公开(公告)号：US20030148103A1

公开(公告)日：2003-08-07

申请号：US10350498

申请日：2003-01-23

Applicant: United Modular Corporation

Inventor： Veerasamy Vijayen ,  Manfred Weiler ,  Eric Li

IPC: B32B009/00

CPC classification number: H01J37/32357 ,  C03C17/22 ,  C03C2217/282 ,  C03C2218/151 ,  C23C16/26 ,  C23C16/486 ,  G11B5/72 ,  G11B5/8408 ,  H01J27/18 ,  H01J37/08 ,  H01J37/32091 ,  H01J2237/0815 ,  Y10T428/1164 ,  Y10T428/24355 ,  Y10T428/265 ,  Y10T428/30 ,  Y10T428/31678

Abstract: The invention provides systems and methods for the deposition of an improved diamond-like carbon material, particularly for the production of magnetic recording media. The diamond-like carbon material of the present invention is highly tetrahedral, that is, it features a large number of the sp3 carbon-carbon bonds which are found within a diamond crystal lattice. The material is also amorphous, providing a combination of short-range order with long-range disorder, and can be deposited as films which are ultrasmooth and continuous at thicknesses substantially lower than known amorphous carbon coating materials. The carbon protective coatings of the present invention will often be hydrogenated. In a preferred method for depositing of these materials, capacitive coupling forms a highly uniform, selectively energized stream of ions from a dense, inductively ionized plasma. Such inductive ionization is enhanced by a relatively slow moving (or nullquasi-staticnull) magnetic field, which promotes resonant ionization and ion beam homogenization.

公开(公告)号：US5780862A

公开(公告)日：1998-07-14

申请号：US797954

申请日：1997-02-12

Applicant: Harold E. Siess

Inventor： Harold E. Siess

IPC: F03H1/00 ,  H01J27/22 ,  H01J27/00

CPC classification number: H01J27/26 ,  H01J37/08 ,  H01J2237/081 ,  H01J2237/0815

Abstract: A surface ion source apparatus (10) creates a high purity ion beam (44) of molecules of metal compounds having a lower ionization energy than the metal they contain. Low energy dispersion in the ion beam and currents on the order of one ampere are attainable over long duration operation. Rhenium screen (12) is used in the ion source and related catalyzer (31). Temperatures vary in the range of 700 to 2500 degrees centigrade and a preferred vacuum pressure of 10.sup.-5 torr, or lower, is used. Wear and corrosion resistance of a wide variety of materials is greatly enhanced through ion deposition and/or implantation with the disclosed apparatus and methods. This high output ion source is also useful for electronic propulsion, separation of isotopes and production of electricity by forcing ions through a transverse magnetic field, such as used with a magnetohydrodynamic generator.

Abstract translation: 表面离子源装置（10）产生具有比它们所含的金属低的电离能的金属化合物分子的高纯度离子束（44）。 离子束中的低能量色散和一安培数量级的电流可以在长时间运行下达到。 铼筛（12）用于离子源和相关催化剂（31）。 温度在700至2500摄氏度的范围内变化，优选的真空压力为10 -5乇或更低。 通过使用所公开的装置和方法的离子沉积和/或注入，大大增强了各种材料的耐磨性和耐腐蚀性。 这种高输出离子源也可用于电子推进，同位素分离和通过强迫离子通过横向磁场的产生，例如与磁流体动力发电机一起使用。

公开(公告)号：US5112458A

公开(公告)日：1992-05-12

申请号：US457511

申请日：1989-12-27

Applicant: Masatoshi Nakayama ,  Kunihiro Ueda

Inventor： Masatoshi Nakayama ,  Kunihiro Ueda

IPC: C23C16/26 ,  C23C16/452 ,  H01J37/08 ,  H01J37/317

CPC classification number: H01J37/3178 ,  C23C16/26 ,  C23C16/452 ,  H01J37/08 ,  H01J2237/0815

Abstract: In a process for producing a diamond-like film which comprises introducing a hydrocarbon feed gas or a feed gas capable of producing a hydrocarbon on decomposition or reaction into a vacuum, ionizing the gas, and depositing the same on a substrate to form a diamond-like film thereon, the hydrocarbon gas is passed through a plasma exciter prior to the introduction into the vacuum. An apparatus for practicing the process comprises a plasma exciter means located on a passage through which the hydrocarbon gas is introduced into the vacuum.

