公开(公告)号：US20040134236A1

公开(公告)日：2004-07-15

申请号：US10475836

申请日：2003-10-24

发明人： Tomohiro Ishihara

IPC分类号： C03B037/018

CPC分类号： C03B37/01406 ,  C03B37/01202 ,  C03B37/0142 ,  C03B37/0144 ,  C03B37/0146 ,  C03B2207/52 ,  C03B2207/62 ,  C03B2207/66 ,  C03B2207/70 ,  Y02P40/57

摘要： To provide a method for producing a glass particle deposit and a method for producing a glass preform, in which outer diameter variation of the glass particle deposit can be reduced to thereby improve quality. A flow rate of clean gas (CG) introduced into a container potion 10 is limited to thereby prevent the outermost layer of a glass particle deposit 20 from being locally cooled and reduce variation in bulk density in the longitudinal direction of the glass particle deposit 20, that is, outer diameter variation and breakage.

摘要翻译： 提供一种玻璃粒子沉积物的制造方法和玻璃预制体的制造方法，其中可以减少玻璃粒子沉积物的外径变化，从而提高质量。 引入到容器部10中的清洁气体（CG）的流量被限制，从而防止玻璃颗粒沉积物20的最外层局部冷却，并减小玻璃颗粒沉积物20的纵向方向上的堆积密度的变化， 即外径变化和断裂。

公开(公告)号：US20040060326A1

公开(公告)日：2004-04-01

申请号：US10344637

申请日：2003-09-22

发明人： Tomohiro Ishihara

IPC分类号： C03B037/018

CPC分类号： C03B37/0144 ,  C03B37/01406 ,  C03B37/01486 ,  C03B2207/52 ,  Y02P40/57

摘要： To provide an apparatus for manufacturing a glass particles deposit in which it is possible to effectively prevent the foreign matter from being deposited on or mixed into the glass particles deposit during the manufacturing operation. The apparatus for manufacturing the glass particles deposit comprises an upper funnel, a reaction vessel and a lower funnel, wherein the glass particulates are deposited around the outer circumference of a starting rod supported by a support rod within the reaction vessel while the starting rod is being rotated around its axis and reciprocated up and down, characterized in that a sleeve made of quartz separating an inner wall of the reaction vessel and a central rotation member is installed inside the reaction vessel.

摘要翻译： 提供一种用于制造玻璃颗粒沉积物的装置，其中可以有效地防止在制造操作期间异物沉积在玻璃颗粒沉积物中或混入其中。 用于制造玻璃颗粒沉积物的装置包括上漏斗，反应容器和下漏斗，其中玻璃微粒围绕起重杆的外周沉积在反应容器内由支撑杆支撑的起始杆周围，而起始杆是 围绕其轴线旋转并且上下往复运动，其特征在于，在所述反应容器内部安装有由分离反应容器的内壁和中心旋转构件的石英制成的套筒。

公开(公告)号：US06698249B1

公开(公告)日：2004-03-02

申请号：US09807372

申请日：2001-07-16

申请人： Kanta Yagi ,  Sumio Hoshino ,  Wataru Kikuchi

发明人： Kanta Yagi ,  Sumio Hoshino ,  Wataru Kikuchi

IPC分类号： C03B1914

CPC分类号： C03B37/01406 ,  C03B37/0144

摘要： An object of the present invention is to reduce the adhesion of floating glass particulates to the surface of a soot preform during the manufacture of the soot preform, thereby reducing the voids generated in the transparent glass preform made from the soot preform, and to improve the quality of the optical fiber manufactured from the transparent glass preform. The equipment of the invention is equipped with a reaction vessel 1, a burner 2 provided within the reaction vessel 1 into which raw material gas and combustion gas are supplied so as to generate glass particulates by hydrolysis reaction, and a starting rod 5 onto which the glass particulates generated by the burner 2 are deposited. By drawing up the starting rod 5 while turning it around its axis, the glass particulates are deposited on the tip of or around the starting rod 5 to form a soot preform 6 in column-like shape. The equipment is provided with a partition board 8 that separates part of the space around the soot preform 6 in the reaction vessel 1 into upper and lower parts. An exhaust port 4 is provided below the partition board 8 in the inner wall of the reaction vessel 1, and the burner 2 is installed in the space below the partition board 8.

