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    Methods for forming a ferroelectric layer and capacitor and FRAM using the same
    52.
    发明授权
    Methods for forming a ferroelectric layer and capacitor and FRAM using the same 有权
    用于形成铁电层和电容器的方法以及使用其的FRAM

    公开(公告)号：US07312091B2

    公开(公告)日：2007-12-25

    申请号：US10898564

    申请日：2004-07-26

    Applicant: Moon-Sook Lee ,  Byoung-Jae Bae

    Inventor： Moon-Sook Lee ,  Byoung-Jae Bae

    IPC: H01L21/00

    CPC classification number: C23C16/45565 ,  C23C16/4411 ,  C23C16/452 ,  C23C16/45514

    Abstract: Metal organic chemical vapor deposition (MOCVD) may be utilized in methods of forming an (111) oriented PZT ferroelectric layer at a lower temperature, a ferroelectric capacitor and methods of fabricating, and a ferroelectric memory device using the same may be provided. Using the metal organic chemical vapor deposition, ferroelectric layers, capacitors, and memory devices, which may be fabricated and may have (111) preferred oriented crystal growth.

    Abstract translation: 金属有机化学气相沉积（MOCVD）可以用于在较低温度下形成（111）取向的PZT铁电体层的方法，铁电电容器和制造方法，并且可以提供使用该方法的铁电存储器件。 使用金属有机化学气相沉积，铁电层，电容器和存储器件，其可以被制造并且可以具有（111）优选的取向晶体生长。

    Methods of manufacturing ferroelectric capacitors and semiconductor devices
    53.
    发明申请
    Methods of manufacturing ferroelectric capacitors and semiconductor devices 审中-公开
    制造铁电电容器和半导体器件的方法

    公开(公告)号：US20060273366A1

    公开(公告)日：2006-12-07

    申请号：US11447545

    申请日：2006-06-06

    Applicant: Hwa-Young Ko ,  Suk-Ho Joo ,  Byoung-Jae Bae ,  Hee-Seok Kim ,  Kyung-Rae Byun ,  Jin-Hwan Ham

    Inventor： Hwa-Young Ko ,  Suk-Ho Joo ,  Byoung-Jae Bae ,  Hee-Seok Kim ,  Kyung-Rae Byun ,  Jin-Hwan Ham

    IPC: H01L29/94

    CPC classification number: H01L28/55 ,  H01L21/32139 ,  H01L27/11502 ,  H01L27/11507 ,  H01L28/65

    Abstract: In a method of manufacturing a ferroelectric capacitor, a lower electrode layer is formed on a substrate. The lower electrode layer includes at least one lower electrode film. A ferroelectric layer is formed on the lower electrode layer, and then an upper electrode layer is formed on the ferroelectric layer. A hard mask structure is formed on the upper electrode layer. The hard mask structure includes a first hard mask and a second hard mask. An upper electrode, a ferroelectric layer pattern and a lower electrode are formed by partially etching the upper electrode layer, the ferroelectric layer and the lower electrode layer using the hard mask structure. The hard mask structure may prevent damage to the ferroelectric layer and may enlarge an effective area of the ferroelectric capacitor so that the ferroelectric capacitor may have enhanced electrical and ferroelectric characteristics.

    Abstract translation: 在制造铁电电容器的方法中，在基板上形成下电极层。 下电极层包括至少一个下电极膜。 在下电极层上形成铁电体层，在铁电层上形成上电极层。 在上电极层上形成硬掩模结构。 硬掩模结构包括第一硬掩模和第二硬掩模。 通过使用硬掩模结构部分蚀刻上电极层，铁电层和下电极层，形成上电极，铁电层图案和下电极。 硬掩模结构可以防止对铁电层的损坏，并且可以增加铁电电容器的有效面积，使得铁电电容器可以具有增强的电和铁电特性。

    Methods of fabricating thin ferroelectric layers and capacitors having ferroelectric dielectric layers therein
    54.
    发明申请
    Methods of fabricating thin ferroelectric layers and capacitors having ferroelectric dielectric layers therein 审中-公开
    制造其中具有铁电介质层的薄铁电层和电容器的方法

    公开(公告)号：US20060263909A1

    公开(公告)日：2006-11-23

    申请号：US11326485

    申请日：2006-01-05

    Applicant: Suk-Hun Choi ,  Byoung-Jae Bae ,  Yoon-Ho Son ,  Chang-Ki Hong ,  Jeong-Heon Park

    Inventor： Suk-Hun Choi ,  Byoung-Jae Bae ,  Yoon-Ho Son ,  Chang-Ki Hong ,  Jeong-Heon Park

    IPC: H01L21/00 ,  H01L21/8242

    CPC classification number: H01L27/11507 ,  G11C11/22 ,  H01L27/11502 ,  H01L28/55 ,  H01L28/75

    Abstract: Methods of forming ferroelectric layers include forming a ferroelectric layer on a substrate and chemically-mechanically polishing a surface of the ferroelectric layer by rotating a polishing pad on the surface at a rotation speed in a range from about 5 rpm to about 25 rpm. This polishing step includes pressing the polishing pad onto the surface of the ferroelectric layer at a pressure in a range from about 0.5 psi to about 3 psi. This polishing step may be followed by the step of exposing the polished surface to a rapid thermal anneal. This anneal can be performed in an inert atmosphere containing a gas selected from a group consisting of nitrogen, helium, argon and neon.

