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    SCAN ERROR CORRECTION IN LOW COHERENCE SCANNING INTERFEROMETRY
    61.
    发明申请
    SCAN ERROR CORRECTION IN LOW COHERENCE SCANNING INTERFEROMETRY 有权
    低相干扫描干涉测量中的扫描误差校正

    公开(公告)号：US20100128280A1

    公开(公告)日：2010-05-27

    申请号：US12509098

    申请日：2009-07-24

    Applicant: Mark Davidson ,  Jan Liesener ,  Peter de Groot ,  Xavier Colonna de Lega ,  Leslie L. Deck

    Inventor： Mark Davidson ,  Jan Liesener ,  Peter de Groot ,  Xavier Colonna de Lega ,  Leslie L. Deck

    IPC: G01B9/02

    CPC classification number: G01B9/0209 ,  G01B9/02007 ,  G01B9/0201 ,  G01B9/02027 ,  G01B9/02039 ,  G01B9/02057 ,  G01B9/02068 ,  G01B9/02077 ,  G01B11/2441 ,  G01B2290/45 ,  G01B2290/70 ,  Y10T29/49002

    Abstract: In general, in one aspect, the invention features apparatus that includes a broadband scanning interferometry system including interferometer optics for combining test light from a test object with reference light from a reference object to form an interference pattern on a detector, wherein the test and reference light are derived from a common light source. The interferometry system further includes a scanning stage configured to scan an optical path difference (OPD) between the test and reference light from the common source to the detector and a detector system including the detector for recording the interference pattern for each of a series of OPD increments, wherein the frequency of each OPD increment defines a frame rate. The interferometer optics are configured to produce at least two monitor interferometry signals each indicative of changes in the OPD as the OPD is scanned, wherein the detector system is further configured to record the monitor interferometry signals. The apparatus also includes an electronic processor electronically coupled to the detection system and scanning stage and configured to determine information about the OPD increments with sensitivity to perturbations to the OPD increments at frequencies greater than the frame rate.

    Abstract translation: 一般来说，一方面，本发明的特征在于，包括宽带扫描干涉测量系统的装置，其包括用于将来自测试对象的测试光与来自参考物体的参考光组合在一起的干涉仪光学元件，以在检测器上形成干涉图案，其中测试和参考 光源自普通光源。 所述干涉测量系统还包括扫描级，其被配置为扫描来自所述公共源的所述测试参考光与所述检测器之间的光程差（OPD）;以及检测器系统，包括用于记录一系列OPD中的每一个的干涉图案的检测器 增量，其中每个OPD增量的频率定义帧速率。 干涉仪光学器件被配置为产生至少两个监视器干涉测量信号，每个监视器干涉测量信号指示当OPD被扫描时OPD的变化，其中检测器系统还被配置为记录监视器干涉测量信号。 该装置还包括电子处理器，其电耦合到检测系统和扫描级，并且被配置为以大于帧速率的频率灵敏地确定对OPD增量的扰动的OPD增量的信息。

    FIBER-BASED INTERFEROMETER SYSTEM FOR MONITORING AN IMAGING INTERFEROMETER
    62.
    发明申请
    FIBER-BASED INTERFEROMETER SYSTEM FOR MONITORING AN IMAGING INTERFEROMETER 有权
    用于监测成像干涉仪的基于光纤的干涉仪系统

    公开(公告)号：US20100128278A1

    公开(公告)日：2010-05-27

    申请号：US12551308

    申请日：2009-08-31

    Applicant: Leslie L. Deck ,  Peter De Groot ,  Mark Davidson ,  Jan Liesener ,  Xavier Colonna De Lega

    Inventor： Leslie L. Deck ,  Peter De Groot ,  Mark Davidson ,  Jan Liesener ,  Xavier Colonna De Lega

    IPC: G01B9/02

    CPC classification number: G01B9/0209 ,  G01B9/02007 ,  G01B9/0201 ,  G01B9/02027 ,  G01B9/02039 ,  G01B9/02057 ,  G01B9/02068 ,  G01B9/02077 ,  G01B11/2441 ,  G01B2290/45 ,  G01B2290/70 ,  Y10T29/49002

    Abstract: Apparatus include a microscope including an objective and a stage for positioning a test object relative to the objective, the stage being moveable with respect to the objective, and a sensor system, that includes a sensor light source, an interferometric sensor configured to receive light from the sensor light source, to introduce an optical path difference (OPD) between a first portion and a second portion of the light, the OPD being related to a distance between the objective lens and the stage, and to combine the first and second portions of the light to provide output light, a detector configured to detect the output light from the interferometric sensor, a fiber waveguide configured to direct light between the sensor light source, the interferometric sensor and the detector, a tunable optical cavity in a path of the light from the sensor light source and the interferometric sensor, and an electronic controller in communication with the detector, the electronic controller being configured to determine information related to the OPD based on the detected output light.

