公开(公告)号：US20050254673A1

公开(公告)日：2005-11-17

申请号：US11179464

申请日：2005-07-13

申请人： Wen Hsuan Hsieh ,  Yu-Chong Tai

发明人： Wen Hsuan Hsieh ,  Yu-Chong Tai

IPC分类号： B81B3/00 ,  H04R19/01 ,  H04R25/00

CPC分类号： B81C1/00158 ,  B81B2201/0257 ,  B81B2203/0127 ,  H04R19/016

摘要： High performance MEMS thin film electret microphones, components and methods for making the same are disclosed. The microphones generally include a transducer diaphragm including an IC-compatible membrane support structure, a membrane layer formed on the membrane support structure, and a first electrode; a transducer back plate having a second electrode; and an electret layer formed on at least one of the transducer diaphragm or the transducer back plate. The transducer diaphragm and transducer back plate are fabricated using micromachining techniques and are generally compatible with microelectronics. The microphones generally have high open-circuit sensitivities, low noise levels, and low total harmonic distortion.

摘要翻译： 公开了用于制造高性能MEMS薄膜驻极体麦克风，组件和方法。 麦克风通常包括换能器膜片，其包括IC兼容膜支撑结构，形成在膜支撑结构上的膜层和第一电极; 传感器背板，具有第二电极; 以及形成在所述换能器隔膜或所述换能器背板中的至少一个上的驻极体层。 传感器隔膜和传感器背板使用微加工技术制造，并且通常与微电子学兼容。 麦克风通常具有高开路灵敏度，低噪音水平和低总谐波失真。

公开(公告)号：US06825539B2

公开(公告)日：2004-11-30

申请号：US10403732

申请日：2003-03-31

申请人： Yu-Chong Tai ,  Yong Xu

发明人： Yu-Chong Tai ,  Yong Xu

IPC分类号： H01L2100

CPC分类号： B81C1/00246 ,  A61B2562/028 ,  A61B2562/164 ,  B81C2203/0735 ,  G01L9/0055 ,  G01M9/065

摘要： An IC-integrated, flexible, shear-stress sensor skin is made by providing a wafer with integrated circuits and sensor elements which are fabricated in the wafer, disposing a first polymer layer on the wafer and sensor elements to provide mechanical support for the sensor elements, defining a cavity below the sensor elements to provide thermal isolation, while the sensor element remains supported by the first polymer layer, and isolating the sensor elements into a plurality of islands defined in the wafer, so that the islands, with at least one sensor element on at least one of the islands, and the integrated circuits form the IC-integrated, flexible, shear-stress sensor skin. The invention is an IC-integrated, flexible, sensor skin made according to the method.

摘要翻译： IC集成的，灵活的剪切应力传感器外壳是通过在晶片上提供集成电路和传感器元件来制造的，所述集成电路和传感器元件在晶片上制造，在晶片上设置第一聚合物层和传感器元件以为传感器元件提供机械支撑 ，在所述传感器元件下方限定一个空腔以提供热隔离，同时所述传感器元件保持由所述第一聚合物层支撑，并且将所述传感器元件隔离成限定在所述晶片中的多个岛，使得所述岛与至少一个传感器 元件在至少一个岛上，并且集成电路形成IC集成的，灵活的剪切应力传感器皮肤。 本发明是根据该方法制造的IC集成的，灵活的传感器皮肤。

公开(公告)号：US06713908B1

公开(公告)日：2004-03-30

申请号：US09281831

申请日：1999-03-30

申请人： Yu-Chong Tai ,  John A. Wright ,  Gerald Lilienthal

发明人： Yu-Chong Tai ,  John A. Wright ,  Gerald Lilienthal

IPC分类号： H02K100

CPC分类号： H01H1/0036 ,  H01H50/005 ,  Y10S310/06

摘要： A DC motor is commutated by rotating a magnetic rotor to induce a magnetic field in at least one magnetostatic relay in the motor. Each relay is activated in response to the magnetic field to deliver power to at least one corresponding winding connected to the relay. In some cases, each relay delivers power first through a corresponding primary winding and then through a corresponding secondary winding to a common node. Specific examples include a four-pole, three-phase motor in which each relay is activated four times during one rotation of the magnetic rotor.

