Ultrasonic spray apparatus that blocks air contact to prevent changes in properties of ionized water

    公开(公告)号:US12128434B2

    公开(公告)日:2024-10-29

    申请号:US17641572

    申请日:2019-12-18

    CPC classification number: B05B17/06 C02F1/4618 C02F1/467

    Abstract: An ultrasonic spray apparatus is configured to minimize contact between bubbles, which are generated due to ultrasonic excitation, and ionized water when the bubbles are discharged. The ultrasonic spray apparatus is configured so that a discharge pipe is installed to start from a bottom or a side surface of an accommodation space storing ionized water and protrude above the ionized water filled in the accommodation space. The bubbles are able to be discharged into the accommodation space through the discharge pipe. Changes in properties of the ionized water may be prevented. The properties of the ionized water may be utilized as they are. The discharge of the bubbles is possible even when anyone of the branched portions is blocked, and interference with a flow of the bubbles is prevented in advance even when water drops or the like generated inside the accommodation space block any one of the branched portions.

    ULTRASONIC SPRAY APPARATUS THAT BLOCKS AIR CONTACT TO PREVENT CHANGES IN PROPERTIES OF IONIZED WATER

    公开(公告)号:US20220314261A1

    公开(公告)日:2022-10-06

    申请号:US17641572

    申请日:2019-12-18

    Abstract: An ultrasonic spray apparatus is configured to minimize contact between bubbles, which are generated due to ultrasonic excitation, and ionized water when the bubbles are discharged. The ultrasonic spray apparatus is configured so that a discharge pipe is installed to start from a bottom or a side surface of an accommodation space storing ionized water and protrude above the ionized water filled in the accommodation space. The bubbles are able to be discharged into the accommodation space through the discharge pipe. Changes in properties of the ionized water may be prevented. The properties of the ionized water may be utilized as they are. The discharge of the bubbles is possible even when anyone of the branched portions is blocked, and interference with a flow of the bubbles is prevented in advance even when water drops or the like generated inside the accommodation space block any one of the branched portions.

    Methods of forming fine patterns in integrated circuit devices
    3.
    发明授权
    Methods of forming fine patterns in integrated circuit devices 有权
    在集成电路器件中形成精细图案的方法

    公开(公告)号:US09117654B2

    公开(公告)日:2015-08-25

    申请号:US13470773

    申请日:2012-05-14

    Abstract: A method of fabricating an integrated circuit device includes forming first and second mask structures on respective first and second regions of a feature layer. Each of the first and second mask structures includes a dual mask pattern and an etch mask pattern thereon having an etch selectivity relative to the dual mask pattern. The etch mask patterns of the first and second mask structures are etched to partially remove the etch mask pattern from the second mask structure. Spacers are formed on opposing sidewalls of the first and second mask structures. The first mask structure is selectively removed from between the spacers in the first region to define a first mask pattern including the opposing sidewall spacers with a void therebetween in the first region, and a second mask pattern including the opposing sidewall spacers with the second mask structure therebetween in the second region.

    Abstract translation: 制造集成电路器件的方法包括在特征层的相应的第一和第二区域上形成第一和第二掩模结构。 第一和第二掩模结构中的每一个包括双掩模图案和其上具有相对于双掩模图案的蚀刻选择性的蚀刻掩模图案。 蚀刻第一和第二掩模结构的蚀刻掩模图案以从第二掩模结构部分去除蚀刻掩模图案。 间隔件形成在第一和第二掩模结构的相对侧壁上。 第一掩模结构被选择性地从第一区域中的间隔物之间​​移除,以限定第一掩模图案,其包括在第一区域中具有空隙的相对的侧壁间隔物,以及包括与第二掩模结构相对的侧壁间隔物的第二掩模图案 在第二区域中。

    METHOD OF FORMING PATTERNS FOR SEMICONDUCTOR DEVICE
    4.
    发明申请
    METHOD OF FORMING PATTERNS FOR SEMICONDUCTOR DEVICE 有权
    形成半导体器件的图案的方法

    公开(公告)号:US20140191405A1

    公开(公告)日:2014-07-10

    申请号:US14208456

    申请日:2014-03-13

    Abstract: Provided is a method of forming patterns for a semiconductor device in which fine patterns and large-width patterns are formed simultaneously and adjacent to each other. In the method, a first layer is formed on a substrate so as to cover a first region and a second region which are included in the substrate. Both a blocking pattern covering a portion of the first layer in the first region and a low-density large-width pattern covering a portion of the first layer in the second region are simultaneously formed. A plurality of sacrificial mask patterns are formed on the first layer and the blocking pattern in the first region. A plurality of spacers covering exposed sidewalls of the plurality of sacrificial mask patterns are formed. The plurality of sacrificial mask patterns are removed. The first layer in the first and second regions are simultaneously etched by using the plurality of spacers and the blocking pattern as etch masks in the first region and using the low-density large-width pattern as an etch mask in the second region.

