Chemical mechanical polishing apparatus
    63.
    发明授权
    Chemical mechanical polishing apparatus 失效
    化学机械抛光装置

    公开(公告)号:US06976902B2

    公开(公告)日:2005-12-20

    申请号:US10850688

    申请日:2004-05-21

    摘要: There is provided a chemical mechanical polishing apparatus, which may include a polishing table rotated by a polishing table motor and having a pad thereon, a carrier head located above the polishing table to be rotatable by the driving of a carrier head motor and having a wafer located under the bottom thereof, a slurry supplier for supplying a slurry to the upper portion of the polishing table, a first polishing end point detector for detecting a polishing end point through the temperature change of the temperature sensor, at least one temperature sensor for detecting the temperature of a polishing region (the wafer, the pad, and the slurry), and a second polishing end point detector for detecting a polishing end point from the changes of load current, voltage, and resistance of the carrier head motor. Further, instead of the second polishing end point detector, an optical signal polishing end point detector may be employed, for detecting the polishing end point by the light illuminated on the wafer and reflected from the wafer.

    摘要翻译: 提供了一种化学机械抛光装置,其可以包括由抛光台马达旋转并且具有垫的抛光台,位于抛光台上方的载体头可以通过载体头马达的驱动旋转并具有晶片 位于其底部的浆料供应器,用于向抛光台的上部供应浆料;第一抛光终点检测器,用于通过温度传感器的温度变化检测抛光终点;至少一个检测温度传感器 抛光区域(晶片,焊盘和浆料)的温度,以及用于从承载头电动机的负载电流,电压和电阻的变化检测抛光终点的第二抛光终点检测器。 此外,代替第二研磨终点检测器,可以采用光信号抛光终点检测器,用于通过照射在晶片上的光并从晶片反射来检测抛光终点。

    Pad conditioner of CMP equipment
    64.
    发明授权
    Pad conditioner of CMP equipment 有权
    CMP设备的垫式调节器

    公开(公告)号:US06960114B2

    公开(公告)日:2005-11-01

    申请号:US10766485

    申请日:2004-01-29

    申请人: Jong-Won Lee

    发明人: Jong-Won Lee

    CPC分类号: B24B53/017

    摘要: A pad conditioner of wafer planarization equipment includes a linear driving device for moving a disk holder up and down using a magnetic force. The linear driving device has an electromagnet, a permanent magnet, and a controller. The controller controls the power supplied to the electromagnet such that the electromagnet and permanent magnet produce a force of attraction and/or repulsion used to move the disk holder relative to a polishing pad of the wafer planarization equipment.

    摘要翻译: 晶片平面化设备的衬垫调节器包括用于使用磁力使盘保持器上下移动的线性驱动装置。 线性驱动装置具有电磁体,永磁体和控制器。 控制器控制提供给电磁体的功率,使得电磁体和永磁体产生用于相对于晶片平面化设备的抛光垫移动盘保持器的吸引力和/或排斥力。

    Steering column support mounting bracket for automobile
    65.
    发明申请
    Steering column support mounting bracket for automobile 有权
    转向柱支持汽车安装支架

    公开(公告)号:US20050035585A1

    公开(公告)日:2005-02-17

    申请号:US10682971

    申请日:2003-10-14

    申请人: Jong-Won Lee

    发明人: Jong-Won Lee

    IPC分类号: B62D25/08 B60T7/06 B62D1/16

    CPC分类号: B60T7/06 B62D1/16

    摘要: A steering column support mounting bracket for an automobile which can increase the strength by reducing the weight of the steering column support mounting bracket and decreases the number of parts by pivotally coupling a brake pedal unit to a lower portion thereof. The steering column support mounting bracket includes a supporting plate which is coupled to a predetermined position of a cowl cross bar and is made of a plastic material and a reinforcing plate which is coupled to one side of the supporting plate and is made of a steel material so as to increase the strength of the supporting plate. A brake pedal unit is pivotally connected to a lower portion of the mounting bracket.

