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    METHOD OF OPERATING A MICROMECHANICAL DEVICE THAT CONTAINS ANTI-STICTION GAS-PHASE LUBRICANT
    61.
    发明申请
    METHOD OF OPERATING A MICROMECHANICAL DEVICE THAT CONTAINS ANTI-STICTION GAS-PHASE LUBRICANT 有权
    操作抗气相润滑剂的微生物装置的方法

    公开(公告)号：US20090284823A1

    公开(公告)日：2009-11-19

    申请号：US12108030

    申请日：2008-04-23

    Applicant: Dongmin Chen ,  Fulin Xiong

    Inventor： Dongmin Chen ,  Fulin Xiong

    IPC: G02B26/00 ,  H02N2/00

    CPC classification number: G02B1/14 ,  B81B3/0005 ,  B81B2201/042 ,  B81C1/0096 ,  B81C2201/112 ,  B82Y30/00 ,  G02B21/32 ,  G02B27/0006

    Abstract: One embodiment of an micromechanical device includes a first contact surface, a moveable component having a second contact surface, and a coating of liquid or solid lubricant on at least one of the contact surfaces, where the second contact surface interacts with the first contact surface during device operation, and a gas-phase lubricant is disposed between the first contact surface and the second contact surface, where the gas-phase lubricant is adapted to increase the usable lifetime of the liquid or solid lubricant coating on the contact surfaces. One advantage of the disclosed device is that a gas-phase lubricant has a high diffusion rate and, therefore, is self-replenishing, meaning that it can quickly move back into a contact region after being physically displaced from the region by the contacting surfaces of the device during operation. Consequently, the gas-phase lubricant used with conventional solid or liquid lubricants is more reliable than solid or liquid lubricants used alone in preventing stiction-related device failures.

    Abstract translation: 微机械装置的一个实施例包括第一接触表面，具有第二接触表面的可移动部件和在至少一个接触表面上的液体或固体润滑剂涂层，其中第二接触表面在第一接触表面与第一接触表面相互作用 装置操作，并且气相润滑剂设置在第一接触表面和第二接触表面之间，其中气相润滑剂适于增加接触表面上的液体或固体润滑剂涂层的使用寿命。 所公开的装置的一个优点是气相润滑剂具有高扩散速率，因此是自补充的，这意味着它可以在通过接触区域的接触表面物理移位之后迅速地移回接触区域 该设备在运行期间。 因此，与常规固体或液体润滑剂一起使用的气相润滑剂比单独使用的固体或液体润滑剂更可靠，以防止与静脉相关的装置故障。

    Method of using a preferentially deposited lubricant to prevent anti-stiction in micromechanical systems
    62.
    发明授权
    Method of using a preferentially deposited lubricant to prevent anti-stiction in micromechanical systems 有权
    使用优先沉积的润滑剂以防止微机械系统中的抗静电的方法

    公开(公告)号：US07463404B2

    公开(公告)日：2008-12-09

    申请号：US11556154

    申请日：2006-11-02

    Applicant: Dongmin Chen ,  Fulin Xiong

    Inventor： Dongmin Chen ,  Fulin Xiong

    IPC: G02B26/00

    CPC classification number: G02B26/0841 ,  B81B3/0005 ,  B81C1/0096 ,  B81C2201/112 ,  B82Y30/00

    Abstract: Embodiments of the present invention generally relate to a device that has an improved usable lifetime due to the presence of a lubricant that reduces the likelihood of stiction occurring between the various moving parts in an electromechanical device. Embodiments of the present invention also generally include a device, and a method of forming a device, that has one or more surfaces or regions that have a volume of lubricant disposed thereon that acts as a ready supply of “fresh” lubricant to prevent stiction occurring between interacting components found within the device. In one aspect, components within the volume of lubricant form a gas or vapor phase that reduces the chances of stiction-related failure in the formed device. In one example, aspects of this invention may be especially useful for fabricating and using micromechanical devices, such as MEMS devices, NEMS devices, or other similar thermal or fluidic devices.

    Abstract translation: 本发明的实施例总体上涉及一种由于存在降低在机电装置中的各种运动部件之间出现静电的可能性的润滑剂而具有改善的使用寿命的装置。 本发明的实施例还通常包括一种装置和一种形成装置的方法，其具有一个或多个表面或区域，其具有设置在其上的润滑剂体积，其用作即将供应的“新鲜”润滑剂以防止发生粘连 在设备内发现的互动组件之间。 在一个方面，润滑剂体积内的组分形成气体或气相，其降低了所形成的装置中与静电相关的故障的机会。 在一个示例中，本发明的方面对于制造和使用诸如MEMS器件，NEMS器件或其它类似的热或流体器件的微机械器件可能特别有用。

    Preparation of microelectromechanical system device using an anti-stiction material and selective plasma sputtering
    63.
    发明授权
    Preparation of microelectromechanical system device using an anti-stiction material and selective plasma sputtering 失效
    使用抗静电材料和选择性等离子体溅射制备微机电系统装置

