公开(公告)号：US20190109049A1

公开(公告)日：2019-04-11

申请号：US16180172

申请日：2018-11-05

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Deepak C. Sekar ,  Brian Cronquist

IPC: H01L21/822 ,  H01L21/8238 ,  H01L25/065 ,  H01L21/84 ,  H01L23/36 ,  H01L23/525 ,  H01L23/544 ,  H01L21/762 ,  H01L25/18 ,  H01L27/02 ,  H01L27/06 ,  H01L27/092 ,  H01L27/105 ,  H01L27/108 ,  H01L27/11 ,  H01L27/112 ,  H01L27/118 ,  H03K17/687 ,  H03K19/0948 ,  H03K19/177 ,  G11C16/04 ,  G11C17/06 ,  G11C29/00 ,  H01L29/78 ,  H01L29/786 ,  H01L21/683 ,  G11C17/14 ,  H01L23/00 ,  H01L23/48

Abstract: A 3D semiconductor device including: a first level comprising first single crystal transistors, a first metal layer, and a plurality of latches; a second level comprising a plurality of second transistors, wherein said second level comprises first memory cells, and wherein said first memory cells each comprise at least one of said plurality of second transistors; a third level comprising a plurality of third transistors, wherein said third level comprises second memory cells, wherein said second memory cells each comprise at least one of said plurality of third transistors, wherein said second level overlays said first level, and wherein said third level overlays said second level; a second metal layer overlaying said third level, said second metal layer comprising a plurality of bit-lines, wherein said plurality of second transistors are aligned to said first single crystal transistors with less than 100 nm alignment error, wherein said plurality of second transistors are junction-less transistors, and wherein each of said plurality of bit lines is connected to at least one of said plurality of latches.

公开(公告)号：US20190074222A1

公开(公告)日：2019-03-07

申请号：US16179914

申请日：2018-11-03

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Deepak C. Sekar ,  Brian Cronquist

IPC: H01L21/822 ,  H03K19/177 ,  H03K19/0948 ,  H03K17/687 ,  H01L29/786 ,  H01L29/78 ,  H01L27/118 ,  H01L27/112 ,  H01L27/11 ,  H01L27/108 ,  H01L27/105 ,  H01L27/092 ,  H01L27/06 ,  H01L27/02 ,  H01L25/18 ,  H01L25/065 ,  H01L23/544 ,  H01L23/525 ,  H01L23/36 ,  H01L21/84 ,  H01L21/8238 ,  H01L21/762 ,  H01L21/683 ,  G11C29/00 ,  G11C17/14 ,  G11C17/06 ,  G11C16/04 ,  H01L23/48 ,  H01L23/00

Abstract: A 3D semiconductor device including: a first level including first single crystal transistors and a first metal layer; a second level including a plurality of second transistors; where the second level includes memory cells including the plurality of second transistors; a third level including a plurality of third transistors, where the second level overlays the first level, and where the third level overlays the second level; a second metal layer overlaying the third level; and vertically oriented conductive plugs, the vertically oriented conductive plugs connect from the second transistors to the first metal layer, where the second transistors are aligned to the first transistors with less than 100 nm alignment error, where the second transistors are junction-less transistors, and where one end of at least one of the vertically oriented conductive plugs functions also as a contact to a portion of each of the plurality of second transistors.

公开(公告)号：US20180350688A1

公开(公告)日：2018-12-06

申请号：US16101351

申请日：2018-08-10

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Deepak C. Sekar ,  Brian Cronquist

IPC: H01L21/822 ,  H03K19/177 ,  H03K19/0948 ,  H03K17/687 ,  H01L29/786 ,  H01L29/78 ,  H01L27/118 ,  H01L27/112 ,  H01L27/11 ,  H01L27/108 ,  H01L27/105 ,  H01L27/092 ,  H01L27/06 ,  H01L27/02 ,  H01L25/18 ,  H01L25/065 ,  H01L23/544 ,  H01L23/525 ,  H01L23/36 ,  H01L21/84 ,  H01L21/8238 ,  H01L21/762 ,  H01L21/683 ,  G11C29/00 ,  G11C17/14 ,  G11C17/06 ,  G11C16/04 ,  H01L23/48 ,  H01L23/00

