公开(公告)号：US20110240855A1

公开(公告)日：2011-10-06

申请号：US13133947

申请日：2009-12-04

申请人： Takashi Ohshima ,  Satoshi Tomimatsu

发明人： Takashi Ohshima ,  Satoshi Tomimatsu

IPC分类号： H01J9/02 ,  H01J19/02 ,  H01J37/073

CPC分类号： H01J37/28 ,  H01J37/065 ,  H01J37/075 ,  H01J37/256 ,  H01J2237/06316

摘要： To obtain a SEM capable of both providing high resolution at low acceleration voltage and allowing high-speed elemental distribution measurement, a SE electron source including Zr—O as a diffusion source is shaped so that the radius r of curvature of the tip is more than 0.5 μm and less than 1 μm, and the cone angle α of a conical portion at a portion in the vicinity of the tip at a distance of 3r to 8r from the tip, is more than 5° and less than (8/r)°. Another SE electron source uses Ba—O and includes a barium diffusion supply means composed of a sintered metal and a barium diffusion source containing barium oxide.

摘要翻译： 为了获得能够在低加速电压下提供高分辨率并允许高速元素分布测量的SEM，包括Zr-O作为扩散源的SE电子源被成形为使得尖端的曲率半径r大于 0.5μm以上且小于1μm，顶端附近的3r〜8r的尖部附近的圆锥部的锥角α大于5°且小于（8 / r） °。 另一个SE电子源使用Ba-O，并且包括由烧结金属和含有氧化钡的钡扩散源组成的钡扩散供给装置。

公开(公告)号：US08115184B2

公开(公告)日：2012-02-14

申请号：US12318583

申请日：2008-12-31

申请人： Hiroyasu Shichi ,  Shinichi Matsubara ,  Takashi Ohshima ,  Satoshi Tomimatsu ,  Tomihiro Hashizume ,  Tohru Ishitani

发明人： Hiroyasu Shichi ,  Shinichi Matsubara ,  Takashi Ohshima ,  Satoshi Tomimatsu ,  Tomihiro Hashizume ,  Tohru Ishitani

IPC分类号： H01J49/00

CPC分类号： H01J27/26 ,  H01J37/08 ,  H01J2237/0805 ,  H01J2237/0807 ,  H01J2237/182

摘要： A gas field ion source that can simultaneously increase a conductance during rough vacuuming and reduce an extraction electrode aperture diameter from the viewpoint of the increase of ion current. The gas field ion source has a mechanism to change a conductance in vacuuming a gas molecule ionization chamber. That is, the conductance in vacuuming a gas molecule ionization chamber is changed in accordance with whether or not an ion beam is extracted from the gas molecule ionization chamber. By forming lids as parts of the members constituting the mechanism to change the conductance with a bimetal alloy, the conductance can be changed in accordance with the temperature of the gas molecule ionization chamber, for example the conductance is changed to a relatively small conductance at a relatively low temperature and to a relatively large conductance at a relatively high temperature.

摘要翻译： 一种气体离子源，其可以在粗吸真空中同时增加电导，并且从离子电流的增加的角度降低提取电极的孔直径。 气体离子源具有改变真空气体分子离子化室中的电导的机理。 也就是说，根据是否从气体分子离子化室抽出离子束，改变对气体分子离子化室进行抽真空的电导。 通过将盖子形成为构成用双金属合金改变电导的机构的部件的部分，可以根据气体分子离子化室的温度来改变电导率，例如，电导率变为相对较小的电导率 相对较低的温度和相对高的温度下的相对较大的电导率。

公开(公告)号：US08530865B2

公开(公告)日：2013-09-10

申请号：US13355104

申请日：2012-01-20

申请人： Hiroyasu Shichi ,  Shinichi Matsubara ,  Takashi Ohshima ,  Satoshi Tomimatsu ,  Tomihiro Hashizume ,  Tohru Ishitani

发明人： Hiroyasu Shichi ,  Shinichi Matsubara ,  Takashi Ohshima ,  Satoshi Tomimatsu ,  Tomihiro Hashizume ,  Tohru Ishitani

IPC分类号： H01J49/26 ,  H01J49/00 ,  H01J37/08

CPC分类号： H01J27/26 ,  H01J37/08 ,  H01J2237/0805 ,  H01J2237/0807 ,  H01J2237/182

摘要： A gas field ion source that can simultaneously increase a conductance during rough vacuuming and reduce an extraction electrode aperture diameter from the viewpoint of the increase of ion current. The gas field ion source has a mechanism to change a conductance in vacuuming a gas molecule ionization chamber. That is, the conductance in vacuuming a gas molecule ionization chamber is changed in accordance with whether or not an ion beam is extracted from the gas molecule ionization chamber. By forming lids as parts of the members constituting the mechanism to change the conductance with a bimetal alloy, the conductance can be changed in accordance with the temperature of the gas molecule ionization chamber, for example the conductance is changed to a relatively small conductance at a relatively low temperature and to a relatively large conductance at a relatively high temperature.

