公开(公告)号：US20060071161A1

公开(公告)日：2006-04-06

申请号：US10522638

申请日：2003-07-29

Applicant: Richard Syms

Inventor： Richard Syms

IPC: B01D59/44

CPC classification number: H01J49/4215 ,  H01J49/0018

Abstract: A method of constructing a micro-engineered mass spectrometer from bonded silicon-on-insulator (BSOI) wafers is described with reference to a quadrupole spectrometer. The quadrupole geometry is achieved using two BSOI wafers (200), which are bonded together to form a monolithic block (410). Deep etched features and springs formed in the outer silicon layers are used to locate cylindrical metallic electrode rods (300). The precision of the assembly is determined by a combination of lithography and deep etching, and by the mechanical definition of the bonded silicon layers. Deep etched features formed in the inner silicon layers are used to define ion entrance and ion collection optics. Other features such as fluidic channels may be incorporated.

Abstract translation: 参考四极谱仪描述从粘合的绝缘体上硅（BSOI）晶片构建微型工程质谱仪的方法。 使用两个BSOI晶片（200）实现四极几何形状，其结合在一起以形成整体块（410）。 形成在外硅层中的深蚀刻特征和弹簧用于定位圆柱形金属电极棒（300）。 组件的精度通过光刻和深蚀刻的组合以及粘合硅层的机械定义来确定。 内部硅层中形成的深蚀刻特征用于限定离子入射和离子收集光学。 可并入其它特征如流体通道。

公开(公告)号：US06969470B2

公开(公告)日：2005-11-29

申请号：US10692457

申请日：2003-10-23

Applicant: James E. Moon ,  Timothy J. Davis ,  Gregory J. Galvin ,  Kevin A. Shaw ,  Paul C. Waldrop ,  Sharlene A. Wilson

Inventor： James E. Moon ,  Timothy J. Davis ,  Gregory J. Galvin ,  Kevin A. Shaw ,  Paul C. Waldrop ,  Sharlene A. Wilson

IPC: G01N37/00 ,  B01D15/08 ,  B05B5/00 ,  B81B1/00 ,  B81C1/00 ,  H01L21/302 ,  H01L21/3065 ,  B81B7/02

CPC classification number: B05B5/00 ,  H01J49/0018 ,  H01J49/167 ,  Y10S438/942

Abstract: Three fundamental and three derived aspects of the present invention are disclosed. The three fundamental aspects each disclose a process sequence that may be integrated in a full process. The first aspect, designated as “latent masking”, defines a mask in a persistent material like silicon oxide that is held abeyant after definition while intervening processing operations are performed. The latent oxide pattern is then used to mask an etch. The second aspect, designated as “simultaneous multi-level etching (SMILE)”, provides a process sequence wherein a first pattern may be given an advanced start relative to a second pattern in etching into an underlying material, such that the first pattern may be etched deeper, shallower, or to the same depth as the second pattern. The third aspect, designated as “delayed LOCOS”, provides a means of defining a contact hole pattern at one stage of a process, then using the defined pattern at a later stage to open the contact holes. The fourth aspect provides a process sequence that incorporates all three fundamental aspects to fabricate an integrated liquid chromatography (LC)/electrrospray ionization (ESI) device. The fifth aspect provides a process sequence that incorporates two of the fundamental aspects to fabricate an ESI device. The sixth aspect provides a process sequence that incorporates two of the fundamental aspects to fabricate an LC device. The process improvements described provide increased manufacturing yield and design latitude in comparison to previously disclosed methods of fabrication.

Abstract translation: 公开了本发明的三个基本和三个派生方面。 三个基本方面各自公开了可以整合到完整过程中的过程序列。 第一方面，被指定为“潜屏蔽”，定义了在固定材料（例如氧化硅）中的掩模，该掩模在定义之后被保持为静止，而执行中间处理操作。 然后将潜在氧化物图案用于掩模蚀刻。 指定为“同时多级蚀刻（SMILE）”的第二方面提供了一种处理顺序，其中在蚀刻到下面的材料中第一图案可相对于第二图案被赋予高级开始，使得第一图案可以是 蚀刻成更深，更浅或与第二图案相同的深度。 指定为“延迟LOCOS”的第三方面提供了在过程的一个阶段定义接触孔图案的方法，然后在稍后阶段使用限定的图案来打开接触孔。 第四方面提供了一个整合液相色谱（LC）/电喷雾离子化（ESI）装置的所有三个基本方面的过程序列。 第五方面提供了一种结合两个基本方面来制造ESI装置的过程序列。 第六方面提供了一种结合两个基本方面来制造LC器件的过程序列。 与先前公开的制造方法相比，所描述的工艺改进提供了增加的制造产量和设计自由度。

