公开(公告)号：US4532423A

公开(公告)日：1985-07-30

申请号：US495486

申请日：1983-05-17

Applicant: Toru Tojo ,  Kazuyoshi Sugihara

Inventor： Toru Tojo ,  Kazuyoshi Sugihara

IPC: H01J37/28 ,  G01R1/073 ,  G01R31/26 ,  G01R31/302 ,  G01R31/305 ,  H01L21/66 ,  G01R31/02 ,  G01N23/00

CPC classification number: H01L22/00 ,  G01R31/305 ,  H01L2924/0002

Abstract: An IC tester including a specimen chamber and an electron optical column for radiating an electron beam to a specimen placed in the specimen chamber, wherein a fixed table is attached to a Z table in the specimen chamber and includes downwardly protruding spring contact pins which are connected to lead wires led outside of the specimen chamber. A probe card unit for testing an IC wafer is provided on the upper surface of the fixed table and includes electric terminals having the same positional relation as that of the spring contact pins. A probe card unit fixing mechanism is attached to the undersurface of the fixed table and is so arranged that the probe card unit can be slid laterally along the undersurface of the fixed table and then upward to press the probe card unit against the undersurface of the fixed table and to bring the spring contact pins into electrical contact with their corresponding probe card terminals.

Abstract translation: 一种IC测试仪，包括用于向放置在样本室中的样本辐射电子束的样本室和电子光学柱，其中固定台附着在样品室中的Z台上，并且包括连接的向下突出的弹簧接触针 将导线引导到样品室外。 用于测试IC晶片的探针卡单元设置在固定台的上表面上，并且包括具有与弹簧接触针相同的位置关系的电端子。 探针卡单元固定机构安装在固定台的下表面上，并且布置成使得探针卡单元可沿着固定台的下表面横向滑动，然后向上以将探针卡单元压靠固定的下表面 并将弹簧触针与其相应的探针卡端子电接触。

公开(公告)号：US4408126A

公开(公告)日：1983-10-04

申请号：US250386

申请日：1981-04-02

Applicant: Toru Tojo ,  Kazuyoshi Sugihara ,  Shuntaro Hata ,  Hirooki Numaga ,  Haruhisa Mukooyama ,  Yoshio Suzuki

Inventor： Toru Tojo ,  Kazuyoshi Sugihara ,  Shuntaro Hata ,  Hirooki Numaga ,  Haruhisa Mukooyama ,  Yoshio Suzuki

IPC: H01L21/027 ,  G21K5/08 ,  H01J37/20 ,  H01L21/673 ,  G21K5/10

CPC classification number: H01J37/20 ,  G21K5/08

Abstract: A cassette retaining device comprises a pair of retaining mechanisms disposed respectively on both sides of the top surface of a sample table and pressing respectively on both sides of the top surface of a cassette to hold the cassette in said predetermined position between said retaining mechanisms and the sample table. Each retaining mechanism includes a presser capable of moving between a first position where the presser presses on a side portion of the top surface of the cassette to hold the cassette and a second position where the presser is separated from the top surface of the sample table to allow the cassette to be inserted or removed from between the presser and the sample table, a rocking arm rockable around a first pin relatively to the sample table and bearing the presser so that the presser may rock around a second pin parallel to the first pin, and a spring urging the rocking arm to rock in one direction, thereby locating the presser in the first position.

Abstract translation: 盒保持装置包括分别位于样品台的顶表面的两侧上的一对保持机构，分别在盒的顶表面的两侧上按压以将盒保持在所述保持机构和所述保持机构的所述预定位置之间 样品表。 每个保持机构包括能够在第一位置和第二位置之间移动的压力器，第一位置和第二位置之间，压缩机压在盒的顶表面的侧面部分以保持盒子;第二位置，其中压脚与样品台的顶表面分离， 允许盒子从压脚和样品台之间插入或取出，摆动臂可相对于样品台围绕第一销摆动并承载压脚，使得压脚可绕平行于第一销的第二销摆动， 以及促使摇臂沿一个方向摇动的弹簧，从而将压脚定位在第一位置。

公开(公告)号：US07421109B2

公开(公告)日：2008-09-02

申请号：US10642760

申请日：2003-08-19

Applicant: Hideo Tsuchiya ,  Kyoji Yamashita ,  Toshiyuki Watanabe ,  Ikunao Isomura ,  Toru Tojo ,  Yasushi Sanada

Inventor： Hideo Tsuchiya ,  Kyoji Yamashita ,  Toshiyuki Watanabe ,  Ikunao Isomura ,  Toru Tojo ,  Yasushi Sanada

