-
1.发明授权Amorphous nitride release layers for imprint lithography, and method of use 有权用于压印光刻的无定形氮化物剥离层及其使用方法公开(公告)号：US08029716B2
公开(公告)日：2011-10-04
申请号：US12024985
申请日：2008-02-01
IPC分类号： B28B11/08
CPC分类号： B29C37/0067 , B29C35/0888 , B29C37/0053 , B29C43/003 , B29C43/021 , B29C2035/0827 , B29C2043/025 , B29C2059/023 , B82Y10/00 , B82Y40/00 , G03F7/0002 , Y10S977/887
摘要： Amorphous inorganic nitrides are used as release layers on templates for nanoimprint lithography. Such a layer facilitates the release of a template from a cured, hardened composition into which the template has transferred a pattern, by reducing the adhesion energy between the release layer and the cured, hardened composition. The release layer may include one or more metallic or semiconductor elements such as Al, Mn, B, Co, Ti, Ta, W and Ge.
摘要翻译： 无定形无机氮化物用作纳米压印光刻模板上的剥离层。 通过减少脱模层和固化的硬化组合物之间的粘附能，这种层有助于从固化的硬化组合物中释放模板，模板已转移到模板中。 剥离层可以包括一种或多种金属或半导体元件，例如Al，Mn，B，Co，Ti，Ta，W和Ge。
-
2.发明申请公开(公告)号：US20090194502A1
公开(公告)日：2009-08-06
申请号：US12024985
申请日：2008-02-01
CPC分类号： B29C37/0067 , B29C35/0888 , B29C37/0053 , B29C43/003 , B29C43/021 , B29C2035/0827 , B29C2043/025 , B29C2059/023 , B82Y10/00 , B82Y40/00 , G03F7/0002 , Y10S977/887
摘要： A morphous inorganic nitrides are used as release layers on templates for nanoimprint lithography. Such a layer facilitates the release of a template from a cured, hardened composition into which the template has transferred a pattern, by reducing the adhesion energy between the release layer and the cured, hardened composition. The release layer may include one or more metallic or semiconductor elements such as Al, Mn, B, Co, Ti, Ta, W and Ge.
摘要翻译： 用于纳米压印光刻的模板上使用形态无机氮化物作为剥离层。 通过减少脱模层和固化的硬化组合物之间的粘附能，这种层有助于从固化的硬化组合物中释放模板，模板已转移到模板中。 剥离层可以包括一种或多种金属或半导体元件，例如Al，Mn，B，Co，Ti，Ta，W和Ge。
-
3.发明申请公开(公告)号：US20120273362A1
公开(公告)日：2012-11-01
申请号：US13534855
申请日：2012-06-27
CPC分类号： B01D67/0065 , B01D71/022 , B01D2323/283 , B01D2325/021 , Y10T428/249953
摘要： A filter includes a membrane having a plurality of nanochannels formed therein. A first surface charge material is deposited on an end portion of the nanochannels. The first surface charge material includes a surface charge to electrostatically influence ions in an electrolytic solution such that the nanochannels reflect ions back into the electrolytic solution while passing a fluid of the electrolytic solution. Methods for making and using the filter are also provided.
摘要翻译： 过滤器包括其中形成有多个纳米通道的膜。 第一表面电荷材料沉积在纳米通道的端部上。 第一表面电荷材料包括静电地影响电解溶液中的离子的表面电荷，使得纳米通道在通过电解液的流体时将离子反射回电解溶液。 还提供了制造和使用过滤器的方法。
-
4.发明申请公开(公告)号：US20110094884A1
公开(公告)日：2011-04-28
申请号：US12607258
申请日：2009-10-28
CPC分类号： B01D67/0065 , B01D71/022 , B01D2323/283 , B01D2325/021 , Y10T428/249953
摘要： A filter includes a membrane having a plurality of nanochannels formed therein. A first surface charge material is deposited on an end portion of the nanochannels. The first surface charge material includes a surface charge to electrostatically influence ions in an electrolytic solution such that the nanochannels reflect ions back into the electrolytic solution while passing a fluid of the electrolytic solution. Methods for making and using the filter are also provided.
