公开(公告)号：US20080237465A1

公开(公告)日：2008-10-02

申请号：US12073948

申请日：2008-03-12

Applicant: Michio Hatano ,  Takashi Ohshima ,  Mitsugu Sato

Inventor： Michio Hatano ,  Takashi Ohshima ,  Mitsugu Sato

IPC: G01N23/02

CPC classification number: G01N23/225 ,  H01J37/244 ,  H01J2237/2446 ,  H01J2237/24485 ,  H01J2237/28

Abstract: A scanning electron microscope can discriminate secondary particles in a desired energy region by band-pass and detect the secondary particles with a high yield point. Even when a lens 23 is disposed on an electron source side of an objective lens 18, and a primary electron beam forms any optical system on the electron gun side of the lens, the lens operates the primary electron beam to be converged to a convergent point 24 that is a specific position. A detection ExB 16 that supplies a field that affects the locus of the secondary particles that are generated from a specimen 2 is disposed at the convergent point 24 of the primary electron beam so as to lead only the secondary particles in a specific energy range to a detection unit 13. Because a position to which the field that affects the locus of the secondary particles is supplied is the convergent point of the primary electron beam 19, it is possible to lead only the secondary particles of the desired energy to the detection unit without enlarging the aberration of the primary electron beam 19 and also to effectively conduct the band-pass discrimination of the energy. As a result, the signal electrons according to an observation object can be discriminated and detected.

Abstract translation: 扫描电子显微镜可以通过带通来区分所需能量区域中的二次粒子，并以高屈服点检测二次粒子。 即使当透镜23设置在物镜18的电子源侧，并且一次电子束在透镜的电子枪侧形成任何光学系统时，该透镜操作一次电子束以收敛到会聚点 24这是一个具体的位置。 提供影响从样本2产生的二次粒子的轨迹的场的检测ExB 16设置在一次电子束的会聚点24处，以便仅将二次粒子在特定能量范围内引导到 检测单元13。 由于施加影响次级粒子的轨迹的场的位置是一次电子束19的会聚点，所以只能将所需能量的二次粒子引导到检测单元，而不会增大像差 一次电子束19并且还有效地进行能量的带通辨别。 结果，可以区分和检测根据观察对象的信号电子。

公开(公告)号：US5811819A

公开(公告)日：1998-09-22

申请号：US568865

申请日：1995-12-05

Applicant: Takashi Ohshima ,  Hiroyuki Shinada ,  Katsuhiro Kuroda

Inventor： Takashi Ohshima ,  Hiroyuki Shinada ,  Katsuhiro Kuroda

IPC: H01J1/304 ,  H01J1/308 ,  H01J9/02 ,  H01J37/073 ,  H01J37/06

CPC classification number: H01J9/025 ,  H01J1/3042 ,  H01J1/308 ,  H01J37/073 ,  H01J2201/30426

Abstract: An electron beam source is provided with an electron forming means such as a doped layer of Si for forming conduction band electrons near the surface of the pointed tip of a needle-shaped structure while suppressing emission of electrons from a valence band. The surface of the pointed tip of the needle-shaped structure is formed with a single-crystal semiconductor or insulator. Preferably a surface passivation layer and/or a highly doped layer is formed on the surface of the needle-shaped structure. Also, means for exciting electrons in a valence band may be provided. An electron beam source apparatus and electron beam apparatus incorporating the electron beam source as defined above are also disclosed.

Abstract translation: 电子束源设置有诸如Si的掺杂层的电子形成装置，用于在抑制从价带发射电子的同时在针状结构的尖端的表面附近形成导带电子。 针状结构的尖端的表面由单晶半导体或绝缘体形成。 优选地，在针状结构的表面上形成表面钝化层和/或高掺杂层。 此外，也可以提供用于激发在价带中的电子的装置。 还公开了包含如上所述的电子束源的电子束源装置和电子束装置。

公开(公告)号：US5241197A

公开(公告)日：1993-08-31

申请号：US759772

申请日：1991-09-13

Applicant: Eiichi Murakami ,  Kiyokazu Nakagawa ,  Takashi Ohshima ,  Hiroyuki Eto ,  Masanobu Miyao

Inventor： Eiichi Murakami ,  Kiyokazu Nakagawa ,  Takashi Ohshima ,  Hiroyuki Eto ,  Masanobu Miyao

IPC: H01L27/085 ,  H01L29/165 ,  H01L29/737 ,  H01L29/778 ,  H01L29/80

CPC classification number: H01L29/7378 ,  H01L27/085 ,  H01L29/165 ,  H01L29/7373 ,  H01L29/7782 ,  H01L29/802

Abstract: A transistor having a high carrier mobility and suited for a high-speed operation can be formed by utilizing a fact that the carrier mobility in a strained germanium layer is large. A strain control layer is provided beneath the germanium layer to impose a compressive strain on the germanium layer, and the composition of the strain control layer in a predetermined range is used to generate the compressive strain surely.