    公开(公告)号：US07443001B2

    公开(公告)日：2008-10-28

    申请号：US11541993

    申请日：2006-10-02

    Applicant: Chien-Hua Chen ,  Paul Felice Reboa ,  Charles C. Haluzak

    Inventor： Chien-Hua Chen ,  Paul Felice Reboa ,  Charles C. Haluzak

    IPC: H01L21/00 ,  H01L21/302

    CPC classification number: B81C1/00849 ,  B81C2201/112 ,  B81C2203/0145

    Abstract: A method for preparing a microelectromechanical system (MEMS) device for subsequent processing is disclosed. The method includes establishing an anti-stiction material on exposed surfaces of the MEMS device. The exposed surfaces include at least an interior surface of a chamber and an external surface of the MEMS device. The anti-stiction material is selectively removed from at least a portion of the external surface via a plasma sputtering process under controlled conditions.

    Abstract translation: 公开了一种用于制备用于后续处理的微机电系统（MEMS）装置的方法。 该方法包括在MEMS器件的暴露表面上建立抗静电材料。 暴露的表面包括至少室的内表面和MEMS装置的外表面。 在受控条件下，通过等离子体溅射工艺，从外表面的至少一部分选择性地除去抗静电材料。

    Micro electro-mechanical system and method of manufacturing the same
    64.
    发明申请
    Micro electro-mechanical system and method of manufacturing the same 有权
    微机电系统及其制造方法

    公开(公告)号：US20080224319A1

    公开(公告)日：2008-09-18

    申请号：US11976678

    申请日：2007-10-26

    Applicant: Makiko Nakamura

    Inventor： Makiko Nakamura

    IPC: H01L23/48 ,  H01L21/02 ,  H01L21/44

    CPC classification number: B81C1/00944 ,  B81B2201/0271 ,  B81B2203/0118 ,  B81B2203/04 ,  B81C2201/112 ,  H01L28/40 ,  H03H3/0077 ,  H03H9/2457 ,  H03H2009/02496

    Abstract: A micro electro-mechanical system, which can be stably formed so as to prevent sticking of a movable part and which has a narrow gap, and a method of manufacturing the same are provided. The micro electro-mechanical system includes at least one fixed electrode formed above a principal surface of a semiconductor substrate and at least one movable electrode formed on the principal surface. The at least one movable electrode includes the movable part separated from the principal surface and the at least one fixed electrode. The movable part is movable with respect to the principal surface and the at least one fixed electrode. The method of manufacturing the micro electromechanical system includes a sacrifical film formation step for forming a sacrifical film above the principal surface, an electrode layer formation step for forming an electrode layer above the principal surface so as to cover over the sacrifical film, an etching step for partially etching the electrode layer via a pattern so as to form the at least one electrode and the at least one fixed electrode, a sacrifical film removal step for removing the sacrifical film, and a conducting film formation step for forming a conducting film on surfaces of the at least one electrode and the at least one fixed electrode.

    Abstract translation: 提供一种可以稳定地形成以防止可动部分的粘附并且具有窄间隙的微机电系统及其制造方法。 微电子机械系统包括形成在半导体衬底的主表面上的至少一个固定电极和形成在主表面上的至少一个可移动电极。 所述至少一个可移动电极包括从所述主表面和所述至少一个固定电极分离的可移动部件。 可移动部分可相对于主表面和至少一个固定电极移动。 微机电系统的制造方法包括在主表面上形成牺牲膜的牺牲膜形成工序，在主表面上形成电极层以覆盖牺牲膜的电极层形成工序，蚀刻工序 用于通过图案部分地蚀刻电极层，以形成至少一个电极和至少一个固定电极，用于去除牺牲膜的牺牲膜去除步骤，以及用于在表面上形成导电膜的导电膜形成步骤 的至少一个电极和至少一个固定电极。

    ALUMINUM FLUORIDE FILMS FOR MICROELECTROMECHANICAL SYSTEM APPLICATIONS
    65.
    发明申请
    ALUMINUM FLUORIDE FILMS FOR MICROELECTROMECHANICAL SYSTEM APPLICATIONS 失效
    用于微电子系统应用的氟化铝薄膜

    公开(公告)号：US20080158645A1

    公开(公告)日：2008-07-03

    申请号：US11646059

    申请日：2006-12-27

    Applicant: Chih-Wei Chiang

    Inventor： Chih-Wei Chiang

    IPC: G02B26/02 ,  B05D5/06 ,  B05D5/12

    CPC classification number: G02B26/001 ,  B81B2201/047 ,  B81C1/00801 ,  B81C2201/014 ,  B81C2201/112

    Abstract: A microelectromechanical systems (MEMS) device utilizing an aluminum fluoride layer as an etch stop is disclosed. In one embodiment, a MEMS device includes a first electrode having a first surface; and a second electrode having a second surface facing the first surface and defining a gap therebetween. The second electrode is movable in the gap between a first position and a second position. At least one of the electrodes includes an aluminum fluoride layer facing the other of the electrodes. During fabrication of the MEMS device, a sacrificial layer is formed between the first and second electrodes and is released to define the gap. The aluminum fluoride layer serves as an etch stop to protect the first or second electrode during the release of the sacrificial layer.

