Method for producing a solid body including a microstructure
    1.
    发明授权
    Method for producing a solid body including a microstructure 失效
    包括微结构的固体的制造方法

    公开(公告)号:US07166232B2

    公开(公告)日:2007-01-23

    申请号:US10433875

    申请日:2000-12-21

    摘要: According to a method for producing a solid body (1) including a microstructure (2), the surface of a substrate (3) is provided with a masking layer (6) that is impermeable to a substance to be applied. The substance is then incorporated into the substrate regions not covered by the masking layer (6). A heat treatment is used to diffuse the substance into a substrate region covered by the masking layer (6) such that a concentration gradient of the substance is created in the substrate region covered by the masking layer (6), proceeding from the edge of the masking layer (6) inward with increasing distance from the edge. The masking layer (6) is then removed to expose the substrate region under this layer, and a near-surface layer of the substrate (3) in the exposed substrate region is converted by a chemical conversion reaction into a coating (9) which has a layer thickness profile corresponding to the concentration gradient of the substance contained in this near-surface layer. A supplementary treatment is implemented in a subsection of the coating (9) in which the thickness of the coating (9) is reduced.

    摘要翻译: 根据包含微结构(2)的固体(1)的制造方法,在基材(3)的表面设置有对被涂物质不可渗透的掩模层(6)。 然后将该物质并入未被掩蔽层(6)覆盖的衬底区域中。 使用热处理将物质扩散到由掩模层(6)覆盖的衬底区域中,使得在由掩模层(6)覆盖的衬底区域中产生物质的浓度梯度,从 掩蔽层(6)随着与边缘的距离增加而向内。 然后去除掩模层(6)以暴露该层下的衬底区域,并且暴露的衬底区域中的衬底(3)的近表面层通过化学转化反应转化成具有 与该近表面层中所含的物质的浓度梯度对应的层厚度曲线。 在涂层(9)的分段中实施补充处理,其中涂层(9)的厚度减小。

    Electric component
    2.
    发明授权
    Electric component 有权
    电气部件

    公开(公告)号:US08084792B2

    公开(公告)日:2011-12-27

    申请号:US12840597

    申请日:2010-07-21

    IPC分类号: H01L29/78

    CPC分类号: G01N27/4148

    摘要: An electric component comprising a sensor and/or actuator chip with a substrate on which a passivating layer and a sensor and/or actuator structure consisting of an active surface area is arranged. The chip is surrounded by an encapsulation having an opening which forms an access to the at least one active surface area. A layer stack is arranged on the substrate, said stack of layers comprising from the passivating layer to the substrate at least one first strip conductor layer, a first electric insulating layer, a second strip conductor layer and a second electric insulating layer. The first conductor strip layer is fully arranged outside the area of the chip covered by the opening. At least one conductor strip of the second conductor strip layer is connected to the sensor and/or actuator structure.

    摘要翻译: 一种电气部件,包括具有衬底的传感器和/或致动器芯片,其上布置有由活性表面积组成的钝化层和传感器和/或致动器结构。 芯片由具有开口的封装围绕,该开口形成对至少一个有源表面区域的访问。 层叠在衬底上,层叠层包括至少一个第一带状导体层,第一电绝缘层,第二带状导体层和第二电绝缘层,从钝化层到衬底。 第一导体带层完全布置在由开口覆盖的芯片的区域的外部。 第二导体带层的至少一个导体条连接到传感器和/或致动器结构。

    Method for producing a sensor or actuator arrangement, and corresponding sensor or actuator arrangement
    3.
    发明授权
    Method for producing a sensor or actuator arrangement, and corresponding sensor or actuator arrangement 失效
    用于制造传感器或致动器装置的方法以及相应的传感器或致动器装置

