公开(公告)号：US07361631B2

公开(公告)日：2008-04-22

申请号：US10942290

申请日：2004-09-15

Applicant: Matthew I. Egbe ,  Jennifer M. Rieker ,  Darryl W. Peters ,  Irl E. Ward

Inventor： Matthew I. Egbe ,  Jennifer M. Rieker ,  Darryl W. Peters ,  Irl E. Ward

IPC: C11D3/30

CPC classification number: C11D7/5022 ,  C11D3/0073 ,  C11D7/10 ,  C11D7/265 ,  C11D7/267 ,  C11D7/30 ,  C11D7/3218 ,  C11D7/3263 ,  C11D7/3281 ,  C11D7/5013 ,  C11D11/0047 ,  G03F7/422 ,  G03F7/425 ,  G03F7/426 ,  H01L2224/0381

Abstract: A composition and method using same for removing photoresist and/or processing residue from a substrate are described herein. In one aspect, there is provided a composition for removing residue consisting essentially of: an acidic buffer solution having an acid selected from a carboxylic acid or a polybasic acid and an ammonium salt of the acid in a molar ratio of acid to ammonium salt ranging from 10:1 to 1:10; an organic polar solvent that is miscible in all proportions in water; a fluoride, and water wherein the composition has a pH ranging from about 3 to about 7.

Abstract translation: 这里描述了一种用于从衬底去除光致抗蚀剂和/或处理残留物的组合物和方法。 在一个方面，提供了一种用于除去残留物的组合物，其基本上由以下组成：酸性缓冲溶液，其具有选自羧酸或多元酸的酸和酸的铵盐，酸与铵盐的摩尔比为 10：1至1:10; 一种在水中以各种比例混溶的有机极性溶剂; 氟化物和水，其中所述组合物的pH为约3至约7。

公开(公告)号：US6054422A

公开(公告)日：2000-04-25

申请号：US252543

申请日：1999-02-19

Applicant: Irl E. Ward ,  Phuong Tang

Inventor： Irl E. Ward ,  Phuong Tang

IPC: B24B57/02 ,  B24B37/00 ,  C10M105/18 ,  C10M107/34 ,  C10M125/02 ,  C10M125/08 ,  C10M125/10 ,  C10M125/26 ,  C10M129/06 ,  C10M129/16 ,  C10M129/24 ,  C10M129/70 ,  C10M133/06 ,  C10M133/16 ,  C10M133/44 ,  C10M135/08 ,  C10M145/14 ,  C10M145/40 ,  C10M169/04 ,  C10N10/06 ,  C10N10/12 ,  C10N20/04 ,  C10N20/06 ,  C10N30/00 ,  C10N40/00 ,  C10N40/22 ,  C10M111/04

CPC classification number: C10M169/041 ,  C10M107/34 ,  C10M2201/00 ,  C10M2201/061 ,  C10M2201/062 ,  C10M2201/087 ,  C10M2201/10 ,  C10M2201/102 ,  C10M2201/105 ,  C10M2201/16 ,  C10M2201/18 ,  C10M2207/02 ,  C10M2207/021 ,  C10M2207/04 ,  C10M2207/046 ,  C10M2207/08 ,  C10M2207/125 ,  C10M2207/129 ,  C10M2207/28 ,  C10M2209/084 ,  C10M2209/103 ,  C10M2209/1033 ,  C10M2209/104 ,  C10M2209/1045 ,  C10M2209/105 ,  C10M2209/1055 ,  C10M2209/106 ,  C10M2209/1065 ,  C10M2209/1075 ,  C10M2209/1085 ,  C10M2209/1095 ,  C10M2209/12 ,  C10M2215/02 ,  C10M2215/04 ,  C10M2215/042 ,  C10M2215/06 ,  C10M2215/064 ,  C10M2215/065 ,  C10M2215/066 ,  C10M2215/067 ,  C10M2215/068 ,  C10M2215/08 ,  C10M2215/082 ,  C10M2215/086 ,  C10M2215/12 ,  C10M2215/122 ,  C10M2215/22 ,  C10M2215/221 ,  C10M2215/223 ,  C10M2215/224 ,  C10M2215/225 ,  C10M2215/226 ,  C10M2215/26 ,  C10M2215/28 ,  C10M2215/30 ,  C10M2217/04 ,  C10M2219/04 ,  C10M2219/042 ,  C10M2219/044 ,  C10M2223/06 ,  C10M2223/061 ,  C10M2223/065 ,  C10N2240/401

Abstract: A lubricating composition which may contain up to 70 weight percent abrasive grit material for use with wire saw and slicing apparatus for cutting or slicing hard and brittle materials. The composition contains abrasive particles suspended in a mixture of high and low molecular weight polyalkylene glycols and a suspension agent. The viscosity of the composition is about 50 to 700 cps.

