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    Method of wet etching vias and articles formed thereby
    43.
    发明申请
    Method of wet etching vias and articles formed thereby 失效
    湿法蚀刻通孔和​​由此形成的制品的方法

    公开(公告)号：US20060055048A1

    公开(公告)日：2006-03-16

    申请号：US10938247

    申请日：2004-09-13

    申请人： Kanakasabapathi Subramanian ,  Jeffrey Fortin ,  Wei-Cheng Tian

    发明人： Kanakasabapathi Subramanian ,  Jeffrey Fortin ,  Wei-Cheng Tian

    IPC分类号： H01L23/48 ,  H01L29/04 ,  H01L29/06

    CPC分类号： H01L21/30617 ,  H01L21/76898 ,  H01L23/481 ,  H01L2223/54453 ,  H01L2924/0002 ,  H01L2924/00

    摘要： A method for forming smooth walled, prismatically-profiled through-wafer vias and articles formed through the method. An etch stop material is provided on a wafer, which may be a silicon wafer. A mask material is provided on the etch stop material and patterned in such a way as to lead to the formation of vias that have at least one pair of opposing side walls that run parallel to a plane in the wafer. A wet etchant, such as potassium hydroxide, is used to etch vias in the wafer. The use of a wet etchant leads to the formation of smooth side walls. This method allows an aspect ratio of height versus width of the vias of greater than 75 to 1.

    摘要翻译： 用于形成通过该方法形成的平滑壁，棱镜通孔晶片通孔和制品的方法。 在晶片上提供蚀刻停止材料，晶片可以是<110>硅晶片。 在蚀刻停止材料上提供掩模材料，并以这样的方式图案化，以便导致形成通孔，其具有平行于晶片中的111平面延伸的至少一对相对的侧壁。 使用诸如氢氧化钾的湿蚀刻剂来蚀刻晶片中的通孔。 使用湿蚀刻剂导致形成平滑的侧壁。 该方法允许通孔的高度与宽度的长宽比大于75至1。

    High sensitivity capacitive micromachined ultrasound transducer
    44.
    发明申请
    High sensitivity capacitive micromachined ultrasound transducer 审中-公开
    高灵敏度电容微机械超声换能器

    公开(公告)号：US20060004289A1

    公开(公告)日：2006-01-05

    申请号：US10881924

    申请日：2004-06-30

    申请人： Wei-Cheng Tian ,  Warren Lee ,  Lowell Smith ,  Ye-Ming Li ,  Jie Sun

    发明人： Wei-Cheng Tian ,  Warren Lee ,  Lowell Smith ,  Ye-Ming Li ,  Jie Sun

    IPC分类号： A61B8/14

    CPC分类号： B06B1/0292 ,  B06B2201/76

    摘要： A capacitive micromachined ultrasound transducer (cMUT) comprises a lower electrode. Furthermore, the cMUT includes a diaphragm disposed adjacent to the lower electrode such that a gap having a first gap width is formed between the diaphragm and the lower electrode. Additionally, the cMUT includes at least one element formed in the gap, where the at least one element is arranged to provide a second gap width between the diaphragm and the lower electrode.

    摘要翻译： 电容微加工超声换能器（cMUT）包括下电极。 此外，cMUT包括邻近下电极设置的隔膜，使得在隔膜和下电极之间形成具有第一间隙宽度的间隙。 此外，cMUT包括形成在间隙中的至少一个元件，其中至少一个元件布置成在隔膜和下电极之间提供第二间隙宽度。

    Microelectromechanical heating apparatus and fluid preconcentrator device utilizing same
    45.
    发明授权
    Microelectromechanical heating apparatus and fluid preconcentrator device utilizing same 失效
    微机电加热装置和利用其的流体预浓缩装置

    公开(公告)号：US06914220B2

    公开(公告)日：2005-07-05

    申请号：US10396929

    申请日：2003-03-25

    申请人： Wei-Cheng Tian ,  Stella W. Pang ,  Edward T. Zellers

    发明人： Wei-Cheng Tian ,  Stella W. Pang ,  Edward T. Zellers

    IPC分类号： F27B17/00 ,  F27D11/00 ,  H05B3/26 ,  F27B11/02

    CPC分类号： F27B17/0025 ,  H05B3/26 ,  H05B2203/003 ,  H05B2203/005 ,  H05B2203/007 ,  H05B2203/013 ,  H05B2203/017

    摘要： A microelectromechanical heating apparatus and fluid preconcentrator device utilizing same wherein heating elements of the apparatus are sized and spaced to substantially uniformly heat a heating chamber within a heater of the apparatus. Tall, thermally-isolated heating elements are fabricated in Si using high aspect ratio etching technology. These tall heating elements have large surface area to provide large adsorbent capacity needed for high efficiency preconcentrators in a micro gas chromatography system (μGC). The tall heating elements are surrounded by air gaps to provide good thermal isolation, which is important for a low power preconcentrator in the μGC system.

