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公开(公告)号:US06176770B1
公开(公告)日:2001-01-23
申请号:US09494522
申请日:2000-01-31
申请人: Chung-Hsien Kao , Patrick Cheng , Li-Chung Lee , Mei-Ling Chen
发明人: Chung-Hsien Kao , Patrick Cheng , Li-Chung Lee , Mei-Ling Chen
IPC分类号: B24B5506
CPC分类号: G03F7/707 , B24B55/10 , B24D15/02 , G03F7/70925
摘要: A grindstone having a vacuum system is applied to a pin chuck stepper. The vacuum system has a vacuum tube attached on the edge of the grindstone. When the grindstone moves on a pin chuck stage on the pin chuck stepper, the vacuum tube vacuums the pin chuck stage to free particles on the pin chuck stage.
摘要翻译: 将具有真空系统的砂轮应用于针式卡盘步进机。 真空系统具有附着在磨石边缘的真空管。 当磨石在针卡盘步进机上的针卡盘台上移动时,真空管将针卡盘台抽真空以释放针卡盘台上的颗粒。
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公开(公告)号:US08481412B2
公开(公告)日:2013-07-09
申请号:US12893399
申请日:2010-09-29
申请人: Chung-Chi Ko , Chia Cheng Chou , Keng-Chu Lin , Joung-Wei Liou , Shwang-Ming Jeng , Mei-Ling Chen
发明人: Chung-Chi Ko , Chia Cheng Chou , Keng-Chu Lin , Joung-Wei Liou , Shwang-Ming Jeng , Mei-Ling Chen
IPC分类号: H01L21/425
CPC分类号: H01L21/768 , H01L21/02126 , H01L21/02134 , H01L21/02137 , H01L21/02203 , H01L21/3105 , H01L21/70 , H01L21/76811 , H01L21/76813 , H01L21/76814 , H01L21/76825 , H01L21/76828
摘要: A method of and apparatus for forming interconnects on a substrate includes etching patterns in ultra-low k dielectric and removing moisture from the ultra-low k dielectric using active energy assist baking. During active energy assist baking, the ultra-low k dielectric is heated and exposed to light having only wavelengths greater than 400 nm for about 1 to about 20 minutes at a temperature of about 300 to about 400 degrees Celsius. The active energy assist baking is performed after wet-cleaning or after chemical mechanical polishing, or both.
摘要翻译: 用于在衬底上形成互连的方法和装置包括在超低k电介质中的蚀刻图案,并且使用主动能量辅助烘烤从超低k电介质去除湿气。 在活性能量辅助烘烤期间,在约300至约400摄氏度的温度下,超低k电介质被加热并暴露于仅具有大于400nm波长的光约1至约20分钟。 活性能量辅助烘烤在湿清洗或化学机械抛光之后进行,或两者都进行。
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公开(公告)号:US20120099085A1
公开(公告)日:2012-04-26
申请号:US13341130
申请日:2011-12-30
申请人: Mei-Ling Chen , Wen-Chieh Wen , Haw-Woei Pan , Chao-Shun Chen
发明人: Mei-Ling Chen , Wen-Chieh Wen , Haw-Woei Pan , Chao-Shun Chen
CPC分类号: H01L33/58
摘要: A light emitting diode package including a carrier, at least one LED chip, and a light guide element. The LED chip is disposed on the carrier. The light guide element including a light transmissive body, a light integration part, a reflective film, and a support part is disposed on the carrier and located above the LED chip. The light integration part connected to the light transmissive body and disposed between the light transmissive body and the LED chip has a light incident surface facing the LED chip and at least one side surface. The side surface connects the light transmissive body and the light incident surface. The reflective film is disposed on the side surface. The support part leaning on the carrier is connected to the light transmissive body and surrounds the light integration part. The light transmissive body, the light integration part, and the support part are integrally formed.
