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47 条记录 (耗时 0.031 秒)

    Gas discharge laser chamber improvements
    41.
    发明授权
    Gas discharge laser chamber improvements 有权

    公开(公告)号：US07522650B2

    公开(公告)日：2009-04-21

    申请号：US10815387

    申请日：2004-03-31

    申请人： William N. Partlo ,  Yoshiho Amada ,  James A. Carmichael ,  Timothy S. Dyer ,  Walter D. Gillespie ,  Bryan G. Moosman ,  Richard G. Morton ,  Curtis L. Rettig ,  Brian D. Strate ,  Thomas D. Steiger ,  Fedor Trintchouk ,  Richard C. Ujazdowski

    发明人： William N. Partlo ,  Yoshiho Amada ,  James A. Carmichael ,  Timothy S. Dyer ,  Walter D. Gillespie ,  Bryan G. Moosman ,  Richard G. Morton ,  Curtis L. Rettig ,  Brian D. Strate ,  Thomas D. Steiger ,  Fedor Trintchouk ,  Richard C. Ujazdowski

    IPC分类号： H01S3/22

    CPC分类号： H01S3/036 ,  H01S3/0384 ,  H01S3/041 ,  H01S3/0971 ,  H01S3/225

    摘要： A method and apparatus if disclosed which may comprise a high power high repetition rate gas discharge laser UV light source which may comprise: a gas discharge chamber comprising an interior wall comprising a vertical wall and an adjacent bottom wall; a gas circulation fan creating a gas flow path adjacent the interior vertical wall and the adjacent bottom wall; an in-chamber dust trap positioned a region of low gas flow, which may be along an interior wall and may comprise at least one meshed screen, e.g., a plurality of meshed screens, which may comprise at least two different gauge meshed screens. The dust trap may extend along the bottom interior wall of the chamber and/or a vertical portion of the interior wall. The dust trap may comprise a first meshed screen having a first gauge; a second meshed screen having a second gauge smaller than the first gauge; and the second meshed screen intermediate the first meshed screen and the interior wall. The chamber may comprise a plurality of dust collecting recesses in at least one of the vertical interior wall and the bottom wall of the chamber which may be selected from a group comprising a one-part recess and a multi-part recess, which may comprise two sections angled with respect to each other. The dust trap may comprise a pressure trap positioned between a portion of a main insulator and an interior wall of the chamber. The chamber may comprise a gas circulating fan comprising a cross-flow fan with a fan cutoff that may comprise a vortex control pocket. The chamber may comprise a preionization mechanism comprising a preionization tub containing a ground rod within an elongated opening in the preionization tube that may comprise a compliant member, an automatic preionization shut-off mechanism, a preionization onset control mechanism and/or a focusing element. The chamber may comprise an elongated baffle plate that may comprise a plurality of pyramidal structures including varying numbers of generally pyramidal elements and oriented in groups of varying numbers of generally pyramidal elements and oriented along and transverse to the longitudinal axis. Acoustic resonances within the chamber may also be reduced by introducing an artificial jitter into the timing of the laser discharges varying the inter-pulse period randomly or in a repeating pattern from pulse to pulse within a burst.

    Cross-flow fan impeller for a transversley excited, pulsed, gas discharge laser
    42.
    发明申请
    Cross-flow fan impeller for a transversley excited, pulsed, gas discharge laser 有权
    横流风扇叶轮，用于横向激励，脉冲式，气体放电激光器

    公开(公告)号：US20080310960A1

    公开(公告)日：2008-12-18

    申请号：US11818829

    申请日：2007-06-15

    申请人： Yoshiho Amada ,  Thomas D. Steiger ,  Richard C. Ujazdowski

    发明人： Yoshiho Amada ,  Thomas D. Steiger ,  Richard C. Ujazdowski

    IPC分类号： F01D5/14

    CPC分类号： F04D29/283 ,  F04D17/04 ,  F04D29/666 ,  H01S3/036 ,  H01S3/09713

    摘要： A cross-flow fan impeller for circulating gas in a transversely excited, pulsed, gas discharge laser is disclosed and may comprise a plurality of hubs, the hubs spaced apart along the impeller's rotation axis and establishing at least two impeller segments wherein a first segment has an output flow within 80-120% of a second segment and the first and second segment having differing blade pass frequencies. In some embodiments of this aspect, the first segment may have n number of blades the second segment m number of blades, and m≢n. In one embodiment, the impeller may be configured with n=29 and m=23 and in another embodiment, the impeller may be configured with n=23 and m=19. The impeller may be configured wherein n and m are prime numbers.

