公开(公告)号：US20210193425A1

公开(公告)日：2021-06-24

申请号：US16899794

申请日：2020-06-12

Applicant: Tsinghua University ,  HON HAI PRECISION INDUSTRY CO., LTD.

Inventor： XIN-HE YANG ,  PENG LIU ,  SHOU-SHAN FAN

IPC: H01J9/02 ,  H01J3/02

Abstract: An electron emission source is provided. The electron emission source comprises a first electrode, an insulating layer, and a second electrode, The first electrode, the insulating layer, and the second electrode are successively stacked with each other. the second electrode is a graphene layer, and the graphene layer is an electron emission end to emit electron. A thickness of the graphene layer ranges from about 0.1 nanometers to about 50 nanometers.

公开(公告)号：US20210050176A1

公开(公告)日：2021-02-18

申请号：US16966908

申请日：2018-12-27

Applicant: 38th Research Institute, China Electronics Technology Group Corporation

Inventor： Xuehui WANG ,  Junting WANG ,  Xianbin HU ,  Dizhi CHEN ,  Guang TANG ,  Huarong LIU ,  Lei ZHENG ,  Qing QIAN ,  Chunning ZHENG ,  Guochao WANG

IPC: H01J37/073 ,  H01J37/065 ,  H01J3/02

Abstract: The present disclosure provides a method of manufacturing an electron source. The method includes forming one or more fixed emission sites on at least one needle tip, the fixed emission sites including a reaction product formed by metal atoms on a surface of the needle tip and gas molecules.

公开(公告)号：US10818464B2

公开(公告)日：2020-10-27

申请号：US16728783

申请日：2019-12-27

Applicant: Nuctech Company Limited ,  Tsinghua University

Inventor： Wenhui Huang ,  Qingxiu Jin ,  Cong Xu ,  Luming Zhang ,  Donghai Liu ,  Cheng Song ,  Peidong Wu ,  Qun Luo ,  Chengjun Tan ,  Shuo Wang

IPC: H01J3/02

Abstract: An external grid-controlled hot cathode array electron gun, including an insulated cathode base, a filament, a plurality of hot cathode emission elements, and a grid-controlled structure is disclosed. In one aspect, the grid-controlled structure includes an insulated grid-controlled structure body and a plurality of through holes. One side of the grid-controlled structure body abuts against the cathode base to clamp the filament between the grid-controlled structure body and the cathode base and the plurality of hot cathode emission elements are inserted into the plurality of through holes respectively.

公开(公告)号：US20190259559A1

公开(公告)日：2019-08-22

申请号：US16270440

申请日：2019-02-07

Applicant: VEECO INSTRUMENTS, INC.

Inventor： Rustam YEVTUKHOV ,  Ivan SHKURENKOV ,  Boris DRUZ ,  Alan HAYES ,  Robert HIERONYMI

IPC: H01J37/02 ,  H01J37/06 ,  H01J37/08 ,  H01J3/02

Abstract: An ion beam neutralization system, often referred to as a plasma bridge neutralizer (PBN), as part of an ion beam (etch) system. The system utilizes an improved filament thermo-electron emitter PBN design, that when utilized in a particular method of operation, greatly extends filament life and minimizes variation in neutralizer operating parameters for long periods of operation. The PBN includes a solenoidal electromagnetic that produces an axial magnetic field within the PBN and a magnetic concentrator that facilitates the alignment of the magnetic field and inhibits stray fields. The PBN can readily provide a filament lifetime of at least 500 hours.

公开(公告)号：US20190189383A1

公开(公告)日：2019-06-20

申请号：US16285475

申请日：2019-02-26

Applicant: NANOX IMAGING PLC

Inventor： KOICHI IIDA ,  HIDENORI KENMOTSU ,  JUN YAMAZAKI ,  HITOSHI MASUYA

IPC: H01J3/14 ,  H01J35/14 ,  H01J1/304 ,  H01J3/02 ,  H01J29/46 ,  G01N23/046 ,  H01J35/06 ,  H01J31/12 ,  G01T1/161

CPC classification number: H01J35/065 ,  G01N23/046 ,  G01N2223/204 ,  G01N2223/419 ,  G01T1/161 ,  H01J1/3042 ,  H01J3/021 ,  H01J3/027 ,  H01J3/14 ,  H01J29/467 ,  H01J31/127 ,  H01J35/14 ,  H01J2235/068

Abstract: Controlling total emission current of an electron emitting construct in an x-ray emitting device by providing a cathode, providing multiple active areas each active area having a gated cone electron source, including multiple emitter tips arranged in an array, a gate electrode, and a gate interconnect lead connected to the gate electrode, providing an x-ray emitting construct comprising an anode, the anode being an x-ray target, situating the x-ray emitting construct facing the active areas face each other, selecting a set of active areas, and activating selected active areas by conductively connecting a voltage source to their associated the gate electrode interconnect lead.