    摘要翻译: 一种用于汽车的转向柱支撑安装支架,其可以通过减小转向柱支撑安装支架的重量来增加强度,并且通过将制动踏板单元枢转地联接到其下部来减少部件数量。 转向柱支撑安装支架包括支撑板,该支撑板联接到前围横梁的预定位置,并且由塑料材料和加强板制成,该加强板联接到支撑板的一侧并由钢材制成 以增加支撑板的强度。 制动踏板单元枢转地连接到安装支架的下部。

    Symbol decoding method and apparatus
    66.
    发明授权
    Symbol decoding method and apparatus 失效
    符号解码方法及装置

    公开(公告)号:US6100826A

    公开(公告)日:2000-08-08

    申请号:US54402

    申请日:1998-04-03

    摘要: A symbol decoding apparatus run-level-decodes corresponding symbol data using the same scan pattern data as used for run-level-encoding. A symbol separator separates the received run-level-encoded symbol data into run data and level data. An address outputter selects a particular scan pattern using the scan pattern data associated with the symbol data, and selects a scan address for storing the level data among the scan addresses corresponding to the selected scan pattern using the separated run data. A data store stores the level data supplied from the symbol separator at the storage position designated by the selected scan address. Thus, the run-level-encoded symbols are run-level-decoded based on the scan pattern used for run-level encoding and stored in a form appropriate for use in a downstream unit.

    摘要翻译: 符号解码装置使用与用于运行级别编码的相同的扫描模式数据运行级别对相应的符号数据进行解码。 符号分隔符将接收到的运行级别编码的符号数据分成运行数据和级别数据。 地址输出器使用与符号数据相关联的扫描图案数据来选择特定的扫描图案,并且使用分离的运行数据来选择用于存储与所选择的扫描图形相对应的扫描地址之间的电平数据的扫描地址。 数据存储器将从符号分离器提供的电平数据存储在由所选扫描地址指定的存储位置处。 因此,运行级编码符号基于用于运行级编码的扫描模式进行运行级解码,并以适合于在下游单元中使用的形式存储。

    Depositing titanium silicon nitride films for forming phase change memories
    68.
    发明授权
    Depositing titanium silicon nitride films for forming phase change memories 有权
    沉积用于形成相变存储器的氮化钛膜

    公开(公告)号:US08501523B2

    公开(公告)日:2013-08-06

    申请号:US10977186

    申请日:2004-10-28

    IPC分类号: H01L21/00 H01L21/31

    摘要: Organometallic precursors may be utilized to form titanium silicon nitride films that act as heaters for phase change memories. By using a combination of TDMAT and TrDMASi, for example in a metal organic chemical vapor deposition chamber, a relatively high percentage of silicon may be achieved in reasonable deposition times, in some embodiments. In one embodiment, two separate bubblers may be utilized to feed the two organometallic compounds in gaseous form to the deposition chamber so that the relative proportions of the precursors can be readily controlled.

    摘要翻译: 有机金属前体可用于形成用作相变存储器的加热器的氮化钛膜。 通过使用TDMAT和TrDMASi的组合,例如在金属有机化学气相沉积室中,在一些实施方案中,可以在合理的沉积时间内实现相对高百分比的硅。 在一个实施方案中,可以使用两个分开的起泡器将气态形式的两种有机金属化合物进料到沉积室,以便容易地控制前体的相对比例。

    Polypyrrole and Silver Vanadium Oxide Composite
    69.
    发明申请
    Polypyrrole and Silver Vanadium Oxide Composite 有权
    聚吡咯和银氧化钒复合材料

    公开(公告)号:US20120168687A1

    公开(公告)日:2012-07-05

    申请号:US13411976

    申请日:2012-03-05

    IPC分类号: H01B1/08 H01B1/04

    摘要: In one embodiment of the present disclosure, a composite electrode for a battery is provided. The composite electrode includes silver vanadium oxide present in an amount from about 75 weight percent to about 99 weight percent and polypyrrole present in an amount from about 1 weight percent to about 25 weight percent.

    摘要翻译: 在本公开的一个实施例中,提供了一种用于电池的复合电极。 复合电极包括以约75重量%至约99重量%的量存在的银钒氧化物,并且存在量为约1重量%至约25重量%的聚吡咯。