公开(公告)号：US08827617B2

公开(公告)日：2014-09-09

申请号：US13764373

申请日：2013-02-11

Applicant: Brooks Automation, Inc.

Inventor： Christopher Hofmeister ,  Robert T. Caveney

IPC: H01L21/677 ,  H01L21/67

CPC classification number: H01L21/677 ,  H01L21/67161 ,  H01L21/67167 ,  H01L21/67173 ,  H01L21/67184 ,  H01L21/67709 ,  H01L21/67724 ,  H01L21/67727 ,  H01L21/67742 ,  H01L21/67766 ,  Y10S414/139

Abstract: A substrate processing apparatus including a transport chamber having an end and defining more than one substantially linear substrate transport zone where each transport zone extends longitudinally along the transport chamber between opposing walls of the transport chamber and at least one of the more than one substantially linear substrate transport zones is configured as a supply zone for enabling transport of substrates from the end and at least one of the more than one substantially linear substrate transport zones is configured as a return zone for enabling transport of substrates to the end, and at least one substrate transport located in and movably mounted to the transport chamber for transporting substrates along the more than one substantially linear substrate transport zone, where each substrate transport zone is configured to allow the at least one substrate transport to move from one transport zone to another transport zone.

Abstract translation: 一种基板处理设备，包括具有端部并且限定多于一个基本上线性的基板输送区域的输送室，其中每个输送区域沿着输送室在输送室的相对壁之间纵向延伸，并且多于一个基本上线性的基板 运输区域被配置为用于使得能够从端部传送基板的供应区域，并且多于一个的基本线性的基板输送区域中的至少一个被配置为用于使基板传送到端部的返回区域，以及至少一个基板 位于并可移动地安装到输送室的输送器，用于沿着多于一个的基本上线性的基底输送区输送基底，其中每个基底输送区被配置为允许至少一个基底输送从一个输送区移动到另一个输送区。

公开(公告)号：US20140201571A1

公开(公告)日：2014-07-17

申请号：US13739831

申请日：2013-01-11

Applicant: BROOKS AUTOMATION, INC.

Inventor： Martin HOSEK ,  Jay KRISHNASAMY ,  Jan PROCHAZKA

IPC: G06F11/22

CPC classification number: G05B23/0283 ,  B25J9/1674 ,  G05B19/41875 ,  G05B23/0221 ,  G06F11/2257

Abstract: A system for condition monitoring and fault diagnosis includes a data collection function that acquires time histories of selected variables for one or more of the components, a pre-processing function that calculates specified characteristics of the time histories, an analysis function for evaluating the characteristics to produce one or more hypotheses of a condition of the one or more components, and a reasoning function for determining the condition of the one or more components from the one or more hypotheses.

Abstract translation: 用于状态监视和故障诊断的系统包括数据收集功能，其获取一个或多个组件的选定变量的时间历史，计算时间历史的指定特征的预处理功能，用于评估特征的分析功能 产生一个或多个组件的条件的一个或多个假设，以及用于从一个或多个假设确定一个或多个组件的状况的推理功能。

公开(公告)号：US20140126987A1

公开(公告)日：2014-05-08

申请号：US14071314

申请日：2013-11-04

Applicant: Brooks Automation Inc.

Inventor： Ulysses Gilchrist ,  Christopher Hofmeister

IPC: H01L21/677

CPC classification number: B25J9/042 ,  B25J9/0087 ,  B25J9/08 ,  B25J9/10 ,  B25J9/104 ,  B25J18/04 ,  H01L21/67742 ,  Y10S901/15 ,  Y10S901/23 ,  Y10S901/28 ,  Y10T74/20305 ,  Y10T74/20317 ,  Y10T74/20329

Abstract: A substrate transport apparatus having a frame, a drive section and an articulated arm. The drive section has at least one motor module that is selectable for placement in the drive section from a number of different interchangeable motor modules. Each having a different predetermined characteristic. The articulated arm has articulated joints. The arm is connected to the drive section for articulation. The arm has a selectable configuration selectable from a number of different arm configurations each having a predetermined configuration characteristic. The selection of the arm configuration is effected by selection of the at least one motor module for placement in the drive section.