IPC: G06K9/00 ,  G01B11/00 ,  G01J1/10

CPC classification number: G06T7/0004 ,  G06T2207/30148

Abstract: A pattern inspecting method, comprising preparing a sample having a first and a second inspection regions and an imaging device having a plurality of pixels, scanning the first inspection region to a first direction using the imaging device to obtain a first measurement pattern representing at least parts of the first inspection region, scanning the second inspection region to the first direction using the imaging device to obtain a second measurement pattern representing at least parts of the second inspection region, comparing the first measurement pattern and the second measurement pattern with each other to determine presence or absence of a defect formed on the sample, and controlling a scanning condition for scanning a pattern of the second inspection region by the imaging device so as to keep the same with the scanning condition when the pattern of the first inspection region is scanned by the imaging device.

Abstract translation: 一种图案检查方法，包括准备具有第一和第二检查区域的样本和具有多个像素的成像装置，使用成像装置将第一检查区域扫描到第一方向，以获得表示至少部分的第一测量图案 使用所述成像装置将所述第二检查区域扫描到所述第一方向，以获得表示所述第二检查区域的至少一部分的第二测量图案，将所述第一测量图案和所述第二测量图案彼此进行比较，以确定 存在或不存在形成在样品上的缺陷，以及控制用于通过成像装置扫描第二检查区域的图案的扫描条件，以便当第一检查区域的图案被扫描时与扫描条件保持相同 成像装置。

公开(公告)号：US20050128451A1

公开(公告)日：2005-06-16

申请号：US11012257

申请日：2004-12-16

Applicant: Soichiro Mitsui ,  Toru Tojo ,  Kiminobu Akeno

Inventor： Soichiro Mitsui ,  Toru Tojo ,  Kiminobu Akeno

IPC: G01B11/00 ,  G03F9/00 ,  H01L21/027 ,  H01L21/68 ,  G03B27/42

CPC classification number: H01L21/681

Abstract: An alignment apparatus for substrates comprises a first movement mechanism moving a substrate to be treated in a horizontal direction, a second movement mechanism moving the substrate in a vertical direction, a rotation mechanism rotating the substrate in a substrate plane, an illumination tool irradiating the substrate from a sidewise direction in a state where the substrate is held in a desired height position by the second movement mechanism, an image sensor picking up an image on a back surface of the substrate in an irradiated state, an edge position sensor sensing plural edge positions of the substrate from an image obtained by the image sensor, and a control computer obtaining a positional shift of the substrate based on the edge positions sensed by the edge position sensor and correcting a positional shift of the horizontal and rotation directions by the first movement and rotation mechanisms.

Abstract translation: 基板对准装置包括：沿水平方向移动待处理基板的第一移动机构，沿垂直方向移动基板的第二移动机构，在基板平面内旋转基板的旋转机构，照射基板的照明工具 在通过第二移动机构将基板保持在期望的高度位置的状态下的侧面方向上，以照射状态在基板的背面拾取图像的图像传感器，感测多个边缘位置的边缘位置传感器 根据由图像传感器获得的图像获得基板的位置偏移;以及控制计算机，基于由边缘位置传感器感测的边缘位置获得基板的位置偏移，并且通过第一移动来校正水平和旋转方向的位置偏移，以及 旋转机制。

公开(公告)号：US20050052634A1

公开(公告)日：2005-03-10

申请号：US10897120

申请日：2004-07-23

Applicant: Shinji Sugihara ,  Riki Ogawa ,  Toru Tojo

Inventor： Shinji Sugihara ,  Riki Ogawa ,  Toru Tojo

IPC: G01B11/02 ,  G02B7/28 ,  G02B21/26 ,  G03B27/52 ,  G03F7/20 ,  G03F9/00 ,  H01L21/027

CPC classification number: G03F9/7088 ,  G03F7/70725 ,  G03F9/7003 ,  G03F9/7026 ,  G03F9/7034

Abstract: An automatic focusing apparatus comprises a stage holding a substrate, an objective lens disposed facing the substrate surface, an illumination optics illuminating the substrate surface with a spotted light beam from an oblique direction, a photodetector detecting reflected light from the substrate surface, a position detection circuit detecting a vertical position of the substrate surface from an electric signal obtained from the photodetector to output a position signal, a correction circuit monitoring the position signal in real time and subtracting a surplus exceeding a signal change corresponding to a surface shape change of the substrate from the position signal, when a change amount per unit time of the position signal exceeds a predetermined level and outputting a corrected position signal, and a stage control circuit controlling the vertical position of the stage based on the corrected position signal.

