摘要:
Radio frequency sputtering of high resistance films may be achieved in a cluster tool. Suitable radio frequency isolation may be utilized to enable RF sputtering in an environment which may sensitive to radio frequency energy.
摘要:
A planarized surface may be formed by initially forming an aperture through an insulating layer. The insulating layer and its aperture may be conformally coated with a conductive material that ultimately acts as a planarization stop. The conductive material may then be covered with another insulator that fills the remainder of the aperture. Thereafter, the structure may be planarized down to the conductive layer that acts as a planarization stop.
摘要:
There is provided a chemical mechanical polishing apparatus, which may include a polishing table rotated by a polishing table motor and having a pad thereon, a carrier head located above the polishing table to be rotatable by the driving of a carrier head motor and having a wafer located under the bottom thereof, a slurry supplier for supplying a slurry to the upper portion of the polishing table, a first polishing end point detector for detecting a polishing end point through the temperature change of the temperature sensor, at least one temperature sensor for detecting the temperature of a polishing region (the wafer, the pad, and the slurry), and a second polishing end point detector for detecting a polishing end point from the changes of load current, voltage, and resistance of the carrier head motor. Further, instead of the second polishing end point detector, an optical signal polishing end point detector may be employed, for detecting the polishing end point by the light illuminated on the wafer and reflected from the wafer.
摘要:
A pad conditioner of wafer planarization equipment includes a linear driving device for moving a disk holder up and down using a magnetic force. The linear driving device has an electromagnet, a permanent magnet, and a controller. The controller controls the power supplied to the electromagnet such that the electromagnet and permanent magnet produce a force of attraction and/or repulsion used to move the disk holder relative to a polishing pad of the wafer planarization equipment.
摘要:
A steering column support mounting bracket for an automobile which can increase the strength by reducing the weight of the steering column support mounting bracket and decreases the number of parts by pivotally coupling a brake pedal unit to a lower portion thereof. The steering column support mounting bracket includes a supporting plate which is coupled to a predetermined position of a cowl cross bar and is made of a plastic material and a reinforcing plate which is coupled to one side of the supporting plate and is made of a steel material so as to increase the strength of the supporting plate. A brake pedal unit is pivotally connected to a lower portion of the mounting bracket.
摘要:
A symbol decoding apparatus run-level-decodes corresponding symbol data using the same scan pattern data as used for run-level-encoding. A symbol separator separates the received run-level-encoded symbol data into run data and level data. An address outputter selects a particular scan pattern using the scan pattern data associated with the symbol data, and selects a scan address for storing the level data among the scan addresses corresponding to the selected scan pattern using the separated run data. A data store stores the level data supplied from the symbol separator at the storage position designated by the selected scan address. Thus, the run-level-encoded symbols are run-level-decoded based on the scan pattern used for run-level encoding and stored in a form appropriate for use in a downstream unit.
摘要:
Organometallic precursors may be utilized to form titanium silicon nitride films that act as heaters for phase change memories. By using a combination of TDMAT and TrDMASi, for example in a metal organic chemical vapor deposition chamber, a relatively high percentage of silicon may be achieved in reasonable deposition times, in some embodiments. In one embodiment, two separate bubblers may be utilized to feed the two organometallic compounds in gaseous form to the deposition chamber so that the relative proportions of the precursors can be readily controlled.
摘要:
In one embodiment of the present disclosure, a composite electrode for a battery is provided. The composite electrode includes silver vanadium oxide present in an amount from about 75 weight percent to about 99 weight percent and polypyrrole present in an amount from about 1 weight percent to about 25 weight percent.
摘要:
A semiconductor package includes a first substrate on which a first semiconductor chip is mounted, a second substrate spaced apart from the first substrate and on which a second semiconductor chip is mounted, first pads disposed on the first substrate, second pads disposed on the second substrate to be opposite to the first pads, and connection patterns electrically connecting the opposite first and second pads to each other, respectively. The first pads are disposed asymmetrically with respect to the central axis of the first substrate.