公开(公告)号：US20240085624A1

公开(公告)日：2024-03-14

申请号：US17944252

申请日：2022-09-14

Applicant: GlobalFoundries U.S. Inc.

Inventor： Yusheng Bian ,  Steven M. Shank ,  Judson Holt ,  Michal Rakowski ,  Bartlomiej Jan Pawlak

IPC: G02B6/122 ,  G02B6/13

CPC classification number: G02B6/1228 ,  G02B6/13

Abstract: Structures including an electro-absorption modulator and methods of forming such structures. The structure comprises a waveguide core including a first tapered section, a second tapered section, and a longitudinal axis. The first tapered section and the second tapered section are aligned along the longitudinal axis. The structure further comprises a first waveguide taper overlapping the first tapered section of the waveguide core, a second waveguide taper overlapping the second tapered section of the waveguide core, and a multiple-layer structure on the waveguide core between the first waveguide taper and the second waveguide taper.

公开(公告)号：US11852867B2

公开(公告)日：2023-12-26

申请号：US17454063

申请日：2021-11-09

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Yusheng Bian ,  Bo Peng ,  Michal Rakowski

IPC: G02B6/122 ,  G02B6/12

CPC classification number: G02B6/1225 ,  G02B2006/1213 ,  G02B2006/12104

Abstract: The present disclosure generally relates to semiconductor devices for use in optoelectronic/photonic applications and integrated circuit (IC) chips. More particularly, the present disclosure relates to semiconductor devices having a reflector and a photonic component and a method of forming the same. The present disclosure provides a semiconductor device having a substrate, a photonic component arranged above the substrate, a bottom reflector arranged above the substrate and positioned below the photonic component, in which the bottom reflector has a plurality of grating structures configured to reflect electromagnetic waves towards the photonic component, and a top reflector arranged above the photonic component, in which the top reflector has a plurality of grating structures configured to reflect electromagnetic waves towards the photonic component.

公开(公告)号：US11555964B1

公开(公告)日：2023-01-17

申请号：US17363846

申请日：2021-06-30

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Michal Rakowski ,  Petar I. Todorov ,  Yusheng Bian ,  Won Suk Lee ,  Asif J. Chowdhury ,  Kenneth J. Giewont

IPC: G02B6/125 ,  G02F1/01 ,  G02B6/136 ,  G02B6/12

Abstract: Disclosed is a photonic structure and associated method. The structure includes a closed-curve waveguide having a first height, as measured from the top surface of an insulator layer, and an outer curved sidewall that extends essentially vertically the full first height (e.g., to minimize signal loss). The structure includes a closed-curve thermal coupler and a heating element. The closed-curve thermal coupler is thermally coupled to and laterally surrounded by the closed-curve waveguide and has a second height that is less than the first height. In some embodiments, the closed-curve waveguide and the closed-curve thermal coupler are continuous portions of the same semiconductor layer having different thicknesses. The heating element is thermally coupled to the closed-curve thermal coupler and thereby indirectly thermally coupled to the closed-curve waveguide. Thus, the heating element is usable for thermally tuning the closed-curve waveguide via the closed-curve thermal coupler to minimize any temperature-dependent resonance shift (TDRS).

公开(公告)号：US11500262B2

公开(公告)日：2022-11-15

申请号：US16842887

申请日：2020-04-08

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Bo Peng ,  Yusheng Bian ,  Michal Rakowski ,  Tymon Barwicz

IPC: G02F1/225 ,  G02B6/122 ,  H01S5/00 ,  G02F1/21 ,  H01S3/00 ,  G02F1/313

Abstract: One illustrative backscattering generator disclosed herein includes a low-reflection waveguide structure, a slot waveguide structure comprising a first waveguide, a second waveguide and a slot located between the first waveguide and the second waveguide, and a variable direction coupler operatively coupled to the low-reflection waveguide structure and the slot waveguide structure.