Abstract translation: 一种润滑组合物，其可以含有高达70重量％的磨料砂粒材料，用于线锯和切割装置，用于切割或切割硬和脆性材料。 该组合物含有悬浮在高分子量低分子量聚亚烷基二醇和悬浮剂混合物中的磨料颗粒。 组合物的粘度为约50至700cps。

公开(公告)号：US5709756A

公开(公告)日：1998-01-20

申请号：US744013

申请日：1996-11-05

Applicant: Irl E. Ward ,  Francis W. Michelotti ,  Darryl W. Peters

Inventor： Irl E. Ward ,  Francis W. Michelotti ,  Darryl W. Peters

IPC: C11D7/10 ,  C11D7/32 ,  C11D7/34 ,  C11D7/50 ,  C11D11/00 ,  G03F7/16 ,  G03F7/42 ,  H01L21/306 ,  H01L21/302 ,  B08B3/08

CPC classification number: G03F7/425 ,  C11D11/0047 ,  C11D7/10 ,  C11D7/3218 ,  C11D7/5009 ,  H01L21/02063 ,  C11D7/32 ,  C11D7/34 ,  G03F7/16 ,  Y10S438/906

Abstract: An aqueous and basic stripping and cleaning composition is provided which contains a hydroxylamine, ammonium fluoride, water and optionally DMSO. The pH of the composition is greater than about 8. Also provided is a method of stripping and cleaning utilizing the compositions of the invention.

Abstract translation: 提供含有羟胺，氟化铵，水和任选的DMSO的水性和碱性汽提和清洁组合物。 组合物的pH大于约8.还提供了利用本发明组合物的汽提和清洗方法。

公开(公告)号：US5417877A

公开(公告)日：1995-05-23

申请号：US983257

申请日：1992-11-30

Applicant: Irl E. Ward

Inventor： Irl E. Ward

IPC: C09K15/04 ,  C09D9/00 ,  G03F7/42 ,  H01L21/027 ,  H01L21/30

CPC classification number: C09D9/005 ,  G03F7/425

Abstract: Organic stripping composition for photoresists comprising organic polar solvents and basic amines which includes an inhibitor which forms a coordination complex with a metal.

Abstract translation: 用于光刻胶的有机剥离组合物包括有机极性溶剂和碱性胺，其包括与金属形成配位络合物的抑制剂。

公开(公告)号：US5244952A

公开(公告)日：1993-09-14

申请号：US694343

申请日：1991-05-01

Applicant: Irl E. Ward

Inventor： Irl E. Ward

IPC: C08F8/28 ,  C08J3/09 ,  G03F1/62

CPC classification number: C08J3/096 ,  C08J5/18 ,  G03F1/62 ,  C08J2329/14

Abstract: An improved pellicle for use in projection printing comprises a pellicle in which the transparent film is formed from a specific polyvinyl butyral resin from a casting composition which is a mixture of the specific polyvinyl butyral resin and dimethylformamide.

Abstract translation: 用于投影印刷的改进的防护薄膜组件包括防护薄膜，其中透明膜由特定的聚乙烯醇缩丁醛树脂由特定的聚乙烯醇缩丁醛树脂和二甲基甲酰胺的混合物的浇铸组合物形成。

公开(公告)号：US4584727A

公开(公告)日：1986-04-29

申请号：US623089

申请日：1984-06-21

Applicant: Bernard Reiss ,  Irl E. Ward

Inventor： Bernard Reiss ,  Irl E. Ward

IPC: A47C17/22 ,  A47C17/23 ,  A47C17/04 ,  A47C19/00

CPC classification number: A47C17/23 ,  A47C17/225

Abstract: A sofa bed has a stationary framework and a foldable bed frame connected to and foldable into the framework, the foldable frame having an outer section connected to and pivotal relative to a body section, the outer section overlying the body section in the folded position of the frame to form a seat. The outer section has a plurality of individual seat support elements extending thereacross transversely to the sofa back. The individual elements are spaced apart in a direction parallel to that axis, and each of the individual elements is downwardly deflectable independently of the other when a person sits on said seat, and is arched so that a concavity is formed in the sofa form for the sofa cushions, and as that the mattress is compressed. A spring edge is mounted on and extends above a front rail of the stationary framework to form the front supporting edge of the seat.