    Abstract translation: 形成铁电体层的方法包括在基板上形成铁电层，并以大约5rpm至大约25rpm的旋转速度旋转表面上的抛光垫，对铁电层的表面进行化学机械抛光。 该抛光步骤包括在约0.5psi至约3psi范围内的压力下将抛光垫压在铁电层的表面上。 该抛光步骤之后可以将抛光表面暴露于快速热退火的步骤。 该退火可以在含有选自氮，氦，氩和氖的气体的惰性气氛中进行。

    System and method for handover in wireless communication system
    57.
    发明授权
    System and method for handover in wireless communication system 有权
    无线通信系统切换系统及方法

    公开(公告)号：US08804556B2

    公开(公告)日：2014-08-12

    申请号：US13331445

    申请日：2011-12-20

    Applicant: Byoung-Jae Bae

    Inventor： Byoung-Jae Bae

    IPC: H04L1/00 ,  H04W76/04 ,  H04W24/10

    CPC classification number: H04W24/10 ,  H04W36/0083 ,  H04W76/28 ,  Y02D70/00 ,  Y02D70/1224 ,  Y02D70/1262 ,  Y02D70/24

    Abstract: A system and a method for handover of a terminal in a wireless communication system are provided. The method includes transmitting, by a serving BS, measurement control information and DRX control information to a terminal; measuring, by the terminal, a channel, based on the measurement control information; operating, by the terminal, in connected DRX, based on the DRX control information; reporting, by the terminal, channel measurement information to the serving BS; determining, by the serving BS, the handover of the terminal based on the channel measurement information provided from the terminal; resetting, by the serving BS, the DRX control information of the terminal; transmitting, by the serving BS, the reset DRX control information to the terminal; operating, by the terminal, in the connected DRX, based on the reset DRX control information provided from the serving BS; and transmitting, by the serving BS, handover indication information to the terminal.

    Abstract translation: 提供了一种在无线通信系统中终端切换的系统和方法。 该方法包括由服务BS向终端发送测量控制信息和DRX控制信息; 基于所述测量控制信息，由所述终端测量信道; 基于所述DRX控制信息，由所述终端操作连接的DRX; 通过终端向业务BS报告信道测量信息; 由所述服务BS根据从所述终端提供的信道测量信息确定所述终端的切换; 由服务BS重设终端的DRX控制信息; 由所述服务BS向所述终端发送所述复位DRX控制信息; 基于从所述服务BS提供的复位DRX控制信息，由所述终端在所连接的DRX中进行操作; 以及由所述服务BS向所述终端发送切换指示信息。

    SYSTEM AND METHOD FOR HANDOVER IN WIRELESS COMMUNICATION SYSTEM
    59.
    发明申请
    SYSTEM AND METHOD FOR HANDOVER IN WIRELESS COMMUNICATION SYSTEM 有权
    无线通信系统中的切换系统与方法

    公开(公告)号：US20120155309A1

    公开(公告)日：2012-06-21

    申请号：US13331445

    申请日：2011-12-20

    Applicant: Byoung-Jae BAE

    Inventor： Byoung-Jae BAE

    IPC: H04W36/30 ,  H04W24/00

    CPC classification number: H04W24/10 ,  H04W36/0083 ,  H04W76/28 ,  Y02D70/00 ,  Y02D70/1224 ,  Y02D70/1262 ,  Y02D70/24

    Abstract: A system and a method for handover of a terminal in a wireless communication system are provided. The method includes transmitting, by a serving BS, measurement control information and DRX control information to a terminal; measuring, by the terminal, a channel, based on the measurement control information; operating, by the terminal, in connected DRX, based on the DRX control information; reporting, by the terminal, channel measurement information to the serving BS; determining, by the serving BS, the handover of the terminal based on the channel measurement information provided from the terminal; resetting, by the serving BS, the DRX control information of the terminal; transmitting, by the serving BS, the reset DRX control information to the terminal; operating, by the terminal, in the connected DRX, based on the reset DRX control information provided from the serving BS; and transmitting, by the serving BS, handover indication information to the terminal.

    Abstract translation: 提供了一种在无线通信系统中终端切换的系统和方法。 该方法包括由服务BS向终端发送测量控制信息和DRX控制信息; 基于所述测量控制信息，由所述终端测量信道; 基于所述DRX控制信息，由所述终端操作连接的DRX; 通过终端向业务BS报告信道测量信息; 由所述服务BS根据从所述终端提供的信道测量信息确定所述终端的切换; 由服务BS重设终端的DRX控制信息; 由所述服务BS向所述终端发送所述复位DRX控制信息; 基于从所述服务BS提供的复位DRX控制信息，由所述终端在所连接的DRX中进行操作; 以及由所述服务BS向所述终端发送切换指示信息。

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