CPC classification number: H01L21/8221 ,  G11C5/025 ,  G11C5/063 ,  G11C16/0483 ,  G11C29/82 ,  H01L21/6835 ,  H01L21/76254 ,  H01L21/8238 ,  H01L21/84 ,  H01L21/845 ,  H01L23/481 ,  H01L23/5252 ,  H01L23/544 ,  H01L24/16 ,  H01L24/32 ,  H01L24/48 ,  H01L25/0655 ,  H01L25/0657 ,  H01L25/18 ,  H01L27/0688 ,  H01L27/0694 ,  H01L27/092 ,  H01L27/1157 ,  H01L27/11578 ,  H01L27/2436 ,  H01L27/249 ,  H01L29/785 ,  H01L29/78696 ,  H01L45/04 ,  H01L45/1226 ,  H01L45/146 ,  H01L2223/5442 ,  H01L2223/54426 ,  H01L2223/54453 ,  H01L2224/16145 ,  H01L2224/16225 ,  H01L2224/32145 ,  H01L2224/32225 ,  H01L2224/45015 ,  H01L2224/45099 ,  H01L2224/48091 ,  H01L2224/48227 ,  H01L2224/73204 ,  H01L2224/73265 ,  H01L2225/06513 ,  H01L2225/06517 ,  H01L2225/06527 ,  H01L2225/06541 ,  H01L2225/06589 ,  H01L2924/00 ,  H01L2924/00012 ,  H01L2924/00014 ,  H01L2924/01019 ,  H01L2924/01066 ,  H01L2924/01322 ,  H01L2924/10253 ,  H01L2924/12032 ,  H01L2924/12042 ,  H01L2924/1305 ,  H01L2924/13062 ,  H01L2924/13091 ,  H01L2924/14 ,  H01L2924/1433 ,  H01L2924/1436 ,  H01L2924/1437 ,  H01L2924/1461 ,  H01L2924/15311 ,  H01L2924/181 ,  H01L2924/19107 ,  H01L2924/207 ,  H01L2924/3011 ,  H01L2924/3025 ,  H03K19/0948 ,  H03K19/17704 ,  H03K19/17756 ,  H03K19/17764 ,  H03K19/17796

Abstract: A 3D semiconductor device, the device including: a first single crystal layer including a plurality of first transistors and at least one metal layer, where the at least one metal layer interconnecting the first transistors; a plurality of logic gates including the at least one metal layer interconnecting the first transistors; a plurality of second transistors overlaying the at least one metal layer; a plurality of third transistors overlaying the second transistors; a top metal layer overlaying the third transistors; and a memory array including wordlines, where the memory array includes at least four rows by four columns of memory mini arrays, where each of the mini arrays includes at least four rows by four columns of memory cells, and where each of the memory cells includes at least one of the second transistors or at least one of the third transistors.

公开(公告)号：US20180350686A1

公开(公告)日：2018-12-06

申请号：US16043133

申请日：2018-07-23

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Deepak C. Sekar ,  Brian Cronquist ,  Zeev Wurman

IPC: H01L21/822 ,  H03K19/177 ,  H03K19/0948 ,  H03K17/687 ,  H01L29/786 ,  H01L29/78 ,  H01L27/118 ,  H01L27/112 ,  H01L27/11 ,  H01L27/108 ,  H01L27/105 ,  H01L27/092 ,  H01L27/06 ,  H01L27/02 ,  H01L25/18 ,  H01L25/065 ,  H01L23/544 ,  H01L23/525 ,  H01L23/36 ,  H01L21/84 ,  H01L21/8238 ,  H01L21/762 ,  H01L21/683 ,  G11C29/00 ,  G11C17/14 ,  G11C17/06 ,  G11C16/04 ,  H01L23/48 ,  H01L23/00