摘要翻译: 一种发光二极管封装,包括载体,至少一个LED芯片和导光元件。 LED芯片设置在载体上。 包括透光体,光一体化部,反射膜和支撑部的导光元件设置在载体上并位于LED芯片的上方。 连接到透光体并且设置在透光体和LED芯片之间的光集成部分具有面向LED芯片和至少一个侧表面的光入射表面。 侧面连接透光体和光入射面。 反射膜设置在侧面。 靠在载体上的支撑部分连接到透光体并且围绕光集成部分。 光透射体,光一体化部和支撑部一体形成。
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公开(公告)号:US08011642B2
公开(公告)日:2011-09-06
申请号:US12477930
申请日:2009-06-04
申请人: Ming-Chin Tsai , Mei-Ling Chen
发明人: Ming-Chin Tsai , Mei-Ling Chen
IPC分类号: B01F3/04
CPC分类号: B01F3/04588 , B01F3/04609 , B01F3/04765 , B01F13/0049 , B01F15/00435 , B01F2015/00623 , B01F2015/00642
摘要: A cruising aerator includes a raft, a motor mounted on the raft, a shaft driven by the motor, a first impeller mounted on the shaft, a second impeller mounted on the shaft, and a common chamber. The cruising aerator further includes a sequential controller connected to the motor for controlling the motor to rotate clockwise or counterclockwise. The motor, the shaft and impellers are installed inside of the common chamber. The common chamber has a common inlet disposed under a water surface. A first outlet and a second outlet of the common chamber are arranged to face in opposite directions. The first impeller and second impeller are assembled to have opposite normal rotating directions to each other according to a rotating direction of the motor.
摘要翻译: 巡航曝气器包括筏,安装在筏上的马达,由马达驱动的轴,安装在轴上的第一叶轮,安装在轴上的第二叶轮和公共室。 巡航曝气器还包括连接到马达的顺序控制器,用于控制马达顺时针或逆时针旋转。 电动机,轴和叶轮安装在公共室内。 公共室具有设置在水面下的共同入口。 公共室的第一出口和第二出口布置成面向相反的方向。 第一叶轮和第二叶轮根据马达的旋转方向组装成彼此具有相反的正常旋转方向。
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公开(公告)号:US07947565B2
公开(公告)日:2011-05-24
申请号:US11672307
申请日:2007-02-07
申请人: Mei-Ling Chen , Kuo-Chih Lai , Su-Jen Sung , Chien-Chung Huang , Yu-Tsung Lai
发明人: Mei-Ling Chen , Kuo-Chih Lai , Su-Jen Sung , Chien-Chung Huang , Yu-Tsung Lai
IPC分类号: H01L21/443 , H01L33/16
CPC分类号: H01L21/31695 , H01L21/02164 , H01L21/02203 , H01L21/02271 , H01L21/02304 , H01L21/02362 , H01L21/7682 , H01L21/76835 , Y10T428/24992
摘要: A method of forming a porous low-k layer is described. A CVD process is conducted to a substrate, wherein a framework precursor and a porogen precursor are supplied. In an end period of the supply of the framework precursor, the value of at least one deposition parameter negatively correlated with the density of the product of the CVD process is decreased.