    公开(公告)号:US07592195B2

    公开(公告)日:2009-09-22

    申请号:US10504738

    申请日:2003-02-07

    IPC分类号: H01L21/00

    CPC分类号: B81B7/0061

    摘要: In a method for producing a sensor arrangement and the resulting sensor arrangement, a sensor is provided on or in a chip and the chip is covered with a protective cover, the cover being an interface between the sensor and the environment. An adhesive layer is provided between the chip and the protective cover, the adhesive layer alone or together with the protective cover being an interface between the sensor and the environment. The protective cover and/or the adhesive layer may have a channel formed therein, the channel functioning as the reception channel for a sensor. In an alternative embodiment, the protective cover placed on a wafer with several chips, and the wafer is cut up to produce the individual chips with the protective cover. Thus, a sensor arrangement may have the protective cover applied to the individual chip after the chip is cut from the wafer, or the protective cover may be applied to the wafer, and the wafer and cover are then cut up into the individual chips and corresponding covers. The channel leading from one side of the arrangement to the sensor may be taken through the adhesive layer, through the protective cover, or through both. A hole may be formed in the protective cover above the sensor, with the sensor lying loosely in the hole. The reaction volume may be determined by the dimensions of the hole.

    摘要翻译: 在用于制造传感器装置和所得到的传感器装置的方法中,传感器设置在芯片上或芯片中,并且芯片被保护盖覆盖,盖是传感器和环境之间的接口。 粘合剂层设置在芯片和保护盖之间,粘合剂层单独或与保护罩一起作为传感器和环境之间的界面。 保护盖和/或粘合剂层可以具有形成在其中的通道,该通道用作传感器的接收通道。 在替代实施例中,将保护盖放置在具有几个芯片的晶片上,并且切割晶片以用保护盖产生单独的芯片。 因此,在从晶片切割芯片之后,传感器装置可以具有施加到单个芯片的保护盖,或者可以将保护盖施加到晶片,然后将晶片和盖切割成各个芯片,并且对应于 盖子。 从布置的一侧引导到传感器的通道可以穿过粘合剂层,通过保护盖,或者通过两者。 可以在传感器上方的保护罩中形成孔,传感器松动地位于孔中。 反应体积可以由孔的尺寸确定。

    Device for detecting a gas or gas mixture
    4.
    发明授权
    Device for detecting a gas or gas mixture 有权
    用于检测气体或气体混合物的装置

    公开(公告)号:US07554135B2

    公开(公告)日:2009-06-30

    申请号:US10592848

    申请日:2005-03-04

    IPC分类号: H01L23/58

    摘要: A device for detecting a gas or gas mixture having at least one first gas sensor designed as an SGFET and at least—one second, additional gas sensor designed as a Lundström-FET. The gas sensors are connected to a processing device designed to analyze the measurement signals from both types of gas sensors in order to detect the gas or gas mixture.

    摘要翻译: 一种用于检测气体或气体混合物的装置,其具有设计为SGFET的至少一个第一气体传感器和设计为Lundström-FET的至少一个第二附加气体传感器。 气体传感器连接到设计用于分析来自两种类型的气体传感器的测量信号的处理装置,以便检测气体或气体混合物。

    Fuel cell system
    5.
    发明授权
    Fuel cell system 有权
    燃料电池系统

    公开(公告)号:US07422816B2

    公开(公告)日:2008-09-09

    申请号:US11074594

    申请日:2005-03-08

    IPC分类号: H01M2/00

    摘要: A fuel cell system includes a fuel cell and a fuel infeed device. The fuel cell has first and second electrodes (cathode and anode). A layer with catalytic activity permeable to protons is between the electrodes. A fuel supply device provides a fuel, and a reactant supply device provides a reactant that reacts with protons from the fuel to produce current. The fuel and reactant supply devices are located directly on the face of an electrode. The fuel infeed device is connected to the fuel supply device for feeding in the fuel, the fuel supply device being one of the electrodes. The fuel supply device also stores the fuel. Besides supplying an electrical circuit with the fuel cell system as a micro energy supply device, the fuel cell system as a fuel infeed device also has an integrated electrolysis unit for regenerating the fuel supply.