    Abstract translation: 公开了一种利用氟化铝层作为蚀刻阻挡层的微机电系统（MEMS）装置。 在一个实施例中，MEMS器件包括具有第一表面的第一电极; 以及第二电极，其具有面向所述第一表面的第二表面并且在其间限定间隙。 第二电极可以在第一位置和第二位置之间的间隙中移动。 至少一个电极包括面对另一个电极的氟化铝层。 在MEMS器件的制造期间，在第一和第二电极之间形成牺牲层并被释放以限定间隙。 氟化铝层用作蚀刻停止件，以在释放牺牲层期间保护第一或第二电极。

    Method of operating a micromechanical device that contains anti-stiction gas-phase lubricant
    67.
    发明授权
    Method of operating a micromechanical device that contains anti-stiction gas-phase lubricant 有权
    操作含有抗静电气相润滑剂的微机械装置的方法

    公开(公告)号：US07372615B2

    公开(公告)日：2008-05-13

    申请号：US11389423

    申请日：2006-03-24

    Applicant: Dongmin Chen ,  Fulin Xiong

    Inventor： Dongmin Chen ,  Fulin Xiong

    IPC: G02B26/00 ,  G22B26/08 ,  G02F1/29

    CPC classification number: G02B1/14 ,  B81B3/0005 ,  B81B2201/042 ,  B81C1/0096 ,  B81C2201/112 ,  B82Y30/00 ,  G02B21/32 ,  G02B27/0006

    Abstract: One embodiment of an micromechanical device includes a first contact surface, a moveable component having a second contact surface, where the second contact surface interacts with the first contact surface during device operation, and a gas-phase lubricant disposed between the first contact surface and the second contact surface, where the gas-phase lubricant is adapted to reduce stiction-related forces between the first contact surface and the second contact surface. One advantage of the disclosed device is that a gas-phase lubricant has a high diffusion rate and, therefore, is self-replenishing, meaning that it can quickly move back into a contact region after being physically displaced from the region by the contacting surfaces of the device during operation. Consequently, the gas-phase lubricant is more reliable than conventional solid or liquid lubricants in preventing stiction-related device failures.

    Abstract translation: 微机械装置的一个实施例包括第一接触表面，具有第二接触表面的可移动部件，其中第二接触表面在器件操作期间与第一接触表面相互作用，以及设置在第一接触表面和第二接触表面之间的气相润滑剂 第二接触表面，其中气相润滑剂适于减小第一接触表面和第二接触表面之间的静摩擦力。 所公开的装置的一个优点是气相润滑剂具有高扩散速率，因此是自补充的，这意味着它可以在通过接触区域的接触表面物理移位之后迅速地移回接触区域 该设备在运行期间。 因此，气相润滑剂比传统的固体或液体润滑剂在防止与静脉相关的装置故障方面更可靠。

    MICRO DEVICES HAVING ANTI-STICTION MATERIALS
    69.
    发明申请
    MICRO DEVICES HAVING ANTI-STICTION MATERIALS 审中-公开
    具有抗反射材料的微型器件

    公开(公告)号：US20080074725A1

    公开(公告)日：2008-03-27

    申请号：US11467507

    申请日：2006-08-25

    Applicant: Shaoher X. Pan

    Inventor： Shaoher X. Pan

    IPC: G02B26/00

    CPC classification number: G02B26/0841 ,  B81B3/0005 ,  B81C2201/112

    Abstract: A method for fabricating a micro structure includes forming a first structure portion on a substrate; disposing a sacrificial material over the first structure portion; depositing a layer of a first structural material over the sacrificial material and the substrate; removing at least a portion of the sacrificial material to form a second structure portion in the layer of the first structural material, and forming a carbon layer on a surface of the second structure portion or on a surface of the first structure portion to prevent stiction between the second structure portion and the first structure portion. The second structure portion is connected with the substrate and is movable between a first position in which the second structural portion is separated from the first structure portion and a second position in which the second structure portion is in contact with the first structure portion.

    Abstract translation: 微结构的制造方法包括在基板上形成第一结构部分; 在所述第一结构部分上设置牺牲材料; 在所述牺牲材料和所述基底上沉积第一结构材料层; 去除所述牺牲材料的至少一部分以在所述第一结构材料的层中形成第二结构部分，以及在所述第二结构部分的表面上或所述第一结构部分的表面上形成碳层，以防止所述第二结构部分之间的粘结 第二结构部分和第一结构部分。 第二结构部与基板连接，并且能够在第二结构部分与第一结构部分分离的第一位置和第二结构部分与第一结构部分接触的第二位置之间移动。

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