CPC classification number: H01L21/8221 ,  G11C5/025 ,  G11C5/063 ,  G11C16/0483 ,  G11C29/82 ,  H01L21/6835 ,  H01L21/76254 ,  H01L21/8238 ,  H01L21/84 ,  H01L21/845 ,  H01L23/481 ,  H01L23/5252 ,  H01L23/544 ,  H01L24/16 ,  H01L24/32 ,  H01L24/48 ,  H01L25/0655 ,  H01L25/0657 ,  H01L25/18 ,  H01L27/0688 ,  H01L27/0694 ,  H01L27/092 ,  H01L27/1157 ,  H01L27/11578 ,  H01L27/2436 ,  H01L27/249 ,  H01L29/785 ,  H01L29/78696 ,  H01L45/04 ,  H01L45/1226 ,  H01L45/146 ,  H01L2223/5442 ,  H01L2223/54426 ,  H01L2223/54453 ,  H01L2224/16145 ,  H01L2224/16225 ,  H01L2224/32145 ,  H01L2224/32225 ,  H01L2224/45015 ,  H01L2224/45099 ,  H01L2224/48091 ,  H01L2224/48227 ,  H01L2224/73204 ,  H01L2224/73265 ,  H01L2225/06513 ,  H01L2225/06517 ,  H01L2225/06527 ,  H01L2225/06541 ,  H01L2225/06589 ,  H01L2924/00 ,  H01L2924/00012 ,  H01L2924/00014 ,  H01L2924/01019 ,  H01L2924/01066 ,  H01L2924/01322 ,  H01L2924/10253 ,  H01L2924/12032 ,  H01L2924/12042 ,  H01L2924/1305 ,  H01L2924/13062 ,  H01L2924/13091 ,  H01L2924/14 ,  H01L2924/1433 ,  H01L2924/1436 ,  H01L2924/1437 ,  H01L2924/1461 ,  H01L2924/15311 ,  H01L2924/181 ,  H01L2924/19107 ,  H01L2924/207 ,  H01L2924/3011 ,  H01L2924/3025 ,  H03K19/0948 ,  H03K19/17704 ,  H03K19/17756 ,  H03K19/17764 ,  H03K19/17796

Abstract: A 3D semiconductor device, the device including: a substrate including a single crystal layer; a plurality of first transistors in and on the single crystal layer; at least one metal layer, where the at least one metal layer overlays the plurality of first transistors and the at least one metal layer includes connections between the first transistors, and where a portion of the connections between the first transistors form memory peripheral circuits; a stack of at least sixteen layers, where the stack of sixteen layers includes odd numbered layers and even numbered layers of a different composition and overlays the at least one metal layer, a multilevel memory structure, where the multilevel memory structure includes the stack of at least sixteen layers, where the stack of at least sixteen layers includes at least eight layers of memory cells controlled by the memory peripheral circuits.

公开(公告)号：US20180350685A1

公开(公告)日：2018-12-06

申请号：US16041770

申请日：2018-07-21

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Deepak C. Sekar ,  Brian Cronquist

IPC: H01L21/822 ,  H03K19/177 ,  H03K19/0948 ,  H03K17/687 ,  H01L29/786 ,  H01L29/78 ,  H01L27/118 ,  H01L27/112 ,  H01L27/11 ,  H01L27/108 ,  H01L27/105 ,  H01L27/092 ,  H01L27/06 ,  H01L27/02 ,  H01L25/18 ,  H01L25/065 ,  H01L23/544 ,  H01L23/525 ,  H01L23/36 ,  H01L21/84 ,  H01L21/8238 ,  H01L21/762 ,  H01L21/683 ,  G11C29/00 ,  G11C17/14 ,  G11C17/06 ,  G11C16/04 ,  H01L23/48 ,  H01L23/00

CPC classification number: H01L21/8221 ,  G11C5/025 ,  G11C5/063 ,  G11C16/0483 ,  G11C29/82 ,  H01L21/6835 ,  H01L21/76254 ,  H01L21/8238 ,  H01L21/84 ,  H01L21/845 ,  H01L23/481 ,  H01L23/5252 ,  H01L23/544 ,  H01L24/16 ,  H01L24/32 ,  H01L24/48 ,  H01L25/0655 ,  H01L25/0657 ,  H01L25/18 ,  H01L27/0688 ,  H01L27/0694 ,  H01L27/092 ,  H01L27/1157 ,  H01L27/11578 ,  H01L27/2436 ,  H01L27/249 ,  H01L29/785 ,  H01L29/78696 ,  H01L45/04 ,  H01L45/1226 ,  H01L45/146 ,  H01L2223/5442 ,  H01L2223/54426 ,  H01L2223/54453 ,  H01L2224/16145 ,  H01L2224/16225 ,  H01L2224/32145 ,  H01L2224/32225 ,  H01L2224/45015 ,  H01L2224/45099 ,  H01L2224/48091 ,  H01L2224/48227 ,  H01L2224/73204 ,  H01L2224/73265 ,  H01L2225/06513 ,  H01L2225/06517 ,  H01L2225/06527 ,  H01L2225/06541 ,  H01L2225/06589 ,  H01L2924/00 ,  H01L2924/00012 ,  H01L2924/00014 ,  H01L2924/01019 ,  H01L2924/01066 ,  H01L2924/01322 ,  H01L2924/10253 ,  H01L2924/12032 ,  H01L2924/12042 ,  H01L2924/1305 ,  H01L2924/13062 ,  H01L2924/13091 ,  H01L2924/14 ,  H01L2924/1433 ,  H01L2924/1436 ,  H01L2924/1437 ,  H01L2924/1461 ,  H01L2924/15311 ,  H01L2924/181 ,  H01L2924/19107 ,  H01L2924/207 ,  H01L2924/3011 ,  H01L2924/3025 ,  H03K19/0948 ,  H03K19/17704 ,  H03K19/17756 ,  H03K19/17764 ,  H03K19/17796