公开(公告)号：US10319554B2

公开(公告)日：2019-06-11

申请号：US15539384

申请日：2015-12-23

Applicant: Massachusetts Institute of Technology

Inventor： Akintunde I. Akinwande ,  Stephen Angelo Guerrera

IPC: H01J29/86 ,  H01L29/06 ,  H01L29/12 ,  G01L21/34 ,  H01J29/48 ,  H01J29/56 ,  H01J29/62 ,  H01J1/304 ,  H01J3/02

Abstract: Example compact modular electron beam units are provided that can be used to generate electron beams using field emitter elements. A modular electron beam unit may comprise an electron beam source including a base portion, at least one field emitter element coupled to the base portion, the field emitter element including a field emitter tip, at least one gate electrode and a membrane window disposed over the at least one gate electrode.

公开(公告)号：US20190080878A1

公开(公告)日：2019-03-14

申请号：US16123297

申请日：2018-09-06

Applicant: JEOL Ltd.

Inventor： Akihiro Ikeda ,  Norikazu Arima

IPC: H01J37/063 ,  G02B5/08 ,  H01J3/02

Abstract: An electron gun includes an emitter, an electron gun electrode, and a short-circuiting mechanism for setting the emitter and the electron gun electrode at the same potential. The short-circuiting mechanism includes a first switch member provided with a first switch electrode that is connected to the emitter and a second switch electrode that is connected to the electron gun electrode, a second switch member provided with a third switch electrode, and a drive unit that operates at least one of the first switch member and the second switch member to switch between a state in which the first switch electrode and the second switch electrode are in contact with the third switch electrode and a state in which the first switch electrode and the second switch electrode are separated from the third switch electrode. The short-circuiting mechanism has the same potential as a predetermined voltage.

公开(公告)号：US20180269024A1

公开(公告)日：2018-09-20

申请号：US15983967

申请日：2018-05-18

Applicant: Colorado State University Research Foundation

Inventor： Bao Gia Nguyen ,  John D. Williams ,  Desiree D. Williams ,  Casey C. Farnell ,  Ryan Kenneth Ham ,  Kathryn Elizabeth Greiner

IPC: H01J29/48 ,  H01J3/02 ,  H01J9/04 ,  H01J37/02

Abstract: A filament assembly can include: a button having a planar emitter region with one or more apertures extending from an emission surface of the planar emitter region to an internal surface opposite of the emission surface; an inlet electrical lead coupled to the button at a first side; an outlet electrical lead coupled to the button at a second side opposite of the first side; and a low work function object positioned adjacent to the internal surface of the planar emitter region and retained to the button. The planar emitter region can include a plurality of apertures. The low work function object can include a porous ceramic material having the barium, and may have a polished external surface. An electron gun can include the filament assembly. An additive manufacturing system can include the electron gun having the filament assembly.

公开(公告)号：US20180019088A1

公开(公告)日：2018-01-18

申请号：US15544854

申请日：2016-01-18

Applicant: SIEMENS AKTIENGESELLSCHAFT

Inventor： Andreas Geisler ,  Svetlana Goßmann ,  Oliver Heid

IPC: H01J1/304 ,  H01J35/10 ,  H01J35/06 ,  H01J31/08 ,  H01J9/02 ,  H01J35/14 ,  H01J3/02

CPC classification number: H01J1/304 ,  H01J3/021 ,  H01J9/025 ,  H01J31/08 ,  H01J35/065 ,  H01J35/10 ,  H01J35/14

Abstract: An apparatus is provided for generating X-ray radiation in an outer magnetic field, which may be generated by a magnetic field device. The apparatus includes a cathode configured to generate an electron beam and an anode configured to retard the electrons of the electron beam and generate an X-ray beam. The apparatus further includes a device configured to generate an electric field orientated from the anode in the direction of the cathode and substantially collinear to the outer magnetic field, wherein the cathode, as an electron emitter, includes a cold cathode that passively provides free electrons by field emission.

公开(公告)号：US09666400B2

公开(公告)日：2017-05-30

申请号：US13718587

申请日：2012-12-18

Applicant: Tsinghua University ,  HON HAI PRECISION INDUSTRY CO., LTD.

Inventor： Cai-Lin Guo ,  Jie Tang ,  Peng Liu ,  Shou-Shan Fan

IPC: H01J1/304 ,  H01J3/02 ,  B82Y99/00 ,  B82Y30/00

CPC classification number: H01J1/3042 ,  B82Y30/00 ,  B82Y99/00 ,  H01J1/304 ,  H01J3/021 ,  H01J2201/30469 ,  H01J2203/0212 ,  H01J2329/0455 ,  H01J2329/4608

Abstract: A field emission electron source includes a linear carbon nanotube structure, an insulating layer and at least one conductive ring. The linear carbon nanotube structure has a first end and a second end. The insulating layer is located on outer surface of the linear carbon nanotube structure. The first conductive ring includes a first ring face 1301 and a second ring face, an end surface of the linear carbon nanotube structure, and the first ring face are coplanar.