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17 条记录 (耗时 0.014 秒)

    Substrate supporting member and substrate processing apparatus
    3.
    发明申请
    Substrate supporting member and substrate processing apparatus 有权
    基板支撑构件和基板处理装置

    公开(公告)号：US20060207507A1

    公开(公告)日：2006-09-21

    申请号：US11370145

    申请日：2006-03-08

    申请人： Kaoru Oohashi ,  Toshihiro Hayami

    发明人： Kaoru Oohashi ,  Toshihiro Hayami

    IPC分类号： C23C16/00

    CPC分类号： H01L21/67109 ,  H01J37/32724 ,  H01L21/6875 ,  H01L21/68785

    摘要： A substrate supporting member, and a substrate processing apparatus including the substrate supporting member are provided. The substrate supporting member for mounting and supporting a substrate on a substrate supporting surface thereof, and controlling a temperature of the substrate by thermal transfer between the substrate and the substrate supporting surface, wherein the substrate supporting surface is smaller than the substrate, and includes a central region, an intermediate region, and a peripheral region. A thermal conductivity between the substrate and the peripheral region is greater than that between the substrate and the central region which is greater than that between the substrate and the intermediate region located between the central region and the peripheral region.

    摘要翻译： 提供了基板支撑构件，以及包括基板支撑构件的基板处理装置。 一种用于在其基板支撑表面上安装和支撑基板的基板支撑构件，并且通过基板和基板支撑表面之间的热转移来控制基板的温度，其中基板支撑表面小于基板，并且包括 中央区域，中间区域和周边区域。 衬底和外围区域之间的导热性大于衬底和中心区域之间的热导率，其大于衬底与位于中心区域和外围区域之间的中间区域之间的热导率。

    Substrate mounting table, substrate processing apparatus and substrate processing method
    4.
    发明申请
    Substrate mounting table, substrate processing apparatus and substrate processing method 有权
    基板安装台，基板加工装置及基板加工方法

    公开(公告)号：US20060207725A1

    公开(公告)日：2006-09-21

    申请号：US11376161

    申请日：2006-03-16

    申请人： Kaoru Oohashi ,  Toshihiro Hayami

    发明人： Kaoru Oohashi ,  Toshihiro Hayami

    IPC分类号： C23F1/00 ,  C03C25/68

    CPC分类号： H01L21/67248 ,  H01J37/32724 ,  H01L21/67109 ,  H01L21/68785

    摘要： A substrate mounting table includes a plurality of passageways independently provided therein, a temperature control medium flowing through the passageways, and a gap formed between at least two of the passageways. In a substrate processing method for processing a substrate mounted on the substrate mounting table in a substrate processing apparatus while controlling a temperature thereof, a process is performed on the substrate while controlling the temperature of the substrate by flowing the temperature control medium through each of the passageways. The passageways are respectively provided in a central area of the substrate mounting table and a peripheral area located outside the central area, and the central area and the peripheral area are thermally isolated from each other by evacuating the gap so as to set the gap to a vacuum state.

    摘要翻译： 基板安装台包括独立地设置在其中的多个通道，流过通道的温度控制介质和形成在至少两个通道之间的间隙。 在基板处理方法中，在控制基板处理装置的基板处理装置的基板安装台上进行处理的基板处理方法中，对基板进行处理，同时通过使温度控制介质 通道。 通道分别设置在基板安装台的中心区域和位于中心区域外部的周边区域，并且通过抽空间隙将中心区域和周边区域彼此热隔离，从而将间隙设置为 真空状态。

    Vehicle height control system
    5.
    发明授权
    Vehicle height control system 失效
    车高控制系统

    公开(公告)号：US4611815A

    公开(公告)日：1986-09-16

    申请号：US665064

    申请日：1984-10-26

    申请人： Yoshihiro Sasage ,  Naoto Ooka ,  Kaoru Oohashi

    发明人： Yoshihiro Sasage ,  Naoto Ooka ,  Kaoru Oohashi

    IPC分类号： B60G17/00 ,  B60G17/015 ,  B60G17/04

    CPC分类号： B60G17/0155 ,  B60G2500/2012

    摘要： A vehicle height control system includes a plurality of vehicle height adjusters actuated by a pneumatic actuating system and controlled respectively by control signals from a control unit. The control unit calculates, for each of the vehicle height adjusters, a target difference between a target adjustment position and an actual position detected by a vehicle height sensor associated with the adjuster. The control unit compares the target differences for respective vehicle height adjusters, and the adjuster having the target difference which is the largest in magnitude is first actuated to perform its adjusting operation, thereby preventing unbalanced differences in the vehicle height.

