公开(公告)号：US20080149845A1

公开(公告)日：2008-06-26

申请号：US11615317

申请日：2006-12-22

Applicant: Victor M. Benveniste ,  Christopher W. Campbell ,  Frank Sinclair

Inventor： Victor M. Benveniste ,  Christopher W. Campbell ,  Frank Sinclair

IPC: H01J1/50

CPC classification number: H01J37/3171 ,  H01J37/05 ,  H01J2237/0475 ,  H01J2237/04922

Abstract: This disclosure describes an ion implanter having a collimator magnet that is configured to shape an ion beam. A first deceleration stage is configured to manipulate energy of the ion beam shaped by the collimator magnet. A neutral filter magnet is configured to filter neutral atoms from the ion beam passing through the first deceleration stage.

Abstract translation: 本公开描述了具有准直器磁体的离子注入机，其被配置成使离子束成形。 第一减速阶段被配置为操纵由准直器磁体成形的离子束的能量。 中性滤波器磁体被配置为从穿过第一减速阶段的离子束中滤出中性原子。

公开(公告)号：US20080135777A1

公开(公告)日：2008-06-12

申请号：US11870333

申请日：2007-10-10

Applicant: Takatoshi Yamashita ,  Tadashi Ikejiri ,  Kohei Tanaka ,  Weijiang Zhao ,  Hideyuki Tanaka

Inventor： Takatoshi Yamashita ,  Tadashi Ikejiri ,  Kohei Tanaka ,  Weijiang Zhao ,  Hideyuki Tanaka

IPC: H01J3/14

CPC classification number: H01J37/3171 ,  H01J37/05 ,  H01J2237/047 ,  H01J2237/055 ,  H01J2237/12 ,  H01J2237/15

Abstract: The projection distances of connecting portions of a coil are reduced, thereby enabling the size and power consumption of an analyzing electromagnet to be reduced, and therefore the size and power consumption of an ion implanting apparatus are enabled to be reduced.[Means for Resolution] An analyzing electromagnet 200 constituting an ion implanting apparatus has a first inner coil 206, a second inner coil 212, three first outer coils 218, three second outer coils 224, and a yoke 230. The inner coils 206, 212 are saddle-shaped coils cooperating with each other to generate a main magnetic field which bends an ion beam in the X direction. Each of the outer coils 218, 224 is a saddle-shaped coil which generates a sub-magnetic field correcting the main magnetic field. Each of the coils has a configuration where a notched portion is disposed in a fan-shaped cylindrical stacked coil configured by: winding a laminations of an insulation sheet and a conductor sheet in multiple turn on an outer peripheral face of a laminated insulator; and forming a laminated insulator on an outer peripheral face,

Abstract translation: 线圈的连接部分的投影距离减小，从而能够降低分析电磁铁的尺寸和功率消耗，从而能够减小离子注入装置的尺寸和功耗。 [分辨装置]构成离子注入装置的分析电磁体200具有第一内线圈206，第二内线圈212，三个第一外线圈218，三个第二外线圈224和轭230。 内部线圈206,212是彼此协作的鞍形线圈，以产生在X方向上弯曲离子束的主磁场。 外部线圈218,224中的每一个是产生校正主磁场的子磁场的鞍形线圈。 每个线圈具有其中凹口部分设置在扇形圆柱形堆叠线圈中的构造，该扇形圆柱形堆叠线圈通过以下方式构成：在层压绝缘体的外周面上多层卷绕绝缘片和导体片的叠层; 并在外周面上形成层压绝缘体，

公开(公告)号：US20070210249A1

公开(公告)日：2007-09-13

申请号：US10574868

申请日：2004-10-06

Applicant: Stefano Alberici

Inventor： Stefano Alberici

IPC: H01J47/00

CPC classification number: H01J37/256 ,  G01N23/227 ,  H01J37/05 ,  H01J2237/053 ,  H01J2237/057 ,  H01J2237/06316 ,  H01J2237/24571 ,  H01J2237/2511 ,  H01J2237/2561

Abstract: An electroscope system excites a certain area of a surface of a sample to emit electrons with a characteristic distribution of kinetic energies. The analyzed area of the sample is excited by an electron beam produced by a field emission source. A monochromator energy filter for the electron beam is down-stream of the field emission source. The field emission electron source is preferably a Schottky source, and a monochromator energy filter reduces energy dispersion of the electrons of the electron beam to less than 0.2 eV. Microareas of linear dimensions on the order of ten nanometers may be analyzed while observing them. Information on the chemical state of the detected elements present at the surface of the examined microarea of the sample is gathered.