Abstract: A 3D semiconductor, the device including: a first level including a plurality of first transistors; a first metal layer including interconnects between the plurality of first transistors, where the interconnects between the plurality of first transistors includes forming a plurality of logic gates; a plurality of second transistors overlaying the first metal layer, where at least six of the plurality of first transistors are connected in series forming at least a portion of a NAND logic structure, where the plurality of second transistors are vertically oriented transistors, and where the plurality of second transistors are at least partially directly overlaying the NAND logic structure; a memory cell; and a second metal layer overlaying the plurality of second transistors, where the second metal layer is aligned to the first metal layer with less than 40 nm misalignment, where the second transistors include a p type source and a p type drain.

公开(公告)号：US20180331073A1

公开(公告)日：2018-11-15

申请号：US16024911

申请日：2018-07-02

Applicant: Monolithic 3D Inc.

Inventor： Deepak Sekar ,  Zvi Or-Bach ,  Brian Cronquist

IPC: H01L25/065 ,  H01L23/48 ,  H01L23/367 ,  H01L27/092 ,  H01L27/088 ,  H01L21/8234 ,  H01L27/06 ,  H01L23/522

CPC classification number: H01L25/0657 ,  H01L21/8221 ,  H01L21/823475 ,  H01L23/3677 ,  H01L23/481 ,  H01L23/5225 ,  H01L27/0688 ,  H01L27/088 ,  H01L27/0886 ,  H01L27/092 ,  H01L27/0922 ,  H01L2225/06527 ,  H01L2225/06541 ,  H01L2225/06589 ,  H01L2924/00 ,  H01L2924/0002

Abstract: A 3D semiconductor device, the device comprising: a first single crystal layer comprising a plurality of first transistors; at least one metal layer interconnecting said first transistors, a portion of said first transistors forming a plurality of logic gates; a plurality of second transistors overlaying said first single crystal layer; a plurality of third transistors overlaying said plurality of second transistors; a top metal layer overlying said third transistors; first circuits underlying said first single crystal layer; second circuits overlying said top metal layer; a first set of connections underlying said at least one metal layer, wherein said first set of connections connects said first transistors to said first circuits; a second set of connections overlying said top metal layer, wherein said second set of connections connects said first transistors to said second circuits, and wherein said first set of connections comprises a through silicon via (TSV).

公开(公告)号：US10038073B1

公开(公告)日：2018-07-31

申请号：US15917629

申请日：2018-03-10

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Deepak C. Sekar ,  Brian Cronquist

IPC: H01L29/76 ,  H01L29/94 ,  H01L31/062 ,  H01L31/113 ,  H01L31/119 ,  H01L29/00 ,  H01L29/66 ,  H01L23/50 ,  H01L23/34 ,  H01L27/088 ,  H01L27/02 ,  H01L29/78 ,  H01L27/108 ,  H01L23/544 ,  H01L21/74 ,  H01L29/10 ,  H01L29/808 ,  H01L29/732 ,  H01L27/118 ,  H01L27/11578 ,  H01L27/11573 ,  H01L27/11551 ,  H01L27/11526 ,  H01L23/48 ,  H01L27/06 ,  H01L27/24

Abstract: A 3D integrated circuit device, the device including: a first level including a single crystal wafer, the first level includes a plurality of first transistors; a second level overlaying the first level, the second level includes a plurality of second transistors; a third level overlaying the second level, the third level includes a plurality of third transistors; a first metal layer interconnecting the plurality of first transistors; a second metal layer overlaying the third level, where the second level has a first coefficient of thermal expansion; and a connection path connecting at least one of the second transistors to the first metal layer, where the connection path includes at least one through-layer via, where the through-layer via includes a material, the material has a second co-efficient of thermal expansion, and where the second co-efficient of thermal expansion is within 50 percent of the first coefficient of thermal expansion.