    Abstract translation: 提供一种形成半导体器件的图案的方法,其中精细图案和大幅图案同时并且彼此相邻地形成。 在该方法中,在衬底上形成第一层以覆盖包括在衬底中的第一区域和第二区域。 同时形成覆盖第一区域中的第一层的一部分的阻挡图案和覆盖第二区域中的第一层的一部分的低密度大图案。 在第一层上形成多个牺牲掩模图案,并在第一区域中形成阻挡图案。 形成覆盖多个牺牲掩模图案的暴露侧壁的多个间隔物。 去除多个牺牲掩模图案。 通过使用多个间隔物和阻挡图案作为第一区域中的蚀刻掩模并且在第二区域中使用低密度大宽度图案作为蚀刻掩模,同时蚀刻第一和第二区域中的第一层。

    Schottky diode, resistive memory device having schottky diode and method of manufacturing the same
    7.
    发明授权
    Schottky diode, resistive memory device having schottky diode and method of manufacturing the same 失效
    肖特基二极管,具有肖特基二极管的电阻式存储器件及其制造方法

    公开(公告)号:US08541775B2

    公开(公告)日:2013-09-24

    申请号:US13331698

    申请日:2011-12-20

    Abstract: A schottky diode, a resistive memory device including the schottky diode and a method of manufacturing the same. The resistive memory device includes a semiconductor substrate including a word line, a schottky diode formed on the word line, and a storage layer formed on the schottky diode. The schottky diode includes a first semiconductor layer, a conductive layer formed on the first semiconductor layer and having a lower work function than the first semiconductor layer, and a second semiconductor layer formed on the to conductive layer.

    Abstract translation: 肖特基二极管,包括肖特基二极管的电阻式存储器件及其制造方法。 电阻式存储器件包括一个包括字线,形成在字线上的肖特基二极管和形成在肖特基二极管上的存储层的半导体衬底。 肖特基二极管包括第一半导体层,形成在第一半导体层上并具有比第一半导体层低的功函数的导电层和形成在导电层上的第二半导体层。

    Method of forming patterns for semiconductor device
    10.
    发明授权
    Method of forming patterns for semiconductor device 有权
    形成半导体器件图案的方法

    公开(公告)号:US08318603B2

    公开(公告)日:2012-11-27

    申请号:US12653588

    申请日:2009-12-16

    Abstract: Provided is a method of forming patterns for a semiconductor device in which fine patterns and large-width patterns are formed simultaneously and adjacent to each other. In the method, a first layer is formed on a substrate so as to cover a first region and a second region which are included in the substrate. Both a blocking pattern covering a portion of the first layer in the first region and a low-density large-width pattern covering a portion of the first layer in the second region are simultaneously formed. A plurality of sacrificial mask patterns are formed on the first layer and the blocking pattern in the first region. A plurality of spacers covering exposed sidewalls of the plurality of sacrificial mask patterns are formed. The plurality of sacrificial mask patterns are removed. The first layer in the first and second regions are simultaneously etched by using the plurality of spacers and the blocking pattern as etch masks in the first region and using the low-density large-width pattern as an etch mask in the second region.

    Abstract translation: 提供一种形成半导体器件的图案的方法,其中精细图案和大幅图案同时并且彼此相邻地形成。 在该方法中,在衬底上形成第一层以覆盖包括在衬底中的第一区域和第二区域。 同时形成覆盖第一区域中的第一层的一部分的阻挡图案和覆盖第二区域中的第一层的一部分的低密度大图案。 在第一层上形成多个牺牲掩模图案,并在第一区域中形成阻挡图案。 形成覆盖多个牺牲掩模图案的暴露侧壁的多个间隔物。 去除多个牺牲掩模图案。 通过使用多个间隔物和阻挡图案作为第一区域中的蚀刻掩模并且在第二区域中使用低密度大宽度图案作为蚀刻掩模,同时蚀刻第一和第二区域中的第一层。

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