    Abstract translation: 装置包括显微镜，其包括物镜和用于相对于物镜定位测试对象的台，该台可相对于物镜移动;以及传感器系统，其包括传感器光源，被配置为从 所述传感器光源在所述光的第一部分和所述第二部分之间引入光程差（OPD），所述OPD与所述物镜与所述台之间的距离有关，并且将所述第一和第二部分 提供输出光的光，被配置为检测来自干涉测量传感器的输出光的检测器，配置成在传感器光源，干涉测量传感器和检测器之间引导光的光纤波导，在光的路径中的可调光学腔 来自传感器光源和干涉测量传感器以及与检测器通信的电子控制器，该电子控制器是共同的 根据检测到的输出光确定与OPD相关的信息。

    GENERATING MODEL SIGNALS FOR INTERFEROMETRY
    63.
    发明申请
    GENERATING MODEL SIGNALS FOR INTERFEROMETRY 有权
    生成用于干涉的模型信号

    公开(公告)号：US20090021723A1

    公开(公告)日：2009-01-22

    申请号：US11780360

    申请日：2007-07-19

    Applicant: Xavier Colonna De Lega

    Inventor： Xavier Colonna De Lega

    IPC: G01N21/00

    CPC classification number: G01B9/02027 ,  G01B9/02043 ,  G01B9/02057 ,  G01B9/02072 ,  G01B9/02084 ,  G01B9/02088 ,  G01B9/0209 ,  G01B2290/50 ,  G01B2290/70 ,  G01N21/211

    Abstract: A method is disclosed which includes, for each of multiple areas of a test surface on a test object having different reflectivities, using an interferometry system to measure each area in a first mode of operation that measures information about the reflectivity of the area over a range of angles and wavelengths; using the same interferometry-system to measure the test surface in a second mode of operation that interferometrically profiles a topography of the test surface over a range including at least some of the multiple areas; and correcting the profile based on the information about the reflectivity of the multiple areas to reduce errors.

    Abstract translation: 公开了一种方法，其包括对于具有不同反射率的测试对象上的测试表面的多个区域中的每个区域，使用干涉测量系统来测量第一操作模式中的每个区域，该第一操作模式测量关于区域的反射率的信息 的角度和波长; 使用相同的干涉测量系统在第二操作模式中测量所述测试表面，所述第二操作模式在包括所述多个区域中的至少一些区域的范围内对测试表面的形貌进行干涉测量; 并且基于关于多个区域的反射率的信息来校正简档以减少错误。

    SCANNING INTERFEROMETRY FOR THIN FILM THICKNESS AND SURFACE MEASUREMENTS
    65.
    发明申请
    SCANNING INTERFEROMETRY FOR THIN FILM THICKNESS AND SURFACE MEASUREMENTS 有权
    扫描干涉薄膜厚度和表面测量

    公开(公告)号：US20080180694A1

    公开(公告)日：2008-07-31

    申请号：US12020351

    申请日：2008-01-25

    Applicant: Peter J. de Groot ,  Xavier Colonna de Lega

    Inventor： Peter J. de Groot ,  Xavier Colonna de Lega

    IPC: G01B9/02

    CPC classification number: G01B11/0675 ,  G01B9/02057 ,  G01B9/0207 ,  G01B9/02084 ,  G01B9/02088 ,  G01B9/0209 ,  G01B2290/50 ,  G01B2290/70 ,  G01N21/8422 ,  G02F1/13392 ,  G02F2001/133354

    Abstract: A method including: providing a low coherence scanning interferometry data for at least one spatial location of a sample having multiple interfaces, wherein the data is collected using a low coherence scanning interferometer having an illumination geometry and an illumination frequency spectrum, and wherein the data comprises a low coherence scanning interferometry signal having multiple regions of fringe contrast corresponding to the multiple interfaces; and determining a distance between at least one pair of interfaces based on a distance between the corresponding regions of fringe contrast and information about the illumination geometry.