公开(公告)号：US06967326B2

公开(公告)日：2005-11-22

申请号：US10789091

申请日：2004-02-27

Applicant: Chien-Shing Pai ,  Stanley Pau ,  Joseph Ashley Taylor

Inventor： Chien-Shing Pai ,  Stanley Pau ,  Joseph Ashley Taylor

IPC: G01N27/62 ,  B01D59/44 ,  H01J49/00 ,  H01J49/26 ,  H01J49/28 ,  H01J49/42

CPC classification number: H01J49/0018 ,  H01J49/424

Abstract: An apparatus includes a semiconductor or dielectric wafer-substrate and first and second multi-layer structures located over the wafer-substrate. The first multi-layer structure includes an ionizer or an electronic ion detector. The second multi-layer structure includes an ion trap having entrance and exit ports. The ionizer or electronic ion detector has a port coupled to one of the ports of the ion trap.

Abstract translation: 一种装置包括半导体或电介质晶片衬底以及位于晶片衬底之上的第一和第二多层结构。 第一多层结构包括离子发生器或电子离子检测器。 第二多层结构包括具有入口和出口的离子阱。 离子发生器或电子离子检测器具有耦合到离子阱的一个端口的端口。

公开(公告)号：US06967324B2

公开(公告)日：2005-11-22

申请号：US10644463

申请日：2003-08-20

Applicant: Paul C. Goodley ,  Jean-Luc Truche

Inventor： Paul C. Goodley ,  Jean-Luc Truche

IPC: H01J49/04 ,  H01J49/00 ,  H01J49/40 ,  B01D54/44

CPC classification number: H01J49/167 ,  H01J49/0018 ,  H01J49/04

Abstract: A source of ions for an analyzer includes a reservoir for containing a liquid, a manifold having a plurality of nozzles, a conduit connecting the reservoir to the manifold and a counter electrode having a potential difference between the counter electrode and the nozzles to enable liquid to be ejected from the nozzles in droplets and to enable ions to be ejected from the droplets.

Abstract translation: 用于分析器的离子源包括用于容纳液体的储存器，具有多个喷嘴的歧管，将储存器连接到歧管的导管和在对电极和喷嘴之间具有电位差的对电极， 从喷嘴喷出液滴，并使离子从液滴中喷出。

公开(公告)号：US20050178960A1

公开(公告)日：2005-08-18

申请号：US11082329

申请日：2005-03-17

Applicant: Jun Kameoka ,  Harold Craighead

Inventor： Jun Kameoka ,  Harold Craighead

IPC: G01N30/72 ,  H01J49/04 ,  H01J49/16 ,  B01D59/44

CPC classification number: H01J49/165 ,  G01N30/7266 ,  H01J49/0018 ,  G01N30/6095

Abstract: An electrospray ionization device incorporates a shaped thin film with a microfluidic channel. The device may be interfaced to a time-of-flight mass spectrometer (TFOMS). In one embodiment, the shaped thin film has a polygonal-shaped or triangle-shaped thin polymer tip formed by lithography and etching. The microfluidic channel is approximately 20 micrometer wide and 10 micrometers deep, and embossed in a substrate using a silicon master. The shaped thin film is aligned with the channel and bonded between the channel substrate and a flat plate to create a microfluidic channel with a wicking tip protruding from the end of the channel. Application of a high voltage at one end of the channel creates an electrospray from the tip, which is provided to the TFOMS.

