Methods for charged-particle-beam microlithography including correction of deflection aberrations, and device-manufacturing methods comprising same
    71.
    发明授权
    Methods for charged-particle-beam microlithography including correction of deflection aberrations, and device-manufacturing methods comprising same 失效
    包括偏转像差校正的带电粒子束微光刻的方法以及包括其的器件制造方法

    公开(公告)号:US06541169B1

    公开(公告)日:2003-04-01

    申请号:US09638200

    申请日:2000-08-11

    IPC分类号: G03C500

    摘要: Methods and apparatus are provided for performing charged-particle-beam microlithography at improved accuracy. A pattern is formed on a substrate (wafer) by repeated shot exposure of respective areas on a wafer substrate mounted on a wafer stage. Exposure of the wafer is made while the wafer stage is undergoing continuous motion and the charged particle beam making the exposure is being deflected continuously. As the magnitude of the beam deflection changes according to the motion of the stage, correction data for deflecting the beam are updated appropriately so as to correct deflection aberrations continuously.

    摘要翻译: 提供了以提高的精度进行带电粒子束微光刻的方法和装置。 通过在安装在晶片台上的晶片衬底上的各个区域重复地曝光,在衬底(晶片)上形成图案。 在晶片台进行连续运动时进行晶片的曝光,并且使曝光的带电粒子束被连续偏转。 随着光束偏转的大小根据舞台的运动而变化,用于偏转光束的校正数据被适当地更新,以便连续校正偏转像差。

    Reference-voltage generating circuit
    72.
    发明授权
    Reference-voltage generating circuit 失效
    基准电压发生电路

    公开(公告)号:US6087821A

    公开(公告)日:2000-07-11

    申请号:US412983

    申请日:1999-10-06

    申请人: Shinichi Kojima

    发明人: Shinichi Kojima

    CPC分类号: G05F3/262 G05F3/242

    摘要: Saturation connection is performed between the gate and source of a depletion-type n-channel MOS transistor, and the depletion-type n-channel MOS transistor generates a first constant current. A current-mirror circuit is connected to the depletion-type n-channel MOS transistor, and mirrors the first constant current. A first enhancement-type n-channel MOS transistor generates a first constant voltage which depends on the first constant current, when receiving the first constant current mirrored by the current-mirror circuit and being activated. A first resistance element is connected between the first enhancement-type n-channel MOS transistor and ground. A second enhancement-type n-channel MOS transistor is connected to the first enhancement-type n-channel MOS transistor and the first resistance element, and controls generation of a second constant current in the first resistance element in accordance with activation of the first enhancement-type n-channel MOS transistor. A second resistance element is connected between a power-supply line and the second enhancement-type n-channel MOS transistor, and generates a second constant voltage which depends on the second constant current.

    摘要翻译: 在耗尽型n沟道MOS晶体管的栅极和源极之间进行饱和连接,而耗尽型n沟道MOS晶体管产生第一恒定电流。 电流镜电路连接到耗尽型n沟道MOS晶体管,并反射第一恒定电流。 第一增强型n沟道MOS晶体管当接收到由电流镜电路镜像并被激活的第一恒定电流时,产生取决于第一恒定电流的第一恒定电压。 第一电阻元件连接在第一增强型n沟道MOS晶体管和地之间。 第二增强型n沟道MOS晶体管连接到第一增强型n沟道MOS晶体管和第一电阻元件,并且根据第一增强的激活来控制第一电阻元件中的第二恒定电流的产生 型n沟道MOS晶体管。 第二电阻元件连接在电源线和第二增强型n沟道MOS晶体管之间,并产生依赖于第二恒定电流的第二恒定电压。

    Method and apparatus for immersion-process
    74.
    发明授权
    Method and apparatus for immersion-process 失效
    浸渍法的方法和装置

    公开(公告)号:US6048401A

    公开(公告)日:2000-04-11

    申请号:US922151

    申请日:1997-09-02

    IPC分类号: C25D19/00 C23C2/00 B05C11/00

    CPC分类号: C23C2/00

    摘要: In a method and an apparatus for plating a plurality of kinds of works, an unattended route-free vehicle transports the works to a number of processing tanks to immerse the works in the processing tanks. A controller calculates a processing time of the processing tanks and a transporting time needed for the vehicle to transport the works to the processing tanks and renders the vehicle to transport one kind of the works during the immersion-processing of another kind of the works, thereby performing the plating process of a plurality of kinds of works one after another.

    摘要翻译: 在一种用于电镀多种工程的方法和装置中,无人值守的无路线车辆将工件运输到多个处理槽以将工件浸入处理槽中。 控制器计算处理罐的处理时间和车辆将工程运送到处理罐所需的运输时间,并使车辆在另一种工件的浸入处理期间运输一种工件,从而 一个接一个地进行多种作品的电镀处理。

    Method and apparatus for detecting broken sewing needles in sewn articles
    76.
    发明授权
    Method and apparatus for detecting broken sewing needles in sewn articles 失效
    用于检测缝制品中断针缝纫的方法和装置

    公开(公告)号:US5923165A

    公开(公告)日:1999-07-13

    申请号:US848491

    申请日:1997-05-08

    CPC分类号: G01V3/08

    摘要: Disclosed are a method and apparatus for detection of a magnetic substance erroneously included in a non-magnetic product. The non-magnetic product such as a sewn product is passed through a high magnetic field in which a magnetic field is applied to the product. The residual magnetization of a magnetic substance such as a broken needle mingled in the product is detected by a sensing unit and a signal of detection is transmitted to a measuring unit to measure the magnitude of detected residual magnetization. The presence or absence of the magnetic substance in the product is determined by a control unit based on the output from the measuring unit. Alternatively, a magnetic field may be preparatorily applied to a magnetic substance having the possibility of being mingled in the non-magnetic product thereby causing the magnetic substance to assume a state of possessing residual magnetization.