公开(公告)号：US20220291464A1

公开(公告)日：2022-09-15

申请号：US17196428

申请日：2021-03-09

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Nicholas A. Polomoff ,  Jae Kyu Cho ,  Frank Kuechenmeister ,  John J. Ellis-Monaghan ,  Michal Rakowski

IPC: G02B6/42 ,  G02B6/13 ,  F21V8/00 ,  G02B6/122

Abstract: Structures including an edge coupler and a crackstop, as well as methods of forming a structure including an edge coupler and a crackstop. A waveguide core and a crackstop are located over a top surface of a dielectric layer. A communication passageway is either optically coupled or electrically coupled to the waveguide core. The communication passageway, which may include an electric conductor or a buried waveguide core, extends laterally beneath the crackstop.

公开(公告)号：US20220252784A1

公开(公告)日：2022-08-11

申请号：US17170203

申请日：2021-02-08

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Alec Hammond ,  Yusheng Bian ,  Michal Rakowski ,  Won Suk Lee ,  Asif J. Chowdhury ,  Roderick A. Augur ,  Abdelsalam Aboketaf

IPC: G02B6/12 ,  G02B6/13 ,  G02B1/00

Abstract: Structures for a wavelength-division multiplexing filter and methods of forming a structure for a wavelength-division multiplexing filter. The structure includes a first slab having a first perimeter, a first waveguide core coupled to the first slab, and a plurality of second waveguide cores coupled to the first slab. A second slab is positioned to overlap with the first slab. The second slab includes a second perimeter and openings that are distributed inside the second perimeter. The openings of the second slab penetrate through the second slab.

公开(公告)号：US20220247148A1

公开(公告)日：2022-08-04

申请号：US17167201

申请日：2021-02-04

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Yusheng Bian ,  Roderick A. Augur ,  Michal Rakowski ,  Kenneth J. Giewont ,  Karen A. Nummy

IPC: H01S5/026 ,  H01S5/30 ,  H01S5/323

Abstract: A laser structure, including: a dielectric matrix formed of a first material; a laser source formed within the dielectric matrix and formed of a semiconductor material; and a plurality of side confining features formed within the dielectric matrix and extending parallel to and along a length of the laser source. The plurality of side confining features are formed of the semiconductor material.

公开(公告)号：US11322636B2

公开(公告)日：2022-05-03

申请号：US16799183

申请日：2020-02-24

Applicant: GLOBALFOUNDRIES U.S. INC.

Inventor： Asif J. Chowdhury ,  Ajey Poovannummoottil Jacob ,  Yusheng Bian ,  Michal Rakowski

IPC: H01L31/107 ,  H01L31/0232 ,  H01L31/02

Abstract: The present disclosure relates to semiconductor structures and, more particularly, to photodiode structures and methods of manufacture. The structure includes: a charge region having a first doping concentration and a variable width; a multiplication region adjacent to the charge region; and an absorption region adjacent to the variable width charge region.

公开(公告)号：US11199672B1

公开(公告)日：2021-12-14

申请号：US16901509

申请日：2020-06-15

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Judson Holt ,  Yusheng Bian ,  Andreas D. Stricker ,  Colleen Meagher ,  Michal Rakowski

IPC: G02B6/42 ,  H01L31/0232 ,  G02B6/12 ,  G02B6/13 ,  H01L31/18 ,  H01L31/028

Abstract: Structures for a photodetector and methods of fabricating a structure for a photodetector. A photodetector may have a light-absorbing layer comprised of germanium. A waveguide core may be coupled to the light-absorbing layer. The waveguide core may be comprised of a dielectric material, such as silicon nitride. Another waveguide core, which may be comprised of a different material such as single-crystal silicon, may be coupled to the light-absorbing layer.

公开(公告)号：US20210141156A1

公开(公告)日：2021-05-13

申请号：US16682502

申请日：2019-11-13

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Yusheng Bian ,  Ajey Poovannummoottil Jacob ,  Michal Rakowski ,  Bo Peng

IPC: G02B6/34

Abstract: Structures including a grating coupler and methods of fabricating such structures. The structure includes a waveguide core, a bend, and a grating coupler coupled to the waveguide core by the bend. The grating coupler includes grating structures that are positioned with a spaced relationship in a layer stack above the bend.