    摘要翻译： 一种微机电加热装置和利用其的流体预浓缩器装置，其中装置的加热元件的尺寸和间隔尺寸以基本均匀地加热装置的加热器内的加热室。 使用高纵横比蚀刻技术在Si中制造高，热隔离的加热元件。 这些高加热元件具有较大的表面积，以提供微气相色谱系统（muGC）中高效预浓缩器所需的大的吸附剂能力。 高温加热元件被气隙包围以提供良好的热隔离，这对于muGC系统中的低功率预浓缩器是重要的。

    Microfluidic device with vertical injection aperture
    46.
    发明授权
    Microfluidic device with vertical injection aperture 有权
    具有垂直注射孔径的微流体装置

    公开(公告)号：US08029743B2

    公开(公告)日：2011-10-04

    申请号：US11857570

    申请日：2007-09-19

    申请人： Jun Xie ,  Shashi Thutupalli ,  Stacey Joy Kennerly ,  Wei-Cheng Tian ,  Erin Jean Finehout ,  Li Zhu ,  Oliver Charles Boomhower

    发明人： Jun Xie ,  Shashi Thutupalli ,  Stacey Joy Kennerly ,  Wei-Cheng Tian ,  Erin Jean Finehout ,  Li Zhu ,  Oliver Charles Boomhower

    IPC分类号： B01L3/00 ,  G01N27/453

    CPC分类号： G01N27/447

    摘要： A microfluidic device with a vertical injection aperture is provided. The microfluidic device comprises a separation channel, an injection aperture disposed adjacent to and in fluid communication with the separation channel. The microfluidic device further comprises a semi-permeable filter disposed adjacent to the injection aperture, wherein the filter is configured to preconcentrate a sample in the injection aperture to form a preconcentrated sample plug during an injection operation, and wherein the sample plug flows downwardly from the injection aperture to the separation channel during an electrophoresis operation.

    摘要翻译： 提供具有垂直注射孔的微流体装置。 微流体装置包括分离通道，与分离通道相邻并且与分离通道流体连通地设置的注射孔。 微流体装置还包括邻近喷射孔布置的半渗透过滤器，其中过滤器构造成在注射操作期间预浓缩注入孔中的样品以形成预浓缩样品塞，并且其中样品塞从 在电泳操作期间到分离通道的注射孔径。

    Methods of making and using integrated and testable sensor array
    47.
    发明授权
    Methods of making and using integrated and testable sensor array 有权
    制作和使用集成和可测量传感器阵列的方法

    公开(公告)号：US07781238B2

    公开(公告)日：2010-08-24

    申请号：US11951360

    申请日：2007-12-06

    申请人： Robert Gideon Wodnicki ,  Stacey Joy Kennerly ,  Wei-Cheng Tian ,  Kevin Matthew Durocher ,  David Martin Mills ,  Charles Gerard Woychik ,  Lowell Scott Smith

    发明人： Robert Gideon Wodnicki ,  Stacey Joy Kennerly ,  Wei-Cheng Tian ,  Kevin Matthew Durocher ,  David Martin Mills ,  Charles Gerard Woychik ,  Lowell Scott Smith

    IPC分类号： H01L21/66

    CPC分类号： H01L22/20 ,  H01L22/14

    摘要： A method for making a testable sensor assembly is provided. The method includes forming a first sensor array on a first substrate having a first side and a second side, wherein the first sensor array is formed on the first side of the first substrate, coupling a first semiconductor wafer having a first side and a second side to the first sensor array, wherein the first side of the first semiconductor wafer is coupled to the first sensor array, thinning one of the second side of the first substrate or the second side of the first semiconductor wafer, and testing the first sensor array to identify operational and non-operational units in the testable sensor assembly before integration of the sensor assembly with interface electronics.

