EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
    81.
    发明申请
    EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD 审中-公开
    曝光装置和装置制造方法

    公开(公告)号:US20100141911A1

    公开(公告)日:2010-06-10

    申请号:US12632457

    申请日:2009-12-07

    CPC classification number: G03F7/70733 G03F7/70341 G03F7/707

    Abstract: An exposure apparatus, exposing a substrate via liquid so as to transfer a pattern of a mask onto the substrate, includes a stage configured to move while holding the substrate. The stage includes a substrate supporting portion on which the substrate is disposed, a supporting surface disposed outside the substrate supporting portion configured to support the liquid together with the substrate, and a frame portion formed so as to surround the supporting surface. The frame portion includes a depression and a member whose top surface is located in a plane including the supporting surface.

    Abstract translation: 曝光装置,通过液体使基板曝光以将掩模的图案转印到基板上,包括配置成在保持基板的同时移动的台。 台架包括:衬底支撑部分,衬底被设置在衬底支撑部分上,支撑表面设置在衬底支撑部分的外部,该衬底支撑部分构造成与衬底一起支撑液体;以及框架部分,形成为围绕支撑表面。 框架部分包括凹部和其顶表面位于包括支撑表面的平面中的构件。

    SWING DRIVE SYSTEM FOR CONSTRUCTION MACHINE
    84.
    发明申请
    SWING DRIVE SYSTEM FOR CONSTRUCTION MACHINE 有权
    建筑机械摆动驱动系统

    公开(公告)号:US20090055056A1

    公开(公告)日:2009-02-26

    申请号:US11816346

    申请日:2006-12-22

    Abstract: A swing drive system for a construction machine enhances safety for an operator. A swing control means 55A has a lever input amount-torque table 11 and an actual rotating speed-torque table 13. Based on a lever input amount and an actual rotating speed of an electric motor, the tables are used to derive torque values. A minimum value of the torque values is taken as the acceleration torque. The swing control means 55A further has a lever input amount-meter-out restriction area table 15 and an actual rotating speed-relief torque table 119. Based on the lever input amount and the actual rotating speed of the electric motor, a meter-out restriction area is derived from the lever input amount-meter-out restriction area table and the actual rotating speed to calculate a meter-out torque. A minimum value of the meter-out torque and relief torque is taken as the braking torque.

    Abstract translation: 用于施工机械的摆动驱动系统提高了操作者的安全性。 摆动控制装置55A具有杠杆输入量扭矩表11和实际转速扭矩表13.根据杠杆输入量和电动机的实际转速,使用这些表来导出转矩值。 扭矩值的最小值作为加速扭矩。 摆动控制装置55A还具有杠杆输入量计出限制区域表15和实际转速减速扭矩表119.根据杠杆输入量和电动机的实际转速,计量出 从杠杆输入量计出限制区域表和实际转速导出限制区域以计算出出扭矩。 将出力矩和减速转矩的最小值作为制动转矩。

    Obstacle detection device
    86.
    发明授权
    Obstacle detection device 失效
    障碍物检测装置

    公开(公告)号:US07230524B2

    公开(公告)日:2007-06-12

    申请号:US10524208

    申请日:2004-03-09

    Abstract: An obstacle detection device includes: an obstacle detection section (11) for emitting beams having a predetermined divergence angle consecutively in a plurality of different directions, receiving a reflected wave from an obstacle for each direction, and detecting the obstacle existing within an emission angle range of the beam for the direction; a distance calculation section (12) for calculating a distance representative of an interspace between the obstacle and the vehicle for each direction based on a received signal of the reflected wave for the direction outputted from the obstacle detection section; an obstacle image creation section (14) for creating, as an obstacle image, a figure two-dimensionally developed in the emission angle range of the beam emitted in each direction while treating, as a basis for image creation, the distance calculated by the distance calculation section for the direction, and for creating and outputting image data for displaying the obstacle image; and a display section (15) for receiving the image data created by the obstacle image creation section and displaying an image showing a positional relationship between the obstacle and the vehicle.