    摘要翻译: 公开了用于检测非磁性产品中错误地包含的磁性物质的方法和装置。 诸如缝合产品的非磁性产品通过其中向产品施加磁场的高磁场。 通过感测单元检测诸如产品中混合的断针的磁性物质的残余磁化,并将检测信号传输到测量单元以测量检测到的剩余磁化强度。 产品中磁性物质的存在或不存在由控制单元基于测量单元的输出确定。 或者,可以将磁场预先施加到具有可能性混入非磁性产品中的磁性物质,从而使磁性物质呈现具有剩余磁化强度的状态。

    Peripheral equipment control device
    77.
    发明授权
    Peripheral equipment control device 失效
    外围设备控制装置

    公开(公告)号:US5892958A

    公开(公告)日:1999-04-06

    申请号:US757318

    申请日:1996-11-27

    IPC分类号: G06F1/32 G06F13/10 G06F15/78

    摘要: A peripheral equipment control LSI interposed between an SCSI bus connected to a main CPU and peripheral equipment such as a file device. The LSI is divided into two major blocks. One block recognizes an SCSI protocol ID signal sent over the SCSI bus. The other block generates a signal that causes the other block to leave a sleep state (low power dissipation mode). In a state in which a command is awaited from the main CPU, the peripheral equipment control LSI allows the block containing the ID recognition part to remain active while the other block is kept in the sleep state. On receiving an ID-based selected (access) signal from the main CPU, the LSI detects the start of an access operation and causes the other block to leave its sleep state and to become active.

    摘要翻译: 插入在连接到主CPU的SCSI总线和诸如文件装置的外围设备之间的外围设备控制LSI。 LSI分为两大块。 一个块识别通过SCSI总线发送的SCSI协议ID信号。 另一个块产生一个信号,导致另一个块离开睡眠状态(低功耗模式)。 在从主CPU等待命令的状态下,外围设备控制LSI允许包含ID识别部分的块保持活动,而另一个块保持在睡眠状态。 在从主CPU接收到基于ID的选择(访问)信号时,LSI检测到访问操作的开始,并使其他块离开其休眠状态并变为活动状态。

    One-chip semiconductor integrated circuit device capable of outputting
analog color signal or digital color signal
    78.
    发明授权
    One-chip semiconductor integrated circuit device capable of outputting analog color signal or digital color signal 失效
    能够输出模拟彩色信号或数字彩色信号的单芯片半导体集成电路器件

    公开(公告)号:US5515068A

    公开(公告)日:1996-05-07

    申请号:US300065

    申请日:1994-09-02

    CPC分类号: G09G5/06 G09G5/366 G06F3/1431

    摘要: A semiconductor device (CPLT) of the invention comprises a first terminal (R) to which analog data is to be supplied, a digital/analog converter (DAC1) with its output coupled to the first terminal, a second terminal (R'0) to which digital data is to be supplied, a digital output circuit (DOB) with its output coupled to the second terminal, and a preparation means (PLM, SEL) which is coupled to respective inputs of the digital/analog converter and the digital output circuit, and prepares digital data to be processed (RR) for any one of input of the digital/analog converter and input of the digital output circuit.

    摘要翻译: 本发明的半导体器件(CPLT)包括:要向其提供模拟数据的第一端子(R),其输出耦合到第一端子的数模转换器(DAC1),第二端子(R'0) 要向其提供数字数据的数字输出电路(DOB),其输出耦合到第二终端;以及准备装置(PLM,SEL),其耦合到数字/模拟转换器的相应输入端和数字输出端 电路,并为数字/模拟转换器的输入和数字输出电路的输入中的任何一个准备待处理的数字数据(RR)。

    Graphic processing apparatus utilizing improved data transfer to reduce
memory size
    79.
    发明授权
    Graphic processing apparatus utilizing improved data transfer to reduce memory size 失效
    利用改进的数据传输来减少存储器大小的图形处理装置

    公开(公告)号:US4975857A

    公开(公告)日:1990-12-04

    申请号:US302332

    申请日:1989-01-27

    CPC分类号: G09G5/393 G06T1/60

    摘要: A Memory Interface and Video Attribute Controller (MIVAC) is inserted between a dynamic RAM (DRAM) capable of a consecutive data read operation, such as the operation associated with the static column mode, page mode, or nibble mode, and a graphic processor to provide a parallel data processing. A serial data transfer is executed on each data bus between the MIVAC and the DRAM, whereas parallel data transfer is conducted between the MIVAC and the graphic processor. As a result, the graphic processor can be configured with a reduced number of DRAMs so that the graphic processor operates without paying attention to the consecutive data read mode of the DRAM.

    摘要翻译: 存储器接口和视频属性控制器(MIVAC)插入在能够进行连续数据读取操作的动态RAM(DRAM)之间,诸如与静态列模式,页面模式或半字节模式相关联的操作,以及图形处理器 提供并行数据处理。 在MIVAC和DRAM之间的每个数据总线上执行串行数据传输,而在MIVAC和图形处理器之间进行并行数据传输。 结果,图形处理器可以被配置为具有减少数量的DRAM,使得图形处理器在不关注DRAM的连续数据读取模式的情况下操作。