    Abstract translation: 一种方法，包括：为具有多个接口的样本的至少一个空间位置提供低相干扫描干涉测量数据，其中使用具有照明几何形状和照明频谱的低相干扫描干涉仪来收集数据，并且其中数据包括 低相干扫描干涉测量信号，具有对应于多个界面的多个边缘对比区域; 以及基于条纹对比的对应区域和关于照明几何形状的信息之间的距离来确定至少一对界面之间的距离。

    Methods and systems for determining optical properties using low-coherence interference signals
    67.
    发明授权
    Methods and systems for determining optical properties using low-coherence interference signals 有权
    使用低相干干涉信号确定光学性质的方法和系统

    公开(公告)号：US07142311B2

    公开(公告)日：2006-11-28

    申请号：US11131649

    申请日：2005-05-17

    Applicant: Xavier Colonna De Lega

    Inventor： Xavier Colonna De Lega

    IPC: G01B11/02

    CPC classification number: G01B9/02084 ,  G01B9/02058 ,  G01B9/0209 ,  G01B11/2441 ,  G01M11/0228 ,  G01M11/0271 ,  G01N21/45

    Abstract: Methods and related systems for determining properties of optical systems (e.g., interferometers) and/or optical elements (e.g., lenses and/or lens systems) are described. For example, information related to an optical thickness mismatch of an interferometer can be determined by providing scanning interferometry data. The data typically include obtaining one or more interference signals each corresponding to a different spatial location of a test object. A phase is determined for each of multiple frequencies of each interference signal. The information related to the optical thickness mismatch is determined based on the phase for each of the multiple frequencies of the interference signal(s).

    Abstract translation: 描述了用于确定光学系统（例如，干涉仪）和/或光学元件（例如，透镜和/或透镜系统）的性质的方法和相关系统。 例如，可以通过提供扫描干涉测量数据来确定与干涉仪的光学厚度失配有关的信息。 数据通常包括获得每个对应于测试对象的不同空间位置的一个或多个干扰信号。 确定每个干扰信号的多个频率中的每一个的相位。 基于干涉信号的多个频率中的每一个的相位确定与光学厚度失配有关的信息。

    Low coherence grazing incidence interferometry systems and methods
    69.
    发明申请
    Low coherence grazing incidence interferometry systems and methods 有权
    低相干掠入射干涉测量系统和方法

    公开(公告)号：US20050057757A1

    公开(公告)日：2005-03-17

    申请号：US10941631

    申请日：2004-09-15

    Applicant: Xavier Colonna De Lega ,  Peter De Groot ,  Michael Kuchel

    Inventor： Xavier Colonna De Lega ,  Peter De Groot ,  Michael Kuchel

    IPC: G01B9/02 ,  G01B11/00 ,  G01B11/06 ,  G03F7/20 ,  G03F9/00

    CPC classification number: G03F7/70491 ,  G01B9/02019 ,  G01B9/02022 ,  G01B9/02084 ,  G01B9/02087 ,  G01B9/0209 ,  G01B11/0675 ,  G01B2290/30 ,  G01B2290/70 ,  G03F7/70608 ,  G03F7/70641 ,  G03F7/70775 ,  G03F9/7003 ,  G03F9/7049 ,  G03F9/7088

    Abstract: An optical system includes a photolithography system, a low coherence interferometer, and a detector. The photolithography system is configured to illuminate a portion of an object with a light pattern and has a reference surface. The low coherence interferometer has a reference optical path and a measurement optical path. Light that passes along the reference optical path reflects at least once from the reference surface and light that passes along the measurement optical path reflects at least once from the object. The detector is configured to detect a low coherence interference signal including light that has passed along the reference optical path and light that has passed along the measurement optical path. The low coherence interference signal is indicative of a spatial relationship between the reference surface and the object.

    Abstract translation: 光学系统包括光刻系统，低相干干涉仪和检测器。 光刻系统被配置为用光图案照射物体的一部分并具有参考表面。 低相干干涉仪具有参考光路和测量光路。 沿着基准光路通过的光至少从参考面反射一次，并且沿测量光路通过的光至少反射一次。 检测器被配置为检测包括沿着参考光路已经通过的光和沿着测量光路已经通过的光的低相干干涉信号。 低相干干涉信号指示参考表面和对象之间的空间关系。

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