    Abstract translation: 障碍物检测装置包括:障碍物检测部(11),用于在多个不同的方向上连续地发射具有预定发散角的光束,从每个方向接收来自障碍物的反射波,并且检测存在于发射角范围内的障碍物 的梁的方向; 距离计算部分,用于根据从障碍物检测部分输出的方向的反射波的接收信号,计算表示每个方向上的障碍物与车辆之间的空间的距离; 用于在处理作为图像创建的基础的距离计算出的距离的同时,在以每个方向发射的光束的发射角范围内形成二维显影的图像作为障碍物图像的障碍物图像创建部分(14) 计算部分,用于创建和输出用于显示障碍物图像的图像数据; 以及显示部(15),用于接收由障碍物图像创建部创建的图像数据,并且显示示出障碍物和车辆之间的位置关系的图像。

    Cooling fin connected to a cooling unit and a pusher of the testing apparatus
    87.
    发明申请
    Cooling fin connected to a cooling unit and a pusher of the testing apparatus 有权
    冷却翅片连接到测试装置的冷却单元和推动器

    公开(公告)号:US20060255822A1

    公开(公告)日:2006-11-16

    申请号:US11483075

    申请日:2006-07-10

    Abstract: A device testing apparatus including a connection terminal to which an electronic device under test is detachably attached, a pusher for pushing the electronic device in the direction of the connection terminal so as to connect the electronic device to the connection terminal, and a cooling unit for cooling the electronic device. As the cooling unit, an element cooling the device using electricity is for example used. The cooling unit includes a cooling medium blower for blowing a cooling medium around the electronic device and heat exchange projections or depressions for raising the cooling efficiency by blowing a cooling medium. In the device testing apparatus, even if the electronic device generates heat on its own during testing, the electronic device is cooled through the pusher, connection terminals, or socket, so the effect of the heat generated by the electronic device is canceled out and the electronic device can be tested at the predetermined temperature as prescribed in the specification.

    Abstract translation: 一种装置测试装置,包括可拆卸地安装有被测试的电子设备的连接端子,用于沿着连接端子的方向推动电子设备以将电子设备连接到连接端子的推动器,以及用于 冷却电子设备。 作为冷却单元,例如使用电力冷却装置的元件。 冷却单元包括用于吹送电子设备周围的冷却介质的冷却介质鼓风机和通过吹送冷却介质而提高冷却效率的热交换突起或凹部。 在设备测试装置中,即使电子设备在测试期间自身产生热量,电子设备通过推动器,连接端子或插座被冷却,因此电子设备产生的热量的影响被消除,并且 电子设备可以按照说明书中规定的预定温度进行测试。

    Illumination apparatus and exposure apparatus
    88.
    发明申请
    Illumination apparatus and exposure apparatus 失效
    照明装置和曝光装置

    公开(公告)号:US20050185165A1

    公开(公告)日:2005-08-25

    申请号:US11062024

    申请日:2005-02-18

    Inventor: Yutaka Watanabe

    CPC classification number: G03B27/54 G03F7/70075

    Abstract: An illumination apparatus for illuminating a target surface using light includes a light source that emits the light, a reflection integrator that forms plural secondary light sources using the light from the light source, and an optical unit that differentiates Helmholtz-Lagrange invariants in two orthogonal directions with respect to the light incident upon the reflection integrator.