摘要翻译： 过滤器包括其中形成有多个纳米通道的膜。 第一表面电荷材料沉积在纳米通道的端部上。 第一表面电荷材料包括静电地影响电解溶液中的离子的表面电荷，使得纳米通道在通过电解液的流体时将离子反射回电解溶液。 还提供了制造和使用过滤器的方法。
-
5.发明授权公开(公告)号：US08448790B2
公开(公告)日：2013-05-28
申请号：US13534855
申请日：2012-06-27
CPC分类号： B01D67/0065 , B01D71/022 , B01D2323/283 , B01D2325/021 , Y10T428/249953
摘要： A filter includes a membrane having a plurality of nanochannels formed therein. A first surface charge material is deposited on an end portion of the nanochannels. The first surface charge material includes a surface charge to electrostatically influence ions in an electrolytic solution such that the nanochannels reflect ions back into the electrolytic solution while passing a fluid of the electrolytic solution. Methods for making and using the filter are also provided.
摘要翻译： 过滤器包括其中形成有多个纳米通道的膜。 第一表面电荷材料沉积在纳米通道的端部上。 第一表面电荷材料包括静电地影响电解溶液中的离子的表面电荷，使得纳米通道在通过电解液的流体时将离子反射回电解溶液。 还提供了制造和使用过滤器的方法。
-
公开(公告)号：US20120267249A1
公开(公告)日：2012-10-25
申请号：US13534890
申请日：2012-06-27
CPC分类号： B01D67/0065 , B01D71/022 , B01D2323/283 , B01D2325/021 , Y10T428/249953
摘要： A filter includes a membrane having a plurality of nanochannels formed therein. A first surface charge material is deposited on an end portion of the nanochannels. The first surface charge material includes a surface charge to electrostatically influence ions in an electrolytic solution such that the nanochannels reflect ions back into the electrolytic solution while passing a fluid of the electrolytic solution. Methods for making and using the filter are also provided.
-
7.发明授权公开(公告)号：US08307994B2
公开(公告)日：2012-11-13
申请号：US12607258
申请日：2009-10-28
CPC分类号： B01D67/0065 , B01D71/022 , B01D2323/283 , B01D2325/021 , Y10T428/249953
摘要： A filter includes a membrane having a plurality of nanochannels formed therein. A first surface charge material is deposited on an end portion of the nanochannels. The first surface charge material includes a surface charge to electrostatically influence ions in an electrolytic solution such that the nanochannels reflect ions back into the electrolytic solution while passing a fluid of the electrolytic solution. Methods for making and using the filter are also provided.
摘要翻译： 过滤器包括其中形成有多个纳米通道的膜。 第一表面电荷材料沉积在纳米通道的端部上。 第一表面电荷材料包括静电地影响电解溶液中的离子的表面电荷，使得纳米通道在通过电解液的流体时将离子反射回电解溶液。 还提供了制造和使用过滤器的方法。
-
8.发明授权公开(公告)号：US08940570B2
公开(公告)日：2015-01-27
申请号：US13342450
申请日：2012-01-03
IPC分类号： H01L21/00
CPC分类号： B81B3/001 , B81B3/0008 , B81B3/0013 , B81B2201/0221 , B81B2203/0109 , B81B2203/0118 , B81B2203/019 , B81C1/0015 , H01G5/18
摘要： Micro-Electro-Mechanical System (MEMS) structures, methods of manufacture and design structures are disclosed. The method includes forming at least one fixed electrode on a substrate. The method further includes forming a Micro-Electro-Mechanical System (MEMS) beam with a varying width dimension, as viewed from a top of the MEMS beam, over the at least one fixed electrode.