公开(公告)号：US20180204930A1

公开(公告)日：2018-07-19

申请号：US15917629

申请日：2018-03-10

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Deepak C. Sekar ,  Brian Cronquist

IPC: H01L29/66 ,  H01L23/50 ,  H01L23/48 ,  H01L23/34 ,  H01L27/088

CPC classification number: H01L29/66704 ,  H01L21/743 ,  H01L23/34 ,  H01L23/3677 ,  H01L23/481 ,  H01L23/50 ,  H01L23/544 ,  H01L27/0207 ,  H01L27/0623 ,  H01L27/0688 ,  H01L27/088 ,  H01L27/0886 ,  H01L27/10802 ,  H01L27/10894 ,  H01L27/10897 ,  H01L27/11526 ,  H01L27/11551 ,  H01L27/11573 ,  H01L27/11578 ,  H01L27/11807 ,  H01L27/2436 ,  H01L27/249 ,  H01L29/1066 ,  H01L29/66272 ,  H01L29/66825 ,  H01L29/66901 ,  H01L29/732 ,  H01L29/7841 ,  H01L29/808 ,  H01L45/16 ,  H01L2224/16225 ,  H01L2224/73253 ,  H01L2924/00 ,  H01L2924/12032 ,  H01L2924/1305 ,  H01L2924/13062 ,  H01L2924/13091 ,  H01L2924/1461 ,  H01L2924/16152

Abstract: A 3D integrated circuit device, the device including: a first level including a single crystal wafer, the first level includes a plurality of first transistors; a second level overlaying the first level, the second level includes a plurality of second transistors; a third level overlaying the second level, the third level includes a plurality of third transistors; a first metal layer interconnecting the plurality of first transistors; a second metal layer overlaying the third level, where the second level has a first coefficient of thermal expansion; and a connection path connecting at least one of the second transistors to the first metal layer, where the connection path includes at least one through-layer via, where the through-layer via includes a material, the material has a second co-efficient of thermal expansion, and where the second co-efficient of thermal expansion is within 50 percent of the first coefficient of thermal expansion.

公开(公告)号：US20180190811A1

公开(公告)日：2018-07-05

申请号：US15862616

申请日：2018-01-04

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Deepak C. Sekar ,  Brian Cronquist

IPC: H01L29/78

CPC classification number: H01L27/06 ,  H01L21/84 ,  H01L27/10802 ,  H01L27/10897 ,  H01L27/1203 ,  H01L27/24 ,  H01L29/66787 ,  H01L29/785 ,  H01L29/78696

Abstract: A 3D semiconductor device, the device including: a first layer including first transistors each including a silicon channel; a second layer including second transistors each including a silicon channel, the second layer overlaying the first transistors, where at least one of the second transistors is at least partially self-aligned to at least one of the first transistors; and a third layer including third transistors each including a single crystal silicon channel, the third layer underlying the first transistors, where a plurality of the third transistors form a logic circuit, and where the logic circuit is aligned to the second transistors with less than 200 nm alignment error, where the first layer thickness is less than one micron, and where the first transistor is a junction-less transistor.

公开(公告)号：US20180190619A1

公开(公告)日：2018-07-05

申请号：US15904377

申请日：2018-02-25

Applicant: Monolithic 3D Inc.

Inventor： Deepak Sekar ,  Zvi Or-Bach ,  Brian Cronquist

IPC: H01L25/065 ,  H01L23/48 ,  H01L23/367 ,  H01L27/092 ,  H01L21/8234 ,  H01L27/088 ,  H01L23/522 ,  H01L27/06

CPC classification number: H01L25/0657 ,  H01L21/823475 ,  H01L23/3677 ,  H01L23/481 ,  H01L23/5225 ,  H01L27/0688 ,  H01L27/088 ,  H01L27/0886 ,  H01L27/092 ,  H01L27/0922 ,  H01L2225/06527 ,  H01L2225/06541 ,  H01L2225/06589 ,  H01L2924/00 ,  H01L2924/0002

Abstract: A 3D semiconductor device, the device including: a first single crystal layer including a plurality of first transistors; at least one metal layer interconnecting the first transistors, a portion of the first transistors forming a plurality of logic gates; a plurality of second transistors overlaying the first single crystal layer; at least one connection from the plurality of first transistors to a plurality of through silicon vias (TSVs); a plurality of third transistors overlaying the plurality of second transistors, where the plurality of second transistors are self-aligned to the plurality of third transistors having been processed following the same lithography step; and a first memory array and a second memory array, where the first memory array includes the plurality of second transistors and the second memory array includes the plurality of third transistors.