    Abstract translation: 用于使用光照射目标表面的照明装置包括发射光的光源,使用来自光源的光形成多个次级光源的反射积分器,以及在两个正交方向上区分亥姆霍兹 - 拉格朗日不变量的光学单元 相对于反射积分器发生的光线。

    Processing solution for forming hexavalent chromium free, black conversion film on zinc or zinc alloy plating layers, and method for forming hexavalent chromium free, black conversion film on zinc or zinc alloy plating layers
    89.
    发明申请
    Processing solution for forming hexavalent chromium free, black conversion film on zinc or zinc alloy plating layers, and method for forming hexavalent chromium free, black conversion film on zinc or zinc alloy plating layers 审中-公开
    用于在锌或锌合金镀层上形成六价铬,黑色转换膜的加工溶液,以及在锌或锌合金镀层上形成六价铬黑色转化膜的方法

    公开(公告)号:US20050109426A1

    公开(公告)日:2005-05-26

    申请号:US10939555

    申请日:2004-09-14

    CPC classification number: C23C22/17 C23C22/47 C23C22/53 C23C2222/10

    Abstract: It is an object of the present invention to provide a processing solution used for forming a hexavalent chromium free, black conversion film, which is applied onto the surface of zinc or zinc alloy plating layers, and which has corrosion resistance identical to or higher than that achieved by the conventional hexavalent chromium-containing conversion film. According to an aspect of the present invention, there is provided a processing solution for forming a hexavalent chromium free, black conversion film on zinc or zinc alloy plating layers, the processing solution comprising: nitrate ions and trivalent chromium in a mole ratio (NO3−/Cr3+) of less than 0.5/1, wherein the trivalent chromium is present in the form of a water-soluble complex with a chelating agent; and cobalt ions and/or nickel ions, wherein the cobalt ions and/or nickel ions are stably present in the processing solution without causing any precipitation by forming a hardly soluble metal salt with the chelating agent; wherein the solution reacts with zinc when it is brought into contact with the zinc or zinc alloy plating to form a hexavalent chromium free, black conversion film containing zinc, chromium, cobalt and/or nickel, and the chelating agent on the plating.

    Abstract translation: 本发明的目的是提供一种用于形成六价铬无黑变换膜的处理溶液,其被施加到锌或锌合金镀层的表面上,并且具有与之相同或更高的耐蚀性 通过常规的六价含铬转化膜实现。 根据本发明的一个方面,提供一种用于在锌或锌合金镀层上形成六价铬的黑色转换膜的处理溶液,所述处理溶液包括:摩尔比(NO < 其中三价铬以与螯合剂的水溶性络合物的形式存在;其中三价铬以水溶性络合物的形式存在于螯合剂中; 和钴离子和/或镍离子,其中钴离子和/或镍离子稳定地存在于处理溶液中,而不会通过与螯合剂形成难溶的金属盐而引起任何沉淀; 其中当与锌或锌合金镀层接触时,溶液与锌反应,以形成含有锌,铬,钴和/或镍的六价铬无黑色转化膜和电镀上的螯合剂。

    Exposure method
    90.
    发明授权
    Exposure method 有权
    曝光方法

    公开(公告)号:US06324250B1

    公开(公告)日:2001-11-27

    申请号:US09425224

    申请日:1999-10-22

    CPC classification number: G03F7/70425 G03F1/22 G03F1/50 G03F7/2022

    Abstract: An exposure method for transferring a pattern of a mask onto a workpiece in a proximity exposure system, includes a first exposure step for exposing a predetermined portion of the workpiece, while maintaining a first spacing between the mask and the workpiece, and a second exposure step for exposing the predetermined portion of the workpiece, while maintaining a second spacing, different from the first spacing, between the mask and the workpiece, wherein exposures in the first and second exposure steps are performed superposedly, prior to a development process.

    Abstract translation: 一种用于在接近曝光系统中将掩模图案转印到工件上的曝光方法包括:第一曝光步骤,用于在保持掩模和工件之间的第一间隔的同时保持工件的预定部分,以及第二曝光步骤 用于在所述掩模和所述工件之间保持与所述第一间隔不同的第二间隔的情况下暴露所述工件的预定部分,其中在显影处理之前,重叠地执行所述第一和第二曝光步骤中的曝光。

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