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公开(公告)号:US20130098292A1
公开(公告)日:2013-04-25
申请号:US13708936
申请日:2012-12-08
申请人: Emmerich Bertagnolli , Heinz Wanzenboeck , Wolfram Buehler , Camille Stebler , Ulrike Zeile , Alexander Rosenthal
发明人: Emmerich Bertagnolli , Heinz Wanzenboeck , Wolfram Buehler , Camille Stebler , Ulrike Zeile , Alexander Rosenthal
IPC分类号: C23C16/48
CPC分类号: H01J37/3178 , C23C16/486 , C23C16/487 , H01J37/16 , H01J37/20 , H01J37/261 , H01J37/30 , H01J37/3056 , H01J2237/188 , H01J2237/2002 , H01J2237/2602 , H01J2237/303 , H01J2237/31744
摘要: A processing system for processing an object (3) is provided, wherein the processing system is adapted, to focus a first energy beam, in particular an electron beam (11), and a second energy beam, in particular an ion beam (21), on a focusing region (29) in which a object (3) to be processed is arrangeable. A processing chamber wall (35) having two openings (38, 39) for traversal of both energy beams and a connector (37) for supplying process gas delimits a processing chamber (45) from a vacuum chamber (2) of the processing system. Processing the object by activating the process gas through one of the energy beams and inspecting the object via one of the energy beams is enabled for different orientations of the object relative to a propagation direction of one of the energy beams.
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公开(公告)号:US20100024730A1
公开(公告)日:2010-02-04
申请号:US12378634
申请日:2009-02-18
申请人: Emmerich Bertagnolli , Heinz Wanzenboeck , Wolfram Buehler , Camille Stebler , Ulrike Zeile , Alexander Rosenthal
发明人: Emmerich Bertagnolli , Heinz Wanzenboeck , Wolfram Buehler , Camille Stebler , Ulrike Zeile , Alexander Rosenthal
IPC分类号: C23C16/54
CPC分类号: H01J37/3178 , C23C16/486 , C23C16/487 , H01J37/16 , H01J37/20 , H01J37/261 , H01J37/30 , H01J37/3056 , H01J2237/188 , H01J2237/2002 , H01J2237/2602 , H01J2237/303 , H01J2237/31744
摘要: A processing system for processing an object (3) is provided, wherein the processing system is adapted, to focus a first energy beam, in particular an electron beam (11), and a second energy beam, in particular an ion beam (21), on a focusing region (29) in which a object (3) to be processed is arrangeable. A processing chamber wall (35) having two openings (38, 39) for traversal of both energy beams and a connector (37) for supplying process gas delimits a processing chamber (45) from a vacuum chamber (2) of the processing system. Processing the object by activating the process gas through one of the energy beams and inspecting the object via one of the energy beams is enabled for different orientations of the object relative to a propagation direction of one of the energy beams.
摘要翻译: 提供了一种用于处理物体(3)的处理系统,其中处理系统适于聚焦第一能量束,特别是电子束(11)和第二能量束,特别是离子束(21) 在可以配置被处理物体(3)的聚焦区域(29)上。 具有用于穿过能量束的两个开口(38,39)和用于供给处理气体的连接器(37))的处理室壁(35)从处理系统的真空室(2)界定处理室(45)。 通过激活能量束中的一个能量束并通过其中一个能量束检查物体来处理物体,能够使物体相对于能量束之一的传播方向的不同取向。
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公开(公告)号:US08008639B2
公开(公告)日:2011-08-30
申请号:US12268822
申请日:2008-11-11
申请人: Wolfram Buhler , Alexander Rosenthal , Camille Stebler , Emmerich Bertagnolli , Heinz Wanzenbock
发明人: Wolfram Buhler , Alexander Rosenthal , Camille Stebler , Emmerich Bertagnolli , Heinz Wanzenbock
IPC分类号: H01J37/317 , G03F7/20
CPC分类号: H01J37/3056 , H01J2237/0041 , H01J2237/006 , H01J2237/31744
摘要: A processing system comprises a gas supply apparatus with which process gas is supplied to an object. An activation beam activates the gas thereby inducing a chemical reaction between material at the surface of the object and the process gas causing ablation of material from the surface or deposition of material at the surface. The gas supply apparatus is formed from a stack of plates providing a gas conduit system between at least one gas inlet and at least one gas outlet.
摘要翻译: 一种处理系统包括:气体供给装置,通过该气体供给装置向处理对象物供给处理气体。 激活光束激活气体,从而导致物体表面的材料与处理气体之间的化学反应,导致材料从表面烧蚀或在表面沉积材料。 气体供应装置由一堆板形成,其在至少一个气体入口和至少一个气体出口之间提供气体导管系统。
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公开(公告)号:US20090152460A1
公开(公告)日:2009-06-18
申请号:US12268822
申请日:2008-11-11
申请人: Wolfram Buhler , Alexander Rosenthal , Camille Stebler , Emmerich Bertagnolli , Heinz Wanzenbock
发明人: Wolfram Buhler , Alexander Rosenthal , Camille Stebler , Emmerich Bertagnolli , Heinz Wanzenbock
IPC分类号: G01N23/00
CPC分类号: H01J37/3056 , H01J2237/0041 , H01J2237/006 , H01J2237/31744
摘要: A processing system comprises a gas supply apparatus with which process gas is supplied to an object. An activation beam activates the gas thereby inducing a chemical reaction between material at the surface of the object and the process gas causing ablation of material from the surface or deposition of material at the surface. The gas supply apparatus is formed from a stack of plates providing a gas conduit system between at least one gas inlet and at least one gas outlet.
