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    Probes for testing integrated electronic circuits and corresponding production method
    9.
    发明授权
    Probes for testing integrated electronic circuits and corresponding production method 有权
    集成电子电路检测探针及相应的生产方法

    公开(公告)号：US09229031B2

    公开(公告)日：2016-01-05

    申请号：US13106615

    申请日：2011-05-12

    申请人： Alberto Pagani

    发明人： Alberto Pagani

    IPC分类号： G01R31/20 ,  G01R1/067 ,  G01R3/00 ,  G01R31/319 ,  G01R1/073

    CPC分类号： G01R3/00 ,  G01R1/06761 ,  G01R1/07307 ,  G01R1/07342 ,  G01R31/31905 ,  Y10T29/49002

    摘要： An embodiment of a method is proposed for producing cantilever probes for use in a test apparatus of integrated electronic circuits; the probes are configured to contact during the test corresponding terminals of the electronic circuits to be tested. An embodiment comprises forming probe bodies of electrically conductive materials. In an embodiment, the method further includes forming on a lower portion of each probe body that, in use, is directed to the respective terminal to be contacted, an electrically conductive contact region having a first hardness value equal to or greater than 300 HV; each contact region and the respective probe body form the corresponding probe.

    摘要翻译： 提出了一种用于制造用于集成电子电路的测试装置的悬臂探针的方法的实施例; 探针被配置为在测试的电子电路的相应端子的测试期间接触。 一个实施例包括形成导电材料的探针体。 在一个实施例中，该方法还包括在每个探针体的下部形成在使用中的，被引导到要接触的相应端子的第一硬度值等于或大于300HV的导电接触区域; 每个接触区域和相应的探针体形成相应的探针。

    Method for an improved checking of repeatability and reproducibility of a measuring chain for semiconductor device testing
    10.
    发明授权
    Method for an improved checking of repeatability and reproducibility of a measuring chain for semiconductor device testing 有权
    用于半导体器件测试的测量链的重复性和再现性的改进的检查方法

    公开(公告)号：US08928346B2

    公开(公告)日：2015-01-06

    申请号：US13092772

    申请日：2011-04-22

    申请人： Sergio Tenucci ,  Alberto Pagani ,  Marco Spinetta ,  Bernard Ranchoux

    发明人： Sergio Tenucci ,  Alberto Pagani ,  Marco Spinetta ,  Bernard Ranchoux

    IPC分类号： G01R31/26 ,  G05B19/418 ,  G01R31/28

    CPC分类号： G05B19/41875 ,  G01R31/2894 ,  Y02P90/22 ,  Y02P90/86

    摘要： A method provides an improved checking of repeatability and reproducibility of a measuring chain, in particular for quality control by semiconductor device testing. The method includes testing steps provided for multiple and different devices to be subjected to measurement or control through a measuring system that includes at least one chain of measuring units between a testing apparatus (ATE) and each device to be subjected to measurement or control. Advantageously, the method comprises checking repeatability and reproducibility of each type of unit that forms part of the measuring chain and, after the checking, making a correlation between the various measuring chains as a whole to check repeatability and reproducibility, using a corresponding device subjected to measurement or control.

    摘要翻译： 一种方法提供了对测量链的重复性和再现性的改进的检查，特别是通过半导体器件测试的质量控制。 该方法包括对通过测量系统进行测量或控制的多个和不同设备提供的测试步骤，所述测量系统包括测试装置（ATE）和要进行测量或控制的每个设备之间的至少一个测量单元链。 有利地，该方法包括检查构成测量链的一部分的每种类型的单元的重复性和再现性，并且在检查之后，使各种测量链之间的相关性作为整体来检查重复性和再现性，使用受到 测量或控制。