Multiple complementary gas distribution assemblies
    2.
    发明授权
    Multiple complementary gas distribution assemblies 有权
    多个互补气体分配组件

    公开(公告)号:US09303318B2

    公开(公告)日:2016-04-05

    申请号:US13649488

    申请日:2012-10-11

    Abstract: In one embodiment, an apparatus includes a first gas distribution assembly that includes a first gas passage for introducing a first process gas into a second gas passage that introduces the first process gas into a processing chamber and a second gas distribution assembly that includes a third gas passage for introducing a second process gas into a fourth gas passage that introduces the second process gas into the processing chamber. The first and second gas distribution assemblies are each adapted to be coupled to at least one chamber wall of the processing chamber. The first gas passage is shaped as a first ring positioned within the processing chamber above the second gas passage that is shaped as a second ring positioned within the processing chamber. The gas distribution assemblies may be designed to have complementary characteristic radial film growth rate profiles.

    Abstract translation: 在一个实施例中,一种装置包括第一气体分配组件,该第一气体分配组件包括用于将第一工艺气体引入第二气体通道的第一气体通道,该第二气体通道将第一工艺气体引入处理室,以及包括第三气体的第二气体分配组件 用于将第二工艺气体引入到将第二工艺气体引入处理室的第四气体通道中。 第一和第二气体分配组件各自适于联接到处理室的至少一个室壁。 第一气体通道被成形为位于第二气体通道上方的处理室内的第一环,该第一环形成为位于处理室内的第二环。 气体分配组件可以被设计成具有互补的特征径向膜生长速率曲线。

    Protection of components from corrosion

    公开(公告)号:US11015252B2

    公开(公告)日:2021-05-25

    申请号:US16283567

    申请日:2019-02-22

    Abstract: Using the systems and methods discussed herein, CMAS corrosion is inhibited via CMAS interception in an engine environment and/or is prevented or reduced by the formation of a metal oxide protective coating on a hot engine section component. The CMAS interception can occur while the engine is in operation in flight or in a testing or quality control environment. The metal oxide protective coating can be applied over other coatings, including Gd-zirconates (GZO) or yttria-stabilized zirconia (YSZ). The metal oxide protective coating is applied at original equipment manufacturers (OEM) and can also be applied in-situ using a gas injection system during engine use in-flight or during maintenance or quality testing. The metal oxide protective coating contains a rare earth element, aluminum, zirconium, chromium, or combinations thereof, and is from 1 nm to 3 microns in thickness.

    Methods for increasing the density of high-index nanoimprint lithography films

    公开(公告)号:US12242186B2

    公开(公告)日:2025-03-04

    申请号:US18394133

    申请日:2023-12-22

    Abstract: Embodiments of the present disclosure generally relate to densified nanoimprint films and processes for making these densified nanoimprint films, as well as optical devices containing the densified nanoimprint films. In one or more embodiments, a densified nanoimprint film contains a base nanoimprint film and a metal oxide disposed on the base nanoimprint film and in between the nanoparticles. The base nanoimprint film contains nanoparticles, where the nanoparticles contain titanium oxide, zirconium oxide, niobium oxide, tantalum oxide, hafnium oxide, chromium oxide, indium tin oxide, silicon nitride, or any combination thereof. The metal oxide contains aluminum oxide, titanium oxide, zirconium oxide, niobium oxide, tantalum oxide, indium oxide, indium tin oxide, hafnium oxide, chromium oxide, scandium oxide, tin oxide, zinc oxide, yttrium oxide, praseodymium oxide, magnesium oxide, silicon oxide, silicon nitride, silicon oxynitride, or any combination thereof.

Patent Agency Ranking