摘要翻译: 一种处理系统包括:气体供给装置,通过该气体供给装置向处理对象物供给处理气体。 激活光束激活气体,从而导致物体表面的材料与处理气体之间的化学反应,导致材料从表面烧蚀或在表面沉积材料。 气体供应装置由一堆板形成,其在至少一个气体入口和至少一个气体出口之间提供气体导管系统。
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公开(公告)号:US20090152459A1
公开(公告)日:2009-06-18
申请号:US12268802
申请日:2008-11-11
申请人: Wolfram Buhler , Alexander Rosenthal , Emmerich Bertagnolli , Heinz Wanzenbock , Markus Fischer , Gottfried Hochleitner
发明人: Wolfram Buhler , Alexander Rosenthal , Emmerich Bertagnolli , Heinz Wanzenbock , Markus Fischer , Gottfried Hochleitner
IPC分类号: G01N23/00
CPC分类号: H01J37/3005 , G03F1/74 , G03F1/86 , H01J37/20 , H01J37/3056 , H01J2237/006 , H01J2237/202 , H01J2237/31744
摘要: A system and a method for processing and inspecting an object are provided, wherein the system comprises a particle beam column, an object holder and a gas supply apparatus. Thereby, the object holder is formed comprising a base, a first table displaceable relative to the base, a second table displaceable relative to the first table and a third table rotatable relative to the second table, wherein the cannula of the gas supply apparatus is fixed at the first table.
摘要翻译: 提供了一种用于处理和检查物体的系统和方法,其中所述系统包括粒子束柱,物体保持器和气体供应装置。 因此,物体保持器形成为包括基部,相对于基部可移动的第一台,相对于第一台可移动的第二台和可相对于第二台转动的第三台,其中气体供应装置的插管固定 在第一张桌子
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公开(公告)号:US07923702B2
公开(公告)日:2011-04-12
申请号:US12268802
申请日:2008-11-11
申请人: Wolfram Buhler , Alexander Rosenthal , Emmerich Bertagnolli , Heinz Wanzenbock , Markus Fischer , Gottfried Hochleitner
发明人: Wolfram Buhler , Alexander Rosenthal , Emmerich Bertagnolli , Heinz Wanzenbock , Markus Fischer , Gottfried Hochleitner
IPC分类号: C23C16/458 , C23C16/48 , H01J49/00
CPC分类号: H01J37/3005 , G03F1/74 , G03F1/86 , H01J37/20 , H01J37/3056 , H01J2237/006 , H01J2237/202 , H01J2237/31744
摘要: A system and a method for processing and inspecting an object are provided, wherein the system comprises a particle beam column, an object holder and a gas supply apparatus. Thereby, the object holder is formed comprising a base, a first table displaceable relative to the base, a second table displaceable relative to the first table and a third table rotatable relative to the second table, wherein the cannula of the gas supply apparatus is fixed at the first table.
摘要翻译: 提供了一种用于处理和检查物体的系统和方法,其中所述系统包括粒子束柱,物体保持器和气体供应装置。 因此,物体保持器形成为包括基部,相对于基部可移动的第一台,相对于第一台可移动的第二台和可相对于第二台转动的第三台,其中气体供应装置的插管固定 在第一张桌子
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公开(公告)号:US07001226B2
公开(公告)日:2006-02-21
申请号:US10910062
申请日:2004-08-03
IPC分类号: H10R4/42
CPC分类号: H01R11/288 , H01M2/305 , H01R11/289
摘要: A pole terminal (10) for connection to a connecting pin of a vehicle battery having a clamping element (12) for at least partially engaging around a circumference of a clamping section of the connecting pin and having a connecting device (16) for one or more power cables. In addition to the clamping element (12), a connecting pin (18) is provided, whose circumferential dimensions in one clamping section correspond, within a predeterminable tolerance, to the circumferential dimensions of the clamping section of the connecting pin of the vehicle battery.
摘要翻译: 一种用于连接到具有夹紧元件(12)的车辆电池的连接销的极端子(10),所述夹紧元件用于至少部分地接合连接销的夹持部分的周围,并具有连接装置(16),用于一个或 更多的电力电缆。 除了夹紧元件(12)之外,还提供了连接销(18),其连接销(18),其一个夹紧部分中的周向尺寸在可预定的公差内对应于车辆电池的连接销的夹紧部分的周向尺寸。
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公开(公告)号:US20050032439A1
公开(公告)日:2005-02-10
申请号:US10910062
申请日:2004-08-03
CPC分类号: H01R11/288 , H01M2/305 , H01R11/289
摘要: A pole terminal (10) for connection to a connecting pin of a vehicle battery having a clamping element (12) for at least partially engaging around a circumference of a clamping section of the connecting pin and having a connecting device (16) for one or more power cables. In addition to the clamping element (12), a connecting pin (18) is provided, whose circumferential dimensions in one clamping section correspond, within a predeterminable tolerance, to the circumferential dimensions of the clamping section of the connecting pin of the vehicle battery.
摘要翻译: 一种用于连接到具有夹紧元件(12)的车辆电池的连接销的极端子(10),所述夹紧元件用于至少部分地接合连接销的夹持部分的周围,并具有连接装置(16),用于一个或 更多的电力电缆。 除了夹紧元件(12)之外,还提供了连接销(18),其连接销(18),其一个夹紧部分中的周向尺寸在可预定的公差内对应于车辆电池的连接销的夹紧部分的周向尺寸。
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