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公开(公告)号:US11189786B2
公开(公告)日:2021-11-30
申请号:US16587543
申请日:2019-09-30
Applicant: International Business Machines Corporation
Inventor: Reinaldo Vega , Takashi Ando , Jianshi Tang , Praneet Adusumilli
IPC: H01L45/00
Abstract: Tapered resistive memory devices with interface dipoles are provided. In one aspect, a ReRAM device includes: a bottom electrode; a core dielectric that is thermally conductive disposed on the bottom electrode; an oxide resistive memory cell disposed along outer sidewalls of the core dielectric, wherein the oxide resistive memory cell has inner edges adjacent to the core dielectric, and outer edges that are tapered; an outer coating disposed adjacent to the outer edges of the oxide resistive memory cell; and a top electrode disposed on the core dielectric, the oxide resistive memory cell, and the outer coating. A method of forming a ReRAM device as well as a method of operating a ReRAM device are also provided.
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公开(公告)号:US11164908B2
公开(公告)日:2021-11-02
申请号:US16422344
申请日:2019-05-24
Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
Inventor: Jianshi Tang , Takashi Ando , Reinaldo Vega , Praneet Adusumilli
Abstract: A semiconductor device with an array of vertically stacked electrochemical random-access memory (ECRAM) devices, includes holes formed in a vertical stack of horizontal electrodes. The horizontal electrodes are horizontally aligned and stacked vertically at different vertical levels within the vertical stack and separated by first fill layers. The semiconductor device includes a stack deposition, including a channel layer, and an electrolyte layer, formed over the vertical stack and holes. Selector layers fill holes. The selector layers include an inner selector layer and outer selector layers. The channel layer, the electrolyte layer and outer selector layers are recessed to the inner selector layer and a fill layer is deposited over the vertical stack. The fill layer has been reduced down to the top of the inner selector layer.
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公开(公告)号:US11145811B2
公开(公告)日:2021-10-12
申请号:US16655038
申请日:2019-10-16
Applicant: International Business Machines Corporation
Inventor: Takashi Ando , Jianshi Tang , Praneet Adusumilli , Reinaldo Vega
Abstract: Resistive memory with core and shell oxides and interface dipoles for controlled filament formation is provided. In one aspect, a ReRAM device includes at least one ReRAM cell having a substrate; a bottom electrode disposed on the substrate; spacers formed from a low group electron negativity material disposed on the bottom electrode; a core formed from a high group electron negativity material present between the spacers; and a top electrode over and in contact with the spacers and the core, wherein a combination of the low group electron negativity material for the spacers and the high group electron negativity material for the core generates an interface dipole pointing toward the core. Methods of forming and operating a ReRAM device are also provided.
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公开(公告)号:US11050023B2
公开(公告)日:2021-06-29
申请号:US16458857
申请日:2019-07-01
Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
Inventor: Jianshi Tang , Takashi Ando , Reinaldo Vega , Praneet Adusumilli
Abstract: Devices with settable resistance and methods of forming the same include forming vertical dielectric structures from heterogeneous dielectric materials on a first electrode. A second electrode is formed on the vertical dielectric structures.
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公开(公告)号:US20200051979A1
公开(公告)日:2020-02-13
申请号:US16101659
申请日:2018-08-13
Applicant: International Business Machines Corporation
Inventor: Takashi Ando , Reinaldo Vega , Choonghyun Lee , Hari Mallela , Li-Wen Hung
IPC: H01L27/092 , H01L21/8238 , H01L21/28 , H01L29/51 , H01L29/423 , H01L29/49
Abstract: Multi-voltage threshold vertical transport transistors and methods of fabrication generally include forming the transistors with vertically oriented silicon fin channels for both the n-type doped field effect transistors (nFET) and the p-type doped field effect transistors (pFET). A silicon oxynitride interfacial layer is provided on sidewalls of the fins in the nFET and a silicon dioxide interfacial with aluminum is provided on sidewalls of the fins in the pFET to provide an aluminum induced dipole. A high k dielectric overlays the interfacial layers and a common work function metal overlays the high k dielectric layer to define a gate structure.
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公开(公告)号:US10170485B2
公开(公告)日:2019-01-01
申请号:US16010589
申请日:2018-06-18
Applicant: International Business Machines Corporation
Inventor: Michael A. Guillorn , Robert R. Robison , Reinaldo Vega , Rajasekhar Venigalla
IPC: H01L29/423 , H01L27/11 , H01L21/84 , H01L21/822 , H01L29/417 , H01L29/78 , H01L29/786
Abstract: A structure comprises a first channel region forming an n-channel device; a second channel region forming a p-channel device, the p-channel device being stacked with the n-channel device in a vertical orientation; a gate positioned around the stacked n-channel device and p-channel device; and at least one source region and at least one drain region extending from each of the n-channel device and the p-channel device. Each of the at least one source region and the at least one drain region within the stacked n-channel device and p-channel device are independently contacted.