    摘要翻译: 燃料电池系统包括燃料电池和燃料供给装置。 燃料电池具有第一和第二电极(阴极和阳极)。 具有对质子可渗透的催化活性的层位于电极之间。 燃料供应装置提供燃料,并且反应物供应装置提供与来自燃料的质子反应以产生电流的反应物。 燃料和反应物供应装置直接位于电极的表面上。 燃料供给装置连接到用于供给燃料的燃料供给装置,燃料供给装置是电极之一。 燃料供给装置还存储燃料。 除了将燃料电池系统的电路作为微能量供给装置提供之外,作为燃料供给装置的燃料电池系统还具有用于再生燃料供应的集成电解单元。

    Method for structuring a substrate surface
    7.
    发明申请
    Method for structuring a substrate surface 失效
    用于构造衬底表面的方法

    公开(公告)号:US20070105111A1

    公开(公告)日:2007-05-10

    申请号:US10564172

    申请日:2004-06-30

    申请人: Mirko Lehmann

    发明人: Mirko Lehmann

    IPC分类号: C12Q1/68

    CPC分类号: B29C59/18 B01L3/508 B29C70/64

    摘要: In a method for structuring the surface of a substrate, a substrate is elastically expanded by the application of a tensile stress so that a surface area of the substrate in which a structure is to be created, is enlarged. Then, in the surface area, a structure is produced that is larger than the structure to be produced. For this purpose at least one solution is applied to the substrate, which solvent contains at least one solid substance dissolved in a solvent. The solvent is then removed from the surface of the substrate so that the solid substance remains behind. The expansion of the substrate is at least partly reversed by the reduction or removal of the tensile stress so that the size of the structure is reduced to the size of the structure to be produced. In the material of the substrate, a compression stress can also be created to reduce the size of the structure to the size of the structure to be produced.

    摘要翻译: 在用于构造基板的表面的方法中,通过施加拉伸应力使基板弹性膨胀,从而扩大了其中将产生结构的基板的表面积。 然后,在表面积中产生比要制造的结构大的结构。 为此目的,将至少一种溶液应用于底物,该溶剂含有溶解在溶剂中的至少一种固体物质。 然后从基材的表面除去溶剂,使得固体物质保留在后面。 通过拉伸应力的减少或去除,基材的膨胀至少部分地反转,使得结构的尺寸减小到要生产的结构的尺寸。 在基材的材料中,还可以产生压缩应力以将结构的尺寸减小到待生产的结构的尺寸。

    Device for the detection of at least one ligand contained in a sample that is to be analyzed
    8.
    发明申请
    Device for the detection of at least one ligand contained in a sample that is to be analyzed 有权
    用于检测待分析样品中所含的至少一种配体的装置

    公开(公告)号:US20060051244A1

    公开(公告)日:2006-03-09

    申请号:US10528954

    申请日:2003-09-26

    IPC分类号: G01N33/50

    摘要: Disclosed is a device for detecting at least one ligand contained in a sample that is to be analyzed. Said device comprises an optical waveguide, on the surface of which at least one ligand-specific receptor is directly or indirectly immobilized. The ligand bonds to said receptor during contact therewith. The inventive device comprises at least one optical source of radiation for injecting excitation radiation into the waveguide, the radiation being used for exciting emission of luminescence radiation in accordance with the bonding of the ligand to the receptor. At least one radiation receiver is integrated into the semiconductor substrate of a semiconductor chip so as to detect the luminescence radiation. The waveguide is integrated in a monolithic manner into the semiconductor substrate or is applied thereupon as a wave-guiding layer.

    摘要翻译: 公开了一种用于检测待分析样品中所含的至少一种配体的装置。 所述装置包括光波导,其表面上直接或间接固定至少一种配体特异性受体。 配体在与其接触时与所述受体结合。 本发明的装置包括至少一个用于将激发辐射注入到波导中的辐射光源,所述辐射用于根据配体与受体的结合激发发射辐射。 至少一个辐射接收器被集成到半导体芯片的半导体衬底中,以便检测发光辐射。 波导以单片方式集成到半导体衬底中或作为波导层施加在其上。