Abstract translation: 具有框架，驱动部和铰接臂的基板输送装置。 驱动部分具有至少一个电动机模块，其可选择用于从多个不同的可互换电动机模块放置在驱动部分中。 每个具有不同的预定特性。 铰接臂具有铰接接头。 臂连接到驱动部分用于铰接。 臂具有可从多个具有预定配置特性的不同臂配置中选择的可选配置。 通过选择用于放置在驱动部分中的至少一个电机模块来实现臂配置的选择。

公开(公告)号：US20130028700A1

公开(公告)日：2013-01-31

申请号：US13646282

申请日：2012-10-05

Applicant: BROOKS AUTOMATION, INC.

Inventor： Ulysses Gilchrist ,  Martin Hosek ,  Jairo Terra Moura ,  Jay Krishnasamy ,  Christopher Hofmeister

IPC: H01L21/677 ,  B25J18/00

CPC classification number: H02K7/09 ,  H02K29/03 ,  Y10S901/15 ,  Y10S901/23 ,  Y10T74/20305 ,  Y10T74/20317 ,  Y10T74/20329

Abstract: A drive section for a substrate transport arm including a frame, at least one stator mounted within the frame, the stator including a first motor section and at least one stator bearing section and a coaxial spindle magnetically supported substantially without contact by the at least one stator bearing section, where each drive shaft of the coaxial spindle includes a rotor, the rotor including a second motor section and at least one rotor bearing section configured to interface with the at least one stator bearing section, wherein the first motor section is configured to interface with the second motor section to effect rotation of the spindle about a predetermined axis and the at least one stator bearing section is configured to effect at least leveling of a substrate transport arm end effector connected to the coaxial spindle through an interaction with the at least one rotor bearing section.

公开(公告)号：US12002696B2

公开(公告)日：2024-06-04

申请号：US17362599

申请日：2021-06-29

Applicant: Brooks Automation, Inc.

Inventor： Radik Sunugatov ,  Roy R. Wang ,  Karl Shieh ,  Justo Graciano ,  Austin Wise ,  Caspar Hansen ,  Erick Pastor

IPC: H01L21/67 ,  G06T7/13 ,  H01L21/673 ,  H01L21/677

CPC classification number: H01L21/67265 ,  G06T7/13 ,  H01L21/6732 ,  H01L21/67778

Abstract: A semiconductor wafer mapping apparatus comprising a frame forming a wafer load opening communicating with a load station for a substrate carrier disposed to hold more than one wafers vertically distributed in the substrate carrier for loading through the wafer load opening, a movable arm movably mounted to the frame so as to move relative to the wafer load opening and having at least one end effector movably mounted to the movable arm to load wafers from the substrate carrier through the wafer load opening, an image acquisition system including an array of cameras arranged on a common support and each camera fixed with respect to the common support that is static with respect to each camera of the array of cameras, wherein each respective camera is positioned with a field of view disposed to view through the wafer load opening with the common support positioned by the movable arm.

公开(公告)号：US11821953B2

公开(公告)日：2023-11-21

申请号：US17534179

申请日：2021-11-23

Applicant: Brooks Automation, Inc.

Inventor： Jairo T Moura ,  Nathan Spiker ,  Aaron Gawlik ,  Jayaraman Krishnasamy

IPC: G01R31/34 ,  G01L3/22 ,  H02P23/12 ,  H02P23/00 ,  H02P6/10 ,  H02P25/098

CPC classification number: G01R31/34 ,  G01L3/22 ,  H02P6/10 ,  H02P23/0031 ,  H02P23/12 ,  H02P25/098

Abstract: A variable reluctance motor load mapping apparatus includes a frame, an interface disposed on the frame configured for mounting a variable reluctance motor, a static load cell mounted to the frame and coupled to the variable reluctance motor, and a controller communicably coupled to the static load cell and the variable reluctance motor, the controller being configured to select at least one motor phase of the variable reluctance motor, energize the at least one motor phase, and receive motor operational data from at least the static load cell for mapping and generating an array of motor operational data look up tables.

公开(公告)号：US11801598B2

公开(公告)日：2023-10-31

申请号：US16460676

申请日：2019-07-02

Applicant: Brooks Automation, Inc.

