RADIATION HARDENED SOI STRUCTURE AND METHOD OF MAKING SAME
    72.
    发明申请
    RADIATION HARDENED SOI STRUCTURE AND METHOD OF MAKING SAME 有权
    辐射硬化SOI结构及其制备方法

    公开(公告)号:US20130341770A1

    公开(公告)日:2013-12-26

    申请号:US13555271

    申请日:2012-07-23

    IPC分类号: H01L29/02

    摘要: An SOI substrate including a buried insulator layer positioned between a base substrate and a top semiconductor active layer is first provided. A semiconductor device can then be formed on and/or within a portion of the top semiconductor active layer. A bottommost surface of the buried insulator layer which is opposite a topmost surface of the buried insulator layer that forms an interface with the top semiconductor active layer can be then exposed. Ions can then be implanted through the bottommost surface of the buried insulator layer and into a portion of the buried insulator layer. The ions are implanted at energy ranges that do not disturb the buried insulator layer/top semiconductor active layer interface, while leaving a relatively thin portion of the buried insulator layer near the buried insulator layer/top semiconductor active layer interface intact.

    摘要翻译: 首先提供包括位于基底基板和顶部半导体有源层之间的掩埋绝缘体层的SOI衬底。 然后可以在顶部半导体有源层的一部分上和/或内部形成半导体器件。 掩埋绝缘体层的与埋入绝缘体层的与顶部半导体活性层形成界面的最上表面相对的最底表面可以暴露。 然后,离子可以通过掩埋绝缘体层的最底部的表面注入埋入的绝缘体层的一部分中。 将离子注入到不会干扰埋入的绝缘体层/顶部半导体有源层界面的能量范围内,同时在掩埋的绝缘体层/顶部半导体活性层界面附近保留相当薄的部分隐埋绝缘体层。