摘要:
A semiconductor device according to the invention includes a first Cu interconnect and a first barrier insulating film. a The first barrier insulating film is provided on the first Cu interconnect, and prevents Cu from being diffused from the first Cu interconnect. In addition, the semiconductor device includes a second Cu interconnect and a second barrier insulating film on the first barrier insulating film. The second barrier insulating film is provided on a first Cu interconnect, and prevents Cu from being diffused from the second Cu interconnect. The first and second barrier insulating films are made of a silicon-based insulating film having a branched alkyl group and a carbon-carbon double bond.
摘要:
A low-permittivity interlayer insulating film of the present invention is formed by a plasma CVD method and includes at least carbon and silicon, wherein a ratio of the carbon to the silicon is 2.5 or more, and relative permittivity is 3.8 or less. Also, a film formation method of a low-permittivity interlayer insulating film of the present invention includes forming a film of an insulating film material that includes at least carbon and silicon by a plasma CVD method, wherein a hydrocarbon is not used as the insulating film material, and a ratio of the carbon to the silicon is 2.5 or more, and relative permittivity is 3.8 or less in the formed low-permittivity interlayer insulating film.
摘要:
An insulating film material for plasma CVD of the present invention is constituted of a silicon compound including two hydrocarbon groups bonded to each other to form a ring structure together with a silicon atom, or at least one branched hydrocarbon group, wherein within the branched hydrocarbon group, α-carbon that is a carbon atom bonded to the silicon atom constitutes a methylene group, and β-carbon that is a carbon atom bonded to the methylene group or γ-carbon that is a carbon atom bonded to the β-carbon is a branching point.
摘要:
A connector fitting structure enabling easy insertion is provided. The connector fitting structure includes a case provided with a plurality of holes, a male connector having connectors fitted into the plurality of holes, respectively, and sealing elements as sealing members interposed between the holes and the connectors, respectively. Connectors each have a tapered surface. The respective tapered surfaces are shifted in position such that a tapered surface comes into contact with a sealing element, and then another tapered surface comes into contact with a sealing element.
摘要:
Hybrid drive system for a motor vehicle, including (a) an engine operated by combustion of a fuel, (b) a planetary gear mechanism having a sun gear and a carrier one of which is connected to the engine, and a ring gear connected to an output member, (c) a motor/generator connected to the output member, and (d) a differential gear device including output shafts and an input member rotated by a drive force received from the output member, and wherein the motor/generator, the planetary gear mechanism and the output member are arranged coaxially with each other along a first axis, and the output shafts of the differential gear device are disposed along a second axis parallel to the first axis. The planetary gear mechanism is disposed in a radially inner space provided radially inwardly of a stator coil of the motor/generator, and the input member includes a radially outer portion which overlaps a radially outer portion of the motor/generator in the radial direction of the motor/generator.
摘要:
An apparatus including motor/generator whose axis is spaced from and parallel to engine crankshaft, 3-elements type input and output mechanism disposed coaxially with the motor/generator and having first rotary element connected to the crankshaft, second rotary element connected to output shaft of the motor/generator, and third rotary element, and first and second one-way clutches associated with the input and output mechanism, which is arranged such that speed V1 of forward rotation of the first rotary element by engine is reduced when the second rotary element is rotated forward with the third rotary element held stationary. The motor/generator is operated to rotate the second rotary element to start the engine, with the first one-way clutch inhibiting the reverse rotation of the third rotary element, and as an electric generator, with the first one-way clutch allowing the forward rotation of the third rotary element while the three rotary elements are rotated as a unit under an action of the second one-way clutch.
摘要:
A power output apparatus (100) includes an engine (102), a double-pinion planetary gear (110), a first motor (MG1), and a second motor (MG2). A ring gear (114), a planetary carrier (126), and a sun gear (112) of the double-pinion planetary gear (110) are respectively linked with a crankshaft (104) of the engine (102), a drive shaft (108), and the first motor (MG1). The engine (102), the second motor (MG2), the double-pinion planetary gear (110), and the first motor (MG1) are arranged sequentially along an axis running from the front to the rear of a vehicle. The second motor (MG2) is required to output a greater torque than that of the first motor (MG1) and accordingly has a larger size. The second motor (MG2) is, however, disposed closer to the engine (102) and thereby has a sufficient margin in the diametral direction. This configuration reduces the size of the whole power output apparatus (100).
摘要:
A rocker arm with a roller made with a metal plate and utilized in a valve actuating system of an engine is provided. The roller mounting rocker arm includes a rocker arm body (11) having a pair of side walls (11c) and a connecting portion 12 for connecting the side walls (11c), a roller (7) mounted between the side walls (11c), a pivot engageable recess (12a) formed on the connecting portion by drawing, and a valve stem receiving portion (14) formed at the other end of the side walls (11c). This roller mounting rocker arm has a high rigidity and is suitable for mass-production, and low cost is realized.
摘要:
In a power transfer device including an input shaft rotatably mounted within a housing, a first output shaft rotatably supported on the housing for connecting the input shaft to a pair of front wheel drive axles, and a second output shaft arranged in parallel with the first output shaft and rotatably supported on the housing for drive connection to a pair of rear wheel drive axles, a shift mechanism includes a sleeve member axially slidable on the first output shaft between respective positions in which it effects a drive connection or disconnection between the output shafts, a shift rod arranged in parallel with the output shafts and axially movably supported on the housing, a shift fork mounted on the shift rod and coupled with the sleeve member, an operation rod extending through the peripheral wall of the housing and rotatably supported therethrough, the operation rod having an outer end operatively connected to a manual operation lever, and a swing arm secured to the inner end of the operation rod for rotation therewith and engaged at one end portion thereof with a recessed portion formed on the shift rod to restrict axial movement of the operation rod outwardly with respect to the housing and to restrict rotation of the shift rod.