公开(公告)号：US20130147313A1

公开(公告)日：2013-06-13

申请号：US13816556

申请日：2011-08-12

申请人： Matthias Sachse

发明人： Matthias Sachse

IPC分类号： B81C1/00 ,  H02N1/00

CPC分类号： B81C1/00619 ,  B81B2201/0221 ,  B81B2201/033 ,  B81B2203/051 ,  G01C19/5733 ,  G01P15/125 ,  H01G5/16 ,  H02N1/008

摘要： The invention presents a method for producing microstructured apparatuses for microelectromechanical systems (MEMS). In order to increase the maximum aspect ratio conditioned by physical or chemical microstructuring methods, it is proposed to design flat elements of the apparatus, which are structured such that they are movable relative to one another, to be laterally changeable from a first reference position relative to one another (structuring position) to a second reference position (operating position) in a permanent or irreversible manner. As a result, higher trench capacitances can be formed between structured wall sections. The reference position can be changed by means of integrated drives or by supplying energy from the outside and said change is effected in a direction which is substantially different from the measuring direction. In addition to mechanical work and energy from electrical or magnetic fields, heat can be used to shift location in drives as a result of the action of force on an element or induced changes in length. This method makes it possible to produce highly sensitive sensors for very small excitation signals or to produce economical actuators with an extremely high level of efficiency in the form of low-attenuation, area-optimized, highly capacitive converters, as well as variable vertical capacitors with a high capacitance.

摘要翻译： 本发明提供一种用于生产用于微机电系统（MEMS）的微结构化装置的方法。 为了增加由物理或化学微结构化方法调节的最大纵横比，建议设计设备的扁平元件，其被构造成使得它们能够相对于彼此移动，从而可以相对于第一参考位置相对地横向变化 以永久或不可逆的方式彼此（结构位置）到第二参考位置（操作位置）。 结果，可以在结构化的壁部分之间形成更高的沟槽电容。 参考位置可以通过集成驱动器或通过从外部供应能量来改变，并且所述改变在与测量方向基本上不同的方向上进行。 除了来自电场或磁场的机械功能和能量之外，由于力对元件的作用或引起长度变化，热量可用于将位置移动到驱动器中。 该方法使得可以为非常小的激励信号产生高灵敏度的传感器，或者以低衰减，面积优化，高容性转换器以及可变垂直电容器的形式产生具有非常高的效率水平的经济致动器 高电容。

公开(公告)号：US20130075237A1

公开(公告)日：2013-03-28

申请号：US13247925

申请日：2011-09-28

申请人： Roman C. Gutierrez

发明人： Roman C. Gutierrez

IPC分类号： H01H59/00

CPC分类号： G06F3/016 ,  B81B3/0037 ,  B81B2203/051 ,  G01P15/0802 ,  G01P15/097 ,  G01P15/125 ,  G06F1/1686 ,  G06F1/1694 ,  G06F3/0202 ,  H01H59/0009 ,  H01H2003/008 ,  H02N1/00 ,  H02N1/006 ,  H03K17/98 ,  H03K2217/96062

摘要： A device can have an electrostatic MEMS actuator and a capacitive sensor in electrical communication with the electrostatic MEMS actuator. The capacitive sensor can be configured to determine a capacitance of the electrostatic MEMS actuator while a force is being applied to the electrostatic MEMS actuator as the electrostatic MEMS actuator is being actuated. The device can be used to construct a keyboard having tactile feedback, for example.

摘要翻译： 设备可以具有静电MEMS致动器和与静电MEMS致动器电连通的电容传感器。 当静电MEMS致动器被致动时，电容传感器可以被配置为确定静电MEMS致动器的电容，同时力施加到静电MEMS致动器。 例如，该装置可用于构建具有触觉反馈的键盘。

公开(公告)号：US20100155204A1

公开(公告)日：2010-06-24

申请号：US12717406

申请日：2010-03-04

申请人： Rogier Receveur ,  Philippe Habets ,  Ralph B. Danzl ,  Richard P.M. Houben ,  Michael F. Mattes

发明人： Rogier Receveur ,  Philippe Habets ,  Ralph B. Danzl ,  Richard P.M. Houben ,  Michael F. Mattes