摘要翻译： 本发明的一个目的是在烟灰预制件的制造过程中减少漂浮的玻璃微粒对烟灰预制件表面的粘附，从而减少由烟炱预制件制成的透明玻璃预制件中产生的空隙，并改善 由透明玻璃预制件制造的光纤的质量。 本发明的设备配备有反应容器1，设置在反应容器1内的燃烧器2，原料气体和燃烧气体通过水解反应而产生玻璃微粒，原料气体和燃烧气体通过水解反应产生玻璃微粒; 沉积由燃烧器2产生的玻璃微粒。 通过在绕其轴线转动的同时拉起起始杆5，玻璃颗粒沉积在起始杆5的尖端或周围，以形成柱状形状的烟灰预制件6。 该设备设置有分隔板8，其将反应容器1中的烟灰预制件6周围的空间的一部分分离成上部和下部。 排气口4设置在反应容器1的内壁的分隔板8的下方，燃烧器2安装在隔板8的下方的空间内。

公开(公告)号：US20030148194A1

公开(公告)日：2003-08-07

申请号：US10342717

申请日：2003-01-13

发明人： John T. Brown ,  Stephen C. Currie ,  Lisa A. Moore ,  Susan L. Schiefelbein ,  Robert S. Pavlik JR.

IPC分类号： G03F009/00 ,  G03C005/00 ,  C03B005/26 ,  C03B007/00 ,  B32B009/00 ,  B32B017/06

CPC分类号： G03F7/70216 ,  C03B19/1407 ,  C03B19/1415 ,  C03B19/1423 ,  C03B19/1453 ,  C03B37/01202 ,  C03B37/01406 ,  C03B37/01413 ,  C03B37/0142 ,  C03B37/0146 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/12 ,  C03B2201/20 ,  C03B2201/21 ,  C03B2207/06 ,  C03B2207/14 ,  C03B2207/20 ,  C03B2207/30 ,  C03B2207/32 ,  C03B2207/36 ,  C03B2207/38 ,  C03B2207/40 ,  C03B2207/46 ,  C03B2207/54 ,  C03C3/06 ,  C03C4/0085 ,  C03C2201/12 ,  C03C2201/20 ,  C03C2201/21 ,  C03C2201/23 ,  C03C2201/30 ,  C03C2201/32 ,  C03C2203/54 ,  G03F1/60 ,  G03F7/70958 ,  Y02P40/57

摘要： High purity direct deposit vitrified silicon oxyfluoride glass suitable for use as a photomask substrates for photolithography applications in the VUV wavelength region below 190 nm is disclosed. The inventive direct deposit vitrified silicon oxyfluoride glass is transmissive at wavelengths around 157 nm, making it particularly useful as a photomask substrate at the 157 nm wavelength region. The inventive photomask substrate is a dry direct deposit vitrified silicon oxyfluoride glass which exhibits very high transmittance in the vacuum ultraviolet (VUV) wavelength region while maintaining the excellent thermal and physical properties generally associated with high purity fused silica. In addition to containing fluorine and having little or no OH content, the inventive direct deposit vitrified silicon oxyfluoride glass suitable for use as a photomask substrate at 157 nm is also characterized by having less than 1null1017 molecules/cm3 of molecular hydrogen and low chlorine levels.

公开(公告)号：US06541168B2

公开(公告)日：2003-04-01

申请号：US09841517

申请日：2001-04-24

申请人： John T. Brown ,  Stephen C. Currie ,  Lisa A. Moore ,  Susan L. Schiefelbein ,  Robert S. Pavlik, Jr.

发明人： John T. Brown ,  Stephen C. Currie ,  Lisa A. Moore ,  Susan L. Schiefelbein ,  Robert S. Pavlik, Jr.

IPC分类号： G03F900

CPC分类号： G03F7/70216 ,  C03B19/1407 ,  C03B19/1415 ,  C03B19/1423 ,  C03B19/1453 ,  C03B37/01202 ,  C03B37/01406 ,  C03B37/01413 ,  C03B37/0142 ,  C03B37/0146 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/12 ,  C03B2201/20 ,  C03B2201/21 ,  C03B2207/06 ,  C03B2207/14 ,  C03B2207/20 ,  C03B2207/30 ,  C03B2207/32 ,  C03B2207/36 ,  C03B2207/38 ,  C03B2207/40 ,  C03B2207/46 ,  C03B2207/54 ,  C03C3/06 ,  C03C4/0085 ,  C03C2201/12 ,  C03C2201/20 ,  C03C2201/21 ,  C03C2201/23 ,  C03C2201/30 ,  C03C2201/32 ,  C03C2203/54 ,  G03F1/60 ,  G03F7/70958 ,  Y02P40/57

摘要： High purity direct deposit vitrified silicon oxyfluoride glass suitable for use as a photomask substrates for photolithography applications in the VUV wavelength region below 190 nm is disclosed. The inventive direct deposit vitrified silicon oxyfluoride glass is transmissive at wavelengths around 157 nm, making it particularly useful as a photomask substrate at the 157 nm wavelength region. The inventive photomask substrate is a dry direct deposit vitrified silicon oxyfluoride glass which exhibits very high transmittance in the vacuum ultraviolet (VUV) wavelength region while maintaining the excellent thermal and physical properties generally associated with high purity fused silica. In addition to containing fluorine and having little or no OH content, the inventive direct deposit vitrified silicon oxyfluoride glass suitable for use as a photomask substrate at 157 nm is also characterized by having less than 1×1017 molecules/cm3 of molecular hydrogen and low chlorine levels.