摘要翻译： 公开了微机电系统（MEMS）结构，制造方法和设计结构。 该方法包括在基板上形成至少一个固定电极。 该方法还包括在至少一个固定电极上形成从MEMS光束的顶部观察的具有变化的宽度尺寸的微机电系统（MEMS）光束。
-
9.发明授权Planar cavity MEMS and related structures, methods of manufacture and design structures 有权平面腔MEMS及相关结构，制造方法和设计结构公开(公告)号：US08685778B2
公开(公告)日：2014-04-01
申请号：US12973285
申请日：2010-12-20
IPC分类号： B81C1/00
CPC分类号： B81B3/0072 , B81B3/0021 , B81B2201/01 , B81B2201/014 , B81B2203/0118 , B81B2203/0315 , B81B2203/04 , B81C1/0015 , B81C1/00365 , B81C1/00476 , B81C1/00619 , B81C1/00626 , B81C1/00666 , B81C2201/0109 , B81C2201/013 , B81C2201/0167 , B81C2201/017 , B81C2203/0136 , B81C2203/0172 , G06F17/5068 , G06F17/5072 , H01H1/0036 , H01H57/00 , H01H59/0009 , H01H2057/006 , H01L41/1136 , H01L2924/0002 , Y10S438/937 , Y10T29/42 , Y10T29/435 , Y10T29/49002 , Y10T29/49105 , Y10T29/49121 , Y10T29/49126 , Y10T29/4913 , Y10T29/49155 , Y10T29/5313 , H01L2924/00
摘要： A method of forming at least one Micro-Electro-Mechanical System (MEMS) cavity includes forming a first sacrificial cavity layer over a lower wiring layer. The method further includes forming a layer. The method further includes forming a second sacrificial cavity layer over the first sacrificial layer and in contact with the layer. The method further includes forming a lid on the second sacrificial cavity layer. The method further includes forming at least one vent hole in the lid, exposing a portion of the second sacrificial cavity layer. The method further includes venting or stripping the second sacrificial cavity layer such that a top surface of the second sacrificial cavity layer is no longer touching a bottom surface of the lid, before venting or stripping the first sacrificial cavity layer thereby forming a first cavity and second cavity, respectively.
摘要翻译： 形成至少一个微机电系统（MEMS）腔的方法包括在下布线层上形成第一牺牲腔层。 该方法还包括形成层。 该方法还包括在第一牺牲层上形成与层接触的第二牺牲腔层。 该方法还包括在第二牺牲腔层上形成盖子。 该方法还包括在盖中形成至少一个通气孔，暴露第二牺牲腔层的一部分。 该方法还包括排气或剥离第二牺牲腔层，使得第二牺牲腔层的顶表面在不排除或剥离第一牺牲腔层之前不再接触盖的底表面，从而形成第一腔和第二腔 腔。
-
10.发明授权Negative thermal expansion system (NTEs) device for TCE compensation in elastomer composites and conductive elastomer interconnects in microelectronic packaging 有权负热膨胀系统（NTE）装置用于弹性体复合材料中的TCE补偿和微电子封装中的导电弹性体互连公开(公告)号：US07417315B2
公开(公告)日：2008-08-26
申请号：US10310532
申请日：2002-12-05
申请人： Gareth Geoffrey Hougham , S. Jay Chey , James Patrick Doyle , Xiao Hu Liu , Christopher V. Jahnes , Paul Alfred Lauro , Nancy C. LaBianca , Michael J. Rooks
发明人： Gareth Geoffrey Hougham , S. Jay Chey , James Patrick Doyle , Xiao Hu Liu , Christopher V. Jahnes , Paul Alfred Lauro , Nancy C. LaBianca , Michael J. Rooks
IPC分类号： H01L21/302 , B32B5/22 , G02B26/00
CPC分类号： B81B3/0035 , H01L2924/0002 , Y10T428/249986 , H01L2924/00
摘要： A Negative Thermal Expansion system (NTEs) device for TCE compensation or CTE compensation in elastomer composites and conductive elastomer interconnects in microelectronic packaging. One aspect of the present invention provides a method for fabricating micromachine devices that have negative thermal expansion coefficients that can be made into a composite for manipulation of the TCE of the material. These devices and composites made with these devices are in the categories of materials called “smart materials” or “responsive materials.” Another aspect of the present invention provides microdevices comprised of dual opposed bilayers of material where the two bilayers are attached to one another at the peripheral edges only, and where the bilayers themselves are at a minimum stress conditions at a reference temperature defined by the temperature at which the bilayers are formed. These devices have the technologically useful property of volumetrically expanding upon lowering of the device temperature below the reference or processing temperature.
摘要翻译： 用于微电子封装中弹性体复合材料和导电弹性体互连的TCE补偿或CTE补偿的负热膨胀系统（NTE）装置。 本发明的一个方面提供了一种用于制造具有负热膨胀系数的微机械装置的方法，该热膨胀系数可以制成用于操纵材料的TCE的复合材料。 这些设备和这些设备制成的复合材料属于称为“智能材料”或“响应材料”的材料类别。 本发明的另一方面提供了由双重相对的双层材料构成的微器件，其中两个双层仅在外围边缘处彼此附接，并且其中双层本身处于由温度定义的参考温度下的最小应力条件 双层形成。 当器件温度降低到参考温度或加工温度以下时，这些器件具有技术上有用的特性。
-
-
-
-
-
-
-
-
-
搜索结果
42 条记录 (耗时 0.026 秒)