Inventor： Christopher Hofmeister ,  Alexander G. Krupyshev ,  Krysztof A. Majczak ,  Martin Hosek ,  Jay Krishnasamy

IPC: B25J9/10 ,  H01L21/677 ,  B25J11/00 ,  B25J18/00 ,  B25J9/12

CPC classification number: B25J9/106 ,  B25J9/126 ,  B25J11/0095 ,  B25J18/00 ,  H01L21/67742 ,  Y10S901/15 ,  Y10S901/21 ,  Y10S901/23 ,  Y10S901/27 ,  Y10T74/20305 ,  Y10T74/20317 ,  Y10T74/20329

Abstract: A substrate transport apparatus including a frame, a drive section connected to the frame and including at least one independently controllable motor, at least two substrate transport arms connected to the frame and comprising arm links arranged for supporting and transporting substrates, and a mechanical motion switch coupled to the at least one independently controllable motor and the at least two substrate transport arms for effecting the extension and retraction of one of the at least two substrate transport arms while the other one of the at least two substrate transport arms remains in a substantially retracted configuration.

公开(公告)号：US11776834B2

公开(公告)日：2023-10-03

申请号：US17229495

申请日：2021-04-13

Applicant: BROOKS AUTOMATION, INC.

Inventor： Bing Yin ,  Jairo Moura ,  Vincent Tsang ,  Aaron Gawlik ,  Nathan Spiker

IPC: G06F17/00 ,  H01L21/68 ,  H01L21/687

CPC classification number: H01L21/68 ,  H01L21/68707

Abstract: Substrate processing apparatus including a wafer transport apparatus with a transport arm including an end effector, an arm pose deterministic feature integral to the substrate transport apparatus and disposed so that a static detection sensor of the substrate processing apparatus detects at least one edge of the at least one arm pose deterministic feature on the fly with radial motion of the transport arm, and a controller configured so that detection of the edge effects a determination of a proportion factor identifying at least a thermal expansion variance of the transport arm on the fly and includes a kinematic effects resolver configured to determine, from the detection of the edge on the fly, a discrete relation between the determined proportion factor and each different discrete variance respective to each different link of the transport arm determining at least the thermal expansion variance of the transport arm on the fly.

公开(公告)号：US11613002B2

公开(公告)日：2023-03-28

申请号：US16990775

申请日：2020-08-11

Applicant: BROOKS AUTOMATION, INC.

Inventor： Robert T. Caveney ,  Alexander G. Krupyshev ,  Martin R. Elliot ,  Christopher Hofmeister

IPC: B25J9/04

Abstract: A substrate processing apparatus including a frame, a first arm coupled to the frame at a shoulder axis having a first upper arm, a first forearm and at least one substrate holder serially and rotatably coupled to each other, a second arm coupled to the frame at the shoulder axis where shoulder axes of rotation of the arms are substantially coincident, the second arm having a second upper arm, a second forearm and at least one substrate holder serially and rotatably coupled to each other, and a drive section connected to the frame and coupled to the arms, the drive section being configured to independently extend and rotate each arm where an axis of extension of the first arm is angled relative to an axis of extension of the second arm substantially at each angular position of at least one of the first arm or the second arm.

公开(公告)号：US11610793B2

公开(公告)日：2023-03-21

申请号：US17341638

申请日：2021-06-08

Applicant: Brooks Automation, Inc.

Inventor： Radik Sunugatov ,  Robert Carlson

IPC: H01L21/67 ,  B65G49/06

Abstract: Substrate loading device including a frame adapted to connect the substrate loading device to a substrate processing apparatus, the frame having a transport opening through which substrates are transported between the substrate loading device and the substrate processing apparatus, a cassette support connected to the frame for holding at least one substrate cassette container for transfer of substrates to and from the at least one substrate cassette container through the transport opening, and selectably variable cassette support purge ports with a variable purge port nozzle outlet, variable between more than one selectable predetermined purge port nozzle characteristics, disposed on the cassette support, each of the more than one purge port nozzle characteristics being configured so that the purge port nozzle outlet with each selected predetermined purge port nozzle characteristic complements and couples to at least one purge port of the at least one substrate cassette container.