Apparatus for forming multiple cavity products
    2.
    发明授权
    Apparatus for forming multiple cavity products 失效
    用于形成多个腔体产品的装置

    公开(公告)号:US5707480A

    公开(公告)日:1998-01-13

    申请号:US530500

    申请日:1995-09-19

    IPC分类号: H01L21/48 B32B31/04 B32B31/20

    摘要: The present invention relates generally to a new apparatus and method for simultaneously laminating a plurality of substrates having at least one cavity. More particularly, the invention encompasses apparatus and method for fabricating cavities in MLC (multi-layer ceramic). A membrane with or without an opening is placed on the top surface of the unlaminated green sheet having at least one cavity and then standard pressure is applied to laminate the green sheets, while simultaneously a counter pressure is applied in the cavity to prevent the cavity from deforming or collapsing. This is done to simultaneously form a plurality of cavity substrates.

    摘要翻译: 本发明一般涉及用于同时层压具有至少一个空腔的多个基板的新装置和方法。 更具体地说,本发明涵盖用于在MLC(多层陶瓷)中制造空腔的装置和方法。 具有或不具有开口的膜被放置在具有至少一个空腔的未层压生片的顶表面上,然后施加标准压力以层压生片,同时在空腔中施加反压力以防止空腔 变形或塌陷。 这样做同时形成多个空腔基板。

    Method for forming multiple cavity products
    4.
    发明授权
    Method for forming multiple cavity products 失效
    多腔产品的形成方法

    公开(公告)号:US5707476A

    公开(公告)日:1998-01-13

    申请号:US530499

    申请日:1995-09-19

    IPC分类号: H01L21/48 B32B31/04 B32B31/20

    摘要: The present invention relates generally to a new apparatus and method for simultaneously laminating a plurality of substrates having at least one cavity. More particularly, the invention encompasses apparatus and method for fabricating cavities in MLC (multi-layer ceramic). A membrane with or without an opening is placed on the top surface of the unlaminated green sheet having at least one cavity and then standard pressure is applied to laminate the green sheets, while simultaneously a counter pressure is applied in the cavity to prevent the cavity from deforming or collapsing. This is done to simultaneously form a plurality of cavity substrates.

    摘要翻译: 本发明一般涉及用于同时层压具有至少一个空腔的多个基板的新装置和方法。 更具体地说,本发明涵盖用于在MLC(多层陶瓷)中制造空腔的装置和方法。 具有或不具有开口的膜被放置在具有至少一个空腔的未层压生片的顶表面上,然后施加标准压力以层压生片,同时在空腔中施加反压力以防止空腔 变形或塌陷。 这样做同时形成多个空腔基板。