Abstract translation: 一种自动对焦装置，包括：保持基板的台阶，与基板面对面配置的物镜;从倾斜方向用点状光束照射基板表面的照明光学元件;检测来自基板面的反射光的光电检测器;位置检测 检测从光电检测器获得的电信号的基板表面的垂直位置以输出位置信号，校正电路实时监控位置信号，并减去超过与基板的表面形状变化相对应的信号变化的剩余量 当位置信号的每单位时间的变化量超过预定值并输出校正的位置信号时，根据位置信号，以及基于校正位置信号控制舞台的垂直位置的舞台控制电路。

公开(公告)号：US20050002020A1

公开(公告)日：2005-01-06

申请号：US10852434

申请日：2004-05-25

Applicant: Hiromu Inoue ,  Toru Tojo ,  Takehiko Nomura ,  Shinichi Imai

Inventor： Hiromu Inoue ,  Toru Tojo ,  Takehiko Nomura ,  Shinichi Imai

IPC: G01N21/956 ,  G03F1/84 ,  H01L21/66 ,  G01N21/88

CPC classification number: G01N21/956 ,  G01N2021/95676

Abstract: A photolithography mask inspection apparatus has at least two sensors. One sensor is configured to sense light transmitted through an object to be inspected, and the other sensor senses light reflected off the object. A first optical system is arranged to expose a first portion of the object with a first light beam, and a second optical system is arranged to expose a second portion of the object, spaced form the first portion, with a second light beam. A third optical system focuses the transmitted light on to the first sensor, as well as the reflected light on to the second sensor. A defect detecting circuit is also provided to detect a defect of the object, based upon image data associated with the reflected and transmitted light.

Abstract translation: 光刻掩模检查装置具有至少两个传感器。 一个传感器被配置为感测通过待检查对象传播的光，另一个传感器感测从物体反射的光。 第一光学系统布置成用第一光束曝光物体的第一部分，并且第二光学系统布置成用第二光束暴露出与第一部分间隔开的物体的第二部分。 第三光学系统将透射光聚焦到第一传感器，以及将反射光聚焦到第二传感器上。 还提供缺陷检测电路，用于基于与反射和透射光相关联的图像数据来检测物体的缺陷。

公开(公告)号：US06676289B2

公开(公告)日：2004-01-13

申请号：US09933719

申请日：2001-08-22

Applicant: Ryoichi Hirano ,  Shusuke Yoshitake ,  Toru Tojo ,  Shuichiro Fukutome ,  Teruaki Yamamoto ,  Masaki Toriumi

Inventor： Ryoichi Hirano ,  Shusuke Yoshitake ,  Toru Tojo ,  Shuichiro Fukutome ,  Teruaki Yamamoto ,  Masaki Toriumi

IPC: G01K1300

CPC classification number: G01K7/42

Abstract: According to one embodiment of the present invention, the present invention may provide a temperature measuring method in a pattern drawing apparatus having a drawing chamber for drawing a pattern on a substrate to be transferred inside, a stage installed inside the drawing chamber, a standby chamber connected to the drawing chamber, and a thermostatic device installed inside the standby chamber, characterized in that a dummy substrate having a temperature measuring device and a recording device for recording the temperature measured by the temperature measuring device is transferred to the thermostatic device, then transferred into the drawing chamber, and then put on the stage, thus the temperature history of the dummy substrate in the transfer route from the thermostatic device to the stage is measured by the temperature measuring device and recorded in the recording device.

Abstract translation: 根据本发明的一个实施例，本发明可以提供一种图形绘制装置中的温度测量方法，该图形绘制装置具有用于在待传送内部的基板上绘制图案的拉伸室，安装在拉伸室内的台，备用室 连接到拉伸室，以及安装在备用室内的恒温装置，其特征在于，具有用于记录由温度测量装置测量的温度的温度测量装置和记录装置的虚拟基板被传送到恒温装置，然后转移 进入拉伸室，然后放在平台上，由温度测量装置测量从恒温装置到载物台的传输路径中的虚拟基板的温度历史记录在记录装置中。