Abstract translation: 可以通过利用应变锗层中的载流子迁移率大的事实来形成具有高载流子迁移率且适于高速操作的晶体管。 在锗层下方设置应变控制层，以在锗层上施加压缩应变，并且使用预定范围内的应变控制层的组成以确定地产生压缩应变。

公开(公告)号：US4621419A

公开(公告)日：1986-11-11

申请号：US687283

申请日：1984-12-28

Applicant: Toshikatsu Hino ,  Fumio Arase ,  Takashi Ohshima

Inventor： Toshikatsu Hino ,  Fumio Arase ,  Takashi Ohshima

IPC: B23P21/00 ,  H05K13/00 ,  H05K13/04 ,  H05K13/08 ,  H05K3/30 ,  B23P23/00

CPC classification number: H05K13/0404 ,  H05K13/08 ,  Y10T29/5137 ,  Y10T29/53183

Abstract: An automatic IC mounting process for mounting a plurality of ICs on an upper surface of a printed circuit board in accordance with a predetermined sequence program. Each of the ICs has a plurality of leads, each of which is to be inserted into a predetermined corresponding through-hole of the printed circuit board. The process includes: (i) a step for inserting the leads of an IC into the through-holes of the printed circuit board; (ii) a step for detecting whether or not each lead of the IC is correctly inserted into the corresponding through-hole after every step (i); (iii) a step for removing a misinserted IC having a misinserted lead from the printed circuit board and discarding the misinserted IC into a predetermined reject place immediately after a misinsertion is detected in the step (ii); (iv) a step for memorizing the information for identifying the misinserted IC; (v) a step for mounting a predetermined number of subsequent ICs on the printed circuit board in accordance with the predetermined sequence program, leaving the position of the misinserted IC unmounted; (vi) a step for searching for whether or not the information was memorized in the step (iv); and, (vii) a step for preparing a new IC identified by that information and remounting it on the printed circuit board at the position of the misinserted IC.

Abstract translation: 一种用于根据预定顺序程序将多个IC安装在印刷电路板的上表面上的自动IC安装过程。 每个IC具有多个引线，每个引线被插入到印刷电路板的预定对应的通孔中。 该方法包括：（i）将IC的引线插入印刷电路板的通孔中的步骤; （ii）在每个步骤（i）之后检测IC的每个引线是否被正确地插入到相应的通孔中的步骤; （iii）在步骤（ii）中检测到错误插入之后，立即将从印刷电路板移除具有错误插入的引线的错误插入的IC并将错误插入的IC丢弃到预定的拒绝位置的步骤; （iv）记录识别错误插入的IC的信息的步骤; （v）根据预定的顺序程序将预定数量的后续IC安装在印刷电路板上的步骤，使错误插入的IC的位置不被安装; （vi）在步骤（iv）中搜索该信息是否被记住的步骤; 和（vii）准备由该信息确定的新的IC并将其重新安装在印刷电路板上的错误插入IC位置的步骤。

公开(公告)号：US09202667B2

公开(公告)日：2015-12-01

申请号：US13521092

申请日：2010-08-11

Applicant: Michio Hatano ,  Tetsuya Sawahata ,  Yasuko Watanabe ,  Mitsugu Sato ,  Sukehiro Ito ,  Takashi Ohshima ,  Hiroyuki Honda

Inventor： Michio Hatano ,  Tetsuya Sawahata ,  Yasuko Watanabe ,  Mitsugu Sato ,  Sukehiro Ito ,  Takashi Ohshima ,  Hiroyuki Honda

IPC: H01J37/28 ,  H01J37/244

CPC classification number: H01J37/244 ,  H01J37/28 ,  H01J2237/2448

Abstract: Disclosed is a charged particle radiation device having a charged particle source which generates a charged particle as a probe, a charged particle optical system, a sample stage, a vacuum discharge system, an aperture which restricts a probe, a conductive film, and a charged particle detector, wherein the conductive film is provided at a position excluding the optical axis of the optical system between the sample stage and the aperture; and the distance between the sensing surface of the surface of the charged particle detector and the sample stage is larger than the distance between the sample stage and the conductive film, so that the surface of the conductive film and the sensing surface of the detector are inclined.