    摘要翻译： 公开了一种用于在横向激发的脉冲式气体放电激光器中循环气体的横流风扇叶轮，并且可以包括多个毂，所述轮毂沿着叶轮的旋转轴线间隔开并且建立至少两个叶轮段，其中第一段具有 输出流在第二段的80-120％之内，第一和第二段具有不同的叶片通过频率。 在该方面的一些实施例中，第一段可以具有n个叶片，第二段m个叶片，并且mnn。 在一个实施例中，叶轮可以配置为n = 29和m = 23，在另一个实施例中，叶轮可以配置为n = 23和m = 19。 可以配置叶轮，其中n和m是素数。

    Window assembly for a gas discharge laser chamber
    43.
    发明申请
    Window assembly for a gas discharge laser chamber 审中-公开
    气体放电激光室窗组件

    公开(公告)号：US20080013589A1

    公开(公告)日：2008-01-17

    申请号：US11488879

    申请日：2006-07-17

    申请人： John T. Melchior ,  Richard C. Ujazdowski ,  James K. Howey

    发明人： John T. Melchior ,  Richard C. Ujazdowski ,  James K. Howey

    IPC分类号： H01S3/08

    CPC分类号： H01S3/034 ,  H01S3/0346 ,  H01S3/225

    摘要： A window assembly for a pressurized laser discharge chamber is disclosed and may include a housing that is formed with a recess. The assembly may also include an optic having a first side that is exposed to chamber pressure and an opposed second side, and a compliant member that may be positioned in the recess to space the second side of the optic from the housing under normal chamber operating pressures. For the assembly, the compliant member may be compressible to allow the optic to mechanically abut the assembly housing during a chamber overpressure.

    摘要翻译： 公开了一种用于加压激光放电室的窗组件，并且可以包括形成有凹部的壳体。 组件还可以包括具有暴露于腔室压力的第一侧面和相对的第二侧面的光学元件，以及柔性构件，其可以定位在凹部中，以在正常室操作压力下将光学元件的第二侧与壳体间隔开 。 对于组件，柔性构件可以是可压缩的，以允许光学器件在腔室超压期间机械地邻接组件壳体。

    Flow shaping electrode with erosion pad for gas discharge laser
    46.
    发明授权
    Flow shaping electrode with erosion pad for gas discharge laser 有权
    流动成型电极，带气体放电激光器的冲蚀垫

    公开(公告)号：US06654403B2

    公开(公告)日：2003-11-25

    申请号：US09748317

    申请日：2000-12-22

    申请人： Richard C. Ujazdowski ,  Michael C. Cates ,  Richard G. Morton

    发明人： Richard C. Ujazdowski ,  Michael C. Cates ,  Richard G. Morton

    IPC分类号： H01S3097

    CPC分类号： G03F7/70025 ,  G03F7/70041 ,  G03F7/70575 ,  G03F7/708 ,  H01S3/036 ,  H01S3/038 ,  H01S3/0381 ,  H01S3/0385 ,  H01S3/0387 ,  H01S3/0979 ,  H01S3/223 ,  H01S3/225

    摘要： An excimer laser with a laser chamber containing a circulating laser gas containing fluorine and a set of long life electrode structures. At least one of the electrode structures has an erosion pad and a cross section shape designed to provide in conjunction with other chamber structure a gradual increasing flow cross section between the discharge region and the circulating tangential fan blade. In a preferred embodiment, electrode lifetime is increased by annealing the erosion rod after it is are machined. This annealing relieves the surface stress caused by the machining operation and reduces the exposed metallic grain boundary length per unit area on the surface of the electrodes, which provides substantial reduction in erosion caused by fluorine chemical attack. Annealing after machining also reduces the stress throughout the bulk of the electrode material. In preferred embodiments the anode is a copper-aluminum alloy and the cathode is a copper-zinc alloy.

    摘要翻译： 具有激光室的准分子激光器，其包含含有氟的循环激光气体和一组长寿命的电极结构。 电极结构中的至少一个具有冲蚀焊盘和横截面形状，其设计成与其他腔室结构一起提供在放电区域和循环切向风扇叶片之间逐渐增加的流动横截面。 在优选的实施方案中，通过在侵蚀棒被加工之后对其进行退火来增加电极寿命。 该退火减轻了加工操作引起的表面应力，降低了电极表面单位面积暴露的金属晶界长度，大大减少了氟化学侵蚀引起的侵蚀。 加工后的退火也可以减少整个电极材料的应力。 在优选实施例中，阳极是铜 - 铝合金，阴极是铜 - 锌合金。