摘要:
According to the embodiment, an optical image intensity distribution to be formed in a resist arranged on a lower layer side of a diffraction pattern is calculated by performing a whole image exposure from an upper surface side of the diffraction pattern formed on a substrate. The optical image intensity distribution is calculated by using a multimode waveguide analysis model or a fractional Fourier transform with respect to the diffraction pattern.
摘要:
A gear transmission comprises a crankshaft that eccentrically rotates one of an internal gear and an external gear. A first gear is attached to one end of the crankshaft. A ring gear having internal teeth meshes with the first gear. An intermediate gear meshes with external teeth of the ring gear. A second gear is attached to one end of an output shaft of a motor and meshes with the intermediate gear. The motor and the crankshaft are positioned, relative to the intermediate gear, on the same side in the axial direction of the gear transmission.
摘要:
A transceiver suitable for larger scale of integration employs direct conversion reception for reducing the number of filters. Also, the number of VCOs is reduced by utilizing dividers to supply a receiver and a transmitter with locally oscillated signals at an RF band. Dividers each having a fixed division ratio are used for generating locally oscillated signals for the receiver, while a divider having a switchable division ratio are used for generating the locally oscillated signal for the transmitter. In addition, a variable gain amplifier for baseband signal is provided with a DC offset voltage detector and a DC offset canceling circuit for supporting high speed data communications to accomplish fast cancellation of a DC offset by eliminating intervention of a filter within a feedback loop for offset cancellation.
摘要:
A method for designing a semiconductor integrated circuit is provided which comprises compacting a design layout of a semiconductor integrated circuit on the basis of a given design rule to obtain a compacted pattern, predicting a pattern to be formed at a surface area of a wafer for forming the semiconductor integrated circuit on the basis of the compacted pattern, obtaining an evaluated value by comparing the predicted pattern with the compacted pattern, deciding whether the evaluated value satisfies a predetermined condition, and modifying the design rule when the evaluated value is decided as not satisfying the predetermined condition.
摘要:
There are provided a solar cell including a semiconductor substrate and a busbar electrode extending in a first direction and a finger electrode extending in a second direction on a first surface of the semiconductor substrate the finger electrode and the busbar electrode being electrically connected to each other, and a side portion of the busbar electrode being curved such that a width of the busbar electrode increases toward an end portion of the busbar electrode in a region near the end portion of the busbar electrode in the first direction a solar cell string, and a solar cell module.
摘要:
A fan drive control device includes: a hydraulic motor driving a cooling fan by a hydraulic oil supplied from a hydraulic pump driven by an engine; a flow rate adjuster adjusting a flow rate of the hydraulic oil flowed into the hydraulic motor; a temperature sensor detecting a temperature of a fluid cooled by a cooling fan; an accelerator pedal angle sensor detecting an accelerator pedal angle for controlling an engine power based on a detected value by the temperature sensor; a target flow rate setting unit setting a target flow rate of the hydraulic oil flowed into the hydraulic motor; a target flow rate compensation unit compensating the target flow rate based on a detected value by the accelerator pedal angle sensor; and a control command generator generating a control command to the flow rate adjuster according to the target flow rate by the target flow rate compensation unit.
摘要:
Disclosed is a polynucleotide marker or a protein marker for use in the specific detection of an IL-17-producing helper T-cell (a Th17 cell). Also disclosed is a method for detecting a Th17 cell, which is characterized by detecting the occurrence of the polynucleotide marker or the protein marker.
摘要:
A reticle set, includes a first photomask having a circuit pattern provided with first and second openings provided adjacent to each other sandwiching a first opaque portion, and a monitor mark provided adjacent to the circuit pattern; and a second photomask having a trim pattern provided with a second opaque portion covering the first opaque portion in an area occupied by the circuit pattern and an extending portion connected to one end of the first opaque portion and extending outside the area when the second photomask is aligned with a pattern delineated on a substrate by the first photomask.
摘要:
Borderless contacts for word lines or via contacts for bit lines are formed using interconnect patterns, a part of which is removed. A semiconductor memory includes: a plurality of active regions AAi, AAi+1, . . . , AAn, which extend on a memory cell array along the column length; a plurality of word line patterns WL1, WL2, . . . , extend along the row length and are non-uniformly arranged; a plurality of select gate line patterns SG1, SG2, . . . , are arranged parallel to the plurality of word line patterns; borderless contacts are formed near the ends of the word line patterns on the memory cell array, and are in contact with part of an interconnect extended from the end of the memory cell array, but are not in contact with interconnects adjacent to that interconnect; and bit line contacts are formed within contact forming regions provided by removing part of the plurality of word line patterns and select gate line patterns through double exposure.
摘要:
A plasma processing method performs a desired plasma process on substrates by using a plasma generated in a processing space. A first and a second electrode are disposed in parallel in a processing vessel that is grounded, the substrate is supported on the second electrode to face the first electrode, the processing vessel is vacuum evacuated, a desired processing gas is supplied into the processing space formed between the first electrode, the second electrode and a sidewall of the processing vessel, and a first radio frequency power is supplied to the second electrode. The first electrode is connected to the processing vessel via an insulator or a space, and is electrically coupled to a ground potential via a capacitance varying unit whose electrostatic capacitance is varied based on a process condition of the plasma process performed on the substrate.