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81.发明授权Thin-film piezoelectric resonator, band-pass filter and method of making thin-film piezoelectric resonator 有权薄膜压电谐振器，带通滤波器和制造薄膜压电谐振器的方法公开(公告)号：US06734763B2
公开(公告)日：2004-05-11
申请号：US10117219
申请日：2002-04-08
IPC分类号： H03H900
摘要： A thin-film piezo-resonator includes a silicon substrate and a resonator assembly. The substrate is formed with a cavity or through-hole which is opened in the upper and the lower surfaces of the substrate. The resonator assembly, disposed at a location corresponding to the cavity, is composed of a first electrode contacting the upper surface of the substrate, a piezoelectric layer formed on the first electrode and a second electrode formed on the piezoelectric layer. The cavity has a side surface extending in a substantially perpendicular direction to the first surface.
摘要翻译： 薄膜压电谐振器包括硅衬底和谐振器组件。 衬底形成有在衬底的上表面和下表面中打开的空腔或通孔。 设置在与空腔对应的位置处的谐振器组件由与基板的上表面接触的第一电极，形成在第一电极上的压电层和形成在压电层上的第二电极组成。 空腔具有在与第一表面大致垂直的方向上延伸的侧表面。
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82.发明授权Filter element, and filter device, duplexer, and high-frequency circuit each including said filter element 有权滤波器元件，滤波器装置，双工器和高频电路，每个包括所述滤波元件公开(公告)号：US07271684B2
公开(公告)日：2007-09-18
申请号：US10717487
申请日：2003-11-21
CPC分类号： H03H9/564 , H03H9/0095 , H03H9/1014 , H03H9/568
摘要： A filter element includes resonators that are arranged in series arms and parallel arms in a circuit. In this filter element, at least one of the series-arm resonators includes a plurality of single-terminal pair piezoelectric thin-film resonators connected in parallel.
摘要翻译： 滤波器元件包括在电路中以串联臂和并联臂布置的谐振器。 在该滤波元件中，串联臂谐振器中的至少一个包括并联连接的多个单端对的压电薄膜谐振器。
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公开(公告)号：US07145417B2
公开(公告)日：2006-12-05
申请号：US10397172
申请日：2003-03-27
CPC分类号： H03H9/1014 , H03H9/0523 , H03H9/564 , H03H9/568 , H03H9/6483
摘要： A filter chip includes multiple series-arm resonators arranged in series arms of a ladder arrangement, and multiple parallel-arm resonators arranged in parallel arms of the ladder arrangement. A common line is connected to first electrodes of at least two parallel-arm resonators among the multiple parallel-arm resonators. Second electrodes of said at least two parallel-arm resonators are connected to associated series-arm resonators among the multiple series-arm resonators.
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公开(公告)号：US07323953B2
公开(公告)日：2008-01-29
申请号：US10926329
申请日：2004-08-26
IPC分类号： H03H9/00
CPC分类号： H03H9/174 , H03H3/02 , H03H9/02133 , H03H9/131 , H03H9/132 , H03H9/562 , H03H9/564 , H03H9/568 , H03H2003/023
摘要： A film bulk acoustic resonator includes: a piezoelectric thin film that is formed on a principal surface of a substrate; and a lower electrode and an upper electrode that are arranged to sandwich the piezoelectric thin film. In this film bulk acoustic resonator, the piezoelectric thin film is made of aluminum nitride, and at least one of the lower electrode and the upper electrode contains a ruthenium or ruthenium-alloy layer.
摘要翻译： 膜体声波谐振器包括：形成在基板的主表面上的压电薄膜; 以及布置成夹持压电薄膜的下电极和上电极。 在该膜体声波谐振器中，压电薄膜由氮化铝制成，下电极和上电极中的至少一方含有钌或钌合金层。
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公开(公告)号：US20050046519A1
公开(公告)日：2005-03-03
申请号：US10926329
申请日：2004-08-26
IPC分类号： H01L41/187 , H01L41/09 , H01L41/18 , H01L41/22 , H01L41/29 , H01L41/319 , H03H3/02 , H03H3/04 , H03H9/13 , H03H9/17 , H03H9/56 , H03H9/58
CPC分类号： H03H9/174 , H03H3/02 , H03H9/02133 , H03H9/131 , H03H9/132 , H03H9/562 , H03H9/564 , H03H9/568 , H03H2003/023
摘要： A film bulk acoustic resonator includes: a piezoelectric thin film that is formed on a principal surface of a substrate; and a lower electrode and an upper electrode that are arranged to sandwich the piezoelectric thin film. In this film bulk acoustic resonator, the piezoelectric thin film is made of aluminum nitride, and at least one of the lower electrode and the upper electrode contains a ruthenium or ruthenium-alloy layer.
摘要翻译： 膜体声波谐振器包括：形成在基板的主表面上的压电薄膜; 以及布置成夹持压电薄膜的下电极和上电极。 在该膜体声波谐振器中，压电薄膜由氮化铝制成，下电极和上电极中的至少一方含有钌或钌合金层。
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公开(公告)号：US09035536B2
公开(公告)日：2015-05-19
申请号：US13563505
申请日：2012-07-31
CPC分类号： H03H3/04 , H03H9/171 , H03H2003/021 , H03H2003/023 , H03H2003/025 , H03H2003/0407 , Y10T29/42
摘要： A piezoelectric thin-film resonator includes: a lower electrode provided on a substrate; a piezoelectric film that is provided on the lower electrode and includes at least two layers; an upper electrode that is provided on the piezoelectric film and has a region sandwiching the piezoelectric film with the lower electrode and facing the lower electrode; and an insulating film that is provided in a region in which the lower electrode and the upper electrode face each other and between each of the at least two layers, wherein an upper face of the insulating film is flatter than a lower face of the insulating film.
