公开(公告)号：US10204782B2

公开(公告)日：2019-02-12

申请号：US15132091

申请日：2016-04-18

申请人： ASM IP Holding B.V. ,  IMEC VZW

发明人： Jan Willem Maes ,  Werner Knaepen ,  Roel Gronheid ,  Arjun Singh

IPC分类号： H01L21/33 ,  H01L21/033 ,  G03F7/00 ,  H01L21/02 ,  H01L21/027 ,  H01L21/32

摘要： A method for forming a film with an annealing step and a deposition step is disclosed. The method comprises an annealing step for inducing self-assembly or alignment within a polymer. The method also comprises a selective deposition step in order to enable selective deposition on a polymer.

公开(公告)号：US20190155159A1

公开(公告)日：2019-05-23

申请号：US16094119

申请日：2017-04-07

申请人： ASM IP HOLDING B.V. ,  IMEC VZW

发明人： Werner Knaepen ,  Jan Willem Maes ,  Maarten Stokhof ,  Roel Gronheid ,  Hari Pathangi Sriraman

IPC分类号： G03F7/16

摘要： A method of forming a directed self-assembled (DSA) layer on a substrate by: providing a substrate; applying a layer comprising a self-assembly material on the substrate; and annealing of the self-assembly material of the layer to form a directed self-assembled layer by providing a controlled temperature and gas environment around the substrate. The controlled gas environment comprises molecules comprising an oxygen element with a partial pressure between 10-2000 Pa.

公开(公告)号：US10741394B2

公开(公告)日：2020-08-11

申请号：US16254841

申请日：2019-01-23

申请人： ASM IP Holding B.V. ,  IMEC VZW ,  Katholieke Universiteit Leuven

发明人： Jan Willem Maes ,  Werner Knaepen ,  Roel Gronheid ,  Arjun Singh

IPC分类号： H01L21/00 ,  H01L21/033 ,  G03F7/00 ,  H01L21/02 ,  H01L21/027 ,  H01L21/32

摘要： A method for forming a film with an annealing step and a deposition step is disclosed. The method comprises an annealing step for inducing self-assembly or alignment within a polymer. The method also comprises a selective deposition step in order to enable selective deposition on a polymer.

公开(公告)号：US10551741B2

公开(公告)日：2020-02-04

申请号：US16094119

申请日：2017-04-07

申请人： ASM IP HOLDING B.V. ,  IMEC VZW

发明人： Werner Knaepen ,  Jan Willem Maes ,  Maarten Stokhof ,  Roel Gronheid ,  Hari Pathangi Sriraman

IPC分类号： G03F7/16 ,  H01L21/027 ,  H01L21/67 ,  H01L21/768 ,  H01L51/00 ,  H01L21/469 ,  H01L21/31 ,  B05D3/04 ,  B05D3/02

摘要： A method of forming a directed self-assembled (DSA) layer on a substrate by: providing a substrate; applying a layer comprising a self-assembly material on the substrate; and annealing of the self-assembly material of the layer to form a directed self-assembled layer by providing a controlled temperature and gas environment around the substrate. The controlled gas environment comprises molecules comprising an oxygen element with a partial pressure between 10-2000 Pa.

公开(公告)号：US11629407B2

公开(公告)日：2023-04-18

申请号：US16797346

申请日：2020-02-21

申请人： ASM IP Holding B.V.

发明人： Dieter Pierreux ,  Werner Knaepen ,  Bert Jongbloed ,  Jeroen Fluit

IPC分类号： C23C16/48 ,  C23C16/455 ,  C23C16/44 ,  C23C16/458

摘要： The disclosure relates to a substrate processing apparatus, comprising: a first reactor constructed and arranged to process a rack with a plurality of substrates therein; a second reactor constructed and arranged to process a substrate; and, a substrate transfer device constructed and arranged to transfer substrates to and from the first and second reactor. The second reactor may be provided with an illumination system constructed and arranged to irradiate ultraviolet radiation within a range from 100 to 500 nanometers onto a top surface of at least a substrate in the second reactor.

公开(公告)号：US20220162751A1

公开(公告)日：2022-05-26

申请号：US17530161

申请日：2021-11-18

申请人： ASM IP Holding B.V.