IPC分类号： H01H59/00 ,  H01H11/00

CPC分类号： H01H59/0009 ,  B81B3/0054 ,  B81B2201/018 ,  B81B2203/051 ,  H01H2001/0042 ,  H01H2001/0078 ,  Y10T29/49105

摘要： A micro electromechanical (MEMS) switch suitable for use in medical devices is provided, along with methods of producing and using MEMS switches. In one aspect, a micro electromechanical switch including a moveable member configured to electrically cooperate with a receiving terminal is formed on a substrate. The moveable member and the receiving terminal each include an insulating layer proximate to the substrate and a conducting layer proximate to the insulating layer opposite the substrate. In various embodiments, the conducting layers of the moveable member and/or receiving terminal include a protruding region that extends outward from the substrate to switchably couple the conducting layers of the moveable member and the receiving terminal to thereby form a switch. The switch may be actuated using, for example, electrostatic energy.

摘要翻译： 提供了适用于医疗设备的微机电（MEMS）开关，以及生产和使用MEMS开关的方法。 一方面，在基板上形成包括被配置为与接收端子电配合的可移动部件的微机电开关。 可移动构件和接收端子各自包括靠近衬底的绝缘层和靠近与衬底相对的绝缘层的导电层。 在各种实施例中，可移动构件和/或接收端子的导电层包括从基板向外延伸的可突出地连接可移动构件和接收端子的导电层从而形成开关的突出区域。 可以使用例如静电能来致动开关。

公开(公告)号：US07692127B1

公开(公告)日：2010-04-06

申请号：US11729086

申请日：2007-03-26

申请人： Eric H. Linn ,  Michael A. Deeds ,  David Herman

发明人： Eric H. Linn ,  Michael A. Deeds ,  David Herman

IPC分类号： F42B15/01 ,  F42B10/00 ,  B81B7/00 ,  F42B15/00

CPC分类号： F42B10/62 ,  B81B3/0054 ,  B81B3/0072 ,  B81B2201/031 ,  B81B2203/0109 ,  B81B2203/051 ,  B81B2203/058

摘要： A MEMS apparatus includes a substrate; electrical contacts disposed on the substrate; a thermal arch beam supported by and connected between the contacts, the thermal arch beam including a midpoint and a protrusion located at about the midpoint; a lever having an axis of rotation and a bearing surface upon which the protrusion is operable to bear, a pair of lever supports disposed on the substrate for rotatably supporting the lever about the axis of rotation, an area of contact between the protrusion and the bearing surface being positioned vertically between the axis of rotation and the plane of the substrate. A voltage difference between the electrical contacts causes the thermal arch beam to move horizontally in the plane and the protrusion to bear against the lever causing rotation of the lever out of the plane.

摘要翻译： MEMS装置包括：基板; 设置在基板上的电触点; 支撑并连接在触头之间的热拱梁，热拱梁包括位于中点附近的中点和突起; 杠杆，其具有旋转轴线和支撑面，突起可操作地承载在所述支承面上;一对杆支撑件，其设置在所述基板上，用于围绕所述旋转轴线可旋转地支撑所述杠杆;所述突起与所述轴承之间的接触区域 表面垂直定位在旋转轴线和基板的平面之间。 电触点之间的电压差导致热拱梁在平面中水平移动，并且突起抵靠杠杆，导致杠杆从平面旋转。

公开(公告)号：US20100033278A1

公开(公告)日：2010-02-11

申请号：US12373778

申请日：2007-07-18

申请人： David Patrick Arnold ,  Janhavi Shariniwas Agashe

发明人： David Patrick Arnold ,  Janhavi Shariniwas Agashe

IPC分类号： H01F7/08

CPC分类号： H01H50/005 ,  B81B3/0021 ,  B81B2201/038 ,  B81B2203/051 ,  H02K33/18

摘要： Embodiments of the subject invention relate to a method and apparatus for electromagnetic actuation. Embodiments of an electromagnet actuator in accordance with the subject invention can include a fixed main body and a deformable membrane or displaceable piston-like member. In the case of piston motion, in specific embodiments, the piston can be supported by a corrugated diaphragm or bellows. In various embodiments, all or portions of the electromagnet actuator can be produced using microfabrication techniques. Specific embodiment of the subject invention can incorporate a plurality of magnets providing magnetic flux to a plurality of coil conductor elements so as to provide a plurality of locations that a force is applied to the moveable body portion of the electromagnetic actuator. Specific embodiments can incorporate an array of magnets interdigitated with an array of coil conductor elements, where the arrays can include 2, 5, 10, 20, or more each. Further specific embodiments allow the relative position of the magnetic flux and coil conductor elements to remain substantially the same during the movement of the moveable body by positioning the magnets and coil conductor elements on the moveable body so that the relative position of the magnets and the coil conductor elements on the moveable body do not change with the movement of the moveable body.

