WORD LINE AND BIT LINE PROCESSING FOR CROSS-POINT MEMORIES
    4.
    发明申请
    WORD LINE AND BIT LINE PROCESSING FOR CROSS-POINT MEMORIES 审中-公开
    用于跨点记录的字线和位线处理

    公开(公告)号:US20140370664A1

    公开(公告)日:2014-12-18

    申请号:US13917068

    申请日:2013-06-13

    IPC分类号: H01L27/105

    摘要: Techniques for fabricating cross-point memory devices are disclosed in which word line (WL) and/or bit line (BL) processing is separate from cross-point memory memory-material processing, thereby providing an advantageous increase in thickness of the WL and/or BL metal that avoids an increase in the WL and BL resistances as feature sizes for cross-point memories scale smaller.

    摘要翻译: 公开了用于制造交叉点存储器件的技术,其中字线(WL)和/或位线(BL)处理与交叉点存储器材料处理分离,从而提供WL和/ 或BL金属,避免了WL和BL电阻的增加,因为交叉点存储器的特征尺寸缩小。