Abstract translation: 电镜系统激发样品表面的一定面积以发射具有动能特征分布的电子。 样品的分析区域由场致发射源产生的电子束激发。 用于电子束的单色器能量滤波器是场发射源的下游。 场发射电子源优选为肖特基源，单色器能量滤波器将电子束的电子的能量分散减小到小于0.2eV。 可以在观察它们的同时分析十纳米级的线性尺寸的微孔。 收集检测到的微区表面上检测到的元素的化学状态的信息。

公开(公告)号：US20070200070A1

公开(公告)日：2007-08-30

申请号：US11364299

申请日：2006-02-28

Applicant: Rudolf Tromp

Inventor： Rudolf Tromp

IPC: H01J37/153 ,  G01N23/225 ,  G01N23/227 ,  H01J37/05 ,  H01J37/26 ,  H01J49/46

CPC classification number: H01J37/153 ,  H01J37/05 ,  H01J37/252 ,  H01J37/295 ,  H01J2237/055 ,  H01J2237/1534 ,  H01J2237/2538 ,  H01J2237/2544

Abstract: An aberration-correcting microscopy instrument is provided. The instrument has a first magnetic deflector disposed for reception of a first non-dispersed electron diffraction pattern. The first magnetic deflector is also configured for projection of a first energy dispersed electron diffraction pattern in an exit plane of the first magnetic deflector. The instrument also has an electrostatic lens disposed in the exit plane of a first magnetic deflector, as well as a second magnetic deflector substantially identical to the first magnetic deflector. The second magnetic deflector is disposed for reception of the first energy dispersed electron diffraction pattern from the electrostatic lens. The second magnetic deflector is also configured for projection of a second non-dispersed electron diffraction pattern in a first exit plane of the second magnetic deflector. The instrument also has an electron mirror configured for correction of one or more aberrations in the second non-dispersed electron diffraction pattern. The electron mirror is disposed for reflection of the second non-dispersed electron diffraction pattern to the second magnetic deflector for projection of a second energy dispersed electron diffraction pattern in a second exit plane of the second magnetic deflector.

Abstract translation: 提供了一种像差校正显微镜仪器。 仪器具有设置用于接收第一非分散电子衍射图案的第一磁偏转器。 第一磁偏转器还被配置用于在第一磁偏转器的出射平面中投射第一能量分散电子衍射图案。 仪器还具有设置在第一磁偏转器的出射平面中的静电透镜以及与第一磁偏转器基本相同的第二磁偏转器。 第二磁偏转器被设置用于从静电透镜接收第一能量分散电子衍射图案。 第二磁偏转器还被配置用于在第二磁偏转器的第一出射平面中投射第二非分散电子衍射图案。 仪器还具有配置用于校正第二非分散电子衍射图案中的一个或多个像差的电子反射镜。 电子反射镜被设置用于将第二非分散电子衍射图案反射到第二磁偏转器，用于在第二磁偏转器的第二出射平面中投射第二能量分散电子衍射图案。

公开(公告)号：US20070187619A1

公开(公告)日：2007-08-16

申请号：US11276128

申请日：2006-02-15

Applicant: Peter Kellerman ,  Keneth Purser

Inventor： Peter Kellerman ,  Keneth Purser

IPC: H01J37/317 ,  H01J37/141

CPC classification number: H01J37/05 ,  H01J37/141 ,  H01J37/1472 ,  H01J37/3171 ,  H01J2237/0042 ,  H01J2237/057 ,  H01J2237/141 ,  H01J2237/142 ,  H01J2237/1508 ,  H01J2237/152 ,  H01J2237/31701 ,  H01J2237/31705

