WAFER DICING PRESS AND METHOD AND SEMICONDUCTOR WAFER DICING SYSTEM INCLUDING THE SAME
    1.
    发明申请
    WAFER DICING PRESS AND METHOD AND SEMICONDUCTOR WAFER DICING SYSTEM INCLUDING THE SAME 有权
    包括其相同方法和方法以及半导体波片定位系统

    公开(公告)号:US20150140783A1

    公开(公告)日:2015-05-21

    申请号:US14510246

    申请日:2014-10-09

    申请人: Won-chul Lim

    发明人: Won-chul Lim

    IPC分类号: H01L21/78

    摘要: In a wafer dicing press for reducing time and cost for wafer dicing and for evenly applying a dicing pressure to a whole wafer, a wafer dicing press includes a support unit supporting a first side of a wafer; and a pressurization device applying a pressure, by dispersing the pressure, to a second side of the wafer so that a laser-scribed layer of the wafer operates as a division starting point. Accordingly, the wafer dicing press reduces laser radiation and pressure-application times for dividing a wafer into semiconductor devices. This increased efficiency is achieved without increasing the likelihood of damaging the wafer.

    摘要翻译: 在晶片切割机中,为了降低晶片切割的时间和成本,并且对整个晶片均匀地施加切割压力,晶片切割机包括支撑晶片的第一侧的支撑单元; 以及加压装置,通过将压力分散到晶片的第二面上,使得晶片的激光划线层作为分割起点施加压力。 因此,晶片切割机减少了将晶片分成半导体器件的激光辐射和压力施加时间。 在不增加损坏晶片的可能性的情况下实现提高的效率。

    Wafer dicing press and method and semiconductor wafer dicing system including the same
    3.
    发明授权
    Wafer dicing press and method and semiconductor wafer dicing system including the same 有权
    晶片切割机及其制造方法及半导体晶圆切片系统

    公开(公告)号:US09252055B2

    公开(公告)日:2016-02-02

    申请号:US14510246

    申请日:2014-10-09

    申请人: Won-chul Lim

    发明人: Won-chul Lim

    摘要: In a wafer dicing press for reducing time and cost for wafer dicing and for evenly applying a dicing pressure to a whole wafer, a wafer dicing press includes a support unit supporting a first side of a wafer; and a pressurization device applying a pressure, by dispersing the pressure, to a second side of the wafer so that a laser-scribed layer of the wafer operates as a division starting point. Accordingly, the wafer dicing press reduces laser radiation and pressure-application times for dividing a wafer into semiconductor devices. This increased efficiency is achieved without increasing the likelihood of damaging the wafer.

    摘要翻译: 在晶片切割机中,为了降低晶片切割的时间和成本,并且对整个晶片均匀地施加切割压力,晶片切割机包括支撑晶片的第一侧的支撑单元; 以及加压装置,通过将压力分散到晶片的第二面上,使得晶片的激光划线层作为分割起点施加压力。 因此,晶片切割机减少了将晶片分成半导体器件的激光辐射和压力施加时间。 在不增加损坏晶片的可能性的情况下实现提高的效率。

    Wafer dicing press and method and semiconductor wafer dicing system including the same
    8.
    发明授权
    Wafer dicing press and method and semiconductor wafer dicing system including the same 有权
    晶片切割机及其制造方法及半导体晶圆切片系统

    公开(公告)号:US08870047B2

    公开(公告)日:2014-10-28

    申请号:US13336218

    申请日:2011-12-23

    申请人: Won-chul Lim

    发明人: Won-chul Lim

    摘要: In a wafer dicing press for reducing time and cost for wafer dicing and for evenly applying a dicing pressure to a whole wafer, a wafer dicing press includes a support unit supporting a first side of a wafer; and a pressurization device applying a pressure, by dispersing the pressure, to a second side of the wafer so that a laser-scribed layer of the wafer operates as a division starting point. Accordingly, the wafer dicing press reduces laser radiation and pressure-application times for dividing a wafer into semiconductor devices. This increased efficiency is achieved without increasing the likelihood of damaging the wafer.

    摘要翻译: 在晶片切割机中,为了降低晶片切割的时间和成本,并且对整个晶片均匀地施加切割压力,晶片切割机包括支撑晶片的第一侧的支撑单元; 以及加压装置,通过将压力分散到晶片的第二面上,使得晶片的激光划线层作为分割起点施加压力。 因此,晶片切割机减少了将晶片分成半导体器件的激光辐射和压力施加时间。 在不增加损坏晶片的可能性的情况下实现提高的效率。

    WAFER DICING PRESS AND METHOD AND SEMICONDUCTOR WAFER DICING SYSTEM INCLUDING THE SAME
    9.
    发明申请
    WAFER DICING PRESS AND METHOD AND SEMICONDUCTOR WAFER DICING SYSTEM INCLUDING THE SAME 有权
    包括其相同方法和方法以及半导体波片定位系统

    公开(公告)号:US20120196426A1

    公开(公告)日:2012-08-02

    申请号:US13336218

    申请日:2011-12-23

    申请人: Won-chul Lim

    发明人: Won-chul Lim

    IPC分类号: H01L21/78 B65H35/10 B30B1/00

    摘要: In a wafer dicing press for reducing time and cost for wafer dicing and for evenly applying a dicing pressure to a whole wafer, a wafer dicing press includes a support unit supporting a first side of a wafer; and a pressurization device applying a pressure, by dispersing the pressure, to a second side of the wafer so that a laser-scribed layer of the wafer operates as a division starting point. Accordingly, the wafer dicing press reduces laser radiation and pressure-application times for dividing a wafer into semiconductor devices. This increased efficiency is achieved without increasing the likelihood of damaging the wafer.

    摘要翻译: 在晶片切割机中,为了降低晶片切割的时间和成本,并且对整个晶片均匀地施加切割压力,晶片切割机包括支撑晶片的第一侧的支撑单元; 以及加压装置,通过将压力分散到晶片的第二面上,使得晶片的激光划线层作为分割起点施加压力。 因此,晶片切割机减少了将晶片分成半导体器件的激光辐射和压力施加时间。 在不增加损坏晶片的可能性的情况下实现提高的效率。