Abstract translation: 沙发床具有固定框架和连接到框架上并可折叠到框架中的可折叠床架，所述可折叠框架具有连接到主体部分并且可相对于主体部分枢转的外部部分，所述外部部分覆盖所述主体部分的折叠位置 框架形成一个座位。 外部部分具有多个单独的座椅支撑元件，其横向于沙发背面延伸。 各个元件在平行于该轴线的方向上间隔开，并且当人坐在所述座椅上时，每个单独的元件可以独立于另一个独立地向下偏转，并且是拱形的，使得以沙发形式形成凹部，用于 沙发垫，以及床垫被压缩。 弹簧边缘安装在固定框架的前导轨上并在其上方延伸以形成座椅的前支撑边缘。

公开(公告)号：US07700535B1

公开(公告)日：2010-04-20

申请号：US12319735

申请日：2009-01-12

Applicant: Irl E. Ward

Inventor： Irl E. Ward

IPC: C11D1/72 ,  C11D9/36

CPC classification number: C11D11/0047 ,  C11D1/72 ,  C11D1/82 ,  C11D1/825

Abstract: There is provided a method and composition for rinsing sliced ingots into wafers from a wire saw cutting operation. The method uses an alkoxylated alcohol diluted in water alone or with a polyalkyl siloxane when the bath has a dynamic flow of water to prevent foaming.

Abstract translation: 提供了一种从线锯切割操作将切片锭切成晶片的方法和组合物。 该方法使用在水中单独稀释或与聚烷基硅氧烷稀释的烷氧基化醇，当浴具有动态流动的水以防起泡时。

公开(公告)号：US20090176685A1

公开(公告)日：2009-07-09

申请号：US11130768

申请日：2005-05-17

Applicant: Irl E. Ward

Inventor： Irl E. Ward

IPC: C09D5/08 ,  C09G1/00 ,  C11D3/37

CPC classification number: C11D3/0084 ,  C09G1/02 ,  C11D3/3765 ,  C11D7/26

Abstract: Corrosion inhibiting composition for use in aqueous or semi-aqueous stripping, cleaning, abrasive lapping and abrasive slurry compositions that form 5, 6, 7, or 8-membered chelating rings with a base metal together with a film forming polymeric chelation agent. Optionally there is included an oxygen scavenger.

Abstract translation: 用于水性或半水性剥离，清洁，磨料研磨和磨料浆料组合物中的腐蚀抑制组合物，其与基底金属一起形成5,6,7或8元螯合环以及成膜聚合物螯合剂。 任选地，包括除氧剂。

公开(公告)号：US5928430A

公开(公告)日：1999-07-27

申请号：US855880

申请日：1997-05-12

Applicant: Irl E. Ward ,  Francis Michelotti

Inventor： Irl E. Ward ,  Francis Michelotti

IPC: C09D9/00 ,  C11D3/20 ,  C11D3/30 ,  C11D3/34 ,  C11D3/43 ,  C11D11/00 ,  C23G5/036 ,  G03F7/42 ,  B08B3/04

CPC classification number: C09D9/00 ,  C09D9/005 ,  C11D11/0023 ,  C11D3/2086 ,  C11D3/30 ,  C11D3/3445 ,  C11D3/43 ,  C23F11/10 ,  C23G1/18 ,  C23G5/036 ,  G03F7/425

Abstract: An aqueous stripping composition comprising a mixture of about 55% to 70% by weight of a polar amine solvent, about 22.5 to 15% by weight of a basic amine, especially hydroxylamine, a corrosion inhibitor and water. The stripping composition is effective for stripping photoresists, residues from plasma process generated organic, metal-organic materials, inorganic salts, oxides, hydroxides or complexes in combination with or exclusive of organic photoresist films at low temperatures.

Abstract translation: 一种水性剥离组合物，其包含约55％至70％重量的极性胺溶剂，约22.5至15％重量的碱性胺，特别是羟胺，缓蚀剂和水。 剥离组合物在低温下与光致抗蚀剂剥离剂，有机光致抗蚀剂膜结合使用或不包括有机光致抗蚀剂薄膜，有效地剥离光致抗蚀剂，等离子体处理产生的有机，金属 - 有机材料，无机盐，氧化物，氢氧化物或复合物。

公开(公告)号：US5872295A

公开(公告)日：1999-02-16

申请号：US23940

申请日：1998-02-13

Applicant: Francis Michelotti ,  Irl E. Ward

Inventor： Francis Michelotti ,  Irl E. Ward

IPC: C01B21/14 ,  C07C209/48

CPC classification number: C01B21/1481

Abstract: The invention provides a method for purification of hydroxylamine so as to have a substantial reduction of cations and anions. The method involves passing a solution of hydroxylamine through at least one strong acid ion exchange bed which has been pretreated with dilute hydrochloric acid and then through at least one strong base anion exchange resin bed which has been pretreated or regenerated with a non-metal amino or hydroxide base solution.

Abstract translation: 本发明提供了纯化羟胺的方法，以使阳离子和阴离子显着降低。 该方法包括使羟胺溶液通过至少一个强酸离子交换床，其已经用稀盐酸预处理，然后通过至少一个强碱阴离子交换树脂床，其已用非金属氨基进行预处理或再生，或 氢氧化物碱溶液。