Abstract translation: 公开了一种具有带电粒子源的带电粒子辐射装置，其产生作为探针的带电粒子，带电粒子光学系统，样品台，真空放电系统，限制探针的孔，导电膜和带电粒子 粒子检测器，其中所述导电膜设置在除了所述样品台和所述孔之间的所述光学系统的光轴之外的位置处; 并且带电粒子检测器的表面的感测表面与样品台之间的距离大于样品台和导电膜之间的距离，使得导电膜的表面和检测器的感测表面倾斜 。

公开(公告)号：US08714585B2

公开(公告)日：2014-05-06

申请号：US13579792

申请日：2011-02-02

Applicant: Masakazu Okamoto ,  Akifumi Hanawa ,  Takashi Ohshima

Inventor： Masakazu Okamoto ,  Akifumi Hanawa ,  Takashi Ohshima

IPC: B60R21/231

CPC classification number: B60R21/2171 ,  B60R21/2346 ,  B60R21/237 ,  B60R2021/23169

Abstract: An airbag in which no choking occurs and which can be rapidly deployed. A cushion section of the airbag internally accommodates a cylinder-type inflator that includes an insertion hole for inserting the inflator from an outside to an inside, and a diffuser into which the inflator is inserted, and a diffuser having a tubular portion obtained by folding back a section of cloth to form symmetrical portions with an upper base formed by the folded back part and a lower base formed by adjacent ends of the symmetrical portions. The cushion section is folded back at both lateral sides of the along first folding lines that are substantially orthogonal to a longitudinal direction of the diffuser.

Abstract translation: 安全气囊，其中不发生窒息并且可以快速部署。 气囊的缓冲部内部容纳有气缸式充气机，其包括用于将充气器从外部插入到内部的插入孔和充气器插入到其中的扩散器，以及具有通过折回获得的管状部分的扩散器 形成对称部分的布的一部分与由折叠部分形成的上基部和由对称部分的相邻端形成的下基部。 缓冲部分沿着与扩散器的纵向方向基本正交的第一折叠线的两侧的侧面折回。

公开(公告)号：US08530865B2

公开(公告)日：2013-09-10

申请号：US13355104

申请日：2012-01-20

Applicant: Hiroyasu Shichi ,  Shinichi Matsubara ,  Takashi Ohshima ,  Satoshi Tomimatsu ,  Tomihiro Hashizume ,  Tohru Ishitani

Inventor： Hiroyasu Shichi ,  Shinichi Matsubara ,  Takashi Ohshima ,  Satoshi Tomimatsu ,  Tomihiro Hashizume ,  Tohru Ishitani

IPC: H01J49/26 ,  H01J49/00 ,  H01J37/08

CPC classification number: H01J27/26 ,  H01J37/08 ,  H01J2237/0805 ,  H01J2237/0807 ,  H01J2237/182

Abstract: A gas field ion source that can simultaneously increase a conductance during rough vacuuming and reduce an extraction electrode aperture diameter from the viewpoint of the increase of ion current. The gas field ion source has a mechanism to change a conductance in vacuuming a gas molecule ionization chamber. That is, the conductance in vacuuming a gas molecule ionization chamber is changed in accordance with whether or not an ion beam is extracted from the gas molecule ionization chamber. By forming lids as parts of the members constituting the mechanism to change the conductance with a bimetal alloy, the conductance can be changed in accordance with the temperature of the gas molecule ionization chamber, for example the conductance is changed to a relatively small conductance at a relatively low temperature and to a relatively large conductance at a relatively high temperature.

