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    Interference tabs for avoiding snapdown of optical membrane and fabrication process
    41.
    发明申请
    Interference tabs for avoiding snapdown of optical membrane and fabrication process 有权
    用于避免光学膜的拆卸和制造过程的干涉片

    公开(公告)号：US20020072015A1

    公开(公告)日：2002-06-13

    申请号：US10016797

    申请日：2001-12-10

    Applicant: AXSUN Technologies, Inc.

    Inventor： Michael F. Miller ,  Dale C. Flanders

    IPC: G03C005/00 ,  G02B026/08 ,  G02B005/08 ,  B29D011/00

    CPC classification number: B81B3/001 ,  G02B26/001 ,  G02B26/02

    Abstract: Tabs or stops are integrated into a membrane structure to prevent its snapdown. Features comprising two surfaces separated by a distance equal to the maximum desired range of movement are produced. When the two surfaces contact, the motion of the structure is arrested or greatly diminished by increasing its rigidity. For an electrostatically actuated MEMS structure, these features can be used to limit the range of motion such that pull-in or snapdown is avoided, greatly enhancing the reliability of the device. One key design feature is that the two contacting surfaces are maintained at the same electrical potential avoiding problems associated with electrostatic cavity discharge.

    Abstract translation: 标签或止动件集成到膜结构中以防止其卡扣。 产生包括两个表面分开等于最大期望运动范围的距离的特征。 当两个表面接触时，结构的运动通过增加其刚度而被阻止或大大减小。 对于静电驱动的MEMS结构，这些特征可用于限制运动范围，从而避免拉入或跳跃，大大提高了设备​​的可靠性。 一个关键设计特征是两个接触表面保持在相同的电位，避免与静电腔排放相关的问题。

    ASE swept source with self-tracking filter for OCT medical imaging
    47.
    发明授权
    ASE swept source with self-tracking filter for OCT medical imaging 有权
    ASE扫描源用于OCT医疗成像的自我跟踪滤波器

    公开(公告)号：US09041936B2

    公开(公告)日：2015-05-26

    申请号：US13960027

    申请日：2013-08-06

    Applicant: Axsun Technologies, Inc.

    Inventor： Dale C. Flanders ,  Walid A. Atia ,  Mark E. Kuznetsov

    IPC: G01B11/02 ,  F21V9/00 ,  H01S5/50 ,  G01B9/02 ,  H01S5/00 ,  H01S5/022

    CPC classification number: F21V9/00 ,  G01B9/02004 ,  G01B9/02091 ,  H01S5/005 ,  H01S5/0064 ,  H01S5/0078 ,  H01S5/02216 ,  H01S5/02248 ,  H01S5/02284 ,  H01S5/5018 ,  H01S5/5036 ,  H01S5/5063 ,  H01S2301/02

    Abstract: An integrated swept wavelength tunable optical source uses a narrowband filtered broadband signal with an optical amplifier and self-tracking filter. This source comprises a micro optical bench, a source for generating broadband light, a tunable Fabry Perot filter, installed on the bench, for spectrally filtering the broadband light from the broadband source to generate a narrowband tunable signal, an amplifier, installed on the bench, for amplifying the tunable signal. The self-tracking arrangement is used where a single tunable filter both generates the narrowband signal and spectrally filters the amplified signal. In some examples, two-stage amplification is provided. The use of a single bench implementation yields a low cost high performance system. For example, polarization control between components is no longer necessary.

    Abstract translation: 集成扫描波长可调光源使用窄带滤波宽带信号与光放大器和自跟踪滤波器。 该源包括安装在工作台上的用于产生宽带光源的微型光学平台，可调谐法布里珀罗滤波器，用于对来自宽带源的宽带光进行频谱滤波以产生窄带可调信号，安装在台架上的放大器 ，用于放大可调信号。 自我跟踪装置用于单个可调谐滤波器都产生窄带信号并且对放大的信号进行频谱滤波。 在一些实例中，提供了两级放大。 使用单台实现产生低成本的高性能系统。 例如，不再需要组件之间的极化控制。

    Dielectric-Enhanced Metal Coatings for MEMS Tunable Filters
    48.
    发明申请
    Dielectric-Enhanced Metal Coatings for MEMS Tunable Filters 审中-公开
    用于MEMS可调谐滤波器的介质增强金属涂层

    公开(公告)号：US20150043002A1

    公开(公告)日：2015-02-12

    申请号：US13964169

    申请日：2013-08-12

    Applicant: Axsun Technologies, Inc.