公开(公告)号：US08450699B2

公开(公告)日：2013-05-28

申请号：US13133947

申请日：2009-12-04

申请人： Takashi Ohshima ,  Satoshi Tomimatsu

发明人： Takashi Ohshima ,  Satoshi Tomimatsu

IPC分类号： G21K7/00 ,  B01J19/08 ,  H01J9/04

CPC分类号： H01J37/28 ,  H01J37/065 ,  H01J37/075 ,  H01J37/256 ,  H01J2237/06316

摘要： To obtain a SEM capable of both providing high resolution at low acceleration voltage and allowing high-speed elemental distribution measurement, a SE electron source including Zr—O as a diffusion source is shaped so that the radius r of curvature of the tip is more than 0.5 μm and less than 1 μm, and the cone angle α of a conical portion at a portion in the vicinity of the tip at a distance of 3r to 8r from the tip, is more than 5° and less than (8/r)°. Another SE electron source uses Ba—O and includes a barium diffusion supply means composed of a sintered metal and a barium diffusion source containing barium oxide.

摘要翻译： 为了获得能够在低加速电压下提供高分辨率并允许高速元素分布测量的SEM，包括Zr-O作为扩散源的SE电子源被成形为使得尖端的曲率半径r大于 0.5μm以上且小于1μm，并且尖端附近尖端的距离尖端3r至8r的部分的锥形角α大于5°且小于（8 / r） °。 另一个SE电子源使用Ba-O，并且包括由烧结金属和含有氧化钡的钡扩散源组成的钡扩散供给装置。

公开(公告)号：US20120119086A1

公开(公告)日：2012-05-17

申请号：US13355104

申请日：2012-01-20

申请人： Hiroyasu Shichi ,  Shinichi Matsubara ,  Takashi Ohshima ,  Satoshi Tomimatsu ,  Tomihiro Hashizume ,  Tohru Ishitani

发明人： Hiroyasu Shichi ,  Shinichi Matsubara ,  Takashi Ohshima ,  Satoshi Tomimatsu ,  Tomihiro Hashizume ,  Tohru Ishitani

IPC分类号： H01J37/26

CPC分类号： H01J27/26 ,  H01J37/08 ,  H01J2237/0805 ,  H01J2237/0807 ,  H01J2237/182

摘要： A gas field ion source that can simultaneously increase a conductance during rough vacuuming and reduce an extraction electrode aperture diameter from the viewpoint of the increase of ion current. The gas field ion source has a mechanism to change a conductance in vacuuming a gas molecule ionization chamber. That is, the conductance in vacuuming a gas molecule ionization chamber is changed in accordance with whether or not an ion beam is extracted from the gas molecule ionization chamber. By forming lids as parts of the members constituting the mechanism to change the conductance with a bimetal alloy, the conductance can be changed in accordance with the temperature of the gas molecule ionization chamber, for example the conductance is changed to a relatively small conductance at a relatively low temperature and to a relatively large conductance at a relatively high temperature.

摘要翻译： 一种气体离子源，其可以在粗吸真空中同时增加电导，并且从离子电流的增加的角度降低提取电极的孔直径。 气体离子源具有改变真空气体分子离子化室中的电导的机理。 也就是说，根据是否从气体分子离子化室抽出离子束，改变对气体分子离子化室进行抽真空的电导。 通过将盖子形成为构成用双金属合金改变电导的机构的部件的部分，可以根据气体分子离子化室的温度来改变电导率，例如，电导率变为相对较小的电导率 相对较低的温度和相对高的温度下的相对较大的电导率。

公开(公告)号：US09208994B2

公开(公告)日：2015-12-08

申请号：US13817086

申请日：2011-07-07

申请人： Takashi Ohshima ,  Michio Hatano ,  Hideo Morishita

发明人： Takashi Ohshima ,  Michio Hatano ,  Hideo Morishita

IPC分类号： G01N23/00 ,  H01J37/26 ,  H01J37/28

CPC分类号： H01J37/261 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/153 ,  H01J2237/202 ,  H01J2237/20207 ,  H01J2237/20221

摘要： The present invention provides an electron beam apparatus comprising a means for visualizing an axial displacement of a retarding electric field, and a means for adjusting axial displacement. The axial displacement visualizing means includes a reflective plate (6), and an optical system (2, 3) for converging a secondary electron beam (9) on the reflective plate (6), and the axial displacement adjusting means includes an incline rotation mechanism (8) for a sample stage (5). With this configuration, in electron beam apparatuses such as SEM and the like, such problems as visual field displacement caused by displacement of the axial symmetry of the electric field between an objective lens (3) and a sample (4) and inability to measure secondary electrons and reflected electrons that provide desired information can be eliminated.