Abstract translation: 在制造类金刚石膜的方法中，其包括在分解或反应中将能够产生烃的烃进料气体或进料气体引入真空中，使气体电离，并将其沉积在基材上以形成金刚石 - 在引入真空之前，烃气体通过等离子体激发器。 用于实施该方法的装置包括位于将烃气体引入真空的通道上的等离子体激发器装置。

公开(公告)号：US4424104A

公开(公告)日：1984-01-03

申请号：US493871

申请日：1983-05-12

Applicant: James M. E. Harper ,  Alan W. Kleinsasser

Inventor： James M. E. Harper ,  Alan W. Kleinsasser

IPC: H01L21/31 ,  C23C14/22 ,  C23C14/54 ,  H01J37/08 ,  H01J37/305 ,  H01L21/203 ,  H01L39/24 ,  C23C15/00

CPC classification number: H01J37/3053 ,  C23C14/221 ,  C23C14/542 ,  H01J37/08 ,  H01J2237/0815

Abstract: Combining an evaporation source and an ion beam source to provide a crucible anode surface, and heating that crucible anode surface to a high enough temperature to cause evaporation of anode material, provides for emission of atoms and ions selectively and independently controllable and directed along the identical path. A high melting point material auxiliary anode, connected to the crucible anode by a variable resistance, provides independent control of the vapor flux by selectively shifting the discharge current from auxiliary anode to crucible anode. The crucible anode contains the material which is to be evaporated. A gas plasma discharge is supplied between a heated cathode filament and the heated crucible anode. Electrons carrying a discharge current bombard the crucible anode material surface, causing a temperature rise which causes an increase in discharge current. At a high enough discharge current level, the anode material in the crucible anode melts and vaporizes, forming a stream which passes through an extraction grid to deposit vaporized anode material on a substrate. The gas discharge generates ions, which are accelerated by voltages on the anodes, forming an ion beam which also strikes the substrate. The flux of the ion beam is controlled by the discharge current. The ion energy is controlled by the anode power supply. Shifting a portion of the discharge current from the auxiliary anode to the crucible anode increases the amount of vapor flux for a given ion flux.

Abstract translation: 将蒸发源和离子束源组合以提供坩埚阳极表面，并且将坩埚阳极表面加热到足够高的温度以引起阳极材料的蒸发，从而提供原子和离子的发射，其选择性且独立地可控制并沿着相同的方向引导 路径。 通过可变电阻连接到坩埚阳极的高熔点材料辅助阳极通过将放电电流从辅助阳极选择性地移动到坩埚阳极来提供对蒸气通量的独立控制。 坩埚阳极含有待蒸发的材料。 在加热的阴极丝和加热的坩埚阳极之间提供气体等离子体放电。 携带放电电流的电子轰击坩埚阳极材料表面，引起升温，导致放电电流增加。 在足够高的放电电流水平下，坩埚阳极中的阳极材料熔化并蒸发，形成通过提取栅格的流，以将蒸发的阳极材料沉积在衬底上。 气体放电产生离子，其由阳极上的电压加速，形成也撞击衬底的离子束。 离子束的通量由放电电流控制。 离子能量由阳极电源控制。 将放电电流的一部分从辅助阳极转移到坩埚阳极增加给定离子通量的蒸气通量。

公开(公告)号：US11887806B2

公开(公告)日：2024-01-30

申请号：US17715690

申请日：2022-04-07

Applicant: Applied Materials, Inc.

Inventor： Graham Wright ,  Ryan C. Prager

IPC: H01J37/08 ,  H01J37/317 ,  C23C14/48 ,  H01J37/05

CPC classification number: H01J37/08 ,  C23C14/48 ,  H01J37/05 ,  H01J37/3171 ,  H01J2237/0815

Abstract: An ion source is provided. The ion source may include an ion chamber to generate an ion beam comprising a metal ion species; and a charge source, coupled to deliver a metal vapor to the ion chamber, the charge source including a charge mixture. The charge mixture may include a first portion, comprising an elemental metal; and a second portion, comprising a heterogeneous metal fluoride compound.