摘要翻译: 描述形成多孔低k层的方法。 对基材进行CVD工艺,其中提供骨架前体和致孔剂前体。 在框架前体的供给的结束期间,减少与CVD工艺的产物的密度负相关的至少一个沉积参数的值。
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公开(公告)号:US07905601B2
公开(公告)日:2011-03-15
申请号:US11858603
申请日:2007-09-20
申请人: Mei-Ling Chen , S-Wei Chen , Chao-Shun Chen , Hung-Cheng Lung , Chun-Fa Hsu , Cheng-Shun Liao
发明人: Mei-Ling Chen , S-Wei Chen , Chao-Shun Chen , Hung-Cheng Lung , Chun-Fa Hsu , Cheng-Shun Liao
IPC分类号: G03B21/14
CPC分类号: G03B21/14 , G02B27/285 , G03B21/2073 , G03B21/208 , G03B33/08
摘要: A color filtering device including a color filter, a plurality of polarization beam splitting units, a plurality of reflecting units, and a plurality of wave plates is provided. The color filter has a plurality of filtering parts and a plurality of light shielding parts alternately arranged thereon. Each of the polarization beam splitting units is disposed in front of one of the filtering parts and makes an angle with a corresponding filtering part. Each of the reflecting units is disposed in front of one of the light shielding parts and makes an angle with a corresponding light shielding part. Each of the wave plates is substantially parallel to one of the filtering parts. Each of the polarization beam splitting units is disposed between a pair of a wave plate and a filtering part. The color filtering device has both color filtering function and polarization conversion function.
摘要翻译: 提供了一种包括滤色器,多个偏振分束单元,多个反射单元和多个波片的滤色装置。 滤色器具有交替布置在其上的多个滤光部和多个遮光部。 每个偏振光束分离单元设置在一个滤光部分的前面,并与相应的滤光部分形成一个角度。 每个反射单元设置在一个遮光部分的前面并与相应的遮光部分成一定角度。 每个波片基本上平行于过滤部分之一。 每个偏振分束单元设置在一对波片和滤波部之间。 滤色装置具有滤色功能和偏光转换功能。
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公开(公告)号:US20100327288A1
公开(公告)日:2010-12-30
申请号:US12824539
申请日:2010-06-28
申请人: Kou-Liang CHAO , Hung-Hsin Kuo , Tse-Chuan Su , Mei-Ling Chen
发明人: Kou-Liang CHAO , Hung-Hsin Kuo , Tse-Chuan Su , Mei-Ling Chen
IPC分类号: H01L29/872 , H01L21/329 , H01L21/04
CPC分类号: H01L29/66143 , H01L29/0619 , H01L29/404 , H01L29/407 , H01L29/872 , H01L29/8725
摘要: A trench Schottky diode and its manufacturing method are provided. The trench Schottky diode includes a semiconductor substrate having therein a plurality of trenches, a gate oxide layer, a polysilicon structure, a guard ring and an electrode. At first, the trenches are formed in the semiconductor substrate by an etching step. Then, the gate oxide layer and the polysilicon structure are formed in the trenches and protrude above a surface of the semiconductor substrate. The guard ring is formed to cover a portion of the resultant structure. At last, the electrode is formed above the guard ring and the other portion not covered by the guard ring. The protruding gate oxide layer and the protruding polysilicon structure can avoid cracks occurring in the trench structure.
摘要翻译: 提供沟槽肖特基二极管及其制造方法。 沟槽肖特基二极管包括其中具有多个沟槽,栅极氧化物层,多晶硅结构,保护环和电极的半导体衬底。 首先,通过蚀刻步骤在半导体衬底中形成沟槽。 然后,在沟槽中形成栅氧化层和多晶硅结构,并突出在半导体衬底的表面之上。 保护环形成为覆盖所得结构的一部分。 最后,电极形成在防护环的上方,另一部分不被保护环覆盖。 突出的栅极氧化物层和突出的多晶硅结构可以避免在沟槽结构中发生裂纹。
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公开(公告)号:US07641212B1
公开(公告)日:2010-01-05
申请号:US11751825
申请日:2007-05-22
申请人: Wu-Hsiung Liao , Mei-Ling Chen
发明人: Wu-Hsiung Liao , Mei-Ling Chen
IPC分类号: B62J25/00
摘要: A bicycle frame includes an axle, a hub and freewheel assembly, two fork end members, two axle pegs, and two locking nuts. Thus, the first ramp of each of the axle pegs is rested on the second ramp of the respective fork end member to prevent each of the axle pegs from being rotatable relative to the respective fork end member, so that the first end of each of the axle pegs is clamped exactly between the respective fork end member and the respective locking nut to prevent each of the axle pegs from being rotatable freely on the axle to ensure the safety of a user who treads the axle pegs.