Abstract translation: 电喷雾离子化装置结合了具有微流体通道的成形薄膜。 该装置可以连接到飞行时间质谱仪（TFOMS）。 在一个实施例中，成形薄膜具有通过光刻和蚀刻形成的多边形或三角形的薄聚合物尖端。 微流体通道约20微米宽和10微米深，并使用硅母版在基底上压花。 成形的薄膜与通道对准并且结合在通道基板和平板之间以产生具有从通道的端部突出的吸液尖端的微流体通道。 在通道的一端施加高电压从尖端产生电喷雾，其提供给TFOMS。

公开(公告)号：US06855251B2

公开(公告)日：2005-02-15

申请号：US10771553

申请日：2004-02-04

Applicant: James E. Moon ,  Timothy J. Davis ,  Gregory J. Galvin ,  Gary A. Schultz ,  Thomas N. Corso ,  Stephen Lowes

Inventor： James E. Moon ,  Timothy J. Davis ,  Gregory J. Galvin ,  Gary A. Schultz ,  Thomas N. Corso ,  Stephen Lowes

IPC: G01N27/62 ,  B01D15/08 ,  G01N30/60 ,  G01N30/72 ,  G01N37/00 ,  H01J49/04 ,  H01J49/10

CPC classification number: G01N30/6095 ,  G01N30/7266 ,  G01N2030/6013 ,  H01J49/0018 ,  H01J49/167 ,  Y10T436/24 ,  Y10T436/2575

Abstract: An electrospray device is disclosed. The electrospray device comprises a substrate defining a channel between an entrance orifice on an injection surface and an exit orifice on an ejection surface, a nozzle defined by a portion recessed from the ejection surface surrounding the exit orifice, and an electrode for application of an electric potential to the substrate to optimize and generate an electrospray; and, optionally, additional electrode(s) to further modify the electrospray.

Abstract translation: 公开了一种电喷雾装置。 电喷雾装置包括：基材，其限定在喷射表面上的入口孔与喷射表面上的出口孔之间的通道;由从出射孔周围的喷射表面凹陷的部分限定的喷嘴;以及用于施加电 对基板进行优化和产生电喷雾的潜力; 和可选的附加电极以进一步改变电喷雾。

公开(公告)号：US20050029443A1

公开(公告)日：2005-02-10

申请号：US10932986

申请日：2004-09-02

Applicant: Raanan Miller ,  Erkinjon Nazarov ,  Gary Eiceman ,  Evgeny Krylov ,  Boris Tadjikov

Inventor： Raanan Miller ,  Erkinjon Nazarov ,  Gary Eiceman ,  Evgeny Krylov ,  Boris Tadjikov

IPC: G01N27/62 ,  B01D59/44 ,  G01N27/64 ,  G01N30/64 ,  G01N30/72 ,  H01J49/06 ,  H01J49/10 ,  H01J49/40 ,  H01J49/42 ,  H01J49/00

CPC classification number: G01N27/624 ,  G01N27/62 ,  G01N27/64 ,  G01N30/7206 ,  G01N2030/0095 ,  H01J49/0018 ,  H01J49/0022

Abstract: Method and apparatus for chromatographic high field asymmetric waveform ion mobility spectrometry, including a gas chromatographic analyzer section intimately coupled with an ionization section, an ion filter section, and an ion detection section, in which the sample compounds are at least somewhat separated prior to ionization, and ion filtering proceeds in a planar chamber under influence of high field asymmetric periodic signals, with detection integrated into the flow path, for producing accurate, real-time, orthogonal data for identification of a broad range of chemical compounds.

公开(公告)号：US20050000569A1

公开(公告)日：2005-01-06

申请号：US10794572

申请日：2004-03-04

Applicant: Luc Bousse ,  Mingqi Zhao ,  John Stults ,  Jing Ni ,  Jonathan Heller ,  Uthara Srinivasan

Inventor： Luc Bousse ,  Mingqi Zhao ,  John Stults ,  Jing Ni ,  Jonathan Heller ,  Uthara Srinivasan

IPC: F15C1/04 ,  F16L58/04 ,  G01N20060101 ,  H01J49/04 ,  H01J49/16

CPC classification number: H01J49/0018 ,  H01J49/165 ,  Y10T137/0402 ,  Y10T137/2082 ,  Y10T137/2191 ,  Y10T137/2224 ,  Y10T137/7036 ,  Y10T436/2575

Abstract: Microfluidic devices provide substances to a mass spectrometer. The microfluidic devices include first and second surfaces, at least one microchannel formed by the surfaces, and an outlet at an edge of the surfaces. Some embodiments also include a tip surface with one or more surface features for helping guide substances from the outlet of the device toward a mass spectrometer. In some embodiments, the surface feature(s) includes a groove, which may be hydrophilic along all or part of its length. Hydrophilic surfaces and/or hydrophobic surfaces may also help guide substances out of the outlet and/or toward the mass spectrometer. In some embodiments, the outlet and/or the tip surface is recessed back from an adjacent portion of the edge. A source of electrical potential can help move substances through the microchannel, separate substances and/or provide electrospray ionization.

