DISK DRIVE MOTOR
    2.
    发明申请
    DISK DRIVE MOTOR 审中-公开
    磁盘驱动电机

    公开(公告)号:US20110072447A1

    公开(公告)日:2011-03-24

    申请号:US12622412

    申请日:2009-11-19

    CPC classification number: G11B17/0282 G11B19/2018

    Abstract: Disclosed herein is a disk drive motor which can prevent a disk from wobbling despite having a simple structure. The disk drive motor includes a turntable which is rotated by a drive unit and supports a disk thereon, and a disk support which is attached onto the turntable to support the disk thereon. Grooves are formed in the disk support. Each groove is inclined based on the radial direction of the turntable in the direction opposite to the direction in which the disk rotates. In the present invention, when a disk rotates, air which has been in a space between the turntable and the disk is discharged outside through the grooves, so that adsorption force is generated by a difference in pressure between the air and the space between the turntable and the disk. Therefore, the disk can be prevented from wobbling when rotating.

    Abstract translation: 这里公开了尽管具有简单的结构,但是可以防止盘摆动的盘驱动马达。 磁盘驱动电动机包括由驱动单元旋转并支撑其上的盘的转盘和附接到转盘上以支撑盘的盘支撑件。 槽形成在磁盘支架中。 每个凹槽基于转盘的径向在与盘旋转方向相反的方向上倾斜。 在本发明中,当盘旋转时,已经在转盘和盘之间的空间中的空气通过槽排出到外部,从而通过空气与转台之间的空间的压力差产生吸附力 和磁盘。 因此,当旋转时可以防止盘摆动。

    Apparatus using hybrid coupled plasma
    3.
    发明授权
    Apparatus using hybrid coupled plasma 有权
    使用混合耦合等离子体的装置

    公开(公告)号:US07442273B2

    公开(公告)日:2008-10-28

    申请号:US10892259

    申请日:2004-07-14

    CPC classification number: H01J37/32174 H01J37/32082 H01J37/321

    Abstract: A hybrid coupled plasma type apparatus includes: a chamber having a gas-injecting unit; an electrostatic chuck in the chamber; an insulating plate over the gas-injecting unit; a high frequency generator; an impedance matching circuit connected to the high frequency generator; first and second antennas connected to the impedance matching circuit in parallel, a power of the high frequency generator being supplied to the first and second antennas; an electrode of a plate shape connected to one of the first and second antennas in serial, the power of the high frequency generator being supplied to the electrode; and a power distributor between the high frequency generator and one of the first and second antennas.

    Abstract translation: 混合耦合等离子体型装置包括:具有气体注入单元的室; 腔室中的静电卡盘; 气体注入单元上的绝缘板; 高频发生器; 连接到高频发生器的阻抗匹配电路; 第一和第二天线并联连接到阻抗匹配电路,高频发生器的功率被提供给第一和第二天线; 连接到第一和第二天线中的一个的板状电极,高频发生器的功率被提供给电极; 以及高频发生器与第一和第二天线之一之间的功率分配器。

    Plasma generation apparatus
    4.
    发明授权
    Plasma generation apparatus 有权
    等离子体发生装置

    公开(公告)号:US07411148B2

    公开(公告)日:2008-08-12

    申请号:US11356947

    申请日:2006-02-16

    CPC classification number: H01J37/32935 H01J37/321 H05H1/46

    Abstract: A plasma generation apparatus includes: a chamber having a chamber lid and defining an airtight reaction region; a susceptor in the chamber; a gas supplier supplying a process gas to the chamber; and a toroidal core vertically disposed with respect to the susceptor through the chamber lid, including: a toroidal ferromagnetic core combined with the chamber, the toroidal ferromagnetic core having a first portion outside the chamber and a second portion inside the chamber, the second portion having an opening portion; a radio frequency (RF) power supply connected to the chamber; an induction coil electrically connected to the RF power supply, the induction coil rolling the first portion; and a matching circuit matching an impedance between the RF power supply and the induction coil.

    Abstract translation: 等离子体产生装置包括:具有室盖并限定气密反应区域的室; 室内的一个感受器; 供应处理气体的气体供应器; 以及相对于所述基座通过所述室盖垂直设置的环形芯,包括:与所述室结合的环形铁磁芯,所述环形铁磁芯具有在所述室外部的第一部分和所述室内的第二部分,所述第二部分具有 开口部; 连接到所述室的射频(RF)电源; 感应线圈,其电连接到所述RF电源,所述感应线圈滚动所述第一部分; 以及与RF电源和感应线圈之间的阻抗匹配的匹配电路。

    Antenna device for generating inductively coupled plasma
    6.
    发明授权
    Antenna device for generating inductively coupled plasma 有权
    用于产生电感耦合等离子体的天线装置

    公开(公告)号:US06288493B1

    公开(公告)日:2001-09-11

    申请号:US09562902

    申请日:2000-05-02

    CPC classification number: H01J37/321 H05H1/46

    Abstract: The invention relates to an antenna device of a low impedance for generating a large quantity of inductively coupled plasma to process a large size of a specimen with adjustment for a uniform distribution in the density of plasma, comprising: a high frequency power source; a first antenna for receiving the high frequency power supplied from the high frequency power source; and a second antenna connected in parallel with the first antenna for receiving the high frequency power supplied from the high frequency power source, wherein a resonant state is kept between the first and second antennas.