公开(公告)号：US06354112B2

公开(公告)日：2002-03-12

申请号：US09204125

申请日：1998-12-02

申请人： Yasuhiro Nakashima ,  Tadakatsu Shimada ,  Hideo Hirasawa

发明人： Yasuhiro Nakashima ,  Tadakatsu Shimada ,  Hideo Hirasawa

IPC分类号： C03B37018

CPC分类号： C03B37/01406

摘要： A method and apparatus for producing a glass base material for an optical fiber. A material for an optical fiber and a reaction gas are jetted from a burner connected to a material line and a gas line toward a surface of a quartz substrate, in order to deposit a soot-like reaction product on the substrate at a predetermined position to thereby produce a glass base material for an optical fiber. Dry air is introduced into a reaction container in an amount of 4 to 8 times the amount of water vapor that is generated due to flame hydrolysis during the reaction. Therefore, it is possible to reliably solve the problem that the interior of the reaction container is excessively dried, with the result that soot generated through a reaction adheres to and aggregates on the wall surface of the reaction container due to static electricity, and the problem that the amount of water vapor becomes excessive and is condensed on the wall surface, with the result that soot strongly adheres to the wall surface, while the observation window or the like becomes fogged. Further, soot peeled off the wall surface is prevented from adhering to or melting into the side surface or base portion of a pre-form being pulled, so that the quality of products is improved, and stable operation becomes possible.

摘要翻译： 一种用于制造光纤用玻璃基材的方法和装置。 将用于光纤和反应气体的材料从连接到材料线和气体管线的燃烧器朝向石英基板的表面喷射，以便将预定位置的基材上的烟灰状反应产物沉积到 从而制造用于光纤的玻璃基材。 干燥空气以反应中由于火焰水解产生的水蒸汽量的4至8倍的量引入反应容器中。 因此，能够可靠地解决反应容器的内部过度干燥的问题，结果是由反应容器产生的烟灰由于静电而附着在反应容器的壁面上并聚集在反应容器的壁面上， 水蒸汽的量变得过量并且在壁表面上被冷凝，结果是烟灰强烈地粘附到壁表面，同时观察窗等变得雾化。 此外，防止从壁面剥离的烟灰粘附或熔化到被拉伸的预成型体的侧面或基部，从而提高产品的质量，并且可以稳定地操作。

公开(公告)号：US06301936B1

公开(公告)日：2001-10-16

申请号：US09334925

申请日：1999-06-17

申请人： Yuichi Ohga ,  Takashi Kogo

发明人： Yuichi Ohga ,  Takashi Kogo

IPC分类号： C03B2000

CPC分类号： C23C16/453 ,  C03B37/01406 ,  C23C16/44 ,  Y02P40/57

摘要： The object of the invention is to provide an apparatus for manufacturing a porous glass preform, which comprises a reaction vessel in which local stress concentration caused by expansion due to heat is prevented, and there is no fear of the occurrence of deformation or cracks. The apparatus of this invention manufactures the porous glass preform by depositing glass particles blown from a burner on the seed rod rotating around its axis, and this apparatus is characterized in that the reaction vessel is provided with a means for relieving concentration of stress due to thermal expansion of the reaction vessel.

摘要翻译： 本发明的目的是提供一种用于制造多孔玻璃预制件的装置，其包括反应容器，其中防止由热引起的膨胀引起的局部应力集中，并且不会发生变形或裂纹。 本发明的装置通过将从燃烧器吹出的玻璃颗粒沉积在围绕其轴线旋转的晶棒上制造多孔玻璃预制件，该装置的特征在于，反应容器设置有用于缓解因热而引起的应力集中的装置 反应容器的膨胀。

