Continuous laminar fluid mixing in micro-electromechanical systems
    1.
    发明授权
    Continuous laminar fluid mixing in micro-electromechanical systems 失效
    在微机电系统中连续层流混合

    公开(公告)号:US06520197B2

    公开(公告)日:2003-02-18

    申请号:US09867942

    申请日:2001-05-30

    IPC分类号: F15C104

    摘要: A micro-electromechanical system and method for continuous laminar fluid mixing. An embodiment of the invention described in the specification includes a mixing channel, a first delivery channel that is connected to the mixing channel, and a second delivery channel that is connected to the mixing channel. A first pump mechanism produces pulses in the first delivery channel. A second pump mechanism produces pulses in the second delivery channel. The first pulsed fluid stream and the second pulsed fluid stream merge in the mixing channel to form a mixed fluid. The pulses in the fluids operate to distort the interface between the fluids to facilitate diffusion between the fluids.

    摘要翻译: 一种用于连续层流混合的微机电系统和方法。 在说明书中描述的本发明的实施例包括混合通道,连接到混合通道的第一输送通道和连接到混合通道的第二输送通道。 第一泵机构在第一输送通道中产生脉冲。 第二泵机构在第二输送通道中产生脉冲。 第一脉冲流体流和第二脉冲流体流在混合通道中合并形成混合流体。 流体中的脉冲操作以扭曲流体之间的界面,以促进流体之间的扩散。

    MONITORING METHOD AND/OR APPARATUS
    2.
    发明申请
    MONITORING METHOD AND/OR APPARATUS 审中-公开
    监测方法和/或装置

    公开(公告)号:US20090069651A1

    公开(公告)日:2009-03-12

    申请号:US12188918

    申请日:2008-08-08

    IPC分类号: A61B5/00

    摘要: A method and apparatus for substance monitoring. One application is an easy to handle continuous glucose monitor using a group of hollow out-of-plane silicon microneedles to sample substances in interstitial fluid from the epidermal skin layer. The glucose of the interstitial fluid permeates a dialysis membrane and reaches a sensor. Using MEMS technology, for example, allows well-established batch fabrication at low cost.

    摘要翻译: 一种用于物质监测的方法和装置。 一个应用是使用一组中空的平面外的硅微针来容易地处理连续的葡萄糖监测器,以从表皮皮肤层中采集间质液中的物质。 间质液的葡萄糖渗透透析膜并到达传感器。 例如,使用MEMS技术可以以低成本实现良好的批量制造。

    Monitoring method and/or apparatus
    3.
    发明授权
    Monitoring method and/or apparatus 有权
    监测方法和/或装置

    公开(公告)号:US07415299B2

    公开(公告)日:2008-08-19

    申请号:US10828510

    申请日:2004-04-19

    IPC分类号: A61B5/05

    摘要: A method and apparatus for substance monitoring. One application is an easy to handle continuous glucose monitor using a group of hollow out-of-plane silicon microneedles to sample substances in interstitial fluid from the epidermal skin layer. The glucose of the interstitial fluid permeates a dialysis membrane and reaches a sensor. Using MEMS technology, for example, allows well-established batch fabrication at low cost.

    摘要翻译: 一种用于物质监测的方法和装置。 一个应用是使用一组中空的平面外的硅微针来容易地处理连续的葡萄糖监测器,以从表皮皮肤层中采集间质液中的物质。 间质液的葡萄糖渗透透析膜并到达传感器。 例如,使用MEMS技术可以以低成本实现良好的批量制造。

    MEMS microcapillary pumped loop for chip-level temperature control
    5.
    发明授权
    MEMS microcapillary pumped loop for chip-level temperature control 失效
    MEMS微毛细管泵浦回路用于芯片级温度控制

    公开(公告)号:US06976527B2

    公开(公告)日:2005-12-20

    申请号:US10198626

    申请日:2002-07-16

    摘要: A microcapillary pumped loop (CPL) for chip level temperature control includes two mating substrates which define an evaporator, a condenser, and a reservoir for a liquid. A first substrate includes a vapor line which couples vapor from the evaporator to the condenser, and a liquid line which couples liquid from the condenser back to the evaporator. A wicking structure for the evaporator is formed by etching in the second substrate. The wicking structure couples the evaporator to the reservoir and to the liquid line. The condenser includes a plurality of grooves formed in the second substrate which couples liquid from the condenser to the liquid line.

    摘要翻译: 用于芯片级温度控制的微毛细管泵回路(CPL)包括限定蒸发器,冷凝器和用于液体的储存器的两个配合基板。 第一衬底包括将蒸气从蒸发器耦合到冷凝器的蒸汽管线,以及将液体从冷凝器连接回蒸发器的液体管线。 用于蒸发器的芯吸结构通过在第二衬底中的蚀刻形成。 芯吸结构将蒸发器连接到储存器和液体管线。 冷凝器包括形成在第二基板中的多个槽,其将液体从冷凝器连接到液体管线。

    Method of forming vertical, hollow needles within a semiconductor substrate, and needles formed thereby
    6.
    发明授权
    Method of forming vertical, hollow needles within a semiconductor substrate, and needles formed thereby 有权
    在半导体衬底内形成垂直的中空针的方法,以及由此形成的针

    公开(公告)号:US06406638B1

    公开(公告)日:2002-06-18

    申请号:US09478913

    申请日:2000-01-06

    IPC分类号: H01L21302

    CPC分类号: A61M5/32 B81B1/006

    摘要: A method of forming a needle includes the step of anisotropically etching a channel into the back side of a semiconductor substrate. The front side of the semiconductor substrate is then isotropically etched to form a vertical axial surface surrounding the channel. The resultant needle has an elongated body formed of a semiconductor material. The elongated body includes an axial surface positioned between a first end and a second end. The axial surface defines a channel between the first end and the second end. In one embodiment, the first end has a sloping tip with a single circumferential termination point.

    摘要翻译: 形成针的方法包括将通道各向异性地蚀刻到半导体衬底的背面中的步骤。 然后对半导体衬底的前侧进行各向同性蚀刻以形成围绕通道的垂直轴向表面。 所得针具有由半导体材料形成的细长体。 细长主体包括位于第一端和第二端之间的轴向表面。 轴向表面限定了在第一端和第二端之间的通道。 在一个实施例中,第一端具有具有单个圆周终止点的倾斜尖端。

    Apparatus and method for planar laminar mixing
    9.
    发明授权
    Apparatus and method for planar laminar mixing 失效
    平面层流混合的装置和方法

    公开(公告)号:US6065864A

    公开(公告)日:2000-05-23

    申请号:US999597

    申请日:1998-01-23

    摘要: A microelectromechanical system mixes a fluid using predominantly planar laminar flow. The microelectromechanical system includes a mixing chamber and a set of valves to establish the planar laminar flow in the mixing chamber. In one embodiment, bubble-controlled pumps are operated with bubble-controlled valves to establish the predominantly planar laminar flow in the mixing chamber. The bubble-controlled pumps and valves may be used to establish a pulsed double-dipole flow field in the mixing chamber.

    摘要翻译: 微机电系统使用主要为平面的层流混合流体。 微机电系统包括混合室和一组阀门,以在混合室中建立平面层流。 在一个实施例中,气泡控制的泵用气泡控制的阀操作以在混合室中建立主要平面的层流。 气泡控制的泵和阀可用于在混合室中建立脉冲双偶极流场。