公开(公告)号：US20130146766A1

公开(公告)日：2013-06-13

申请号：US13817086

申请日：2011-07-07

Applicant: Takashi Ohshima ,  Michio Hatano ,  Hideo Morishita

Inventor： Takashi Ohshima ,  Michio Hatano ,  Hideo Morishita

IPC: H01J37/26

CPC classification number: H01J37/261 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/153 ,  H01J2237/202 ,  H01J2237/20207 ,  H01J2237/20221

Abstract: The present invention provides an electron beam apparatus comprising a means for visualizing an axial displacement of a retarding electric field, and a means for adjusting axial displacement. The axial displacement visualizing means includes a reflective plate (6), and an optical system (2,3) for converging a secondary electron beam (9) on the reflective plate (6), and the axial displacement adjusting means includes an incline rotation mechanism (8) for a sample stage (5). With this configuration, in electron beam apparatuses such as SEM and the like, such problems as visual field displacement caused by displacement of the axial symmetry of the electric field between an objective lens (3) and a sample (4) and inability to measure secondary electrons and reflected electrons that provide desired information can be eliminated.

Abstract translation: 本发明提供了一种电子束装置，包括用于使延迟电场的轴向位移可视化的装置和用于调节轴向位移的装置。 轴向位移可视化装置包括反射板（6）和用于会聚反射板（6）上的二次电子束（9）的光学系统（2,3），并且轴向位移调节装置包括倾斜旋转机构 （8）用于样品台（5）。 利用这种结构，在诸如SEM等的电子束装置中，存在由物镜（3）和样品（4）之间的电场的轴对称位移引起的视野位移的问题，并且不能测量次级 可以消除提供所需信息的电子和反射电子。

公开(公告)号：US08450699B2

公开(公告)日：2013-05-28

申请号：US13133947

申请日：2009-12-04

Applicant: Takashi Ohshima ,  Satoshi Tomimatsu

Inventor： Takashi Ohshima ,  Satoshi Tomimatsu

IPC: G21K7/00 ,  B01J19/08 ,  H01J9/04

CPC classification number: H01J37/28 ,  H01J37/065 ,  H01J37/075 ,  H01J37/256 ,  H01J2237/06316

Abstract: To obtain a SEM capable of both providing high resolution at low acceleration voltage and allowing high-speed elemental distribution measurement, a SE electron source including Zr—O as a diffusion source is shaped so that the radius r of curvature of the tip is more than 0.5 μm and less than 1 μm, and the cone angle α of a conical portion at a portion in the vicinity of the tip at a distance of 3r to 8r from the tip, is more than 5° and less than (8/r)°. Another SE electron source uses Ba—O and includes a barium diffusion supply means composed of a sintered metal and a barium diffusion source containing barium oxide.

Abstract translation: 为了获得能够在低加速电压下提供高分辨率并允许高速元素分布测量的SEM，包括Zr-O作为扩散源的SE电子源被成形为使得尖端的曲率半径r大于 0.5μm以上且小于1μm，并且尖端附近尖端的距离尖端3r至8r的部分的锥形角α大于5°且小于（8 / r） °。 另一个SE电子源使用Ba-O，并且包括由烧结金属和含有氧化钡的钡扩散源组成的钡扩散供给装置。

公开(公告)号：US20130015646A1

公开(公告)日：2013-01-17

申请号：US13579792

申请日：2011-02-02

Applicant: Masakazu Okamoto ,  Akifumi Hanawa ,  Takashi Ohshima

Inventor： Masakazu Okamoto ,  Akifumi Hanawa ,  Takashi Ohshima

IPC: B60R21/231

CPC classification number: B60R21/2171 ,  B60R21/2346 ,  B60R21/237 ,  B60R2021/23169

Abstract: An airbag in which no choking occurs and which can be rapidly deployed. A cushion section of the airbag internally accommodates a cylinder-type inflator that includes an insertion hole for inserting the inflator from an outside to an inside, and a diffuser into which the inflator is inserted, and a diffuser having a tubular portion obtained by folding back a section of cloth to form symmetrical portions with an upper base formed by the folded back part and a lower base formed by adjacent ends of the symmetrical portions. The cushion section is folded back at both lateral sides of the along first folding lines that are substantially orthogonal to a longitudinal direction of the diffuser.

Abstract translation: 安全气囊，其中不发生窒息并且可以快速部署。 气囊的缓冲部内部容纳有气缸式充气机，其包括用于将充气器从外部插入到内部的插入孔和充气器插入到其中的扩散器，以及具有通过折回获得的管状部分的扩散器 形成对称部分的布的一部分与由折叠部分形成的上基部和由对称部分的相邻端形成的下基部。 缓冲部分沿着与扩散器的纵向方向基本正交的第一折叠线的两侧的侧面折回。