Abstract:
An ultrasonic spray apparatus is configured to minimize contact between bubbles, which are generated due to ultrasonic excitation, and ionized water when the bubbles are discharged. The ultrasonic spray apparatus is configured so that a discharge pipe is installed to start from a bottom or a side surface of an accommodation space storing ionized water and protrude above the ionized water filled in the accommodation space. The bubbles are able to be discharged into the accommodation space through the discharge pipe. Changes in properties of the ionized water may be prevented. The properties of the ionized water may be utilized as they are. The discharge of the bubbles is possible even when anyone of the branched portions is blocked, and interference with a flow of the bubbles is prevented in advance even when water drops or the like generated inside the accommodation space block any one of the branched portions.
Abstract:
An ultrasonic spray apparatus is configured to minimize contact between bubbles, which are generated due to ultrasonic excitation, and ionized water when the bubbles are discharged. The ultrasonic spray apparatus is configured so that a discharge pipe is installed to start from a bottom or a side surface of an accommodation space storing ionized water and protrude above the ionized water filled in the accommodation space. The bubbles are able to be discharged into the accommodation space through the discharge pipe. Changes in properties of the ionized water may be prevented. The properties of the ionized water may be utilized as they are. The discharge of the bubbles is possible even when anyone of the branched portions is blocked, and interference with a flow of the bubbles is prevented in advance even when water drops or the like generated inside the accommodation space block any one of the branched portions.
Abstract:
A method of fabricating an integrated circuit device includes forming first and second mask structures on respective first and second regions of a feature layer. Each of the first and second mask structures includes a dual mask pattern and an etch mask pattern thereon having an etch selectivity relative to the dual mask pattern. The etch mask patterns of the first and second mask structures are etched to partially remove the etch mask pattern from the second mask structure. Spacers are formed on opposing sidewalls of the first and second mask structures. The first mask structure is selectively removed from between the spacers in the first region to define a first mask pattern including the opposing sidewall spacers with a void therebetween in the first region, and a second mask pattern including the opposing sidewall spacers with the second mask structure therebetween in the second region.
Abstract:
Provided is a method of forming patterns for a semiconductor device in which fine patterns and large-width patterns are formed simultaneously and adjacent to each other. In the method, a first layer is formed on a substrate so as to cover a first region and a second region which are included in the substrate. Both a blocking pattern covering a portion of the first layer in the first region and a low-density large-width pattern covering a portion of the first layer in the second region are simultaneously formed. A plurality of sacrificial mask patterns are formed on the first layer and the blocking pattern in the first region. A plurality of spacers covering exposed sidewalls of the plurality of sacrificial mask patterns are formed. The plurality of sacrificial mask patterns are removed. The first layer in the first and second regions are simultaneously etched by using the plurality of spacers and the blocking pattern as etch masks in the first region and using the low-density large-width pattern as an etch mask in the second region.
Abstract:
A spacer grid for nuclear fuel rods includes a plurality of unit spacer grids stacked one on top of another. Each unit spacer grid includes a plurality of unit spacer grid straps disposed at regular intervals in a row, and a plurality of fixing grid straps connected to respective opposite ends of the unit spacer grid straps so as to fix the unit spacer grid straps. Each unit spacer grid strap has convexities alternating with each other on opposite sides thereof at regular intervals, and at least one of the convexities has a diameter greater than the others. The unit spacer grids are rotated in one direction by a 90 or 180 degree angle when being stacked.
Abstract:
Provided are methods of forming a stack of electrodes and three-dimensional semiconductor devices fabricated thereby. The device may include electrodes sequentially stacked on a substrate to constitute an electrode structure. each of the electrodes may include a connection portion protruding horizontally and outward from a sidewall of one of the electrodes located thereon and an aligned portion having a sidewall coplanar with that of one of the electrodes located thereon or thereunder. Here, at least two of the electrodes provided vertically adjacent to each other may be provided in such a way that the aligned portions thereof have sidewalls that are substantially aligned to be coplanar with each other.
Abstract:
A schottky diode, a resistive memory device including the schottky diode and a method of manufacturing the same. The resistive memory device includes a semiconductor substrate including a word line, a schottky diode formed on the word line, and a storage layer formed on the schottky diode. The schottky diode includes a first semiconductor layer, a conductive layer formed on the first semiconductor layer and having a lower work function than the first semiconductor layer, and a second semiconductor layer formed on the to conductive layer.
Abstract:
A schottky diode, a resistive memory device including the schottky diode and a method of manufacturing the same. The resistive memory device includes a semiconductor substrate including a word line, a schottky diode formed on the word line, and a storage layer formed on the schottky diode. The schottky diode includes a first semiconductor layer, a conductive layer formed on the first semiconductor layer and having a lower work function than the first semiconductor layer, and a second semiconductor layer formed on the to conductive layer.
Abstract:
A semiconductor device includes: a gate pattern over a substrate; recess patterns provided in the substrate at both sides of the gate pattern, each having a side surface extending below the gate pattern; and a source and a drain filling the recess patterns, and forming a strained channel under the gate pattern.
Abstract:
Provided is a method of forming patterns for a semiconductor device in which fine patterns and large-width patterns are formed simultaneously and adjacent to each other. In the method, a first layer is formed on a substrate so as to cover a first region and a second region which are included in the substrate. Both a blocking pattern covering a portion of the first layer in the first region and a low-density large-width pattern covering a portion of the first layer in the second region are simultaneously formed. A plurality of sacrificial mask patterns are formed on the first layer and the blocking pattern in the first region. A plurality of spacers covering exposed sidewalls of the plurality of sacrificial mask patterns are formed. The plurality of sacrificial mask patterns are removed. The first layer in the first and second regions are simultaneously etched by using the plurality of spacers and the blocking pattern as etch masks in the first region and using the low-density large-width pattern as an etch mask in the second region.