公开(公告)号：US09734991B2

公开(公告)日：2017-08-15

申请号：US14811272

申请日：2015-07-28

Applicant: Varian Semiconductor Equipment Associates, Inc.

Inventor： Daniel Distaso ,  Svetlana B. Radovanov ,  Joseph P. Dzengeleski

IPC: H01J37/32 ,  H01J27/02 ,  H01J27/16 ,  H01J37/08

CPC classification number: H01J37/32146 ,  H01J27/024 ,  H01J27/028 ,  H01J27/16 ,  H01J37/08 ,  H01J37/3211 ,  H01J37/32422 ,  H01J2237/0815 ,  H01J2237/0827 ,  H01J2237/3151 ,  H01J2237/31701 ,  H01J2237/31732

Abstract: An apparatus and method for the creation of negative ion beams is disclosed. The apparatus includes an RF ion source, having an extraction aperture. An antenna disposed proximate a dielectric window is energized by a pulsed RF power supply. While the RF power supply is actuated, a plasma containing primarily positive ions and electrons is created. When the RF power supply is deactivated, the plasma transforms into an ion-ion plasma. Negative ions may be extracted from the RF ion source while the RF power supply is deactivated. These negative ions, in the form of a negative ribbon ion beam, may be directed toward a workpiece at a specific incident angle. Further, both a positive ion beam and a negative ion beam may be extracted from the same ion source by pulsing the bias power supply multiple times each period.

公开(公告)号：US20170053776A1

公开(公告)日：2017-02-23

申请号：US14831468

申请日：2015-08-20

Applicant: Varian Semiconductor Equipment Associates, Inc.

Inventor： W. Davis Lee ,  Neil Bassom ,  Anthony Renau

IPC: H01J37/08 ,  H01J37/317

CPC classification number: H01J37/08 ,  H01J27/028 ,  H01J27/205 ,  H01J27/24 ,  H01J37/3171 ,  H01J2237/0815 ,  H01J2237/082 ,  H01J2237/31701

Abstract: An apparatus to generate negative hydrogen ions. The apparatus may include an ion source chamber having a gas inlet to receive H2 gas; a light source directing radiation into the ion source chamber to generate excited H2 molecules having an excited vibrational state from at least some of the H2 gas; a low energy electron source directing low energy electrons into the ion source chamber, wherein H− ions are generated from at least some of the excited H2 molecules; and an extraction assembly arranged to extract the H− ions from the ion source chamber.

Abstract translation: 产生负氢离子的装置。 该装置可以包括具有用于接收H 2气体的气体入口的离子源室; 将辐射源引导到离子源室中以产生具有来自至少一些H 2气体的激发的振动状态的激发的H 2分子; 将低能电子引导到离子源室中的低能电子源，其中从至少一些被激发的H 2分子产生H离子; 以及提取组件，被布置成从离子源室提取H-离子。

公开(公告)号：US20170032927A1

公开(公告)日：2017-02-02

申请号：US14809608

申请日：2015-07-27

Applicant: Varian Semiconductor Equipment Associates, Inc.

Inventor： Bon-Woong Koo ,  Alexandre Likhanskii ,  Svetlana B. Radovanov ,  Anthony Renau

IPC: H01J37/14 ,  H01J37/08

CPC classification number: H01J37/14 ,  H01J27/022 ,  H01J27/024 ,  H01J37/08 ,  H01J37/145 ,  H01J37/3211 ,  H01J2237/0815

Abstract: An apparatus for the creation of high current ion beams is disclosed. The apparatus includes an ion source, such as a RF ion source or an indirectly heated cathode (IHC) ion source, having an extraction aperture. Disposed proximate the extraction aperture is a bias electrode, which has a hollow center portion that is aligned with the extraction aperture. A magnetic field is created along the perimeter of the hollow center portion, which serves to contain electrons within a confinement region. Electrons in the confinement region energetically collide with neutral particles, increasing the number of ions that are created near the extraction aperture. The magnetic field may be created using two magnets that are embedded in the bias electrode. Alternatively, a single magnet or magnetic coils may be used to create this magnetic field.