摘要翻译： 本发明提供了一种电子束装置，包括用于使延迟电场的轴向位移可视化的装置和用于调节轴向位移的装置。 轴向位移可视化装置包括反射板（6）和用于会聚反射板（6）上的二次电子束（9）的光学系统（2,3），并且轴向位移调节装置包括倾斜旋转机构 （8）用于样品台（5）。 利用这种结构，在诸如SEM等的电子束装置中，存在由物镜（3）和样品（4）之间的电场的轴对称位移引起的视野位移的问题，并且不能测量次级 可以消除提供所需信息的电子和反射电子。

公开(公告)号：US09029766B2

公开(公告)日：2015-05-12

申请号：US14241121

申请日：2012-05-28

申请人： Hideo Morishita ,  Takashi Ohshima ,  Michio Hatano ,  Sukehiro Ito

发明人： Hideo Morishita ,  Takashi Ohshima ,  Michio Hatano ,  Sukehiro Ito

IPC分类号： H01J37/244 ,  H01J37/28 ,  H01J37/04

CPC分类号： H01J37/28 ,  H01J37/04 ,  H01J37/244 ,  H01J2237/2443 ,  H01J2237/2444 ,  H01J2237/24475 ,  H01J2237/2448 ,  H01J2237/2804 ,  H01J2237/2806

摘要： To provide a low acceleration scanning electron microscope that can discriminate and detect reflected electrons and secondary electrons even with a low probe current, this scanning electron microscope is provided with an electron gun (29), an aperture (26), a sample table (3), an electron optical system (4-1) for making an electron beam (31) converge on a sample (2), a deflection means (10), a secondary electron detector (8), a reflected electron detector (9), and a cylindrical electron transport means (5) in a position between the electron gun (29) and sample (2). The reflected electron detector (9) is provided within the electron transport means (5) and on a side further away from the electron gun (29) than the secondary electron detector (8) and the deflection means (10). The reception surface (9-1) of the reflected electron detector (9) is electrically wired so as to have the same potential as the electron transport means (5).

摘要翻译： 为了提供即使在低探针电流下能够区分和检测反射电子和二次电子的低加速度扫描电子显微镜，该扫描电子显微镜设置有电子枪（29），孔（26），样品台（3 ），用于使电子束（31）会聚在样品（2）上的电子光学系统（4-1），偏转装置（10），二次电子检测器（8），反射电子检测器（9） 以及在电子枪（29）和样品（2）之间的位置的圆柱形电子传输装置（5）。 反射电子检测器（9）设置在电子传输装置（5）内并且比二次电子检测器（8）和偏转装置（10）更远离电子枪（29）的一侧。 反射电子检测器（9）的接收表面（9-1）被电连接以具有与电子传输装置（5）相同的电位。

公开(公告)号：US08651513B2

公开(公告)日：2014-02-18

申请号：US13579803

申请日：2011-02-02

申请人： Masakazu Okamoto ,  Akifumi Hanawa ,  Takashi Ohshima

发明人： Masakazu Okamoto ,  Akifumi Hanawa ,  Takashi Ohshima

IPC分类号： B60R21/20 ,  B60R21/206

CPC分类号： B60R21/2171 ,  B60R21/206 ,  B60R21/2346 ,  B60R21/237

摘要： An airbag having a cushion part defining an insertion hole that is positioned between first and second sewing lines provided to a base fabric and that is provided for the insertion of the inflator from an outside to an inside. A diffuser positioned within the cushion part and in which the inflator is inserted from the insertion hole. The diffuser has a tubular portion with a portion formed by folding layers of fabrics and being sewn to the base fabric along the first sewing line. The diffuser fabric of the tubular portion on a side adjacent to the base fabric being additionally sewn to the base fabric along a second sewing line. The diffuser includes a guide member 1 that extends and covers the insertion hole with a surface that continues from an inner surface of the diffuser. The guide member being sewn to the base fabric along the first sewing line.

摘要翻译： 一种安全气囊，其具有限定插入孔的缓冲部件，所述插入孔位于设置在基布上的第一和第二缝合线之间，并且设置成用于将充气器从外部插入到内部。 位于缓冲部分内的扩散器，其中充气机从插入孔插入其中。 扩散器具有管状部分，其部分通过折叠织物层而形成，并且沿着第一缝合线缝合到基底织物。 在与基底织物相邻的一侧的管状部分的扩散织物，沿第二缝合线另外缝合到基底织物上。 扩散器包括引导构件1，该引导构件1从扩散器的内表面延伸并覆盖插入孔。 引导构件沿着第一缝合线缝合到基底织物上。