Abstract: An electromagnet and related ion implanter system including active field containment are disclosed. The electromagnet provides a dipole magnetic field within a tall, large gap with minimum distortion and degradation of strength. In one embodiment, an electromagnet for modifying an ion beam includes: a ferromagnetic box structure including six sides; an opening in each of a first side and a second opposing side of the ferromagnetic box structure for passage of the ion beam therethrough; and a plurality of current-carrying wires having a path along an inner surface of the ferromagnetic box structure, the inner surface including the first side and the second opposing side and a third side and a fourth opposing side, wherein the plurality of current-carrying wires are positioned to pass around each of the openings of the first and second opposing sides.

Abstract translation: 公开了一种包括活性场容纳的电磁体和相关离子注入机系统。 电磁铁在高大的间隙内提供偶极磁场，具有最小的变形和强度的降低。 在一个实施例中，用于修改离子束的电磁体包括：包括六个边的铁磁盒结构; 所述铁磁盒结构的第一侧和第二相对侧中的每一个中的开口用于使所述离子束通过其中; 以及多个载流线，其具有沿铁磁箱结构的内表面的路径，内表面包括第一侧和第二相对侧，以及第三侧和第四相对侧，其中多个载流 电线定位成绕过第一和第二相对侧的每个开口。

公开(公告)号：US07250599B2

公开(公告)日：2007-07-31

申请号：US10533598

申请日：2003-11-04

Applicant: Dietmar Funnemann ,  Matthias Escher

Inventor： Dietmar Funnemann ,  Matthias Escher

IPC: H01J39/05 ,  H01J49/44

CPC classification number: H01J37/05 ,  H01J37/295 ,  H01J49/48

Abstract: The invention relates to an energy filter image generator for filtering electrically charged particles. The inventive energy filter comprises at least two toroidal energy analysers (30, 40) arranged one inside the other. A transfer lens device (20) is disposed between the plane of emergence (5) of the first energy analyser (30) and the plane of incidence of the second energy analyser (40), thereby making it possible to obtain the perfect energy filtered reproduction of the surface (1′) of a sample on a detector (10).

Abstract translation: 本发明涉及一种用于过滤带电粒子的能量过滤器图像发生器。 本发明的能量过滤器包括一个彼此内置的至少两个环形能量分析器（30,40）。 转移透镜装置（20）设置在第一能量分析器（30）的出射面（5）和第二能量分析器（40）的入射平面之间，从而可以获得完美的能量过滤再生 的检测器（10）上的样品的表面（1'）。

公开(公告)号：US07247849B1

公开(公告)日：2007-07-24

申请号：US11366306

申请日：2006-03-01

Applicant: Gabor D. Toth ,  Varoujan Chakarian ,  Douglas K. Masnaghetti

Inventor： Gabor D. Toth ,  Varoujan Chakarian ,  Douglas K. Masnaghetti

IPC: H01J49/00

CPC classification number: H01J37/21 ,  G01R31/307 ,  H01J37/05 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/216 ,  H01J2237/24485 ,  H01J2237/2487 ,  H01J2237/2817

Abstract: One embodiment disclosed relates to a method for automated focusing of an electron image. An EF cut-off voltage is determined. In compensation for a change in the EF cut-off voltage, a focusing condition is adjusted. Adjusting the focusing condition may comprise, for example, adjusting a wafer bias voltage in correspondence to the change in cut-off voltage. Another embodiment disclosed relates to a method for automated focusing of an electron image in a scanning electron imaging apparatus. A focusing condition of a primary electron beam in a first image plane is varied so as to maximize an intensity of a secondary electron beam through an aperture in a second image plane.