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公开(公告)号:US10128347B2
公开(公告)日:2018-11-13
申请号:US15398225
申请日:2017-01-04
Applicant: International Business Machines Corporation
Inventor: Ruqiang Bao , Michael A. Guillorn , Terence Hook , Robert R. Robison , Reinaldo Vega , Tenko Yamashita
IPC: H01L29/66 , H01L29/423 , H01L29/78 , H01L29/49
Abstract: One example of an apparatus includes a conducting channel region. The conducting channel region includes a plurality of epitaxially grown, in situ doped conducting channels arranged in a spaced apart relation relative to each other. A source positioned at a first end of the conducting channel region, and a drain positioned at a second end of the conducting channel region. A gate surrounds all sides of the conducting channel region and fills in spaces between the plurality of epitaxially grown, in situ doped conducting channels.
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公开(公告)号:US20180190782A1
公开(公告)日:2018-07-05
申请号:US15398225
申请日:2017-01-04
Applicant: International Business Machines Corporation
Inventor: Ruqiang Bao , Michael A. Guillorn , Terence Hook , Robert R. Robison , Reinaldo Vega , Tenko Yamashita
IPC: H01L29/423 , H01L29/66 , H01L29/78 , H01L29/49
CPC classification number: H01L29/42392 , H01L29/495 , H01L29/4966 , H01L29/66545 , H01L29/6656 , H01L29/66795 , H01L29/785
Abstract: One example of an apparatus includes a conducting channel region. The conducting channel region includes a plurality of epitaxially grown, in situ doped conducting channels arranged in a spaced apart relation relative to each other. A source positioned at a first end of the conducting channel region, and a drain positioned at a second end of the conducting channel region. A gate surrounds all sides of the conducting channel region and fills in spaces between the plurality of epitaxially grown, in situ doped conducting channels.
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公开(公告)号:US09305835B2
公开(公告)日:2016-04-05
申请号:US14190641
申请日:2014-02-26
Applicant: International Business Machines Corporation
Inventor: Emre Alptekin , Viraj Sardesai , Cung Tran , Reinaldo Vega
IPC: H01L21/76 , H01L21/4763 , H01L21/70 , H01L21/768 , H01L21/28 , H01L21/283
CPC classification number: H01L21/7682 , H01L21/28008 , H01L21/283 , H01L21/76877 , H01L21/76897 , H01L29/4991 , H01L29/6653 , H01L29/78 , H01L2221/1063
Abstract: Embodiments of present invention provide a method of forming air spacers in a transistor structure. The method includes forming a gate structure of a transistor on top of a semiconductor substrate; forming a first and a second disposable spacers adjacent to a first and a second sidewall of the gate structure; forming a first and a second conductive studs next to the first and the second disposable spacer; removing the first and second disposable spacers to create empty spaces between the first and second conductive studs and the gate structure; and preserving the empty spaces by forming dielectric plugs at a top of the empty spaces.
Abstract translation: 本发明的实施例提供了一种在晶体管结构中形成空气间隔物的方法。 该方法包括在半导体衬底的顶部上形成晶体管的栅极结构; 形成邻近所述栅极结构的第一和第二侧壁的第一和第二一次性间隔件; 在第一和第二一次性间隔件旁边形成第一和第二导电柱; 去除所述第一和第二一次性间隔件以在所述第一和第二导电柱和所述栅结构之间产生空的空间; 并通过在空的空间的顶部形成电介质塞来保留空的空间。
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公开(公告)号:US20250118661A1
公开(公告)日:2025-04-10
申请号:US18483913
申请日:2023-10-10
Applicant: International Business Machines Corporation
Inventor: Nicholas Anthony Lanzillo , Lawrence A. Clevenger , Reinaldo Vega , Ruilong Xie , Albert M. Chu , Brent A. Anderson
IPC: H01L23/528 , H01L21/768 , H01L23/522 , H01L23/532
Abstract: A semiconductor structure includes an interconnect wiring level having metal lines. An insulating cut shape is disposed through a run length of one of the metal lines wherein the insulating cut shape divides the one of the metal lines into electrically isolated nets.
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