    Inventor： Mark E. Kuznetsov ,  Ranko Galeb

    IPC: G02B5/28 ,  H01S5/06 ,  G01J3/28 ,  G01B9/02

    CPC classification number: G02B5/28 ,  G01J3/26 ,  G02B26/001 ,  H01S3/08059 ,  H01S3/105 ,  H01S5/0222 ,  H01S5/02248 ,  H01S5/02284 ,  H01S5/141

    Abstract: The present invention concerns the use of hybrid metal-dielectric optical coatings as the end reflectors of laser cavities and/or in the mirror structures used in other optical resonators, such as Fabry-Perot tunable filters, along with the use of such Fabry-Perot tunable filters in wavelength swept sources such as lasers. Hybrid metal-dielectric optical coatings have reflectivity spectra that can be broader than pure dielectric coatings, offer optical reflectivities higher than metal, as high as pure dielectric coatings, eliminate mirror transmission that can cause parasitic light reflections, and use fewer layers and thus have lower mass and higher mechanical resonant frequency for movable mirror applications An important characteristic of these coatings concerns the non-reflected light. Pure dielectric coatings offer high reflectivity, while the non-reflected portion of the light is transmitted by the coating to the substrate, for example. When metal is added to the optical coating, the non-reflected portion of the light is absorbed by the metal and is not transmitted to the substrate or outside the cavity. Hybrid metal-dielectric coatings have broader and more uniform spectral reflection. Tunable lasers with performance enhanced by the hybrid metal-dielectric coatings can be used in optical coherence tomography and spectroscopic analysis applications.

    Abstract translation: 本发明涉及使用混合金属 - 电介质光学涂层作为激光腔的端部反射器和/或用于其它光学谐振器的反射镜结构，例如法布里 - 珀罗可调谐滤光器，以及使用这种法布里 - 珀罗 波长扫描源（例如激光器）中的可调滤波器。 混合金属 - 介电光学涂层具有比纯电介质涂层更宽的反射光谱，提供高于金属的光学反射率，与纯电介质涂层一样高，消除可能引起寄生光反射的镜面透射，并且使用较少的层，因此具有较低的 可移动镜应用的质量和更高的机械共振频率这些涂层的一个重要特征涉及非反射光。 例如，纯电介质涂层提供高反射率，而光的未反射部分由涂层传播到基底。 当金属被添加到光学涂层中时，光的未反射部分被金属吸收，并且不被透射到基底或腔外。 混合金属 - 电介质涂层具有更广泛和更均匀的光谱反射。 通过混合金属 - 电介质涂层提高性能的可调谐激光器可用于光学相干断层扫描和光谱分析应用。

    Silicon optical bench OCT probe for medical imaging
    49.
    发明授权
    Silicon optical bench OCT probe for medical imaging 有权
    硅光学台用于医学成像的OCT探针

    公开(公告)号：US08781287B2

    公开(公告)日：2014-07-15

    申请号：US13946214

    申请日：2013-07-19

    Applicant: Axsun Technologies, Inc.

    Inventor： Dale C. Flanders ,  James W. Getz ,  Walid A. Atia ,  Peter S. Whitney ,  Mark E. Kuznetsov

    IPC: G02B6/36

    CPC classification number: G01Q60/22 ,  A61B5/0066 ,  A61B5/0084 ,  A61B5/02007 ,  A61B2562/12 ,  G02B23/2469

    Abstract: An optical probe for emitting and/or receiving light within a body comprises an optical fiber that transmits and/or receives an optical signal, a silicon optical bench including a fiber groove running longitudinally that holds an optical fiber termination of the optical fiber and a reflecting surface that optically couples an endface of the optical fiber termination to a lateral side of the optical bench. The fiber groove is fabricated using silicon anisotropic etching techniques. Some examples use a housing around the optical bench that is fabricated using LIGA or other electroforming technology. A method for forming lens structure is also described that comprises forming a refractive lens in a first layer of a composite wafer material, such as SOI (silicon on insulator) wafers and forming an optical port through a backside of the composite wafer material along an optical axis of the refractive lens. The refractive lens is preferably formed using grey-scale lithography and dry etching the first layer.

    Abstract translation: 用于在体内发射和/或接收光的光学探针包括透射和/或接收光信号的光纤，包括纵向延伸的光纤槽的硅光学台，其保持光纤的光纤终端和反射 表面，其将光纤端接件的端面光学耦合到光学平台的侧面。 使用硅各向异性蚀刻技术制造纤维槽。 一些例子使用使用LIGA或其他电铸技术制造的光学平台周围的外壳。 还描述了一种用于形成透镜结构的方法，其包括在诸如SOI（绝缘体上硅）晶片的复合晶片材料的第一层中形成折射透镜，并沿着光学器件通过复合晶片材料的背面形成光学端口 折射透镜的轴线。 折射透镜优选使用灰度光刻形成并且对第一层进行干蚀刻。

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