公开(公告)号：US4811062A

公开(公告)日：1989-03-07

申请号：US214821

申请日：1988-07-01

Applicant: Mitsuo Tabata ,  Toru Tojo ,  Hiroaki Shimozono

Inventor： Mitsuo Tabata ,  Toru Tojo ,  Hiroaki Shimozono

IPC: H01L21/00 ,  G03F9/00 ,  H01L21/027 ,  H01L21/30 ,  H01L21/67 ,  H01L21/68 ,  G01B11/26

CPC classification number: G03F9/7049

Abstract: In a method for aligning first and second objects relative to each other, according to this invention, the first and second objects are arranged opposite to each other, and are aligned in a direction perpendicular to their opposing direction. A grating pattern is formed, as an alignment mark, on the first object, and a checkerboard-like grating pattern is formed, also as an alignment mark, on the second object. A light beam emitted from an alignment light source is radiated onto the checkerboard-like grating pattern of the second object. The light beam diffracted by the checkerboard-like grating pattern is guided onto the grating pattern of the first object. The light beam diffracted by the grating pattern of the first object is detected by a detector. Since the light beam emitted from the light source is diffracted by the checkerboard-like grating pattern, a relative position of the first and second objects can be detected, irrespective of the distance therebetween. The first and second objects are accurately aligned, based on the detection result. This invention can be applied to a method for aligning a mask and a wafer when a circuit pattern pre-formed on the mask is to be transferred onto the wafer.

Abstract translation: 在第一和第二物体相对于彼此对准的方法中，根据本发明，第一和第二物体彼此相对布置，并且在垂直于它们的相反方向的方向上对齐。 在第一物体上形成作为对准标记的光栅图案，并且在第二物体上形成棋盘状光栅图案，也作为对准标记。 从对准光源发射的光束被辐射到第二物体的棋盘状光栅图案上。 由棋盘状光栅图案衍射的光束被引导到第一物体的光栅图案上。 由第一物体的光栅图案衍射的光束由检测器检测。 由于从光源发射的光束被棋盘状光栅图案衍射，所以可以检测第一和第二物体的相对位置，而与它们之间的距离无关。 基于检测结果，第一和第二物体被精确对准。 当将掩模上预先形成的电路图案转印到晶片上时，本发明可以应用于将掩模和晶片对准的方法。

公开(公告)号：US4480284A

公开(公告)日：1984-10-30

申请号：US428341

申请日：1982-09-29

Applicant: Toru Tojo ,  Ichiro Mori ,  Shunichi Sano

Inventor： Toru Tojo ,  Ichiro Mori ,  Shunichi Sano

IPC: B23Q3/15 ,  H01L21/683 ,  H02N13/00

CPC classification number: H01L21/6831 ,  H01L21/6833

Abstract: An electrostatic chuck plate comprises an electrode plate made of electrically conductive material and a dielectric layer formed on one surface of the electrode plate by flame-spraying dielectric material. The surface region of the dielectric layer is impregnated with plastic material, and the surface of the dielectric layer is smooth and flat. A sample is electrostatically attracted toward the electrode plate and is thus held on the smooth and flat surface of the dielectric layer.

Abstract translation: 静电卡盘包括由导电材料制成的电极板和通过火焰喷涂介电材料形成在电极板的一个表面上的电介质层。 电介质层的表面区域用塑料材料浸渍，电介质层的表面光滑平坦。 样品被静电吸引到电极板上，因此被保持在电介质层的光滑平坦的表面上。

公开(公告)号：US4467210A

公开(公告)日：1984-08-21

申请号：US379712

申请日：1982-05-18

Applicant: Kazuyoshi Sugihara ,  Toru Tojo ,  Ichiro Mori ,  Toshiaki Shinozaki

Inventor： Kazuyoshi Sugihara ,  Toru Tojo ,  Ichiro Mori ,  Toshiaki Shinozaki

IPC: H01L21/027 ,  B65G49/07 ,  H01J37/18 ,  H01L21/30 ,  H01L21/677 ,  H01L21/68 ,  B23Q3/157

CPC classification number: H01J37/3174 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/2037 ,  H01J37/18 ,  H01L21/30 ,  H01L21/67766 ,  H01L21/67796 ,  H01L21/682

Abstract: An electron-beam image transfer device includes an evacuated vessel having a main chamber and spare chamber extended therefrom and a specimen holder and mask holder disposed in the main chamber. A subchamber is formed near the spare chamber to house a specimen. The specimen in the subchamber is transferred to the spare chamber by a movable support through an opening which is always kept in an airtight state, and then brought to the specimen holder by a transferring mechanism.

Abstract translation: 电子束图像转印装置包括具有从其延伸的主室和备用室的抽真空容器和设置在主室中的试样保持器和掩模保持架。 在备用室附近形成一个子室以容纳样品。 子室中的样品通过可移动的支撑件通过总是保持在气密状态的开口转移到备用室，然后通过传送机构带到样品保持器。