Abstract translation: 所公开的一个实施例涉及一种用于电子图像的自动聚焦的方法。 确定EF截止电压。 为了补偿EF截止电压的变化，调整聚焦条件。 调整聚焦条件可以包括例如根据截止电压的变化来调整晶片偏置电压。 所公开的另一实施例涉及一种用于扫描电子成像设备中的电子图像的自动聚焦的方法。 改变第一图像平面中的一次电子束的聚焦条件，从而使通过第二图像平面中的孔的二次电子束的强度最大化。

公开(公告)号：US20070138403A1

公开(公告)日：2007-06-21

申请号：US10569963

申请日：2004-08-02

Applicant: Dane Cubric ,  Pieter Kruit

Inventor： Dane Cubric ,  Pieter Kruit

IPC: H01J1/50

CPC classification number: H01J37/05 ,  H01J37/09 ,  H01J37/263 ,  H01J2237/045 ,  H01J2237/0453 ,  H01J2237/0455 ,  H01J2237/0456 ,  H01J2237/0458

Abstract: A particle optical apparatus including an aperture plate for shaping a particle beam before the particle beam enters a monochromator filter assembly. The aperture plate has at least one aperture and is adjustable with respect to the monochromator filter assembly, in normal operating conditions, so that the size of the aperture used to shape the particle beam can be varied, and therefore the beam current entering the filter assembly can be varied.

Abstract translation: 一种粒子光学装置，包括用于在粒子束进入单色器过滤器组件之前成形粒子束的孔板。 孔板具有至少一个孔，并且在正常操作条件下可相对于单色仪滤光器组件可调节，使得用于成形粒子束的孔的尺寸可以改变，因此射入电流进入过滤组件 可以变化。

公开(公告)号：US20070018093A1

公开(公告)日：2007-01-25

申请号：US11489437

申请日：2006-07-20

Applicant: Hyun-Sub Earm ,  Seung-Se Lee ,  Young-Dae Kim ,  Gon-Su Kang ,  Sung-Yeul An

Inventor： Hyun-Sub Earm ,  Seung-Se Lee ,  Young-Dae Kim ,  Gon-Su Kang ,  Sung-Yeul An

IPC: B01D59/44

CPC classification number: H01J49/24 ,  H01J37/05 ,  H01J37/09 ,  H01J37/3171 ,  H01J49/025 ,  H01J49/0495 ,  H01J2237/0225 ,  H01J2237/028 ,  H01J2237/31705

Abstract: In an analyzing chamber for a mass analyzer, a body of the analyzing chamber may include an inlet through which an ion beam enters and an outlet through which the ion beam leaves. A shielding section may be installed on a sidewall. The shielding section may prevent the ion beam traveling along a path in the body from causing damage to the sidewall of the body. A detector may be interposed between the sidewall of the body and the shielding section. The detector may detect an ion beam leaking through the shielding section. Accordingly, damage to the sidewall of the body may be sufficiently reduced and/or prevented.

Abstract translation: 在用于质量分析器的分析室中，分析室的主体可以包括离子束进入的入口和离子束离开的出口。 屏蔽部分可以安装在侧壁上。 屏蔽部分可以防止沿着身体中的路径行进的离子束对身体的侧壁造成损坏。 检测器可以插入在主体的侧壁和屏蔽部分之间。 检测器可以检测通过屏蔽部分泄漏的离子束。 因此，可以充分减少和/或防止对身体侧壁的损坏。

公开(公告)号：US20060255271A1

公开(公告)日：2006-11-16

申请号：US11393367

申请日：2006-03-30

Applicant: Toshikatsu Kaneyama

Inventor： Toshikatsu Kaneyama

IPC: H01J40/00

CPC classification number: H01J37/05 ,  H01J37/265 ,  H01J40/02 ,  H01J2237/057 ,  H01J2237/221 ,  H01J2237/2446 ,  H01J2237/24585

Abstract: A method of analysis using an energy loss spectrometer and a transmission electron microscope equipped with the energy loss spectrometer. The spectrometer has a CCD camera for recording plural spectra as one photoelectric device image and a controller for batch reading in images from the camera, converting the positions of the pixels forming the images, and splitting each image into plural spectra. This permits improvement of the processing speed of the spectrometer.

Abstract translation: 使用能量损失光谱仪和配备有能量损失光谱仪的透射电子显微镜进行分析的方法。 光谱仪具有用于将多个光谱作为一个光电装置图像记录的CCD照相机，以及用于从照相机批量读取图像的控制器，转换形成图像的像素的位置，并将每个图像分割成多个光谱。 这样可以提高光谱仪的处理速度。