METHOD OF FILLING A TRENCH FORMED IN A SEMICONDUCTOR SUBSTRATE

    公开(公告)号:US20240096620A1

    公开(公告)日:2024-03-21

    申请号:US18466542

    申请日:2023-09-13

    Inventor: Bilel Saidi

    Abstract: An embodiment provides a method of forming a semiconductor device. A first silicon layer is deposited in a trench of a semiconductor substrate as an amorphous layer. A second silicon layer is deposited on top of and in contact with the first silicon layer as a polysilicon layer. After depositing the second silicon layer, the first silicon layer includes polysilicon having an average grain size different than an average grain size of the second silicon layer. A third semiconductor layer is deposited on top of and in contact with the second silicon layer to at least partially fill the trench.

    Image sensor
    706.
    发明授权

    公开(公告)号:US11901381B2

    公开(公告)日:2024-02-13

    申请号:US16925248

    申请日:2020-07-09

    Abstract: The present disclosure concerns an image sensor including a plurality of pixels, each including: a doped photosensitive region of a first conductivity type extending vertically in a semiconductor substrate; a charge collection region more heavily doped with the first conductivity type than the photosensitive region, extending vertically in the substrate from an upper surface of the substrate and being arranged above the photosensitive region; and a vertical stack including a vertical transfer gate and a vertical electric insulation wall, the stack crossing the substrate and being in contact with the charge collection region, the gate being arranged on the upper surface side of the substrate and penetrating into the substrate deeper than the charge collection region.

    Manufacturing of cavities
    707.
    发明授权

    公开(公告)号:US11901216B2

    公开(公告)日:2024-02-13

    申请号:US17496411

    申请日:2021-10-07

    CPC classification number: H01L21/7621 H01L29/0649

    Abstract: A substrate includes a first solid semiconductor region and a second semiconductor on insulator region. First and second cavities are simultaneously formed in the first and second regions, respectively, of the substrate using etching processes in two steps which form an upper portion and a lower portion of each cavity. The first and second cavities will each have a step at a level of an upper surface of the insulator of the second semiconductor on insulator region. A further oxidation of the first cavity produces a rounded or cut-off area for the upper portion.

    ELECTRONIC DEVICE MANUFACTURING METHOD
    710.
    发明公开

    公开(公告)号:US20230411450A1

    公开(公告)日:2023-12-21

    申请号:US18330287

    申请日:2023-06-06

    CPC classification number: H01L29/0649 H01L21/76229 H01L21/3212 H10B63/10

    Abstract: The present description concerns a method of manufacturing a device comprising a first portion having an array of memory cells formed therein and a second portion having transistors formed therein, the method comprising: a. the forming of first insulating trenches separating from one another the substrate regions of a same cell row, and b. the forming of second trenches separating from one another the regions of a same cell column, the second trenches having a height greater than the height of the first trenches, step a. comprising the independent forming of a lower portion and of an upper portion of each first trench, the forming of the upper portions comprising the deposition of a first insulating layer, the etching of the portions of the first insulating layer which are not located on the upper portions.

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