Abstract translation: 微流体装置向质谱仪提供物质。 微流体装置包括第一和第二表面，由表面形成的至少一个微通道和表面边缘处的出口。 一些实施例还包括具有一个或多个表面特征的尖端表面，用于帮助将物质从装置的出口引向质谱仪。 在一些实施例中，表面特征包括凹槽，其可以沿其长度的全部或部分亲水。 亲水表面和/或疏水表面还可以帮助将物质引出出口和/或朝向质谱仪。 在一些实施例中，出口和/或尖端表面从边缘的相邻部分向后凹陷。 电势源可以帮助物质通过微通道，分离物质和/或提供电喷雾电离。

公开(公告)号：US20040222382A1

公开(公告)日：2004-11-11

申请号：US10786229

申请日：2004-02-26

Applicant: Ionfinity LLC

Inventor： Frank T. Hartley

IPC: H01J027/00

CPC classification number: H01J49/168 ,  G01N2223/612 ,  H01J3/027 ,  H01J3/04 ,  H01J27/02 ,  H01J27/26 ,  H01J37/08 ,  H01J49/0018 ,  H01J49/0427 ,  H01J2237/061 ,  H01J2237/0815 ,  H01J2237/317

Abstract: Devices are disclosed that incorporate an ionization device for generating ions and electrons having first and second conductive electrodes that are separated by less than the mean-free-path of molecules being ionized. Electrons generated by the ionization device may be used for applications such as light sources, electron bombardment sensors, thyratrons, vacuum tubes, plasma displays, and microwave switches, and ions generated by the ionization device may be used, inter alia, in connection with ion focused milling devices, maskless ion implantation devices, ion beam lithography devices, semiconductor mask modification devices, and semiconductor chip wiring devices. Methods of use and manufacture are also provided.

Abstract translation: 公开了包括用于产生离子的电离装置的装置，该离子和电子具有通过小于被离子化的分子的平均自由路径分开的第一和第二导电电极。 由电离装置产生的电子可用于诸如光源，电子轰击传感器，闸流管，真空管，等离子体显示器和微波开关等应用，并且离子化装置产生的离子尤其可以用于离子 聚焦铣削装置，无掩模离子注入装置，离子束光刻装置，半导体掩模修改装置和半导体芯片布线装置。 还提供了使用和制造方法。

公开(公告)号：US06814870B2

公开(公告)日：2004-11-09

申请号：US10658008

申请日：2003-09-09

Applicant: Sheng Zhang ,  Xian Huang ,  Thomas N. Corso ,  Gary A. Schultz ,  Simon J. Prosser

Inventor： Sheng Zhang ,  Xian Huang ,  Thomas N. Corso ,  Gary A. Schultz ,  Simon J. Prosser

IPC: B01D1508

CPC classification number: G01N30/6095 ,  B01D15/3804 ,  B01J20/28042 ,  B01J20/285 ,  B01J20/286 ,  B01J20/321 ,  B01J20/3212 ,  B01J20/3219 ,  B01J20/3244 ,  B01J20/3251 ,  B01J20/3274 ,  B01J45/00 ,  B01J2220/52 ,  B01J2220/54 ,  B01J2220/58 ,  B01J2220/82 ,  G01N30/463 ,  G01N30/466 ,  G01N30/482 ,  G01N30/7266 ,  G01N2030/528 ,  H01J49/0018 ,  H01J49/167

Abstract: A microchip-based electrospray ionization device and column with affinity adsorbents is disclosed. The invention includes a microchip array and a capillary tube or alone or attached in combination. At least a portion of the device or column has immobilized affinity adsorbents. Methods for using the device are provided as well for affinity capture of biomolecules to meet the needs for the modem life sciences such as proteomics and drug discover.

Abstract translation: 公开了一种基于微芯片的电喷雾离子化装置和具有亲和吸附剂的柱。 本发明包括微芯片阵列和毛细管，或单独或组合连接。 装置或柱的至少一部分具有固定的亲和吸附剂。 还提供了使用该装置的方法用于亲和捕获生物分子以满足现代生命科学如蛋白质组学和药物发现的需要。