发明人： Kornelius Haanstra ,  Lucian C. Jdira ,  Chris G.M. de Ridder ,  Robin Roelofs ,  Werner Knaepen ,  Herbert Terhorst

IPC分类号： C23C16/455 ,  H01L21/673 ,  H01L21/687 ,  C23C16/458

摘要： A substrate processing apparatus having a tube, a closed liner lining the interior surface of the tube, a plurality of gas injectors to provide a gas to an inner space of the liner, and, a gas exhaust duct to remove gas from the inner space is disclosed. The liner may have a substantially cylindrical wall delimited by a liner opening at a lower end and being substantially closed for gases above the liner opening. The apparatus may have a boat constructed and arranged moveable into the inner space via the liner opening and provided with a plurality of substrate holders for holding a plurality of substrates over a substrate support length in the inner space. Each of the gas injectors may have a single exit opening at the top and the exit openings of the plurality of injectors are substantially equally divided over the substrate support length.

公开(公告)号：US20210407789A1

公开(公告)日：2021-12-30

申请号：US17352555

申请日：2021-06-21

申请人： ASM IP Holding B.V.

发明人： Dieter Pierreux ,  Steven van Aerde ,  Bert Jongbloed ,  Kelly Houben ,  Werner Knaepen ,  Wilco Verweij

IPC分类号： H01L21/02 ,  H01L27/11582

摘要： A method for forming layers with silicon is disclosed. The layers may be created by positioning a substrate within a processing chamber, heating the substrate to a first temperature between 300 and 500° C. and introducing a first precursor into the processing chamber to deposit a first layer. The substrate may be heated to a second temperature between 400 and 600° C.; and, a second precursor may be introduced into the processing chamber to deposit a second layer. The first and second precursor may comprise silicon atoms and the first precursor may have more silicon atoms per molecule than the second precursor.

公开(公告)号：US20210371978A1

公开(公告)日：2021-12-02

申请号：US17329829

申请日：2021-05-25

申请人： ASM IP HOLDING B.V.

发明人： Eric James Shero ,  Dieter Pierreux ,  Bert Jongbloed ,  Werner Knaepen ,  Charles Dezelah ,  Qi Xie ,  Petri Raisanen ,  Hannu A. Huotari ,  Paul Ma ,  Vamsi Paruchuri

IPC分类号： C23C16/455 ,  C23C16/34

摘要： Direct liquid injection systems and vapor deposition systems including direct liquid injection systems are disclosed. Exemplary direct liquid injection systems and related vapor deposition systems can be configured for forming vanadium containing layer on a substrate by cyclical deposition processes.

公开(公告)号：US20190304821A1

公开(公告)日：2019-10-03

申请号：US15940759

申请日：2018-03-29

申请人： ASM IP Holding B.V.

发明人： Dieter Pierreux ,  Werner Knaepen ,  Bert Jongbloed ,  Cornelis Thaddeus Herbschleb ,  Hessel Sprey

IPC分类号： H01L21/673 ,  H01L21/306 ,  H01L21/02 ,  C23C16/48 ,  H01L21/67

摘要： The invention relates to a substrate rack and a substrate processing system for processing substrates in a reaction chamber. The substrate rack may be used for introducing a plurality of substrates in the reaction chamber. The substrate rack may have a plurality of spaced apart substrate holding provisions configured to hold the substrates in a spaced apart relationship. The rack may have an illumination system to irradiate radiation with a range from 100 to 500 nanometers onto a top surface of the substrates.

公开(公告)号：US09887082B1

公开(公告)日：2018-02-06

申请号：US15222715

申请日：2016-07-28

申请人： ASM IP Holding B.V.

发明人： Viljami Pore ,  Werner Knaepen ,  Bert Jongbloed ,  Dieter Pierreux ,  Gido Van Der Star ,  Toshiya Suzuki

IPC分类号： H01L21/02 ,  C23C16/455 ,  C23C16/50 ,  H01L21/762

CPC分类号： H01L21/0228 ,  C23C16/45525 ,  C23C16/50 ,  H01L21/02164 ,  H01L21/0217 ,  H01L21/02178 ,  H01L21/02211 ,  H01L21/02219 ,  H01L21/02274 ,  H01L21/76224

摘要： There is provided a method of filling one or more gaps by providing the substrate in a reaction chamber and introducing a first reactant to the substrate with a first dose, thereby forming no more than about one monolayer by the first reactant on a first area; introducing a second reactant to the substrate with a second dose, thereby forming no more than about one monolayer by the second reactant on a second area of the surface, wherein the first and the second areas overlap in an overlap area where the first and second reactants react and leave an initially unreacted area where the first and the second areas do not overlap; and, introducing a third reactant to the substrate with a third dose, the third reactant reacting with the first or second reactant remaining on the initially unreacted area.