Aperture unit for a particle beam device
    2.
    发明授权
    Aperture unit for a particle beam device 有权
    用于粒子束装置的孔径单元

    公开(公告)号:US08779381B2

    公开(公告)日:2014-07-15

    申请号:US13200155

    申请日:2011-09-19

    IPC分类号: H01J27/00 H01J3/14

    摘要: An aperture unit for a particle beam device, in particular an electron beam device, is disclosed. Deposit supporting units are arranged at the aperture unit, with which deposit supporting units contaminations can be bound in such a way that the contaminations can no longer deposit at an aperture opening of the aperture unit. Coatings which can be arranged on the aperture unit make it possible to reduce interactions which cause contaminations to deposit at the aperture opening.

    摘要翻译: 公开了一种用于粒子束装置,特别是电子束装置的孔单元。 沉积支撑单元布置在孔单元处,沉积支撑单元污染物可以以这样的方式结合,使得污染物不再能够沉积在孔单元的孔口处。 可以布置在孔单元上的涂层使得可以减少导致污染物沉积在孔口处的相互作用。

    Charged particle beam analysis while part of a sample to be analyzed remains in a generated opening of the sample
    3.
    发明授权
    Charged particle beam analysis while part of a sample to be analyzed remains in a generated opening of the sample 有权
    带电粒子束分析,而要分析的样品的一部分保留在样品的生成开口中

    公开(公告)号:US08502142B2

    公开(公告)日:2013-08-06

    申请号:US12584992

    申请日:2009-09-15

    IPC分类号: G21K5/10 G01F23/00

    CPC分类号: G01N1/286 H01J2237/31745

    摘要: A device and method for analyzing a sample provide for extracting a part to be analyzed from the sample with the aid of a previously generated opening in the sample. The part to be analyzed is examined in greater detail with the aid of a particle beam. For this purpose, the sample is placed in the opening or on a sample holder.

    摘要翻译: 用于分析样品的装置和方法提供了借助于样品中先前产生的开口从样品中提取待分析的部分。 借助于粒子束来更详细地检查待分析的部分。 为此,将样品置于开口或样品架上。

    Particle beam device and method for use in a particle beam device
    5.
    发明申请
    Particle beam device and method for use in a particle beam device 有权
    用于粒子束装置的粒子束装置和方法

    公开(公告)号:US20090014648A1

    公开(公告)日:2009-01-15

    申请号:US12156954

    申请日:2008-06-05

    IPC分类号: G01N23/00

    摘要: A particle beam device includes a movable carrier element with at least one receiving element for receiving a specimen and in which the receiving element is situated on the carrier element. In various embodiments, the receiving element may be situated removably on the carrier element and/or multiple receiving elements may be situated on the carrier element in such a way that a movement of the carrier element causes a movement of the multiple receiving elements in the same spatial direction or around the same axis. The carrier element may be movable in three spatial directions situated perpendicular to one another and rotatable around a first axis which is parallel to an optical axis of the particle beam device and around a second axis which is situated perpendicular to the optical axis. A method for using the particle beam device in connection with specimen study and preparation is also disclosed.

    摘要翻译: 粒子束装置包括具有至少一个用于接收样本的接收元件的可移动的载体元件,并且其中接收元件位于载体元件上。 在各种实施例中,接收元件可以可拆卸地位于载体元件上和/或多个接收元件可以位于载体元件上,使得载体元件的移动导致多个接收元件在同一移动中的移动 空间方向或围绕同一轴线。 载体元件可以在三个空间方向上移动,该三个空间方向彼此垂直并可围绕平行于粒子束装置的光轴并围绕垂直于光轴定位的第二轴线的第一轴线旋转。 还公开了与样品研究和制备相关的使用粒子束装置的方法。

    PARTICLE BEAM DEVICE AND METHOD FOR USE IN A PARTICLE BEAM DEVICE
    6.
    发明申请
    PARTICLE BEAM DEVICE AND METHOD FOR USE IN A PARTICLE BEAM DEVICE 有权
    颗粒束装置和用于颗粒束装置的方法

    公开(公告)号:US20120305765A1

    公开(公告)日:2012-12-06

    申请号:US13589461

    申请日:2012-08-20

    IPC分类号: H01J37/26

    摘要: A particle beam device includes a movable carrier element with at least one receiving element for receiving a specimen and in which the receiving element is situated on the carrier element. In various embodiments, the receiving element may be situated removably on the carrier element and/or multiple receiving elements may be situated on the carrier element in such a way that a movement of the carrier element causes a movement of the multiple receiving elements in the same spatial direction or around the same axis. The carrier element may be movable in three spatial directions situated perpendicular to one another and rotatable around a first axis which is parallel to an optical axis of the particle beam device and around a second axis which is situated perpendicular to the optical axis. A method for using the particle beam device in connection with specimen study and preparation is also disclosed.