摘要翻译： 通过旋转磁性转子以在电动机中的至少一个静磁继电器中引起磁场，使直流电动机换向。 每个继电器响应于磁场被激活以将功率传递到连接到继电器的至少一个相应的绕组。 在某些情况下，每个继电器首先通过相应的初级绕组传递功率，然后通过相应的次级绕组传递到公共节点。 具体实例包括四极三相电动机，其中每个继电器在磁转子的一个旋转期间被激活四次。

公开(公告)号：US06698798B2

公开(公告)日：2004-03-02

申请号：US09835299

申请日：2001-04-12

申请人： Yu-Chong Tai ,  Tze-Jung Yao

发明人： Yu-Chong Tai ,  Tze-Jung Yao

IPC分类号： F16J1502

CPC分类号： B81B1/006 ,  B01J2219/00804 ,  B01L3/5027 ,  B01L3/565 ,  B01L2200/027 ,  B01L2300/0838 ,  B81B2201/058 ,  B81B2201/13 ,  F16J15/106

摘要： A micromachined O-ring is described. The O-ring can be formed for use in micromachined microfluidic devices.

摘要翻译： 描述了微加工O形环。 O形环可以形成用于微加工微流体装置。

公开(公告)号：US06639713B2

公开(公告)日：2003-10-28

申请号：US09843024

申请日：2001-04-25

申请人： Chen-Wei Chiu ,  Aramais Avakian ,  Tom Tsao ,  Fukang Jiang ,  Jeff Dickson ,  Yu-Chong Tai

发明人： Chen-Wei Chiu ,  Aramais Avakian ,  Tom Tsao ,  Fukang Jiang ,  Jeff Dickson ,  Yu-Chong Tai

IPC分类号： G02F129

CPC分类号： G02B6/3566 ,  B81B3/0051 ,  B81B2201/031 ,  B81B2201/045 ,  B81B2203/0118 ,  B81B2203/058 ,  B81C1/00214 ,  G02B6/3518 ,  G02B6/3546 ,  G02B6/3572 ,  G02B6/3576 ,  G02B6/3584 ,  G02B6/3594

摘要： An apparatus at least partially intercepts a plurality of light beams propagating along a respective plurality of beam paths. The apparatus includes a single crystal silicon substrate and an array including a plurality of modules. Each module includes a reflector comprising single crystal silicon and a reflector surface lying in a reflector plane substantially perpendicular to the substrate surface. Each module further includes a reflector support which mounts the reflector to move substantially within the reflector plane with a displacement component along the surface normal direction of the substrate surface. Each module further includes a reflector driver responsive to electrical current to selectively move the reflector between a first position and a second position.

公开(公告)号：US06526823B2

公开(公告)日：2003-03-04

申请号：US09727017

申请日：2000-11-29

申请人： Yu-Chong Tai ,  Qiao Lin ,  Shuyun Wu

发明人： Yu-Chong Tai ,  Qiao Lin ,  Shuyun Wu

IPC分类号： G01F168

CPC分类号： G01F1/6845

摘要： A sensor assembly has a substrate with a microchannel formed therein through which a fluid can flow. At least one sensor is proximate to the microchannel. The temperature of the at least one sensor or fluid may indicate the condition of the fluid, for example, the flow rate and the presence of gas bubbles and particulate substances.

摘要翻译： 传感器组件具有其中形成有微通道的基底，流体可以通过该通道流动。 至少一个传感器靠近微通道。 至少一个传感器或流体的温度可以指示流体的状态，例如流速和气泡和颗粒物质的存在。

公开(公告)号：US06243474B1

公开(公告)日：2001-06-05

申请号：US08844570

申请日：1997-04-18

申请人： Yu-Chong Tai ,  Tseng-Yang Hsu ,  Wen H. Hsieh

发明人： Yu-Chong Tai ,  Tseng-Yang Hsu ,  Wen H. Hsieh

IPC分类号： H04R2500

CPC分类号： H04R19/016 ,  H04R25/604 ,  Y10T29/42 ,  Y10T29/49005 ,  Y10T29/49226

摘要： A small, inexpensive, high quality electret formed by micro-machining technology on a support surface, and further including a small, inexpensive, high quality, self-powered electret sound transducer, preferably in the form of a microphone, formed by micro-machining technology. Each microphone is manufactured as a two-piece unit, comprising a microphone membrane unit and a microphone back plate, at least one of which includes an electret formed by micro-machining technology. When juxtaposed, the two units form a highly reliable, inexpensive microphone that can produce a signal without the need for external biasing, thereby reducing system volume and complexity. In the preferred embodiment, the electret material used is a thin film of spin-on polytetrafluoroethylene (PTFE). An electron gun preferably is used for charge implantation. The electret has a saturated charged density in the range of about 2×105 C/m2 to about 8×10−4 C/m2. Thermal annealing is used to stabilize the implanted charge. Two prototype micro-machined electret microphones have been fabricated and tested. An open circuit sensitivity of about 0.5 mV/Pa has been achieved for a hybrid microphone package.