    摘要翻译： 提供了制造可测试的传感器组件的方法。 该方法包括在具有第一侧和第二侧的第一衬底上形成第一传感器阵列，其中第一传感器阵列形成在第一衬底的第一侧上，将具有第一侧和第二侧的第一半导体晶片 到第一传感器阵列，其中第一半导体晶片的第一侧耦合到第一传感器阵列，使第一衬底的第二侧或第一半导体晶片的第二面之一变薄，并将第一传感器阵列测试为 在将传感器组件与接口电子器件集成之前，确定可测试传感器组件中的操作和非操作单元。

    SYSTEM AND METHOD FOR PERFORMING MICROFLUIDIC MANIPULATION
    48.
    发明申请
    SYSTEM AND METHOD FOR PERFORMING MICROFLUIDIC MANIPULATION 失效
    用于执行微流控制的系统和方法

    公开(公告)号：US20100096267A1

    公开(公告)日：2010-04-22

    申请号：US12255962

    申请日：2008-10-22

    申请人： Jun Xie ,  Wei-Cheng Tian ,  Shashi Thutupalli ,  Li Zhu ,  Anthony John Murray ,  Erin Jean Finehout

    发明人： Jun Xie ,  Wei-Cheng Tian ,  Shashi Thutupalli ,  Li Zhu ,  Anthony John Murray ,  Erin Jean Finehout

    IPC分类号： G01N27/26

    CPC分类号： G01N27/44791

    摘要： Electrophoresis systems and methods comprise an electrophoresis device, wherein the electrophoresis comprises a loading channel, a separation channel, and an injection channel. The loading channel is in fluid communication with a first and second sample port. The separation channel is connected to the loading channel to form a first intersection, and an injection channel connected to the separation channel to form a second intersection and in fluid communication with a first reservoir, and wherein the separation channel is in fluid communication with a second reservoir. The electrophoresis system further comprises two electrodes coupled to the first sample port and the first reservoir, and the first sample port and the second reservoir, respectively, that are adapted to move the sample into the loading channel towards the first reservoir and form a sample plug in the separation channel, and to further move the sample plug into the separation channel towards the second reservoir.

    摘要翻译： 电泳系统和方法包括电泳装置，其中电泳包括加载通道，分离通道和注射通道。 装载通道与第一和第二采样端口流体连通。 分离通道连接到装载通道以形成第一交叉点，以及连接到分离通道以形成第二交叉并与第一储存器流体连通的注入通道，并且其中分离通道与第二交换流体连通 水库 电泳系统还包括分别耦合到第一样品端口和第一储存器的两个电极以及适于将样品移动到装载通道中以朝向第一储存器形成样品塞的第一样品端口和第二储存器 在分离通道中，并且进一步将样品塞进入分离通道朝向第二储存器。

    ITERATIVE STAINING OF BIOLOGICAL SAMPLES
    49.
    发明申请
    ITERATIVE STAINING OF BIOLOGICAL SAMPLES 审中-公开
    生物样本的迭代染色

    公开(公告)号：US20090253163A1

    公开(公告)日：2009-10-08

    申请号：US12061044

    申请日：2008-04-02

    申请人： Jun Xie ,  Fiona Ginty ,  Robert John Filkins ,  Michael Christopher Montalto ,  Anup Sood ,  Jeffrey Bernard Fortin ,  Wei-Cheng Tian ,  Michael John Gerdes

    发明人： Jun Xie ,  Fiona Ginty ,  Robert John Filkins ,  Michael Christopher Montalto ,  Anup Sood ,  Jeffrey Bernard Fortin ,  Wei-Cheng Tian ,  Michael John Gerdes

    IPC分类号： G01N1/30 ,  C12M1/34 ,  C12M1/36

    CPC分类号： G01N1/312

    摘要： Automated methods and devices that facilitate iterative staining of biological samples from imaging applications are provided. The methods include the steps of providing a small volume flow cell containing a biological sample, applying a stain to the biological sample, combining at least two precursor reagents to form an activated destaining agent and wherein the activated destaining agent decomposition rate is greater than or similar to the destaining reaction rate, and flowing the destaining agent over the biological sample at a flow rate that is greater than the decomposition rate of the activated destaining agent. The process of staining, combining and flowing may be iteratively repeated. Also disclosed herein are devices for iterative staining of biological samples comprising a flow cell, in fluid communication with a premixer, wherein the volume capacity of the premixer is smaller than about five times the volume capacity of the flow cell.

    摘要翻译： 提供了促进成像应用中生物样品的迭代染色的自动化方法和装置。 所述方法包括以下步骤：提供含有生物样品的小体积流动池，向生物样品施加染色，将至少两种前体试剂结合以形成活化的脱色剂，并且其中所述活化脱色剂分解速率大于或等于 与脱色反应速率相关联，并使脱色剂以大于活化脱色剂分解速率的流速流过生物样品。 染色，组合和流动的过程可以迭代地重复。 本文还公开了用于重复染色生物样品的装置，其包括与预混合器流体连通的流动池，其中预混合器的体积容量小于流动池的体积容量的约五倍。