公开(公告)号：US5250097A

公开(公告)日：1993-10-05

申请号：US894426

申请日：1992-06-05

申请人： Tatsuhiko Saitoh ,  Toshio Danzuka

发明人： Tatsuhiko Saitoh ,  Toshio Danzuka

IPC分类号： C03B8/04 ,  C03B20/00 ,  C03B37/014 ,  C03B37/018 ,  G02B6/00

CPC分类号： C03B37/0144 ,  C03B37/01406 ,  Y02P40/57

摘要： A glass soot deposit is produced at a high deposition rate by blowing a gaseous glass-forming raw material together with a fuel gas from a combustion burner in a closed muffle, hydrolyzing the glass-forming raw material in a flame to generate glass soot, and depositing the glass soot on a tip end or a peripheral surface of a starting member which is rotated to form a glass soot deposit, in which a lowest surface temperature of the muffle tube is maintained at 50.degree. C. or higher and an average surface temperature of the muffle is maintained in a range between 50.degree. C. and 150.degree. C., whereby corrosion of the muffle is prevented.

公开(公告)号：US09758422B2

公开(公告)日：2017-09-12

申请号：US14973658

申请日：2015-12-17

申请人： Shin-Etsu Chemical Co., Ltd.

发明人： Masami Terashima ,  Takaaki Nagao ,  Yuichi Matsunaga

IPC分类号： C03B37/018 ,  C03B37/014

CPC分类号： C03B37/0142 ,  C03B37/01406 ,  C03B2207/42

摘要： An optical fiber base material manufacturing apparatus including a reaction chamber; a burner that has a portion thereof inserted into the reaction chamber through an insertion opening that creates a connection between the inside and outside of the reaction chamber, and emits a flame toward a starting member positioned within the reaction chamber; and a seal connection member that creates an air-tight seal between the burner and the reaction chamber at the insertion opening. One end of the seal connection member firmly contacts the burner inserted therethrough, another end of the seal connection member firmly contacts the reaction chamber and has a through-hole formed therein through which the burner is inserted without contacting the seal connection member, and the seal connection member includes a connecting portion that connects the one end to the other end, while preventing transfer of stress between the one end and the other end.

公开(公告)号：US08865271B2

公开(公告)日：2014-10-21

申请号：US10854019

申请日：2004-05-26

申请人： Xiangxin Bi ,  Herman A. Lopez ,  Prasad Narasimha ,  Eric Euvrard ,  Ronald J. Mosso

发明人： Xiangxin Bi ,  Herman A. Lopez ,  Prasad Narasimha ,  Eric Euvrard ,  Ronald J. Mosso

IPC分类号： C23C14/30 ,  C23C24/00 ,  C23C16/48 ,  G02B6/132 ,  C03B37/012 ,  C23C16/56 ,  C03B19/01 ,  C03B19/14 ,  C23C24/04 ,  C23C16/40 ,  C03B37/014 ,  G02B6/036

CPC分类号： G02B1/12 ,  B05D1/12 ,  B05D3/06 ,  C03B19/01 ,  C03B19/1415 ,  C03B37/0128 ,  C03B37/01294 ,  C03B37/01406 ,  C03B37/01413 ,  C03B37/0142 ,  C03B2201/10 ,  C03B2201/12 ,  C03B2201/28 ,  C03B2201/31 ,  C03B2207/34 ,  C23C16/401 ,  C23C16/482 ,  C23C16/483 ,  C23C16/56 ,  C23C24/00 ,  C23C24/04 ,  G02B6/036 ,  G02B6/132 ,  Y02P40/57

摘要： High rate deposition methods comprise depositing a powder coating from a product flow. The product flow results from a chemical reaction within the flow. Some of the powder coatings consolidate under appropriate conditions into an optical coating. The substrate can have a first optical coating onto which the powder coating is placed. The resulting optical coating following consolidation can have a large index-of-refraction difference with the underlying first optical coating, high thickness and index-of-refraction uniformity across the substrate and high thickness and index-of-refraction uniformity between coatings formed on different substrates under equivalent conditions. In some embodiments, the deposition can result in a powder coating of at least about 100 nm in no more than about 30 minutes with a substrate having a surface area of at least about 25 square centimeters.

摘要翻译： 高速沉积方法包括从产品流中沉积粉末涂层。 产物流由流动内的化学反应产生。 一些粉末涂料在合适的条件下固化成光学涂层。 基底可以具有第一光学涂层，其上放置粉末涂层。 固结后的所得光学涂层可以具有与基底的第一光学涂层，基底上的高厚度和折射率均匀性的较大的折射率差异，以及形成在不同的涂层之间的涂层之间的高厚度和折射率均匀性 在相同条件下的底物。 在一些实施方案中，沉积可导致至少约100nm的粉末涂层，其表面积至少约25平方厘米，其表面积至少约为25平方厘米。