摘要翻译： 本发明的实施例涉及一种用于电磁致动的方法和装置。 根据本发明的电磁致动器的实施例可以包括固定主体和可变形膜或可移动的活塞状构件。 在活塞运动的情况下，在具体实施例中，活塞可由波纹膜片或波纹管支撑。 在各种实施例中，电磁致动器的全部或部分可以使用微细加工技术制造。 本发明的具体实施例可以包括向多个线圈导体元件提供磁通量的多个磁体，以便提供将力施加到电磁致动器的可移动主体部分的多个位置。 具体实施例可以包括与线圈导体元件阵列相互指向的磁体阵列，其中阵列可以包括2,5,10,20或更多个。 进一步的具体实施例允许通过将磁体和线圈导体元件定位在可移动体上，使得磁通量和线圈导体元件的相对位置在移动体的移动期间保持基本相同，使得磁体和线圈的相对位置 可移动体上的导体元件不随着可移动体的移动而变化。

公开(公告)号：US20080096301A1

公开(公告)日：2008-04-24

申请号：US11584057

申请日：2006-10-20

申请人： Sriram Ramamoorthi ,  Donald J. Milligan

发明人： Sriram Ramamoorthi ,  Donald J. Milligan

IPC分类号： H01L21/00 ,  H01L21/30

CPC分类号： B81C1/00253 ,  B81B2201/0235 ,  B81B2203/051 ,  B81B2203/053 ,  B81C1/00142 ,  B81C3/004 ,  B81C2201/019 ,  B81C2203/058

摘要： Embodiments of a micro electro mechanical system are disclosed.

摘要翻译： 公开了一种微机电系统的实施例。

公开(公告)号：US20070211612A1

公开(公告)日：2007-09-13

申请号：US10593976

申请日：2005-03-25

申请人： Serge Gidon ,  Olivier Lemonnier

发明人： Serge Gidon ,  Olivier Lemonnier

IPC分类号： G11B9/00

CPC分类号： G11C23/00 ,  B81B3/007 ,  B81B2203/0127 ,  B81B2203/0346 ,  B81B2203/0361 ,  B81B2203/051 ,  B81B2203/058

摘要： The flexible membrane comprises at least one thin layer with a plurality of indentations formed therein, wherein bearing points for actuating elements are disposed between said indentations in order to locally deform the membrane. The thus open-worked membrane is more flexible in a cross direction. The open-worked membrane can act as a support for the recording data, cooperating with a micro-point bi-dimensional network.

摘要翻译： 柔性膜包括至少一个其中形成有多个凹口的薄层，其中用于致动元件的支承点设置在所述凹陷之间，以便使膜局部变形。 这样开放的膜在十字方向上更具柔性。 开放膜可以作为记录数据的支持，与微点二维网络协作。

公开(公告)号：US07049806B2

公开(公告)日：2006-05-23

申请号：US10950886

申请日：2004-09-27

申请人： Patrick C. Herbert ,  Jeffrey R. Annis ,  Jun J. Yao ,  Winfred L. Morris ,  Henric Larsson ,  Richard D. Harris ,  Robert J. Kretschmann

发明人： Patrick C. Herbert ,  Jeffrey R. Annis ,  Jun J. Yao ,  Winfred L. Morris ,  Henric Larsson ,  Richard D. Harris ,  Robert J. Kretschmann

IPC分类号： G01R33/02

CPC分类号： H03H9/462 ,  B81B3/0072 ,  B81B2201/032 ,  B81B2203/0109 ,  B81B2203/051

摘要： In a MEMS device employing a beam supported by transverse arms, potential bowing of the transverse arms caused by fabrication processes, temperature or local self-heating from resistive losses is accommodated by flexible terminations of the transverse arms. Alternatively, this bowing is controlled so as to provide selective biasing to the beam or mechanical advantage in the sensing of beam motion.