摘要翻译: 自行车车架包括轴,轮毂和飞轮组件,两个叉端构件,两个轴钉和两个锁紧螺母。 因此,每个轴钉的第一斜面被搁置在相应的叉端构件的第二斜坡上,以防止每个轴钉相对于相应的叉端构件旋转,使得每个轴端部件的第一端 轴钉紧紧地夹紧在相应的叉端构件和相应的锁定螺母之间,以防止每个轴钉在轴上自由旋转,以确保踏入轴钉的使用者的安全。
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公开(公告)号:US20090275211A1
公开(公告)日:2009-11-05
申请号:US12503077
申请日:2009-07-15
申请人: Mei-Ling Chen , Su-Jen Sung , Kuo-Chih Lai , Jei-Ming Chen
发明人: Mei-Ling Chen , Su-Jen Sung , Kuo-Chih Lai , Jei-Ming Chen
IPC分类号: H01L21/316
CPC分类号: H01L21/31695 , C23C16/0272 , C23C16/401 , H01L21/02126 , H01L21/02203 , H01L21/02274 , H01L21/02348
摘要: A method for fabricating a porous low-k dielectric film includes providing a substrate, performing a first CVD process by providing a back-bone precursor to form an interface dielectric layer, performing a second CVD process by providing a porogen precursor to form a back-bone layer, and removing the porogen material in the back-bone layer so that the back-bone layer becomes an ultra low-k dielectric layer. The interface dielectric layer and the ultra low-k dielectric layer compose a porous low-k dielectric film.
摘要翻译: 制造多孔低k电介质膜的方法包括提供基片,通过提供背骨前体以形成界面电介质层进行第一CVD工艺,通过提供致孔剂前体来形成背光源前体,进行第二CVD工艺, 骨层,并且去除背骨层中的致孔剂材料,使得背骨层变成超低k电介质层。 界面电介质层和超低k电介质层组成多孔低k电介质膜。
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公开(公告)号:US20080304015A1
公开(公告)日:2008-12-11
申请号:US11858603
申请日:2007-09-20
申请人: Mei-Ling Chen , S-Wei Chen , Chao-Shun Chen , Hung-Cheng Lung , Chun-Fa Hsu , Cheng-Shun Liao
发明人: Mei-Ling Chen , S-Wei Chen , Chao-Shun Chen , Hung-Cheng Lung , Chun-Fa Hsu , Cheng-Shun Liao
CPC分类号: G03B21/14 , G02B27/285 , G03B21/2073 , G03B21/208 , G03B33/08
摘要: A color filtering device including a color filter, a plurality of polarization beam splitting units, a plurality of reflecting units, and a plurality of wave plates is provided. The color filter has a plurality of filtering parts and a plurality of light shielding parts alternately arranged thereon. Each of the polarization beam splitting units is disposed in front of one of the filtering parts and makes an angle with a corresponding filtering part. Each of the reflecting units is disposed in front of one of the light shielding parts and makes an angle with a corresponding light shielding part. Each of the wave plates is substantially parallel to one of the filtering parts. Each of the polarization beam splitting units is disposed between a pair of a wave plate and a filtering part. The color filtering device has both color filtering function and polarization conversion function.
摘要翻译: 提供了一种包括滤色器,多个偏振分束单元,多个反射单元和多个波片的滤色装置。 滤色器具有交替布置在其上的多个滤光部和多个遮光部。 每个偏振光束分离单元设置在一个滤光部分的前面,并与相应的滤光部分形成一个角度。 每个反射单元设置在一个遮光部分的前面并与相应的遮光部分成一定角度。 每个波片基本上平行于过滤部分之一。 每个偏振分束单元设置在一对波片和滤波部之间。 滤色装置具有滤色功能和偏光转换功能。
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