    摘要翻译: 粒子束装置包括具有至少一个用于接收样本的接收元件的可移动的载体元件,并且其中接收元件位于载体元件上。 在各种实施例中,接收元件可以可拆卸地位于载体元件上和/或多个接收元件可以位于载体元件上,使得载体元件的移动导致多个接收元件在同一移动中的移动 空间方向或围绕同一轴线。 载体元件可以在三个空间方向上移动,该三个空间方向彼此垂直并可围绕平行于粒子束装置的光轴并围绕垂直于光轴定位的第二轴线的第一轴线旋转。 还公开了与样品研究和制备相关的使用粒子束装置的方法。

    Apparatus for focusing and for storage of ions and for separation of pressure areas
    7.
    发明申请
    Apparatus for focusing and for storage of ions and for separation of pressure areas 有权
    用于聚焦和存储离子和分离压力区域的装置

    公开(公告)号:US20110220788A1

    公开(公告)日:2011-09-15

    申请号:US12931272

    申请日:2011-01-27

    IPC分类号: H01J49/26 H01J3/14

    摘要: An apparatus for focusing and for storage of ions and an apparatus for separation of a first pressure area from a second pressure area are disclosed, in particular for an analysis apparatus for ions. A particle beam device may have at least one of the abovementioned apparatuses. A container for holding ions and at least one multipole unit are provided. The multipole unit has a through-opening with a longitudinal axis as well as a multiplicity of electrodes. A first set of the electrodes is at a first radial distance from the longitudinal axis. A second set of the electrodes is in each case at a second radial distance from the longitudinal axis. The first radial distance is less than the second radial distance. Alternatively or additionally, the apparatus may have an elongated opening with a radial extent. The opening has a longitudinal extent which is greater than the radial extent.

    摘要翻译: 公开了一种用于聚焦和存储离子的装置和用于将第一压力区域与第二压力区域分离的装置,特别是用于离子分析装置。 粒子束装置可以具有上述装置中的至少一个。 提供了用于保持离子和至少一个多极单元的容器。 多极单元具有纵向轴线的通孔以及多个电极。 第一组电极处于距纵向轴线的第一径向距离处。 在每种情况下,第二组电极距离纵向轴线的第二径向距离。 第一径向距离小于第二径向距离。 或者或另外,该装置可以具有径向范围的细长开口。 开口具有大于径向范围的纵向范围。

    Device and method for analyzing a sample
    8.
    发明申请
    Device and method for analyzing a sample 有权
    用于分析样品的装置和方法

    公开(公告)号:US20100059672A1

    公开(公告)日:2010-03-11

    申请号:US12584283

    申请日:2009-09-02

    申请人: Ulrike Zeile

    发明人: Ulrike Zeile

    摘要: A device and method for analyzing a sample, in particular a sample which contains low-density materials, is provided. Ions of a predefined mass and/or a predefined elementary charge are selected from a plurality of ions. The selected ions are directed onto the sample for sample preparation. An electron beam is then directed onto the prepared sample and a spatial distribution of scattered electrons is measured.

    摘要翻译: 提供了用于分析样品的装置和方法,特别是包含低密度材料的样品。 从多个离子中选择预定质量和/或预定义的基本电荷的离子。 选择的离子被引导到样品上用于样品制备。 然后将电子束导向到制备的样品上,并测量散射电子的空间分布。

    Particle beam device and method for use in a particle beam device

    公开(公告)号:US08487270B2

    公开(公告)日:2013-07-16

    申请号:US13589461

    申请日:2012-08-20

    IPC分类号: H01J37/26

    摘要: A particle beam device includes a movable carrier element with at least one receiving element for receiving a specimen and in which the receiving element is situated on the carrier element. In various embodiments, the receiving element may be situated removably on the carrier element and/or multiple receiving elements may be situated on the carrier element in such a way that a movement of the carrier element causes a movement of the multiple receiving elements in the same spatial direction or around the same axis. The carrier element may be movable in three spatial directions situated perpendicular to one another and rotatable around a first axis which is parallel to an optical axis of the particle beam device and around a second axis which is situated perpendicular to the optical axis. A method for using the particle beam device in connection with specimen study and preparation is also disclosed.

    Device and method for analyzing an organic sample
    10.
    发明授权
    Device and method for analyzing an organic sample 有权
    用于分析有机样品的装置和方法

    公开(公告)号:US08263933B2

    公开(公告)日:2012-09-11

    申请号:US12584284

    申请日:2009-09-02

    申请人: Ulrike Zeile

    发明人: Ulrike Zeile

    IPC分类号: H01J49/26 H01J37/00 B01D59/44

    CPC分类号: H01J49/142 G01N23/2258

    摘要: A device and method for analyzing an organic sample provide high spatial resolution. A focused ion beam is directed onto the organic sample. Fragments detached from the sample are examined using mass spectroscopy.

    摘要翻译: 用于分析有机样品的装置和方法提供高空间分辨率。 聚焦离子束被引导到有机样品上。 使用质谱检查从样品分离的片段。