公开(公告)号：US20110186735A1

公开(公告)日：2011-08-04

申请号：US13020098

申请日：2011-02-03

申请人： Tadashi FUJIEDA ,  Makoto Okai ,  Takashi Ohshima ,  Boklae Cho

发明人： Tadashi FUJIEDA ,  Makoto Okai ,  Takashi Ohshima ,  Boklae Cho

IPC分类号： G21K7/00 ,  B01J19/08 ,  H01J9/04

CPC分类号： B01J19/08 ,  G21K7/00 ,  H01J9/04 ,  H01J2237/06316

摘要： An electron source is implemented which has a lower work function of an electron emission surface, yields emitted electrons of a narrower energy bandwidth and higher current density, and lasts longer than existing Zr/O/W electron sources. Further, an electron microscope which yields an image of higher-resolution in a shorter time and an electron beam lithography device which yields higher throughput are also provided. The electron source comprises a needle-shaped electrode made of metal having its tip in a needle shape, a heating body which heats up the needle-shaped electrode, and a diffusion source capable of being heated up by the heating body and made of a mixture of barium composite containing oxygen and carbon particles.

摘要翻译： 实现了具有较低的电子发射表面功函数的电子源，产生较窄的能带宽和较高电流密度的发射电子，并且比现有的Zr / O / W电子源持续时间更长。 此外，还提供了在更短时间内产生更高分辨率的图像的电子显微镜以及产生较高产量的电子束光刻装置。 电子源包括由针尖形状的金属构成的针状电极，加热针状电极的加热体和能够被加热体加热并由混合物构成的扩散源 的含有氧和碳颗粒的钡复合物。

公开(公告)号：US07888513B2

公开(公告)日：2011-02-15

申请号：US12085988

申请日：2006-12-04

申请人： Kazushi Mashima ,  Takashi Ohshima ,  Takanori Iwasaki ,  Hironori Maeda ,  Kenya Ishida

发明人： Kazushi Mashima ,  Takashi Ohshima ,  Takanori Iwasaki ,  Hironori Maeda ,  Kenya Ishida

IPC分类号： C07F15/00 ,  C07D263/08 ,  C07D263/52

CPC分类号： C07D263/12 ,  B01J31/2226 ,  B01J2531/26 ,  C07C53/18 ,  C07C231/02 ,  C07C253/30 ,  C07D263/10 ,  C07D263/14 ,  C07D263/52 ,  C07D413/06 ,  C07F3/003 ,  C07F7/1892 ,  C07F9/5022 ,  C07K1/088 ,  C07K1/10

摘要： The invention relates to a method for producing an azoline compound represented by the general formula (3): wherein R1 represents an optionally substituted hydrocarbon group, an optionally substituted alkoxy group, an optionally substituted alkoxycarbonyl group, a halogen atom, a substituted amino group, a substituted carbamoyl group or an optionally substituted heterocyclic group; R3, R4, R5 and R6 may be the same or different and each represents a hydrogen atom, an optionally substituted hydrocarbon group, an optionally substituted alkoxy group, an optionally substituted alkoxycarbonyl group, a halogen atom, a substituted amino group, a substituted carbamoyl group or an optionally substituted heterocyclic group; two arbitrary groups selected from R3, R4, R5 and R6 may bond to each other to form a ring; and Z1 represents an oxygen atom, a sulfur atom or a selenium atom; comprising reacting a carboxylic acid or a carboxylic acid derivative represented by the general formula (1): R1CO2R2  (1) wherein R1 is as defined above; R2 represents a hydrogen atom, an optionally substituted alkyl group or an optionally substituted aryl group; and R1 and R2 may bond to each other to form a ring; with an aminochalcogenide represented by the general formula (2): wherein R3, R4, R5, R6 and Z1 are as defined above; in the presence of a compound containing a group 12 metal element in the periodic table.

摘要翻译： 本发明涉及一种制备由通式（3）表示的唑啉化合物的方法：其中R1表示任选取代的烃基，任选取代的烷氧基，任选取代的烷氧基羰基，卤素原子，取代的氨基， 取代的氨基甲酰基或任选取代的杂环基; R3，R4，R5和R6可以相同或不同，各自表示氢原子，任选取代的烃基，任选取代的烷氧基，任选取代的烷氧基羰基，卤素原子，取代的氨基，取代的氨基甲酰基 基团或任选取代的杂环基团; 选自R3，R4，R5和R6中的两个任意基团可以彼此键合形成环; Z1表示氧原子，硫原子或硒原子; 包括使由通式（1）表示的羧酸或羧酸衍生物：R1CO2R2（1）其中R1如上定义; R2表示氢原子，任选取代的烷基或任选取代的芳基; 并且R 1和R 2可以彼此键合形成环; 与通式（2）表示的氨基硫族化物：其中R3，R4，R5，R6和Z1如上定义; 在含有元素周期表中第12族金属元素的化合物存在下进行。