Abstract translation: 公开了一种用于产生高电流离子束的装置。 该装置包括具有提取孔的离子源，例如RF离子源或间接加热的阴极（IHC）离子源。 靠近提取孔设置的是偏置电极，其具有与提取孔对准的中空中心部分。 沿着中空中心部分的周边产生磁场，其用于在限制区域内容纳电子。 限制区域中的电子与中性粒子发生强烈碰撞，增加了在提取孔附近产生的离子数。 可以使用嵌入在偏置电极中的两个磁体来产生磁场。 或者，可以使用单个磁体或磁性线圈来产生该磁场。

公开(公告)号：US20160336139A1

公开(公告)日：2016-11-17

申请号：US15112775

申请日：2015-01-15

Applicant: ZEROK NANO TECH CORPORATION

Inventor： Brenton J. KNUFFMAN ,  Adam V. STEELE

IPC: H01J27/24 ,  H01J27/02

CPC classification number: H01J27/24 ,  G01N27/64 ,  H01J27/022 ,  H01J37/08 ,  H01J2237/0815 ,  H01J2237/31701 ,  H01J2237/31749

Abstract: A system and method for using a high-performance photoionization subsystem are disclosed. Embodiments of the present disclosure employ narrow bandwidth laser radiation to selectively excite ionizing resonant states of gaseous atoms in electric fields. This subsystem and method may be incorporated in an ion source producing ions by photoionizing gaseous atoms; the resultant ions may be employed to efficiently produce an ion beam of high brightness.

Abstract translation: 公开了一种使用高性能光电离子系统的系统和方法。 本公开的实施例采用窄带宽激光辐射来选择性激发电场中气态原子的电离谐振状态。 该子系统和方法可以并入离子源中，通过光电离气态原子产生离子; 可以使用所得到的离子来有效地产生高亮度的离子束。

公开(公告)号：US09281165B1

公开(公告)日：2016-03-08

申请号：US14469050

申请日：2014-08-26

Applicant: Varian Semiconductor Equipment Associates, Inc.

Inventor： Shengwu Chang ,  Christopher Lupoli ,  William Davis Lee ,  Frank Sinclair ,  James Pixley

IPC: H01J49/00 ,  H01J37/30 ,  H01J37/317 ,  H01J37/05 ,  H05H5/06

CPC classification number: H01J37/3007 ,  H01J37/08 ,  H01J37/3171 ,  H01J2237/0473 ,  H01J2237/0815 ,  H05H5/063

Abstract: A tandem accelerator and ion implanter with improved performance is disclosed. The tandem accelerator includes a plurality of input electrodes, a plurality of output electrodes and a high voltage terminal disposed therebetween. The high voltage terminal includes a stripper tube. Neutral molecules are injected into the stripper tube, which remove electrons from the incoming negative ion beam. The resulting positive ions are accelerated toward the plurality of output electrodes. To reduce the amount of undesired positive ions that exit the stripper tube, bias electrodes is disposed at the entrance and exit of the stripper tube. The bias electrodes are biased a second voltage, greater than the first voltage applied to the terminal. The bias electrodes repel slow moving positive ions, preventing them from exiting the stripper tube and contaminating the workpiece.

Abstract translation: 公开了一种具有改进性能的串联加速器和离子注入机。 串联加速器包括多个输入电极，多个输出电极和设置在它们之间的高电压端子。 高压端子包括剥离管。 将中性分子注入汽提塔，从入射的负离子束中除去电子。 所产生的正离子朝向多个输出电极加速。 为了减少离开汽提塔的不需要的正离子的量，偏压电极设置在汽提塔管的入口和出口处。 偏置电极偏置第二电压，大于施加到端子的第一电压。 偏置电极排斥缓慢移动的正离子，防止它们离开剥离管并污染工件。