摘要翻译： 在使用由横臂支撑的光束的MEMS装置中，通过制造工艺引起的横向臂的电位弯曲，来自电阻损耗的温度或局部自加热由横向臂的柔性端接来适应。 或者，该弯曲被控制以便在光束运动的感测中提供对光束的选择偏置或机械优点。

公开(公告)号：US07036312B2

公开(公告)日：2006-05-02

申请号：US10782708

申请日：2004-02-17

申请人： Stéphane Menard ,  Normand Lassonde ,  Jean-Claude Villeneuve

发明人： Stéphane Menard ,  Normand Lassonde ,  Jean-Claude Villeneuve

IPC分类号： F01B29/10

CPC分类号： H01H61/04 ,  B81B3/0024 ,  B81B2201/014 ,  B81B2203/0118 ,  B81B2203/051 ,  B81B2203/053 ,  F03G7/06 ,  H01H2001/0047 ,  H01H2001/0078 ,  H01H2061/006 ,  H01H2061/008

摘要： The MEMS cantilever actuator is designed to be mounted on a substrate. The actuator comprises an elongated hot arm member having two spaced-apart portions, each provided at one end with a corresponding anchor pad connected to the substrate. The portions are connected together at a common end that is opposite the anchor pads. It further comprises an elongated cold arm member adjacent to and substantially parallel of the hot arm member, the cold arm member having at one end an anchor pad connected to the substrate, and a free end that is opposite the anchor pad thereof. A dielectric tether is attached over the common end of the portions of the hot arm member and the free end of the cold arm member. This MEMS actuator allows improving the performance, reliability and manufacturability of MEMS switches.

摘要翻译： MEMS悬臂致动器被设计成安装在基板上。 致动器包括细长的热臂构件，其具有两个间隔开的部分，每个部分在一端设置有连接到衬底的对应的锚垫。 这些部分在与锚垫相对的公共端连接在一起。 它还包括与热臂构件相邻并基本上平行的细长的冷臂构件，冷臂构件的一端具有连接到衬底的锚垫和与衬垫相对的自由端。 介电系绳安装在热臂构件的部分和冷臂构件的自由端的公共端上。 该MEMS致动器允许提高MEMS开关的性能，可靠性和可制造性。

公开(公告)号：US06952965B2

公开(公告)日：2005-10-11

申请号：US10744099

申请日：2003-12-24

申请人： Seok-jin Kang ,  Seok-whan Chung ,  Moon-chul Lee ,  Kyu-dong Jung ,  Seog-soo Hong

发明人： Seok-jin Kang ,  Seok-whan Chung ,  Moon-chul Lee ,  Kyu-dong Jung ,  Seog-soo Hong

IPC分类号： B81B7/00 ,  B81B3/00 ,  B81B5/00 ,  B81C1/00 ,  G01C19/56 ,  G01C19/5762 ,  G01C19/5769 ,  G01P9/04

CPC分类号： G01C19/5762 ,  B81B3/0059 ,  B81B2201/0242 ,  B81B2203/051 ,  B81B2203/053

摘要： A vertical MEMS gyroscope by horizontal driving includes a substrate, a support layer fixed on an upper surface of an area of the substrate, a driving structure floating above the substrate and having a portion fixed to an upper surface of the support layer and another portion in parallel with the fixed portion, the driving structure having a predetermined area capable of vibrating in a predetermined direction parallel to the substrate, a detecting structure fixed to the driving structure on a same plane as the driving structure, and having a predetermined area capable of vibrating in a vertical direction with respect to the substrate, a cap wafer bonded with the substrate positioned above the driving structure and the detecting structure, and a fixed vertical displacement detection electrode formed at a predetermined location of an underside of the cap wafer, for detecting displacement of the detecting structure in the vertical direction.

摘要翻译： 通过水平驱动的垂直MEMS陀螺仪包括基板，固定在基板的区域的上表面上的支撑层，浮动在基板上方并具有固定到支撑层的上表面的部分的驱动结构， 平行于固定部分，驱动结构具有能够在与基板平行的预定方向上振动的预定区域;检测结构，其在与驱动结构相同的平面上固定到驱动结构，并且具有能够振动的预定区域 在相对于基板的垂直方向上，与位于驱动结构上方的基板接合的盖晶片和检测结构，以及形成在盖晶片的下侧的预定位置处的固定垂直位移检测电极，用于检测位移 的检测结构。