涉仪接收信号。 使用根据广义奈奎斯坦 - 香农采样标准的装置对信号进行采样。 根据波数分辨率的相位差准则，使用装置对信号进行采样。 基于根据广义奈奎斯特 - 香农采样标准采样的信号和根据波数分辨率的相位差标准采样的信号，重构信号的输入频谱。

公开(公告)号：US20150247950A1

公开(公告)日：2015-09-03

申请号：US14428270

申请日：2012-09-13

Applicant: HALLIBURTON ENERGY SERVICES, INC.

Inventor： David L. Perkins

IPC: G01V8/00 ,  E21B49/08 ,  G01N33/00 ,  G01N21/31 ,  G01N33/28

CPC classification number: G01N21/25 ,  E21B49/00 ,  E21B49/08 ,  G01J3/0227 ,  G01J3/0229 ,  G01J3/0264 ,  G01J3/0291 ,  G01J3/45 ,  G01J3/4531 ,  G01N21/31 ,  G01N33/0009 ,  G01N33/24 ,  G01N33/28 ,  G01V8/00

Abstract: A spatial heterodyne spectrometer may employ an integrated computational element (ICE) to obtain a measure of one or more fluid properties without requiring any moving parts, making it particularly suitable for use in a downhole environment. One illustrative method embodiment includes: directing light from a light source to illuminate a sample; transforming light from the sample into spatial fringe patterns using a dispersive two-beam interferometer; adjusting a spectral weighting of the spatial fringe patterns using an integrated computation element (ICE); focusing spectral-weight-adjusted spatial fringe patterns into combined fringe intensities; detecting the combined fringe intensities; and deriving at least one property of the sample.

Abstract translation: 空间外差谱仪可以采用集成的计算元件（ICE）来获得一种或多种流体性质的量度，而不需要任何移动部件，使其特别适用于井下环境。 一个示例性方法实施例包括：引导来自光源的光以照射样品; 使用色散双光束干涉仪将光从样品转变成空间条纹图案; 使用积分计算元素（ICE）调整空间条纹图案的光谱加权; 将光谱重量调整的空间条纹图案聚焦成条纹强度; 检测组合条纹强度; 并导出样品的至少一个性质。

公开(公告)号：US09103727B2

公开(公告)日：2015-08-11

申请号：US13729983

申请日：2012-12-28

Applicant: The Regents of the University of Michigan

Inventor： Xudong Fan ,  Karthik Reddy ,  Yunbo Guo

IPC: G01B9/02 ,  G01J3/45 ,  G01N21/27 ,  G01N21/39 ,  G01N30/74

CPC classification number: G01J3/45 ,  G01N21/274 ,  G01N21/39 ,  G01N30/74

Abstract: A self-referencing composite Fabry-Pérot cavity sensor, including methods of use and manufacture. The cavity sensor comprises a substrate defining a first cavity portion juxtaposed to a second cavity portion. The first and second cavity portions are provided having a predetermined depth offset. A polymer or other dielectric material is disposed within the first and second cavity portions. An interference spectrum resulting from a light source of a known wavelength is reflected through the sensor and produces a first refractive index from the first cavity portion offset by a second refractive index from the second cavity portion. The difference in refractive indices can be used to determine various physical parameters. An optical sensor according to the present technology may be used with vapor sensing, pressure sensing, protein detection, photo-acoustic imaging, and the like.

Abstract translation: 自参考复合法布里 - 珀罗腔传感器，包括使用和制造方法。 空腔传感器包括限定与第二空腔部分并置的第一空腔部分的基板。 第一和第二空腔部分具有预定的深度偏移。 聚合物或其它介电材料设置在第一和第二空腔部分内。 由已知波长的光源产生的干涉光谱通过传感器反射，并从第一空腔部分产生偏离第二空腔部分的第二折射率的第一折射率。 折射率的差异可用于确定各种物理参数。 根据本技术的光学传感器可以与蒸气感测，压力感测，蛋白质检测，光声成像等一起使用。