摘要翻译： 通过微加工技术在支撑表面上形成的小型，廉价，高质量的驻极体，并且还包括小型，廉价，高质量的自供电驻极体声音传感器，优选地以麦克风的形式通过微加工形成 技术。 每个麦克风被制造成两件式的单元，其包括麦克风膜单元和麦克风背板，其中至少一个包括由微加工技术形成的驻极体。 当并置时，两个单元形成高度可靠，廉价的麦克风，可以产生信号而不需要外部偏置，从而降低系统体积和复杂性。 在优选的实施方案中，使用的驻极体材料是旋涂聚四氟乙烯（PTFE）的薄膜。 电子枪优选用于电荷注入。 驻极体的饱和带电密度在约2×10 5 C / m 2至约8×10 -4 C / m 2的范围内。 热退火用于稳定植入电荷。 已经制造和测试了两个原型的微加工驻极体麦克风。 对于混合麦克风封装已经实现了约0.5mV / Pa的开路灵敏度。

公开(公告)号：US6071819A

公开(公告)日：2000-06-06

申请号：US12756

申请日：1998-01-23

申请人： Yu-Chong Tai ,  Fukang Jiang ,  Chihming Ho

发明人： Yu-Chong Tai ,  Fukang Jiang ,  Chihming Ho

IPC分类号： B81B3/00 ,  B81B7/00 ,  B81C1/00 ,  H01L21/301 ,  H01L21/311

CPC分类号： B81B7/0077 ,  B81C1/00246 ,  H01L24/24 ,  H01L2224/24137

摘要： A flexible skin formed of silicon islands encapsulated in a polyimide film. The silicon islands preferably include a MEMS device and are connected together by a polyimide film (preferably about 1-100 .mu.m thick). To create the silicon islands, silicon wafers are etched to a desirable thickness (preferably about 10-500 .mu.m) by Si wet etching and then patterned from the back side by reactive ion etching (RIE).

摘要翻译： 由聚硅氧烷膜封装的硅岛形成的柔性表皮。 硅岛优选包括MEMS器件，并通过聚酰亚胺膜（优选约1-100μm厚）连接在一起。 为了形成硅岛，通过Si湿式蚀刻将硅晶片蚀刻到期望的厚度（优选约10-500μm），然后通过反应离子蚀刻（RIE）从背面图案化。

公开(公告)号：US6069392A

公开(公告)日：2000-05-30

申请号：US57381

申请日：1998-04-08

申请人： Yu-Chong Tai ,  Xing Yang

发明人： Yu-Chong Tai ,  Xing Yang

IPC分类号： B81B3/00 ,  B82B3/00 ,  H01L21/00 ,  H01L29/82

CPC分类号： B81B3/007 ,  B81B2201/031

摘要： A micromachined multi-layered microbellows-style actuator capable of delivering larger deflections compared to a single layered flat membrane of comparable size. Anchor structures are disclosed that improve the strength of the microbellows membrane. A characterization apparatus is used to measure microbellows membrane performance. Thermopneumatic actuators having a resistive heater chip are also disclosed.

摘要翻译： 与具有相似尺寸的单层平膜相比，微加工的多层微波导式致动器能够提供更大的偏转。 公开了提高微量膜的强度的锚结构。 使用表征装置来测量微波膜的性能。 还公开了具有电阻加热器芯片的热气动致动器。

公开(公告)号：US09733235B2

公开(公告)日：2017-08-15

申请号：US13118332

申请日：2011-05-27

申请人： Yu-Chong Tai ,  Bo Lu

发明人： Yu-Chong Tai ,  Bo Lu

IPC分类号： C12N5/071 ,  G01N33/50 ,  B01D63/08 ,  B01D65/10 ,  B01D67/00 ,  C12M1/00

CPC分类号： G01N33/5011 ,  B01D63/087 ,  B01D65/10 ,  B01D67/0034 ,  B01D2325/021 ,  C12M47/04

摘要： The present invention provides methods for designing a filtration systems for capturing viable tumor cells, such as circulating tumor cells at high efficiency and high viability. The methods involve development of a set of “key engineering design parameters” that are crucial to achieve high tumor cell viability. These important design parameters include the filter geometry design, fluid delivery method, transfilter pressure and total filtration time.