    摘要翻译： 车辆高度控制系统包括由气动致动系统致动并由控制单元的控制信号分别控制的多个车高调节器。 对于每个车高调节器，控制单元计算目标调整位置与由调节器相关联的车辆高度传感器检测到的实际位置之间的目标差。 控制单元比较各车辆高度调节器的目标差异，首先致动具有最大值的目标差的调节器以执行其调节操作，从而防止车辆高度的不平衡差异。

    Apparatus and method for evaluating a substrate mounting device
    6.
    发明授权
    Apparatus and method for evaluating a substrate mounting device 有权
    用于评价基板安装装置的装置和方法

    公开(公告)号：US08573836B2

    公开(公告)日：2013-11-05

    申请号：US11925158

    申请日：2007-10-26

    申请人： Yasuharu Sasaki ,  Takehiro Ueda ,  Taketoshi Okajo ,  Kaoru Oohashi

    发明人： Yasuharu Sasaki ,  Takehiro Ueda ,  Taketoshi Okajo ,  Kaoru Oohashi

    IPC分类号： G01N17/00 ,  H01L21/00

    CPC分类号： H01L21/67248 ,  H01L21/6831 ,  H01L21/68757

    摘要： An apparatus evaluates a substrate mounting device adapted to hold a target substrate placed on a mounting surface and to control a temperature of the target substrate. The apparatus includes an evacuatable airtightly sealed chamber accommodating therein the substrate mounting device, a heat source, arranged in a facing relationship with the mounting surface, for irradiating infrared light. The apparatus further includes an evaluation-purpose substrate adapted to be mounted on the mounting surface in place of the target substrate, the evaluation-purpose substrate being made of an infrared light absorbing material, and having a unit for measuring temperatures at plural sites on a surface and/or inside of the substrate.

    摘要翻译： 一种装置评价适于保持放置在安装表面上的目标基板并控制目标基板的温度的基板安装装置。 该装置包括可抽出的气密密封室，其容纳基板安装装置，以与安装表面相对的关系布置的用于照射红外光的热源。 该装置还包括适于安装在安装表面上以代替目标基板的评估用基板，评估用基板由红外光吸收材料制成，并且具有用于测量在多个位置上的温度的单元 表面和/或内部。

    Vehicle height control system
    9.
    发明授权
    Vehicle height control system 失效
    车高控制系统

    公开(公告)号：US4618156A

    公开(公告)日：1986-10-21

    申请号：US665067

    申请日：1984-10-26

    申请人： Hideaki Kato ,  Kaoru Oohashi

    发明人： Hideaki Kato ,  Kaoru Oohashi

    IPC分类号： B60G17/00 ,  B60G17/015 ,  B60G17/0165 ,  B60G17/033 ,  B60G11/26

    CPC分类号： B60G17/0165 ,  B60G2400/10 ,  B60G2400/204 ,  B60G2400/252 ,  B60G2400/30 ,  B60G2400/50 ,  B60G2400/82 ,  B60G2500/30 ,  B60G2600/26 ,  B60G2600/66 ,  B60G2800/019

    摘要： An improved vehicle height control system comprises vehicle height adjusters responsive to a control signal for adjusting a longitudinal inclination of the vehicle body, an inclination signal generator for generating an inclination signal indicative of an inclination of a road surface on which the vehicle is running, and a control unit for supplying to the vehicle height adjusters the control signal for increasing the height of the rear part of the vehicle body relative to that of the front part thereof when the road surface is ascendant.

    摘要翻译： 改进的车辆高度控制系统包括响应于用于调节车体的纵向倾斜度的控制信号的车辆高度调节器，用于产生表示车辆在其上行驶的路面的倾斜度的倾斜信号的倾斜信号发生器，以及 用于向车辆高度供给的控制单元在路面上升时调节用于增加车体后部相对于其前部的高度的控制信号。