    Abstract translation: 本发明涉及一种用于产生大量电感耦合等离子体的低阻抗天线装置,用于对等离子体密度进行调整以调整大尺寸样品,包括:高频电源; 用于接收从高频电源提供的高频电力的第一天线; 以及与第一天线并联连接的第二天线,用于接收从高频电源提供的高频电力,其中谐振状态保持在第一和第二天线之间。

    SPINDLE MOTOR
    8.
    发明申请
    SPINDLE MOTOR 审中-公开
    主轴电机

    公开(公告)号:US20130024878A1

    公开(公告)日:2013-01-24

    申请号:US13299516

    申请日:2011-11-18

    CPC classification number: G11B19/2009

    Abstract: Disclosed herein is a spindle motor including: a turn table made of a deformable iron based material; a turn table inner diameter part provided at the center of the turn table, having a hollow part, and including a coupling part formed in an inner peripheral surface thereof; and a shaft inserted into the hollow part of the turn table inner diameter part to thereby contact the coupling part and rotate in an axial direction.

    Abstract translation: 本文公开了一种主轴电动机,包括:由可变形铁基材料制成的转台; 转台内径部分设置在转台的中心,具有中空部分,并且包括形成在其内周表面中的联接部分; 以及插入转台内径部分的中空部分中的轴,从而接触联接部并沿轴向旋转。

    Antenna structure and plasma generating device
    9.
    发明授权
    Antenna structure and plasma generating device 有权
    天线结构和等离子体发生装置

    公开(公告)号:US09282624B2

    公开(公告)日:2016-03-08

    申请号:US13990840

    申请日:2011-09-16

    Applicant: Yong Kwan Lee

    Inventor: Yong Kwan Lee

    CPC classification number: H05H1/46 H01J37/3211 H01J2237/327 H05H2001/4667

    Abstract: An antenna structure includes four induction antennas which have the same structure, are connected in parallel and are disposed to be overlapped. The induction antennas include an external upper section arranged on a first quadrant of a first layer, an internal upper section connected to the external upper section and arranged on a second quadrant of the first layer, an internal lower section connected to the internal upper section and arranged on a third quadrant of a second layer arranged on a lower part of the first layer, and an external lower section connected to the internal lower section and arranged on a fourth quadrant of the second layer. An RF power is supplied to one end of the external upper section, and the other end of the external lower section is grounded.

    Abstract translation: 天线结构包括具有相同结构的四个感应天线,并联连接并重叠。 感应天线包括布置在第一层的第一象限上的外部上部,连接到外部上部并且布置在第一层的第二象限上的内部上部,连接到内部上部的内部下部, 布置在布置在第一层的下部的第二层的第三象限上,以及外部下部,连接到内部下部并且布置在第二层的第四象限上。 向外部上部的一端供给RF电力,外部下部的另一端接地。

    ANTENNA STRUCTURE AND PLASMA GENERATING DEVICE
    10.
    发明申请
    ANTENNA STRUCTURE AND PLASMA GENERATING DEVICE 有权
    天线结构和等离子体发生装置

    公开(公告)号:US20130278136A1

    公开(公告)日:2013-10-24

    申请号:US13990840

    申请日:2011-09-16

    Applicant: Yong Kwan Lee

    Inventor: Yong Kwan Lee

    CPC classification number: H05H1/46 H01J37/3211 H01J2237/327 H05H2001/4667

    Abstract: An antenna structure includes four induction antennas which have the same structure, are connected in parallel and are disposed to be overlapped. The induction antennas include an external upper section arranged on a first quadrant of a first layer, an internal upper section connected to the external upper section and arranged on a second quadrant of the first layer, an internal lower section connected to the internal upper section and arranged on a third quadrant of a second layer arranged on a lower part of the first layer, and an external lower section connected to the internal lower section and arranged on a fourth quadrant of the second layer. An RF power is supplied to one end of the external upper section, and the other end of the external lower section is grounded.

    Abstract translation: 天线结构包括具有相同结构的四个感应天线,并联连接并重叠。 感应天线包括布置在第一层的第一象限上的外部上部,连接到外部上部并且布置在第一层的第二象限上的内部上部,连接到内部上部的内部下部, 布置在布置在第一层的下部的第二层的第三象限上,以及外部下部,连接到内部下部并且布置在第二层的第四象限上。 向外部上部的一端供给RF电力,外部下部的另一端接地。

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