摘要翻译： 压电薄膜谐振器包括：设置在基板上的下电极; 压电膜，其设置在所述下电极上并且包括至少两层; 上部电极，其设置在所述压电膜上，并且具有将所述压电膜与所述下部电极夹在中间且与所述下部电极相对的区域; 以及绝缘膜，其设置在所述下电极和所述上电极彼此面对并且在所述至少两层中的每一个之间的区域中，其中所述绝缘膜的上表面比所述绝缘膜的下表面平坦 。
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公开(公告)号：US08766744B2
公开(公告)日：2014-07-01
申请号：US13277866
申请日：2011-10-20
申请人： Masafumi Iwaki , Motoaki Hara , Tokihiro Nishihara
发明人： Masafumi Iwaki , Motoaki Hara , Tokihiro Nishihara
CPC分类号： H03H9/0571 , H03H9/0576 , H03H9/706 , H03H9/725
摘要： In one aspect of the invention, a duplexer including a multilayer substrate with multiple stacked layers and a back surface with a rectangular shape is disclosed. An antenna terminal, a transmission terminal, a reception terminal, a ground terminal, and a conductor are provided in various positions on the multilayer substrate for improved performance.
摘要翻译： 在本发明的一个方面，公开了一种包括具有多层叠层的多层基板和具有矩形形状的背面的双工器。 在多层基板上的各个位置设置天线端子，发送端子，接收端子，接地端子和导体，以提高性能。
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公开(公告)号：US08766103B2
公开(公告)日：2014-07-01
申请号：US12343784
申请日：2008-12-24
IPC分类号： H05K1/02
CPC分类号： H05K1/16 , H01L2224/16 , H05K1/0306 , H05K1/113 , H05K3/246 , H05K3/4061 , H05K3/4611 , H05K3/4629 , H05K2201/0195 , H05K2201/0347 , H05K2201/09436
摘要： An electronic component includes: a multilayer ceramic substrate that has a penetration electrode formed therein, and has a passive element provided on the upper face thereof; an insulating film that is provided on the multilayer ceramic substrate, and has an opening above the penetration electrode; a first connecting terminal that is provided on the insulating film so as to cover the opening, and is electrically connected to the penetration electrode; and a second connecting terminal that is provided on a region of the insulating film other than the opening region.
摘要翻译： 电子部件包括：多层陶瓷基板，其具有形成在其中的穿透电极，并且在其上表面上设置无源元件; 绝缘膜，设置在所述多层陶瓷基板上，并且在所述贯通电极的上方具有开口部; 第一连接端子，设置在绝缘膜上以覆盖开口，并且电连接到穿透电极; 以及第二连接端子，其设置在除了开口区域之外的绝缘膜的区域上。
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公开(公告)号：US20090166068A1
公开(公告)日：2009-07-02
申请号：US12343784
申请日：2008-12-24
CPC分类号： H05K1/16 , H01L2224/16 , H05K1/0306 , H05K1/113 , H05K3/246 , H05K3/4061 , H05K3/4611 , H05K3/4629 , H05K2201/0195 , H05K2201/0347 , H05K2201/09436
摘要： An electronic component includes: a multilayer ceramic substrate that has a penetration electrode formed therein, and has a passive element provided on the upper face thereof; an insulating film that is provided on the multilayer ceramic substrate, and has an opening above the penetration electrode; a first connecting terminal that is provided on the insulating film so as to cover the opening, and is electrically connected to the penetration electrode; and a second connecting terminal that is provided on a region of the insulating film other than the opening region.
摘要翻译： 电子部件包括：多层陶瓷基板，其具有形成在其中的穿透电极，并且在其上表面上设置无源元件; 绝缘膜，设置在所述多层陶瓷基板上，并且在所述贯通电极的上方具有开口部; 第一连接端子，设置在绝缘膜上以覆盖开口，并且电连接到穿透电极; 以及第二连接端子，其设置在除了开口区域之外的绝缘膜的区域上。
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90.发明授权Duplexer with transmission and reception filters each including resonators formed on different chips 有权双工器具有发送和接收滤波器，每个滤波器包括形成在不同芯片上的谐振器公开(公告)号：US09240768B2
公开(公告)日：2016-01-19
申请号：US13610393
申请日：2012-09-11
CPC分类号： H03H9/02102 , H03H9/02834 , H03H9/542 , H03H9/605 , H03H9/6483 , H03H9/706 , H03H9/725
摘要： A duplexer includes a transmission filter and a reception filter having different passbands, wherein: first resonators that are series resonators or parallel resonators included in the transmission and reception filters so as to form a skirt characteristic at a guard band side are a temperature compensated type piezoelectric thin film resonator or a surface acoustic wave resonator using Love waves, and second resonators that form a skirt characteristic at an opposite side to the guard band are one of a temperature non-compensated type piezoelectric thin film resonator, a surface acoustic wave resonator using a lithium tantalate substrate or a substrate made by bonding a lithium tantalate substrate on a sapphire substrate, and a surface acoustic wave resonator using Love waves.
摘要翻译： 双工器包括具有不同通带的发送滤波器和接收滤波器，其中包括在发送和接收滤波器中的串联谐振器或并联谐振器的第一谐振器在保护带侧形成裙部特性是温度补偿型压电 使用爱波的薄膜谐振器或表面声波谐振器以及与保护带相反侧形成裙部特性的第二谐振器是温度非补偿型压电薄膜谐振器之一，使用 钽酸锂基板或通过将蓝宝石基板上的钽酸锂基板接合而制成的基板和使用爱波的表面声波谐振器。
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